• 제목/요약/키워드: $SiH_2Cl_2

검색결과 289건 처리시간 0.034초

Electrolyzed water cleaning for semiconductor manufacturing

  • Ryoo, Kun-Kul;Kim, Woo-Huk
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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    • pp.117-119
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    • 2002
  • A semiconductor cleaning technology has been based upon RCA cleaning which consumes vast amounts of chemicals and ultra pure water. This technology hence gives rise to many environmental issues, and some alternatives such as electrolyzed water are being studied. In this work, intentionally contaminated Si wafers were cleaned using the electrolyzed water. The electrolyzed waters were obtained in anode and cathode with oxidation reduction potentials and pH of -1050mV and 4.8, and -750mV and 10.0, respectively. The electrolyzed water deterioration was correlated with $CO_2$ concentration changes dissolved from air. Overflowing of electrolyzed water during cleaning particles resulted in the same cleanness as could be obtained with RCA clean. The roughness of patterned wafer surfaces after EW clean maintained that of as-received wafers. RCA clean consumed about $9\ell$ chemicals, while electrolyzed water clean did only $400m\ell$ HCl or $600m\ell$ $NH_4$Cl to clean 8" wafers in this study. It was hence concluded that electrolyzed water cleaning technology would be very effective for releasing environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.ring.

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Surface-enhanced Raman Spectroscopy of Quinomethionate Adsorbed on Silver Colloids

  • Kim, Mak-Soon;Kang, Jae-Soo;Park, Si-Bum;Lee, Mu-Sang
    • Bulletin of the Korean Chemical Society
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    • 제24권5호
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    • pp.633-637
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    • 2003
  • We have studied the surface-enhanced Raman spectroscopy (SERS) spectrum of quinomethionate (6-methyl-1,3-dithiolo[4,5-b]quinoxalin-2-one), which is an insecticide or fungicide used on vegetables and wheat. We observed no signals in the ordinary Raman spectra of solid-state quinomethionate, but when it was adsorbed on a colloidal silver surface, strong vibrational signals were obtained at a very low concentration. The SERS spectra were obtained by silver colloids prepared by the Creighton et al. method. The influence of pH and the aggregation inductors ($Cl^-,\;Br^-,\;I^-,\;F^-$) on the adsorption mechanism was investigated. Two different adsorption mechanisms were deduced, depending on the experimental conditions: The one N atom or two N atoms are chemisorbed on an Ag surface. An important contribution of the chemical mechanism was inferred when the one N atom was perpendicularly adsorbed on a surface. It is possible that quinomethionate can be detected to about $10^{-5}$ M.

Characterization and Methanol Biosynthesis of a Methane-Oxidizing Bacterium, Methylomonas sp. SM4, Isolated from Rice Paddy Field Soil (논에서 분리한 메탄산화세균 Methylomonas sp. SM4의 특성과 메탄올 생합성)

  • Park, Sung Min;Madhavaraj, Lavanya;Kim, Si Wouk
    • KSBB Journal
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    • 제32권2호
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    • pp.124-132
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    • 2017
  • A methane-oxidizing bacterium was isolated from rice paddy field soil around Jeollanam-do province, Korea, and characterized. The isolate was gram-negative, orange pigmented and short rod ($1.1-1.2{\times}1.6-1.9{\mu}m$). It was catalase and urease-negative but oxidase-positive. The strain utilized methane and methanol as sole carbon and energy sources. It had an ability to grow with an optimum pH 7.0 and an optimum growth temperature $30^{\circ}C$. The strain was resistant to antibiotic polymyxin B but sensitive to streptomycin, kanamycin, ampicillin, chloramphenicol and rifampicin. The isolate required copper for their growth with concentration range of $2-25{\mu}M$, with an optimum of $10{\mu}M$. Under optimal culture condition, specific cell growth rate and generation time were found to be $0.046hr^{-1}$ and 15.13 hr, respectively. Phylogenetic analysis based on 16S rDNA sequences indicated that the strain formed a tight phylogenetic lineage with Methylomonas koyamae with a value of 99.4% gene sequence homology. So, we named the isolate as Methylomonas sp. SM4. 8.6 mM methanol was accumulated in the reaction mixture containing 70 mM sodium formate and 40 mM $MgCl_2$ (MDH inhibitor) under atmosphere of methane:air (40:60) mixture for 24 hr at $30^{\circ}C$.

