• 제목/요약/키워드: $TiO_2$ oxide layer

검색결과 275건 처리시간 0.029초

선택 건식에칭에 의한 단일 산화주석 나노와이어 소자의 접촉 특성 개선 (Improved Contact Characteristics in a Single Tin-Oxide Nanowire Device by a Selective Reactive Ion Etching (RIE) Process)

  • 이준민;김대일;하정숙;김규태
    • 전기학회논문지
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    • 제59권1호
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    • pp.130-133
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    • 2010
  • Although many structures based on $SnO_2$ nanowires have been demonstrated, there is a limitation towards practical application due to the unwanted contact potential between the metal electrode and the $SnO_2$ nanowire. This is mostly due to the presence of the native oxide layer that acts as an insulator between the metal contact and the nanowire. In this study the contact properties between Ti/Au contacts and a single $SnO_2$ nanowire was compared to the electrical properties of a contact without the oxide layer. RIE(Reactive Ion Etching) is used to selectively remove the oxide layer from the contact area. The $SnO_2$ nanowires were synthesized by chemical vapor deposition (CVD) and dispersed on a $Si/Si_3N_4$ substrate. The Ti/Au (20nm/100nm) electrodes were formed bye-beam lithography, e-beam evaporation and a lift-off process.

D.C. Magnetron Sputter를 이용한 (Ti, Al)N 피막의 고온산화특성 (High Temperature Oxidation Characteristics of the (Ti, Al)N Coating on the STS 304 by D.C. Magnetron Sputtering)

  • 최장현;이상래
    • 한국표면공학회지
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    • 제25권5호
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    • pp.235-252
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    • 1992
  • (Ti, Al)N films were deposited on 304 stainless steel sheet by D.C. magnetron sputtering using Al target and Ti plate. The high temperature oxidation of (T, Al)N films with the variation of composition has been investigated. The chemical composition of (Ti, Al)N films with the variation of composition has been investigated. The chemical composition of (Ti, Al)N films was similar to the sputter area ratio of titanium to aluminum target by means of EDS and AES survey. The high temperature oxidation test of (Ti, Al)N showed that (Ti, Al)N has better high temperature resistance than TiN and TiC films. TiC films were cracked at 40$0^{\circ}C$ in air TiN films quickly were oxidised at $600^{\circ}C$, were spalled more than $700^{\circ}C$. But (Ti, Al)N films are relatively stable to$ 900^{\circ}C$. The good resistance to high temperature oxida-tion of (Ti, Al)N films are due to the formation of dense Al2O3 and TiO2 oxide layer. Especially, Al2O3 oxide layer is more important. The results obtained from this study show, it is believe that the (Ti, Al)N film by D.C. magnetron sputtering is promising for the use of high temperature and wear resistance mate-rials.

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High-Temperature Oxidation of Ti Containing Stainless Steel in O2-N2 Atmosphere

  • Onishi, Hidenori;Saeki, Isao;Furuichi, Ryusaburo;Okayama, Toru;Hanamatsu, Kenko;Shibayama, Tamaki;Takahashi, Heishichiro;Kikkawa, Shinichi
    • Corrosion Science and Technology
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    • 제3권4호
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    • pp.140-147
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    • 2004
  • High temperature oxidation of Fe-19Cr and Fe-19Cr-0.2Ti alloys is studied at 1173-1373 K in 16.5 kPa $O_2$ - balances $N_2$ atmosphere aimed at clarifying the effect of titanium addition. Oxidation rate of Fe-19Cr alloy was accelerated with titanium. For both alloys chromium rich $(Fe,\;Cr)_2O_3$ was formed as a major oxidation product. On Fe-19Cr-0.2Ti alloy, a thin layer composed of spinel type oxide and titanium oxide was also formed and an internal oxidation of titanium was observed. Titanium was concentrated at the oxide surface and internal oxidation zone but a small amount of titanium was also found in the intermediate corundum type $(Fe,\;Cr)_2O_3$ layer. Crystals of corundum type $(Fe,\;Cr)_2O_3$ formed on Fe-19Cr alloy are coarse but that formed on Fe-19Cr -0.2Ti alloys were fine and columnar. Reason for the difference in oxidation kinetics and crystal structure will be discussed relating to the distribution of aliovalent titanium in corundum type $(Fe,\;Cr)_2O_3$ oxide layer.

