• Title/Summary/Keyword: $TiO_2$ layer

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Single layer antireflection coating on PET substrates for display applications

  • Gowtham, M.;Mangalaraj, D.;Seo, Chang-Ki;Shim, Myung-Suk;Hwang, Sun-Woo;Yi, Jun-Sin
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.988-991
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    • 2004
  • In the present investigation, we tried AR coating simulation by using the "Essential Macleod optical coating design and analysis" program. After various run of the program we selected appropriate materials which have specific refractive indices and for that thickness was optimized to get the low reflectance. By comparing the simulated results for the different materials,we found that $SiO_2$ and TiN are the appropriate materials for this Flat panel device (FPD) application. Thin films of these materials were deposited using RF magnetron sputtering and Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD) methods on Polyethyleneterephthalate (PET) substrates. Spectroscopic ellipsometer (SE MF-1000) and UV-Vis spectrophotometer (SCINCO) were used for the optical characterization. The obtained experimental results are in good agreement with the simulation results.

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플라즈마 전해산화 공정에 있어서 전해액 내 실리콘 이온이 표면특성에 미치는 영향

  • Kim, Seong-Cheol;Yun, Sang-Hui;Seong, Gi-Hun;Gang, Du-Hong;Min, Gwan-Sik;Cha, Deok-Jun;Kim, Jin-Tae;Yun, Ju-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.290-290
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    • 2013
  • 플라즈마 전해산화(Plasma Electrolytic Oxidation)란 저 농도의 알칼리 전해액을 매개로, 고전압을 가해 미세 플라즈마 방전을 유도하여 Al, Mg, Ti 등의 금속표면을 산화시켜 고내식성, 초경합금 수준의 내마모성, 탁월한 절연성과 고경도성을 가지는 산화막을 형성시키는 기술로 전자, 자동차, 의료, 섬유, 해양, 석유화학 산업에 이르기까지 광범위한 분야에 적용되어 우수한 물성을 확보할 수 있는 차세대의 표면처리 기술이다. 본 연구에서는 6061 알루미늄 합금을 이용하여 다양한 전해액 조건에서 플라즈마 전해산화 공정으로 Al2O3 산화막을 형성시켰다. 산화막의 조성 및 미세구조는 XRD와 FE-SEM, EDS를 이용하여 분석하였다. 형성된 산화막은 회색에서 밝은 회색으로 시편 전면에 고르게 나타났다. 전해액 조성을 바꾸어줌에 따라 각기 다른 표면 특성을 가지는 산화막을 얻을 수 있었고, 그에 따른 물성 변화를 분석하였다. 특히 Si 이온 농도를 조절함으로써 피막 성장인자와 표면 미세구조를 제어할 수 있었다.

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The Characteristics of Asymmetric Hybrid Supercapacitor Cells and Modules for Power Quality Stabilization (전력품질 안정화용 비대칭 하이브리드 슈퍼커패시터 셀 및 모듈 특성)

  • Lee, Byung-Gwan;Maeng, Ju-Cheul;Lee, Joung-Kyu;Yoon, Jung-Rag
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.65 no.4
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    • pp.617-621
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    • 2016
  • In addition to the energy storage facilities based on high power technologies, Electric double layer capacitors(EDLC) are today's candidate for power quality stabilization. However, its low energy density is often inhibiting factor for application of electric power industry. Hybrid supercapacitor is an promising energy storage device that positioned between conventional EDLC and Li-ion battery. This paper describes the preparation and characteristics of a hybrid supercapacitor and module for power quality stabilization. A cylindrical 3200F hybrid supercapacitor ($60{\times}74.5mm$) was assembled by using the $Li_4Ti_5O_{12}$ electrode as an anode and activated carbon as a cathode. It shows 2.5 times higher energy density than conventional EDLC with the same volume. In order to determine the characteristics of the hybrid supercapacitor Module for uninterruptible power supply (UPS), hybrid supercapacitor cells were connected in series with active balancing circuit. At even the high current density of 14A(10C), Module prepared by 18 cells showed the capacitance of 170F at 30~50V, suggesting the applicability for UPS.