Loess Dyeing of Soybean Fabrics (대두직물의 황토염색)

  • Lee, Sol;Lee, Shin-Hee
    • Fashion & Textile Research Journal
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    • 제17권6호
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    • pp.1004-1012
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    • 2015
  • The purpose of this study is to investigate the loess dyeability of soybean fabric using loess as colorants. Recent days, various textile products such as inner wears, sheets and interior goods are manufactured using materials dyed with loess emphasizing its improved metabolism, anti-bacterial, deodorizing properties, and far infrared ray emissions. Soybean fabric was dyed with loess solution according to concentration of loess, dyeing temperature and dyeing time. To improve washing fastness, soybean fabric and dyed soybean fabric with loess were mordanted by mordanting agents such as sodium chloride(NaCl), Acetic acid(CH3COOH) and Aluminium Potassium Sulfate(AlK(SO4)2·12H2O). Dyeability and color characteristics of dyed soybean fabric were obtained by CCM observation. Particle size distribution of loess, the dyeability(K/S) of soybean fabric, morphology and washing durability of loess dyed soybean fabric were investigated. The results obtained were as follows; Mean average diameter of loess was 1.08µm. The main components of loess used in this study were silicon dioxide(SiO2), aluminium oxide(Al2O3), and iron oxide(Fe2O3). The content of these three component was above 75 weight %. The dyeability of soybean fabric was increased gradually with increasing concentration of loess. The optimum dyeing temperature and dyeing time were 90℃ and 60minutes expectively. The fastness to washing according to concentration of loess and mordanting method indicated good grade result as more than 4 degree in all conditions.

UHV Materials (초고진공계재료)

  • 박동수
    • Proceedings of the Korean Vacuum Society Conference
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    • 한국진공학회 1998년도 제14회 학술발표회 논문개요집
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    • pp.24-24
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    • 1998
  • 반도체장비를 포함하는 초고진공장비의 園훌化가 급속히 그리고 절실히 요구되고 있는 것이 현실정이다. 當面해서 실현할 국산진공장비의 대상은 廣範圍하다. 즉, 각종 진공 pump ( (rotary, dry, diffusion, cryo, ion, turbo melecular pump), 진공 chamber, 진공 line, gate valve 를 위 시 한 진공 V머ve, flange, gasket, fl않d야lU, mainpulater 퉁 진공 部品이 다. 진공계 의 핵심 은 適切하고 優良한 진공재료의 선태파 사용이다. 진공장비는 사용자가 원하는 진공도를 원하 는 시간 동안 륨空度를 유지해 주어야 한다. 진공재료 선태의 기준사항은:(1) 기체의 透過성 (2) 薰했훌 (3) 혔體放出특성 - -outgassing과 degassing- (4) 機械的 량훌度 (5) 온도 의존성 (6) 化學톡성 (7) 加I성 및 鎔接 성 (8) 課電특성 (9) 磁氣특성 (10) 高速함子 및 放射線 특성 (11) 經濟성 및 調達생 둥이 다. 우량한 초고진공계재료는 풍부하게 개발되어 왔고, 또 新材料들이 개발되고 있다. 여기에서는 주로 초고진공 내지는 극고진공계의 構造材料, 機能材料, 部品材料 일반파 몇가지 신재료의 특 성에 관해서 記述한다. M Mild SteeHSAE, 1112, 1010, 1020, 1022, etc)., S Stainless SteeHAlSI, 304, 304L, 310, 316, 321, 347): 구조재료, chamber, fl하1ges A Aluminum과 Alloys (1060, 1100, 2014, 4032, 6(뻐1): 구조재료, chamber, flanges, gaskets A AI, Al 떠loy는 SS에 代替하는 역 할올 시 작하고 있다. C Copper, Copper Alloys(C11$\alpha$)0, C26800, C61400, Cl7200): 내장인자, gasket, cryopanel, tubing T Titanium, Ziriconium, Haf띠um 및 Alloys: 특히 Ti은 10n pump 용 getter material 이 외 에 U UHV,XHV용 chamber계로서 관심올 끌고 있다. N Nickel, Nickel Alloys (200, 204, 211, monel, nichrome): 부식 방지 , 전자장치 , 자기 장치 귀 금속(Ag, Au, Pt, Pd, Rh, Ir, Os, Ru): 보조부품, gasket, filament, coating, thermocouple, 접 합부위 T TiC, SiC, zrC, HfC, TaC 둥의 탄화물과, BN, TiN, AlN 동의 질화물, 붕화물이 둥장하고 었 다. 유리: Soda Lime, Borosilicate, Potash Soda Lead: View Port, Chamber envelope C Ceramics: AlZ03, BeO, MgO, zrOz, SiOz, MgOzSiOz, 3Alz032SiOz, Z$textsc{k}$hSiOz S상N4: e electrical, thermal insulators, crucibles, boats, single crystals, sepctr려 windows 저자는 최근 저자들이 발견한 Zr-Ti-Cu-Ni-Be amorphous alloys coated cham뾰r가 radiation p proof로 이용될 수 있는 사실을 점검하고 었다 .. Z.Y. Hua 들은 Cs3Sb를 새로운 photocathode 재료로 보고하고 있다.