전기화학적 방법에 의한 TiO2 피막의 생성기구 (Formation Mechanisms of TiO2 Layer by Electrochemical Method)

  • 오한준;이종호;장재명;지충수
    • 한국재료학회지
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    • 제12권6호
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    • pp.482-487
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    • 2002
  • A $TiO_2$ film for photocatalyst was prepared by anodic oxidation at 180V in acidic electrolyte and film formation mechanism was studied. The major part of anodic $TiO_2$ film consisted of anatase type structure and surface morphology exhibited a porous cell structure. The thickness growth rate of the oxide film with anodization time revealed two-stage slope corresponds to the surface morphology between anodic films. The growth of pores on cell structure and the growth rate of film with two-stage slope are related to the constant formation rate of the $TiO_2$ layer.

Ti-Al계 금속간화합물의 고온산화특성 (High Temperature Oxidation Characteristics of Ti-Al Intermetallic Compounds)

  • 오인석;최창우;김길무;홍준표;김종집
    • 한국표면공학회지
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    • 제25권5호
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    • pp.253-261
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    • 1992
  • Ti-Al intermetallic compounds which can be used in gas turbine at elevated temperature were inves-tigated in order to improve oxidation resistance by the formation of protective oxide scale. Four Ti-Al alloys were prepared by plasma arc melting. As the amount of Al was increased among the alloys, oxida-tion resistance was improved by the formation of relatively purer Al2O3 layer. However, the alloys which have less amount of Al formed a duplex layer of Al2O3 and TiO2. When samples were oxidized in pure oxygen instead of air, oxidation resistance was improved because of formation of the purer Al2O3 layer.

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$TiO_2$ 두께에 따른 염료감응형 태양전지의 전기화학적 임피던스 분석 (Electrochemical Impedance Spectroscopy Analysis on the Dye-sensitized Solar Cell with Different $TiO_2$ thicknesses)

  • 김희제;이정기;서현웅;손민규;김진경;프라바카르;신인영
    • 전기학회논문지
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    • 제58권12호
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    • pp.2425-2430
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    • 2009
  • Dye-sensitized solar cell(DSC) is composed of a dye-adsorbed nanoporous $TiO_2$ layer on fluorine-doped tin oxide(FTO) glass substrate, electrolyte, and platinium doped counter electrode. Among these, a dye-absorbed nanoporous $TiO_2$ layer plays an important role in the performance of the DSC because the injected electrons from excited dye molecules move through this layer. And the condition of $TiO_2$ layer such as the morphology and thickness affects on the electron movement. Therefore, the performances and the efficiency of DSC change as the thickness of $TiO_2$ layer is different. Electrochemical Impedance Spectroscopy(EIS) is the powerful analysis method to study the kinetics of electrochemical and photoelectrochemical processes occurring in the DSC especially the injected electron movements. So we analyzed the DSCs with different $TiO_2$ thicknesses by using EIS to understand the influence of the $TiO_2$ thickness to the performance of the DSC clearly. Finally, we got the EIS analysis on the DSC with different $TiO_2$ thickness from the internal resistance of the DSC, the electron life time and the amount of dye molecules.

에틸렌 글리콜 용액에서 물 함량에 따른 티타늄 양극산화 나노튜브의 성장거동 (Growth Behaviors of Anodic Titanium Oxide Nanotubes in the Ethylene Glycol Solution According to Water Contents)

  • 이병관;이성은;최진욱;정용수;오한준;이오연;지충수
    • 대한금속재료학회지
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    • 제46권11호
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    • pp.730-736
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    • 2008
  • $TiO_2$ nanotubes fabricated in aqueous HF-based electrolytes have been generally grown only to about 500nm in length because of the strong dissolubility of HF acid. In this paper, ethylene glycol solution has been applied for increasing the length of the anodic $TiO_2$ nanotubes, and the growth behaviors of the nanotubes according to water contents has been investigated. Anodization of Ti in ethylene glycol + 1 wt% $NH_4F$ (EG solution) with water additions up to 10 wt% were carried out at the constant voltage of 20 V. The results show that a thin titanium oxide layer is formed in the initial stage and the nanotube structure grows underneath the initial layer. And the length of $TiO_2$ nanotubes decreases with the increasing water content in the solution. It can be ascribed to the locally acidified circumstance around the barrier layer inside the nanopore due to $H^+$ ion originated from water. The XPS for the nanotubes suggests that the spectra of Ti2p and O1s are the major chemical bonding states of the $TiO_2$, and those for F1s, N1s and C1s come from the compound of $(NH_4)_2TiF_6$.

