• 제목/요약/키워드: $SiH_2Cl_2

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The Effect of Diluent Gases on the Growth Behavior of CVD SiC (희석기체가 화학증착 탄화규소의 성장거동에 미치는 영향)

  • 최두진;김한수
    • Journal of the Korean Ceramic Society
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    • v.34 no.2
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    • pp.131-138
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    • 1997
  • Silicon carbide films were chemically vapor deposited onto graphite substrates using MTS(Ch3SiCl3) as a source and Ar or H2 as a diluent gas. The experiments were performed at a fixed condition such as a de-position temperature of 130$0^{\circ}C$, a total pressure of 10 torr, and a flow rate of 100 sccm for each MTS and carrier gas. The purpose of this study is to consider the variation of the growth behavior with the addition of each diluent gas. It is shown that the deposition rate leads to maximum value at 200 sccm addition ir-respective of diluent gases and the deposition rate of Ar addition is faster than that of H2 one. It seems that these characteristics of deposition rate are due to varying interrelationship between boundary layer thick-ness and the concentration of a source with each diluent gas addition, when overall deposition rate is con-trolled by mass transport kinetics. The preferred orientation of (220) plane was maintained for the whole range of Ar addition. However, above 200 sccm addition, especially that of (111) plane was more increased in proportion to H2 addition. Surface morphologies of SiC films were the facet structures under Ar addition, but those were gradually changed from facet to smooth structures with H2 addition. Surface roughness be-came higher in Ar, but it became lower in H2 with increasing the amount of diluent gas.

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A Study on the Preparation of MgO-Al2O3-SiO2 System Ceramic Powders by Spray Pyrolysis Method (분무열분해법에 의한 MgO-Al2O3-SiO2계 화합물의 분체합성 및 그 특성)

  • 박정현;박찬욱;조경식
    • Journal of the Korean Ceramic Society
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    • v.25 no.4
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    • pp.397-407
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    • 1988
  • Spinel, mullite and cordierite powders have synthesized from Mg(NO3)2.6H2O, Al(NO3).9H2O and SiCl4 solution by spray pyrolysis method. The two-fluid nozzle was used as an atomizer. The powders of sinel and mullite were synthesized above 80$0^{\circ}C$, but the cordierite composition was noncrystalline for all synthersizing temperature. Those noncrystalline powders were crystallized to $\alpha$-cordierite during calcining at 130$0^{\circ}C$ for 2hrs. The synthesized spinel, mullite and cordierite powders seem to be consisted of agglomerated hollow spherical particles. For all powders, the particle size ranged from submicron to about 3${\mu}{\textrm}{m}$ and mean particle size was about 1.4${\mu}{\textrm}{m}$ in diameter. The specific surface area values of spinel, mullite and cordierite powders were maximum for powders prepared at 100$0^{\circ}C$, and those were 45.9, 25.8 and 13.6$m^2$/gr, respectively.

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Theoretical Studies on the Alkylidene Silylenoid H2C = SiLiF and Its Insertion Reaction with R-H (R = F, OH, NH2)

  • Tan, Xiaojun;Wang, Weihua;Li, Ping;Li, Qingyan;Cheng, Lei;Wang, Shufen;Cai, Weiwang;Xing, Jinping
    • Bulletin of the Korean Chemical Society
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    • v.31 no.5
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    • pp.1349-1354
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    • 2010
  • The geometries and isomerization of the alkylidene silylenoid $H_2C$ = SiLiF as well as its insertion reactions with R-H (R = F, OH, $NH_2$) have been systematically investigated at the B3LYP/6-311+$G^*$ level of theory. The potential barriers of the three insertion reactions are 97.5, 103.3, and 126.1 kJ/mol, respectively. Here, all the mechanisms of the three reactions are identical to each other, i.e., an intermediate has been formed first during the insertion reaction. Then, the intermediate could dissociate into the substituted silylene ($H_2C$ = SiHR) and LiF with a barrier corresponding to their respective dissociation energies. Correspondingly, the reaction energies for the three reactions are -36.4, -24.3, and 3.7 kJ/mol, respectively. Compared with the insertion reaction of $H_2C$ = Si: and R-H (R = F, OH and $NH_2$), the introduction of LiF makes the insertion reaction occur more easily. Furthermore, the effects of halogen (F, Cl, Br) substitution and inorganic salts employed on the reaction activity have also been discussed. As a result, the relative reactivity among the three insertion reactions should be as follows: H-F > H-OH > H-$NH_2$.

