• Title/Summary/Keyword: $SiH_2Cl_2

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Seasonal Variations of Chemical Composition of the Estuary Water in Guang Yang Inlet from Mar. 1961 to Feb. 1962 (蟾津江 河口 干潟地 水質의 年間變化)

  • Won, Chong-Hun
    • Journal of the Korean Chemical Society
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    • v.6 no.2
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    • pp.176-197
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    • 1962
  • Seasonal variations of chemical constituents of estuarine water at a definite station of the tidal flat in Guang Yang inlet have been determined for two days a month. The range and mean of the annual variations are as follows:Tidal variations through a year are as follows:1. Although the tidal value of pH is almost constant during one tidal cycle, it raises abruptly 0.1-0.2 intervals of pH value during the first period of flood.2. The lower values of chlorinity, magnesium and calcium contents have been determined the nearer the slack after ebb, and slightly higher during the first period of flood tide than the last of ebb. The tidal change of calcium contents is more remarkable than of magnesium.3. The higher per cent saturation values of dissolved oxygen, sometimes higher than 100 per cent, re determined the nearer the slack after ebb.4. The total nitrogen contents, relatively poor, varies accidentally during one tidal cycle, whereas phosphate-P and silicate-Si are rich at the slack after ebb and increase proportionally to the mixing percentage of fresh water. The average values, 52.2 and 18.5 of Si/P and N/P are greater than of the normal.5. The acid soluble iron contents, lower in winter than in summer, is also varies accidentally during one tidal cycle and the magnitude of the variation is large.6. The chemical composition considered from the value of Ca/Cl or Mg/Cl of estuarine water varies according to the chlorinity even at the high chlorinity of 18-19%.

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The Influence of He flow on the Si etching procedure using chlorine gas

  • Kim, J.W.;Park, J.H.;M.Y. Jung;Kim, D.W.;Park, S.S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.65-65
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    • 1999
  • Dry etching technique provides more easy controllability on the etch profile such as anisotropic etching than wet etching process and the results of lots of researches on the characterization of various plasmas or ion beams for semiconductor etching have been reported. Chlorine-based plasmas or chlorine ion beam have been often used to etch several semiconductor materials, in particular Si-based materials. We have studied the effect of He flow rate on the Si and SiO2 dry etching using chlorine-based plasma. Experiments were performed using reactive ion etching system. RF power was 300W. Cl2 gas flow rate was fixed at 58.6 sccm, and the He flow rate was varied from 0 to 120 sccm. Fig. 1 presents the etch depth of si layer versus the etching time at various He flow rate. In case of low He flow rate, the etch rate was measured to be negligible for both Si and SiO2. As the He flow increases over 30% of the total inlet gas flow, the plasma state becomes stable and the etch rate starts to increase. In high Ge flow rate (over 60%), the relation between the etch depth and the time was observed to be nearly linear. Fig. 2 presents the variation of the etch rate depending on the He flow rate. The etch rate increases linearly with He flow rate. The results of this preliminary study show that Cl2/He mixture plasma is good candidate for the controllable si dry etching.

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The Chemistry of Rhodium in Polysulfone: Reactions with Various Small Gas Molecules

  • Il-Wun Shim;Jin-Si Kim;Seok-Jong Oh;Yong-Sik Yang;Hwan-Kyu Suh;Sang-Kyu Lee
    • Bulletin of the Korean Chemical Society
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    • v.15 no.2
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    • pp.126-132
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    • 1994
  • RhCl [P($C_6H_5)_3]_3$ complexes have been incorporated in polysulfone (PS) as a dispersion medium using cosolvent (THF). The interactions between Rh(Ⅰ) complexes and polysulfone polymer molecules are examined by infrared spectroscopy and thermal analysis. The chemical reactivity of Rh in PS films has been investigated by reacting Rh sites with CO, $H_2,\;D_2,\;O_2\;NO,\;C_2H_2\;and\;C_2H_4$ in the temperature range $25-200^{\circ}C$. Various Rh-carbonyl, -hydride and -nitrosyl species formed in PS films are characterized by their infrared spectra. Rh complexes in PS film show interesting catalytic reactivities in the reactions such as hydrogenation of $C_2H_2\;and\;C_2H_4$, oxidation of CO, and reduction of NO by CO or $H_2$ gas under relatively mild conditions.

