• Title/Summary/Keyword: $Si_3 N_4 O_3$

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Effect of Additives of Sintering and Mechanical Properties of $Si_3 N_4$ Bonded SiC ($Si_3 N_4$ 결합 SiC의 소결과 기계적 특성에 미치는 첨가제의 영향)

  • Baik, Yong-Hyuck;Shin, Jong-Yoon;Jung, Jong-In;Han, Chang
    • Journal of the Korean Ceramic Society
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    • v.29 no.7
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    • pp.511-516
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    • 1992
  • In this study, SiC powder and Si powder were used as the raw materials. Mixture was prepared with addition of Al2O3 and Fe2O3 at 0.1~0.5wt% respectively. After this step, the mixture was pressed and nitrided for 30 hrs at 140$0^{\circ}C$ under NH3-N2 atmosphere. Mechanical properties of sintered specimens were investigated from measurement of porosity, bulk density and three point bending test. nitration reaction extent was observed at the change of mass before and after reaction, and the microstructure and the change of $\alpha$-Si3N4 and $\beta$-Si3N4 were observed by XRD and SEM. In the current work, the results are as follows 1. When Fe2O3 added, the nitridation increased with the content of Fe2O3, and the bending strength was increased from 0.1 wt% to 0.3 wt%, and decreased to 0.5 wt%. 2. When Al2O3 added, the nitridation and the bending strength increased little by little with the content of Al2O3 3. The bending strength of the specimen added with Fe2O3 were higher than that with Al2O3. Because the specimens contained Fe2O3 had much more the whisker type crystal of Si3N4 contributing to strength than contained Al2O3.

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Effect of Yttria and Ceria on Mechanical Properties and Oxidation Behaviors of $\alpha$-Sialon Ceramics ($\alpha$-Sialon 세라믹스의 역학적 성질과 산화거동에 미치는 $Y_2O_3$$CeO_2$의 첨가영향)

  • 이은복;이홍림;조덕호;박원철
    • Journal of the Korean Ceramic Society
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    • v.30 no.11
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    • pp.941-948
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    • 1993
  • The powder mixture of Si3N4-AlN-Y2O3, Si3N4-AlN-CeO2 and Si3N4-AlN-Y2O3-CeO2 system was hot-pressed at 175$0^{\circ}C$ for 2h in N2 to prepare $\alpha$-Sialon ceramics. The mechanical property and oxidation behaviour of the prepared $\alpha$-Sialon ceramics were investigated. At 120$0^{\circ}C$, oxidation resistance was best for the Y2O3 added $\alpha$-Sialon ceramics and oxidation rate increased when the amount of CeO2 increased. But when the mixture of Y2O3 and CeO2 added $\alpha$-Sialon ceramics showed a good oxidation resistance. Fracture toughness of (Y2O3+CeO2) added $\alpha$-Sialon ceramics was higher than Y2O3 added $\alpha$-Sialon ceramics.

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Interpretation of the Crazing and Lifting of the SiO2 Film Formed on Si3N4 (질화규소산화막의 균열 및 박리해석)

  • 최두진
    • Journal of the Korean Ceramic Society
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    • v.26 no.3
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    • pp.390-394
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    • 1989
  • The stored elastic strain energy due to the thermal expansion mismatch between the thermally oxidized crystalline layer (cristobalite) and CVD Si3N4($\alpha$-Si3N4) on cooling form high oxidation temperature (1000-140$0^{\circ}C$) to room temperature, releases through the crazing of film and lifting at the SiO2/Si3N4 interface. The ratial equation (1/n) which corresponds to the ratio of the relaxation of the stored elastic stain energy due to crazing of film to the total energy, is derived under the assumption of the square crazed pattern, as follow. 1/n={8${\gamma}$(1-v)2}/(ΔL2dE) The ratial equation suggests the reason for the lifting at the SiO2/Si3N4 interface which was observed in this research.