Observation of Carrier Multiplication via Internal Quantum Efficiency Exceeding 100% in PbS QDs Monolayer Solar Cells

  • Park, So Yeon;Chung, Hyun Suk;Han, Gill Sang;Su, Jang Ji;Jung, Hyun Suk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.467.1-467.1
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    • 2014
  • Quantum dots (QD) solar cells has received considerable attention due to their potential of improving the overall conversion efficiency by harvesting excess energy via multiple excitons generation (MEG). Although there have been many reports which show MEG phenomena by using optical measurement of quantum dots themselves, carrier multiplication in real QD photovoltaic devices has been sparsely reported due to difficulty in dissociation of excitons and charge collection. In this reports, heterojunction QD solar cells composed of PbS QD monolayer on highly crystalline $TiO_2$ thin films were fabricated by using Langmuir-Blodgett deposition technique to significantly reduce charge recombination at the interfaces between each QD. The PbS CQDs monolayer was characterized by using UV-vis, transmission electron microscopy (TEM) and atomic force microscopy (AFM). The internal quantum efficiency (IQE) for the monolayer QD solar cells was obtained by measurement of external quantum efficiency and determining light absorption efficiency of active layer. Carrier multiplication was observed by measuring IQE greater than 100% over threshold photon energy. Our findings demonstrate that monolayer QD solar cell structure is potentially capable of realizing highly efficient solar cells based on carrier multiplication.

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Towards Multi-color Microencapsulated Electrophoretic Display

  • Kim, Chul-Am;Myoung, Hey-Jin;Kang, Seung-Youl;Kim, Gi-Heon;Ahn, Seong-Deok;You, In-Kyu;Oh, Ji-Young;Baek, Kyu-Ha;Suh, Kyung-Soo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.464-467
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    • 2005
  • In this paper, we present techniques to manufacture color electronic ink for multi-color electrophoretic display implementation. The charged color pigments have been prepared to have superior affinity for dielectric fluid. White $TiO_2$ nanoparticles were modified with poly(methyl methacrylate) copolymer for a microencapsulated electrophoretic display system, in order to reduce the density mismatch between nanoparticles and dielectric medium. These color balls and white pigment particle suspensions were microencapsulated through the typical microencapsulation technique. We fabricate the microcapsules to the single layer on flexible ITO substrate to test the multi-color electrophoretic display application.

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A Study of Pore Formation of AAO Film on Si Substrate with Optimizing Process (Si 기판에 제작된 AAO 박막의 기공 형성 최적화에 관한 연구)

  • Kwon, Soon-Il;Yang, Kea-Joon;Song, Woo-Chang;Lee, Jae-Hyeong;Lim, Dong-Gun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.5
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    • pp.415-420
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    • 2008
  • AAO films were fabricated on two kinds of substrates such as $Al/SiO_2/Si$ and Al/Ni/Ti/Si. To obtain well-aligned AAO film, we optimized process condition for buffer layer, electrolyte and voltage. In the case of oxalic acid, the AAO film with pore size of approximately 45 nm was obtained at voltage of 40 V, temperature of $10^{\circ}C$, oxalic acid of 0.3 M and widening time of 60 min. Then the thickness of barrier is less than 600 nm. In the case of sulfuric acid, the AAO film has pore size of 40 nm and barrier thickness of 400 nm with optimum conditions such as voltage of 25 V, temperature of $8^{\circ}C$, sulfuric acid of 0.3 M and widening time of 60 min.

Tandem Structured Hot Electron-based Photovoltaic Cell with Double Schottky Barriers

  • Lee, Young Keun;Lee, Hyosun;Park, Jeong Young
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.310.1-310.1
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    • 2013
  • We show the novel hot electron based-solar energy conversion using tandem structured Schottky diode with double Schottky barriers. In this report, we show the effect of the double Schottky barriers on solar cell performance by enhancing both of internal photoemission and band-to-band excitation. The tandem structured Au/Si diode capped with TiO2 layer as second semiconductor exhibited improved ability for light harvesting. The proposed mechanisms consist of multiple reflections of hot electrons and additional pathway of solar energy conversion due to presence of multiple interfaces between thin gold film and semiconductors. Short-circuit photocurrent measured on the tandem structured Au/Si diodes under illumination of AM1.5 increased by approximately 70% from 3.1% to 5.3% and overall incident photon to electron conversion efficiency (IPCE) was enhanced in visible light, revealing that the concept of the double Schottky barriers have significant potential as novel strategy for light harvesting.