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Sources Apportionment Estimation of Ambient PM2.5 and Identification of Combustion Sources by Using Concentration Ratios of PAHs (대기 중 PM2.5의 오염기여도 추정 및 PAHs 농도비를 이용한 연소 오염원 확인)

  • Kim, Do-Kyun;Lee, Tae-Jung;Kim, Seong-Cheon;Kim, Dong-Sool
    • Journal of Korean Society for Atmospheric Environment
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    • 제28권5호
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    • pp.538-555
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    • 2012
  • The purpose of this study was to understand $PM_{2.5}$ chemical characteristics on the Suwon/Yongin area and further to quantitatively estimate $PM_{2.5}$ source contributions. The $PM_{2.5}$ sampling was carried out by a high-volume air sampler at the Kyung Hee University-Global Campus from November, 2010 to October, 2011. The 40 chemical species were then analyzed by using ICP-AES(Ag, Ba, Cr, Cu, Fe, Mn, Ni, Pb, Si, Ti, V and Zn), IC ($Na^+$, $K^+$, $NH_4{^+}$, $Mg^{2+}$, $Ca^{2+}$, $NO_3{^-}$, ${SO_4}^{2-}$ and $Cl^-$), DRI/OGC (OC1, OC2, OC3, OC4, OP, EC1, EC2 and EC3) and GC-FID (acenaphthene, fluorene, phenanthrene, anthracene, fluoranthene, pyrene, benzo[a]anthracene, benzo[b]fluoranthene, benzo[a] pyrene, indeno[1,2,3-cd] pyrene, benzo[g,h,i]perylene and dibenzo[a,h,]anthracene). When applying PMF model after performing proper data treatment, a total of 10 sources was identified and their contributions were quantitatively estimated. The average contribution to $PM_{2.5}$ emitted from each source was determined as follows; 26.3% from secondary aerosol source, 15.5% from soil and road dust emission, 15.3% from vehicle emission, 15.3% from illegal biomass burning, 12.2% from incineration, 7.2% from oil combustion source, 4.9% from industrial related source, and finally 3.2% from coal combustion source. In this study we used the ratios of PAHs concentration as markers to double check whether the sources were reasonably classified or not. Finally we provided basic information on the major $PM_{2.5}$ sources in order to improve the air quality in the study area.

The Effect of Boron Content and Deposition Temperature on the Microstructure and Mechanical Property of Ti-B-C Coating Prepared by Plasma-enhanced Chemical Vapor Deposition (PECVD법에 의해 증착된 Ti-B-C코팅막 내의 보론함량과 증착온도에 따른 미세구조 및 기계적 물성의 변화)

  • Ok, Jung-Tae;Song, Pung-Keun;Kim, Kwang-Ho
    • Journal of the Korean institute of surface engineering
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    • 제38권3호
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    • pp.106-111
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    • 2005
  • Ternary Ti-B-C coatings were synthesized on WC-Co and Si wafers substrates by a PECVD technique using a gaseous mixture of $TiCl_4,\;BCl_3,\;CH_4,\;Ar,\;and\; H_2$. The effects of deposition variables such as substrate temperature, gas ratio, $R_x=[BCl_3/(CH_4+BCl_3)]$ on the microstructure and mechanical properties of Ti-B-C coatings were investigated. From our instrumental analyses, the synthesized Ti-B-C coatings was confirmed to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB2, and amorphous carbon at low boron content, on the contrary, nanocrystallites $TiB_2$, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti-B-C coatings increased from $\~23 GPa$ of TiC to $\~38 GPa$ of $Ti_{0.33}B_{0.55}C_{0.11}$ coatings with increasing the boron content. The $Ti_{0.33}B_{0.55}C_{0.11}$ coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of $TiB_2$ and TiC. The microstruture and microhardness value of Ti-B-C coatings were largely depend on the deposition temperature.