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Characterization of High Temperature Strength of Si3N4 Composite Ceramics According to the Amount of SiO2 Nano Colloidal Added (SiO2 나노 콜로이달 첨가량에 따른 Si3N4의 고온강도 특성)

  • Nam, Ki-Woo;Lee, Kun-Chan
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.11
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    • pp.1233-1238
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    • 2009
  • This study analyzed the characterization of high temperature strength of $Si_3N_4$ composite ceramics additive based on variations in the amount of nano colloidal $SiO_2$ added. Semi-elliptical cracks about 100 ${\mu}m$ length were obtained from a Vickers indenter using a load of 24.5 N. The results showed that the heat-treated smooth specimens with $SiO_2$ nano colloidal coating exhibited the highest bending strength at 0.0 wt% $SiO_2$ nano colloidal added, which is amounted to a 187 % increase over that of smooth specimen. Limiting temperature for bending strength of crack-healed zone for bending strength was about 1273 K. However, the bending strength of SSTS-3 and SSTS-4 was considerably increased while that of SSTS-1 and SSTS-2 was decreased at a temperature of 1,573K.

Structure of SrO-B2O3-Al2O3 and SrO-B2O3-SiO2 glasses Using 11B Nuclear Magnetic Resonance (11B NMR 방법에 의한 SrO-B2O3-Al2O3와 SrO-B2O3-SiO2 유리들의 구조에 관한 연구)

  • Moon, Seong-Jun
    • Journal of Korean Ophthalmic Optics Society
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    • v.7 no.2
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    • pp.19-25
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    • 2002
  • Ternary $xSrO-yB_2O_3-0.1Al_2O_3$ and $xSrO-yB_2O_3-0.1SiO_2$ glasses were prepared as a function of R(${\equiv}x/y$). The fraction of four-coordinated brans ($N_4$), symmetric three-coordinated barons ($N_{3S}$), and asymmetric three-coordinated barons ($N_{3A}$) were determined quantitatively to study the structures of these glasses by $^{11}B$ NMR. The values of $Q_{cc}$ and ${\eta}$ for $BO_3$ unit in the glasses were 2.74MHz and 0.22, those for $BO_3{^-}$ unit were 2.54MHz and 0.55, and those for $BO_4$ unit 0.60~0.75MHz and 0.00, respectively. The structure of SrBAl glass at $R_{1st}$ consisted of tetraborate ($[B_8O_{13}]^{-2}$) units and 1st-modified diborate ($[B_2Al_2O_7]^{-2}$) units, and those for the glass at $R_{max}$consisted of diborate ($[B_4O_7]^{-2}$) units, metaborate ($[BO_2^{-1}]$), 1st-modified diborate units, and 2nd-modified diborate ($[B_2Al_2O_8]^{-4}$) units. Due to the oxygens introduced from the strontium oxide. $AlO_4$ units were preferably formed rather than $BO_4$ units. And, the structure of SrBSi glasses in the region $R{\leq}0.5$ could be viewed as binary $SrO-B_2O_3$ glasses structure diluted by silicate oxide: therefore, the Si atoms of the glasses did not contributed to the change the configuration around the boron atoms. The silicate oxide was formed the $SiO_4{^-}$ units rather than the $BO_3{^-}$ units by the oxygens introduced from the storntium oxide in the region of $R{\geq}R_{max}$, and structure of those glass at $R_{max}$ consisted of diborate units, metaborate units loose $BO_4([BO_2]^{-1})$, and $SiO_4{^-}([SiO_{2.5}]^{-1})$ units.

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Optical Properties of the Eu2+ Doped Li2SrSiO4-αNα (Li2SrSiO4-αNα에 첨가된 Eu2+의 광학적 특성)

  • Namkhai, Purevdulam;Kim, Taeyoung;Woo, Hyun-Joo;Jang, Kiwan;Jeong, Jung Hyun
    • New Physics: Sae Mulli
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    • v.68 no.11
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    • pp.1196-1202
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    • 2018
  • $Li_2Sr_{1-x}Eu_xSiO_{4-{\alpha}}N_{\alpha}$ ($Li_2SrSiO_{4-{\alpha}}N_{\alpha}:Eu^{2+}$) phosphors were synthesized by using a solid state reaction (SSR) method with submicron $Si_3N_4$ and nano $Si_3N_4$ powders as the sources of Si and N, and the optical properties of those phosphors were studied. The studied phosphors showed efficient excitation characteristics over the broad range from 230 to 530 nm. Also, They showed broad emission spectra covering a range from 500 to 700 nm, with a peak at 568 nm, which was shifted longer wavelength by 18 nm as compared with that of commercial $YAG:Ce^{3+}$. Combined with a 450 nm blue LED chip, the results support the application of the $Li_2SrSiO_{4-{\alpha}}N_{\alpha}:Eu^{2+}$ phosphor as a luminescent material for a white-light source thaat is warmer than the commercial $YAG:Ce^{3+}$ white-light source. In addition, the $Li_2SrSiO_{4-{\alpha}}N_{\alpha}$ phosphors prepared from a submicron $Si_3N_4$ powder was found to emit a previously unreported self-activated luminescence in $Li_2SrSiO_{4-{\alpha}}N_{\alpha}$.