Thermodynamic Prediction of SiC Deposition in C3H8-SiCl4-H2 System (C3H8-SiCl4-H2 시스템에서의 탄화 실리콘 증착에 대한 열역학적인 해석)

  • Kim, Jun-Woo;Jeong, Seong-Min;Kim, Hyung-Tae;Kim, Kyung-Ja;Lee, Jong-Heun;Choi, Kyoon
    • Journal of the Korean Ceramic Society
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    • v.48 no.3
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    • pp.236-240
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    • 2011
  • In order to deposit a homogeneous and uniform ${\beta}$-SiC films by chemical vapor deposition, we demonstrated the phase stability of ${\beta}$-SiC over graphite and silicon via computational thermodynamic calculation considering pressure, temperature and gas composition as variables. The ${\beta}$-SiC predominant region over other solid phases like carbon and silicon was changed gradually and consistently with temperature and pressure. Practically these maps provide necessary conditions for homogeneous ${\beta}$-SiC deposition of single phase. With the thermodynamic analyses, the CVD apparatus for uniform coating was modeled and simulated with computational fluid dynamics to obtain temperature and flow distribution in the CVD chamber. It gave an inspiration for the uniform temperature distribution and low local flow velocity over the deposition chamber. These calculation and model simulation could provide milestones for improving the thickness uniformity and phase homogeneity.

Synthesis of Dawsonite (Basic Sodium Aluminum Carbonate) from Colloidal Earth (Aoolphane) by Treatment with Acid and Alkali (膠質土酸, Alkali 處理에 의한 Dawsonite의 合成에 관한 硏究)

  • Kwon Sang Wook
    • Journal of the Korean Chemical Society
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    • v.13 no.2
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    • pp.157-164
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    • 1969
  • Aoolphane was treated with 30% Hydrochloric acid at $18^{\circ}C$ for two hows with stirring in order to obtain the insoluble form of SiO2 gel and to extract quantitatively both $Al_2O_3$as and $Fe_2O_3AlCl_3{\cdot}6H_2O Fe$ and $Cl_3{\cdot}6H_2O$ forms, respectively, at the same time. $SiO_2$ gel was filtered and to the filterate Ammonia was added to precipitate $Al(OH)_3[Fe(OH)_3 Contaminated ]$ The precipitate was separated by filteration and the filterate was recovered as the form of $NH_4Cl$. The precipitate was treated with 200g (NaOH)/l Concentration of NaOH a little excessively to the equivalent at $65~70^{\circ}C$ as $Fe(OH)_3$ formed was insoluble, it was filtered of and to the filterate containing $NaAl(OH)_4(OH_2)_2$Carbon dioxide gas was bubbled at $50^{\circ}C~90^{\circ}C$ to obtain the precipitate with excellent filterability and crystallinity. The product was certified to be Dawsonite $(NaAl(OH)_2CO_3)$ by X-Ray diffraction analysis at below $40^{\circ}C$, when $CO_2$ gas was bubbled into the relatively lower concentration of $NaAl(OH)_4(OH_2)_2$ solution, the precipitate of very fine particles was formed, which was hard to filter and with the Composition of $\alpha-Al_2O_3-H_2O$ (Boehmite).

