Korean Journal of Metals and Materials (대한금속재료학회지)

The Korean Institute of Metals and Materials (대한금속재료학회)
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Formation of MoSi2 Layer by Hydrogen Reduction and Si-pack Cementation

수소 환원 공정과 실리콘 확산 침투 처리 공정을 통한 이규화 몰리브덴 코팅층 형성

  • Jeon, In Mok (Department of Materials Science and Engineering, Hanyang University) ;
  • Byun, Jong Min (Department of Materials Science and Engineering, Hanyang University) ;
  • Kim, Se Hoon (Department of Materials Science and Engineering, Hanyang University) ;
  • Kim, Jin Woo (Department of Materials Science and Engineering, Hanyang University) ;
  • Kim, Young Do (Department of Materials Science and Engineering, Hanyang University)
  • 전인목 (한양대학교 신소재공학과) ;
  • 변종민 (한양대학교 신소재공학과) ;
  • 김세훈 (한양대학교 신소재공학과) ;
  • 김진우 (한양대학교 신소재공학과) ;
  • 김영도 (한양대학교 신소재공학과)
  • Received : 2012.04.13
  • Published : 2012.09.25
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Abstract

In this study, a molybdenum disilicide ($MoSi_2$) coating process was investigated by hydrogen reduction and Si-pack cementation. At first, the metallic Mo coating was carried out by hydrogen reduction of $MoO_3$ powder at $750^{\circ}C$ for various holding times (1, 2, 3 h) in hydrogen atmosphere. A $4.3{\mu}m$ thick metallic molybdenum thin film was formed at 3 h. $MoSi_2$ was obtained by Si-pack cementation on molybdenum thin film through hydrogen reduction processing. It was carried out using $Si:Al_2O_3:NH_4Cl=5:92:3$ (wt%) packs at $900^{\circ}C$ for various holding times (30, 60, 90 min) in Ar atmosphere. When the holding time was 90 min, a $MoSi_2$ layer was coated successfully and a $15.4{\mu}m$ thickness was observed.

Keywords

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