Effect of Glycine Adsorption on Polishing of Silicon Nitride in Chemical Mechanical Planarization Process (CeO2 슬러리에서 Glycine의 흡착이 질화규소 박막의 연마특성에 미치는 영향)

  • 김태은;임건자;이종호;김주선;이해원;임대순
    • Journal of the Korean Ceramic Society
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    • v.40 no.1
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    • pp.77-80
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    • 2003
  • Adsorption of glycine on$Si_3N_4$powder surface has been investigated, which is supposed to enhance the formation of passive layer inhibiting oxidation in aqueous solution. In the basic solution, multinuclear surface complexing between Si and dissociated ligands was responsible for the saturated adsorption of glycine. In addition, $CeO_2$-based CMP slurry containing glycine was manufactured and then applied to planarize$SiO_2$and$Si_3N_4$thin film. Owing to the passivation by glycine, the removal rates, Rh, were decreased, however, the selectivities, RE(SiO$_2$)/RR($Si_3N_4$), increased and showed maximum at pH=12. The suppressed oxidation and dissolution by adsorbate were correlated with the dissociation behavior of glycine at different pH and subsequent chemical adsorption.

Characterization of Thin $SiO_2/Si_3N_4$ Film on $WSi_2$ (텅스텐 실리사이드 상의 얇은 $SiO_2/Si_3N_4$ 막의 특성 평가)

  • 구경원;홍봉식
    • Journal of the Korean Vacuum Society
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    • v.1 no.1
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    • pp.183-189
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    • 1992
  • The characteristics of N/O(SiOz/SisN4) film on WSi2 are compared with storage node Poly-Si. Leakage current and breakdown voltage are improved and storage capacitance is decreased. The oxidation rate of WSiz is more rapid than polycrystalline silicon. Thus the thick bottom oxide on the WSiz causes to the decrease of capacitance. The out diffusion of dopant impurity in polycrystalline silicon through the silicide leads to the formation of a depletion region in the polycrystalline silicon and the decrease of depletion capacitance. That results in the decrease of the overall storage capacitance.

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Synthesis of $\alpha$-Sialon Ceramics from an Alkoxide and Their Mechanical Properties(I) (알콕사이드로부터 $\alpha$-Sialon 세라믹스의 제조 및 기계적 성질(I))

  • 이홍림;윤창현;조덕호
    • Journal of the Korean Ceramic Society
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    • v.28 no.2
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    • pp.130-140
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    • 1991
  • The powders of the system Si3N4-Y2O3-AlN were prepared using Si(OC2H5)4 and YCl3.6H2O together with commercial AlN powder. $\alpha$-Si3N4 was prepared by the carbothermal reduction and nitridation of the hydrolyzed gel at 135$0^{\circ}C$ for 10h in N2 atmosphere. YCl3.6H2O was observed to be changed to Y2O3 during the reaction. $\alpha$-Sialon(X=0.2, 0.4, 0.6) ceramics were obtained by hot-pressing the Si3N4-Y2O3-AlN mixture at 178$0^{\circ}C$ for 1h under 30 MPa. The content of $\alpha$-Sialon increased with increasing metal solubility(x value) and $\alpha$-Sialon single phase was obtained at the metal solubility of 0.6. With increasing metal solubility, flexural strength, fracture toughness and thermal shock resistence were decreased, while the microhardness was increased. Large elongated $\beta$-Si3N4 grains were mainly observed at lower metal solubility. Mechanical prorerties of the sintered ceramics with X=0.2 were measured as follows : flexural strength ; 650 MPa, fracture toughness ; 3.63 MN/m3/2, hardness ; 14.7 GPa, thermal shock resistence temperature ; 58$0^{\circ}C$.

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