High-Resolution TEM Study on TiAs Precipitate Formation Between $TiSi_2$ and As Doped in Poly-Silicon
($TiSi_2$ 와 다결정 실리콘에 이온주입된 As 계에서 TiAs 침전물형성에 관한 고분해능 TEM 연구)
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- Journal of the Korean Institute of Telematics and Electronics A
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- v.28A no.5
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- pp.375-379
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- 1991