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HIPIMS Arc-Free Reactive Deposition of Non-conductive Films Using the Applied Material ENDURA 200 mm Cluster Tool

  • Chistyakov, Roman
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.96-97
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    • 2012
  • In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

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The XPS and SEM Evaluation of Various Technique for Cleansing and Decontamination of The Rough Surface Titanium Implants (수종의 방법으로 임프란트 표면 처치후 표면의 형태 및 성분 변화 분석에 관한 연구)

  • Kim, Sun-bong;Yim, Sung-Bin;Chung, Chin-Hyung
    • Journal of Periodontal and Implant Science
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    • v.31 no.4
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    • pp.749-763
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    • 2001
  • Osseointegrated titanium implants have become an integral therapy for the replacement of teeth lost. For dental implant materials, titanium, hydroxyapatite and alumina oxide have been used, which of them, titanium implants are in wide use today. Titanium is known for its high corrosion resistance and biocompatability, because of the high stability of oxide layer mainly consists of $TiO_2$. With the development of peri-implantitis, the implant surface is changed in surface topography and element composition. None of the treatments for cleaning and detoxification of implant surface is efficient to remove surface contamination from contaminated titanium implants to such extent that the original surface elemental composition. In this sights, the purpose of this study was to evaluate rough surface titanium implants by means of scanning electron microscopy(SEM) and X-ray photoelectron spectroscopy(XPS) with respect to surface appearance and surface elemental composition. Moreover, it was also the aim to get the base for treatments of peri-implantitis. For the SEM and XPS study, rough surface titanium models were fabricated for control group. Six experimental groups were evaluated: 1) long-time room exposure, 2 ) air-powder abrasive cleaning for 1min, 3) burnishing in citric acid(pH1) for 1min, 4) burnishing in citric acid for 3min, 5) burnishing in tetracycline for 1min, 6) burnishing in tetracycline for 3min. All experimental treatments were followed by 1min of rinsing with distilled water. The results were as follows: 1. SEM observations of all experimental groups showed that any changes in surface topography were not detected when compared with control group. (750 X magnification) 2. XPS analysis showed that in all experimental groups, titanium and oxygen were increased and carbon was decreased, when compared with control group. 3. XPS analysis showed that the level of titanium, oxygen and carbon in the experimental group 3(citric acid treatment for 1min, followed by 1min of distilled water irrigation) reached to the level of control group. 4. XPS analysis showed that significant differences were not detected between the experimental group 1 and the other experimental groups except of experimental group 3. The Ti. level of experimental group 2, airpowder abrasive treatment for lmin followed by 1min of saline irrigation, was lower than the Ti. level of tetracycline treated groups, experimental group 5 and 6. From the result of this study, it may be concluded that the 1min of citric acid treatment followed by same time of rinsing with distilled water gave the best results from elemental points of view, and can be used safely to treat peri-implantitis.

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Scientific Analysis for Furnace Walls of the Joseon Dynasty Excavated in Southern Region of the Korean Peninsula (한반도 남부지역 출토 조선시대 노벽의 과학적 분석)

  • Jang, Won Jin;Han, Min Su
    • Journal of Conservation Science
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    • v.37 no.6
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    • pp.807-820
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    • 2021
  • A study on the Joseon Dynasty's furnace walls, excavated from south Korea, was conducted to identify the correlations and differences of the furnace walls found in Jeolla and Gyeongsang regions. Three ruins in the Jeolla region and two in the Gyeongsang region were selected for the analysis. The results showed a layer change depending on the degree of plasticity and difference in the number of layers and particle phase. Furthermore, although the temperature to be subjected to heat was divided into 1300℃ and 1100℃, it was not a phenomenon that appeared according to the region. Additionally, analysis result of major components revealed that the TiO2 content of most samples does not exceed 1wt%, This means that the furnace did not smelt iron sand or smelted it into low-titanium sand. This study indicated a slight similarity between the furnace walls found in the two regions, and the correlation was determined based on the nature of the ruins, raw materials of the metals ores, and composition of the raw materials constituting the furnace walls.