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Formation of MoSi2 Layer by Hydrogen Reduction and Si-pack Cementation (수소 환원 공정과 실리콘 확산 침투 처리 공정을 통한 이규화 몰리브덴 코팅층 형성)

  • Jeon, In Mok;Byun, Jong Min;Kim, Se Hoon;Kim, Jin Woo;Kim, Young Do
    • Korean Journal of Metals and Materials
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    • v.50 no.9
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    • pp.653-657
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    • 2012
  • In this study, a molybdenum disilicide ($MoSi_2$) coating process was investigated by hydrogen reduction and Si-pack cementation. At first, the metallic Mo coating was carried out by hydrogen reduction of $MoO_3$ powder at $750^{\circ}C$ for various holding times (1, 2, 3 h) in hydrogen atmosphere. A $4.3{\mu}m$ thick metallic molybdenum thin film was formed at 3 h. $MoSi_2$ was obtained by Si-pack cementation on molybdenum thin film through hydrogen reduction processing. It was carried out using $Si:Al_2O_3:NH_4Cl=5:92:3$ (wt%) packs at $900^{\circ}C$ for various holding times (30, 60, 90 min) in Ar atmosphere. When the holding time was 90 min, a $MoSi_2$ layer was coated successfully and a $15.4{\mu}m$ thickness was observed.

Synthesis and Characterization of A Carbosilane Dendrimer Containing Allylic End Groups

  • 김정균;박은미;강은주
    • Bulletin of the Korean Chemical Society
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    • v.17 no.7
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    • pp.592-595
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    • 1996
  • A silane dendrimer with 48 allylic end groups has been synthesized in excellent yield, via repetitive alkenylation-hydrosilation cycles. Starting with hexaallylethylenedisilane ((CH2=CHCH2)3SiCH2)2 as the core molecule (G0), a succession of alternate platinum catalyzed hydrosilation (Pt/C, 10% platinum content on active carbon) of all allyl groups with methyldichlorosilane and the allylation of all SiCl2 groups with allylmagnesium bromide in THF provided 3rd generation (G3) as carbosilane dendrimer. All the generations of dendrimer have been characterized by 1H and 13C NMR spectroscopy as well as elemental analysis.

Etching of Al and Cu Solids by $SiCl_4$ Molecules

  • Cho Chul Hee;Lee Woan;Rhee Chang Hwan;Park Seung Chul
    • Bulletin of the Korean Chemical Society
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    • v.13 no.2
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    • pp.187-192
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    • 1992
  • The classical trajectory method, previously applied to the reactions of polyatomic molecules with fcc structured metal solids[S. C. Park, C. H. Cho, and C. H. Rhee, Bull. Kor. Chem. Soc., 11, $1(1990)]^1$ is extended to the collision energy dependence of the reaction of the Al solid by $SiCl_4$ molecules. We have calculated etching yields, degrees of anisotropy, kinetic energy distributions, and angular distributions for the reactions of the Al solid and compared with those for the reactions of the Cu solid. Over the range of collision energies we considered, the reactions of the Al soIid show higher etching yield and better anisotropy than the reactions of the Cu solid. Details of reaction mechanisms and the relevance of these calculations for the dry etching of CuAl alloy are discussed.

Analysis of Characteristics of Cohesive Sediment Settling (점착성 퇴적물의 침전 특성 분석)

  • Kim, Jong-Woo;Yoon, Sei-Eui;Lee, Jong-Tae
    • Journal of Korea Water Resources Association
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    • v.38 no.2
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    • pp.133-142
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    • 2005
  • The settling concentration of fine suspended solid particles(alumina(Al$_2$O$_3$) and quartz(SiO$_2$)) is investigated with the physico-chemical effects(initial concentration, pH and NaCl). Laboratory tests have confirmed the significant influence of increasing initial concentration and salinity which can lead to flocculation due to the intermolecular attraction. Furthermore, the influence of the pH value on the concentration-time corves of alumina has been on firmed. Besides a numerical model to predict the behaviour of cohesive deposit under still water is analyzed by solving the unsteady one-dimensional diffusion-advection equation with a explicit, implicit, Crank-Nicolson and finite difference scheme. The model predicts the existence of an equilibrium concentration. Application of the model with implicit centered difference to data from settling experiments shows a similar distribution.