• Title/Summary/Keyword: $SiO_2$ Nano Colloidal

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Synthesis of Sludge Waste-derived Semiconductor Grade Uniform Colloidal Silica Nanoparticles and Their CMP Application (슬러지 폐기물을 활용한 반도체급 균일한 콜로이달 실리카 나노입자의 제조 및 CMP 응용)

  • Kim, Dong Hyun;Kim, Jiwon;Jekal, Suk;Kim, Min Jeong;Kim, Ha-Yeong;Kim, Min Sang;Kim, Sang-Chun;Park, Seon-Young;Yoon, Chang-Min
    • Journal of the Korea Organic Resources Recycling Association
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    • v.30 no.3
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    • pp.5-12
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    • 2022
  • This study suggests the effective recycling method of sludge waste from various industrial fields to synthesize uniform colloidal silica nanoparticles. In detail, polymers are removed from the sludge waste to attain sludge-extracted silica (s-SiO2) micron-sized particles, and ammonia assisted sonication is applied to s-SiO2, which has effectively extracted the silanol precursor. The nano-sized silica (n-SiO2) particles are successfully synthesized by a typical sol-gel method using silanol precursor. Also, the yield amounts of n-SiO2 are determined by the function of s-SiO2 etching time. Finally, n-SiO2-based slurry is synthesized for the practical CMP application. As a result, rough-surfaced semiconductor chip is successfully polished by the n-SiO2-based slurry to exhibit the mirror-like clean surface. In this regard, sludge wastes are successfully prepared as valuable semicondutor grade materials.

Electrical characteristics of Field Effect Thin Film Transistors with p-channels of CdTe/CdHgTe Core-Shell Nanocrystals (CdTe/CdHgTe 코어쉘 나노입자를 이용한 P채널 전계효과박막트렌지스터의 전기적특성)

  • Kim, Dong-Won;Cho, Kyoung-Ah;Kim, Hyun-Suk;Kim, Sang-Sig
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1341-1342
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    • 2006
  • Electrical characteristics of field-effect thin film transistors (TFTs) with p-channels of CdTe/CdHgTe core-shell nanocrystals are investigated in this paper. For the fabrication of bottom- and top-gate TFTs, CdTe/CrHgTe nanocrystals synthesized by colloidal method are first dispersed on oxidized p+ Si substrates by spin-coating, the dispersed nanoparticles are sintered at $150^{\circ}C$ to form the channels for the TFTs, and $Al_{2}O_{3}$ layers are deposited on the channels. A representative bottom-gate field-effect TFT with a bottom-gate $SiO_2$ layer exhibits a mobility of $0.21cm^2$/ Vs and an Ion/Ioff ratio of $1.5{\times}10^2$ and a representative top-gate field-effect TFT with a top-gate $Al_{2}O_{3}$ layer provides a field-effect mobility of $0.026cm^2$/ Vs and an Ion/Ioff ratio of $2.5{\times}10^2$. $Al_{2}O_{3}$ was deposited for passivation of CdTe/CdHgTe core-shell nanocrystal layer, resulting in enhanced hole mobility, Ior/Ioff ratio by 0.25, $3{\times}10^3$, respectively. The CdTe/CdHgTe nanocrystal-based TFTs with bottom- and top gate geometries are compared in this paper.

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Preparation of a Nanosized Micro Element Fertilizer Formulation by using Gamma-irradiation Technique (감마선 조사기술을 이용한 미량원소 비료 나노제제 제조)

  • Park, Hae-Jun;Kim, Hwa-Jung
    • Journal of Radiation Industry
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    • v.4 no.4
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    • pp.347-352
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    • 2010
  • In this study, we addressed a novel nanosized curdlan-silica complex, which is curdlan bound to silica, for the development of a sustain-releasing micro element fertilizer formulation. The complex was obtained as follow steps; First, Curdlan polymer, sodium silicate ($Na_2SiO_3$) and isopropyl alcohol were dissolved in DDW. Next the resultant solution was irradiated by $^{60}Co$ gamma-irradiator (150 TBq of capacity; ACEL, Canada). Then $MgSO_4$ was treated with the resultant solution. The obtained colloidal solution was dried by freeze dryer. Finally, we obtained a novel nanosized curdlan-silica formulation containing $MgSO_4$ from the colloidal solution. The morphology of the complex was characterized by using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The nanosized curdlan-silica complex has a particle size ranging from 20 to 80 nm and high stability. Our results suggested that the nano-complex can be applicable to use in various sustain-releasing formulation for pesticide delivery system (PDS).