Evaluation of Field Application of Soil Conditioner and Planting Chrysanthemum zawadskii on the Roadside Soils Damaged by Deicing Agents

  • Yang, Ji;Lee, Jae-Man;Yoon, Yong-Han;Ju, Jin-Hee
    • Journal of People, Plants, and Environment
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    • 제23권6호
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    • pp.625-636
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    • 2020
  • Background and objects: Soil contamination caused by CaCl2 that is used to deice slippery roads in winter is now recognized as one of the major causes of damage of roadside plants. The aim of this study is to identify the salt mitigation effects of planting Chrysanthemum zawadskii and using a soil conditioner. Methods: The study was conducted at the site where Pinus densiflora f. multicaulis was planted on the roadside between Konkuk University Sageori and Danwol Samgeori located in Chungju-si. We classified the soils collected from the field experimental site according to the degree of the damage caused by deicing agents and divided the site into six blocks of three 80 × 80 cm plots replicated by treatment type. Three selected plots were treated with loess-balls on the soil surface (high salinity with loess-balls, medium salinity with loess-balls, low salinity with loess-balls) and three were left as an untreated control (H = high salinity, M = medium salinity, L = low salinity). The soil properties were measured including pH, EC and exchangeable cations as well as the growth of Chrysanthemum zawadskiia. Results: In the results of soil analysis, pH before planting Chrysanthemum zawadskiia was 6.39-6.74 and in September, five months after planting, the acidity was reduced to 5.43-5.89. Electrical conductivity (EC) was measured to be H > M > L with the higher degree of damage by deicing agents. The analysis of deicing exchangeable cations showed that the content of Ca2+ of soils were significantly correlated to deicing exchangeable cations (Ca2+, Na+, Mg2+) in the shoot part of Chrysanthemum zawadskii. The loess-ball treatment showed a lower content of deicing exchangeable cations than the treatment where Chrysanthemum zawadskiia was planted. Conclusion: In this study, the use of a new system made of loess-balls is proposed as a soil conditioner to protect soils from the adverse effects of road deicing salts. These data suggest that treatment of soil conditioners and planting Chrysanthemum zawadskiia are effective in mitigation of salt stress on the soils damaged by deicing agents.

Surface Properties of Color Concrete Using Acid Stained Agent (표면 착색용 산화제를 사용한 컬러 콘크리트의 표면 특성)

  • Kim, Jin-Man;Jeong, Ji-Yong;Park, Hyo-Jin
    • Journal of the Korea Concrete Institute
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    • 제23권3호
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    • pp.265-272
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    • 2011
  • Even though concrete is the most important material for building structures, its intrinsic gray color degrades urban esthetics. In order to improve this problem, coloring methods of mixing pigment in concrete batch and painting the surface of concrete surface have been tried. However, applications of the coloring methods in construction field are difficult due to high cost and low durability. Recently, acid stain agent is emerging as a new coloring method for concrete. It is able to apply a remarkably thin colored layer on a concrete surface from chemical reaction between acid and alkaline solutions. This study has examined the changes and variations of the surface layer of mortar specimen from chemical reaction of acid stained agents. The colors were changed into natural irregular stains according to aging. After the staining, no shape change was found from visible inspections. Microstructure of the colored surface applied with acid stained agent was much rougher than that of original mortar. When the colored layer was compared to original surface, crystals of hydrate such as $Ca(OH)_2$ and C-S-H gel were observed. Surface hardness was same or slightly higher in the colored layer. The value of pH was reduced by approximately 10%, weight contents of elements such as Ca, Si, and Al were low. In the chemical composition of the colored layer, the non-cement based elements of Mn, Cr, and Cu increased. Also, Fe and alkali elements of K and Na increased.

Geochemistry and Stable Isotopes of Carbonated Waters in South Korea (남한 탄산수의 지구화학적 특성과 안정동위원소 조성)

  • 윤정아;김규한
    • Journal of the Korean Society of Groundwater Environment
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    • 제7권3호
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    • pp.116-124
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    • 2000
  • Geochemical and isotopic analyses were carried out to investigate hydrochemical characteristics, source of carbon species in the carbonated waters in South Korea. Most Korean carbonated waters from different geologic settings are characterized by a Ca-HCO$_3$type with a relatively low pH range from 5.3 to 6.3 (avg. 6.0). The concentrations of cations and anions in the carbonate waters are in the order of Ca$^{2+}$>Na$^{+}$>Mg$^{2+}$>Si$^{4+}$>Fe$^{2+}$>K$^{+}$ and HCO$_3$$^{-}$>SO$_4$$^{2-}$>Cl$^{-}$, respectively. The HCO$_3$$^{-}$ ion is more enriched in the carbonated water from the sedimentary rock and granitic rock of Mesozoic age in the Gyungsang basin(GII) and the Precambrian metamorphic rock and Jurassic granitic rocks of the Gyunggj massif in the Gangwon province(GⅠ) than those of the meta-sedimentary rock and granite in the Ogcheon zone(GⅢ). Based on the oxygen and hydrogen isotopic data, the carbonated waters are derived from the meteoric water, showing apparent latitude and altitude effects. The $delta$$^{13}$C values of carbon species in the carbonated water are in between -6.23 and 0.0 $textperthousand$, suggesting inorganic source of carbon originated from the carbonate mineral and carbonate rock in the aquifer.

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