탄소전극 기반 페로브스카이트 태양전지 적용을 위한 조밀 이산화티타늄 분말 전자수송층 제작 비교 연구 (Comparison Study of Compact Titanium Oxide (c-TiO2) Powder Electron Transport Layer Fabrication for Carbon Electrode-based Perovskite Solar Cells)

  • 우채영;이형우
    • 한국분말재료학회지
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    • 제29권4호
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    • pp.297-302
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    • 2022
  • This study compares the characteristics of a compact TiO2 (c-TiO2) powdery film, which is used as the electron transport layer (ETL) of perovskite solar cells, based on the manufacturing method. Additionally, its efficiency is measured by applying it to a carbon electrode solar cell. Spin-coating and spray methods are compared, and spray-based c-TiO2 exhibits superior optical properties. Furthermore, surface analysis by scanning electron microscopy (SEM) and atomic force microscopy (AFM) exhibits the excellent surface properties of spray-based TiO2. The photoelectric conversion efficiency (PCE) is 14.31% when applied to planar perovskite solar cells based on metal electrodes. Finally, carbon nanotube (CNT) film electrode-based solar cells exhibits a 76% PCE compared with that of metal electrode-based solar cells, providing the possibility of commercialization.

The Effects of Etch Chemicals on the Electrical Properties of Metal-Oxide-Semiconductor (MOS) Device with Plasma Enhanced Atomic Layer Deposited (PEALD) TiN Metal Electrode

  • 김영진;한훈희;임동환;손석기;;최창환
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2015년도 추계학술대회 논문집
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    • pp.244-245
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    • 2015
  • PEALD TiN 금속 전극을 갖는 MOS device에서 SC1 ($NH_4/H_2O_2/H_2O=1:2:5$), SPM ($H_2SO_4/H_2O_2=10:1$), $H_2O_2$ etch chemical을 이용해 TiN 식각 후 oxide 표면 잔류 Ti에 의한 전기적 특성 분석을 진행 하였다. Etch chemical 중 SPM을 이용한 소자의 전기적 특성이 우수하였는데, 이는 잔류Ti atom의 양이 다른 etch chemical을 사용한 것 대비 낮았기 때문이다. 이로 인하여 낮은 leakage current, less frequency dependence의 특성이 관찰되었다. 또한, 후속 열처리를 통해 더욱 우수한 특성이 관찰 되었다. 이러한 공정기술은 single 전극을 갖는 CMOS 형성 시 사용 될 수 있을 것으로 기대된다.

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고온 수증기 환경에서 Ni기 초합금의 산화특성 (Oxidation Behaviors of Nickel-Base Superalloys in High Temperature Steam Environments)

  • 김동훈;구자현;김대종;유영성;장창희
    • 한국압력기기공학회 논문집
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    • 제7권2호
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    • pp.26-33
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    • 2011
  • To evaluate steam oxidation behaviours of Alloy 617 and Haynes 230, oxidation test were performed at $900^{\circ}C$ in steam and $steam+20\;vol.-%\;H_2$ environments. Oxidation rate in steam condition was similar to that in air for Alloy 617, while it was slightly lower for Haynes 230. When hydrogen was added to steam, oxidation rate was enhanced. Isolated $MnTiO_3$ particle were formed on $Cr_2O_3$ oxide layer and sub layer $Cr_2O_3$ were formed in steam and $steam+20\;vol.-%\;H_2$ for Alloy 617. On the other hands, $MnCr_2O_3$ layer were formed on top of $Cr_2O_3$ oxide layer for Haynes 230. The extensive sub layer $Cr_2O_3$ formation was resulted from the oxygen inward diffusion in such environments. When hydrogen was added, the oxide morphology was changed from polygonal to platelet because of the accelerated diffusion of cations under the oxide layer. In addition, decarburized zone was extended as hydrogen participated into the reactions causing carbide dissolution.