Bioactivity enhancement of zirconia substrate by surface coating of diopside bioceramics using sol-gel method (솔젤법에 의한 다이옵사이드 생체 세라믹의 표면코팅 및 지르코니아 기판의 생체활성 증진)

  • Park, Hyunjung;Lee, Jong Kook
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.5
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    • pp.183-190
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    • 2022
  • Diopside (CaMgSi2O6) is known to have high bioactivity as well as excellent mechanical properties. In this study, we tried to improve the bioactivity of zirconia ceramics by surface coating of diopside and its bioactivity was investigated through an in vitro test. Surface coating on zirconia substrate was prepared by sol-gel method using a diopside sol which was prepared by dissolving Ca(NO3)2·4H2O, MgCl2·6H2O and Si(OC2H5)4 in ethanol with a fixed molar ratio and then hydrolysis. To examine the bioactivity of diopside coating, we examined the surface dissolution and the precipitation of new hydroxyapatite particles through in vitro test in SBF (Simulated Body Fluid) solution. Dense and thick diopside coating layers could be fabricated on zirconia substrate by sol-gel method. Also, we confirmed that they contained high bioactivity from the in vitro test, indicated the precipitation of hydroxyapatite particles after the 14 days immersion in SBF solution. In addition, we checked that the bioactivity of diopside coated layers was dependent on the repeated coating cycle and coating thickness.

Micromachined pH Sensor Using Open Well Structures (개방형 우물 구조를 이용한 마이크로머신형 pH 센서)

  • Kim, Heung-Rak;Kim, Young-Deog;Jeong, Woo-Cheol;Kim, Kwang-Il;Kim, Dong-Su
    • Journal of the Korean Society for Nondestructive Testing
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    • v.22 no.4
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    • pp.347-353
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    • 2002
  • A structure of a glass electrode-type pH sensor for measuring any concentration of $H^+$ in an aqueous solution was embodied with bulk micromachining technology. Two open well structures were formed, and a reference electrode was secured by the Ag/AgCl thin film in the sloped side of the etched structure. A sensitive membrane of an indicator electrode for generating a potential by an exchange reaction to $H^+$ was made with a glass containing Na 20% or more finely so that its thickness might be $100{\mu}m$ or so, and then it was bonded to one pyramidal structure. A liquid junction for a current path was formed by filling an agar in the anisotropically etched part of the Si wafer, which had a size of $50{\mu}m{\times}50{\mu}m$, and then bonded it to the other. After complete fabrication of each part, it was filled with a 2M KCl reference solution and encapsulated the sensor structure with a cold expoxy. The potential value of fabricated pH sensor was about 90mV/pH in the standard pH solutions.

A Study on Dancheong Pigments of Old Wooden Building in Gwangju and Jeonnam, Korea (광주.전남지역 목조 고건축물에 사용된 단청안료에 대한 연구)

  • Jang, Seong-Wook;Park, Young-Seog;Park, Dae-Woo;Kim, Jong-Kyun
    • Economic and Environmental Geology
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    • v.43 no.3
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    • pp.269-278
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    • 2010
  • We investigated characteristics of the coloring material of Dancheong pigments and hope that this study contributes the revival of traditional Dancheong pigments color. For this purpose, we collected Dancheong fragment samples that fell off naturally from old wooden buildings in Gwangju and Jeonnam and analyzed the natural coloring material by XRD and EDS-SEM analysis method. In white pigments of Dancheong fragments, it is confirmed that gypsum$(CaSO_{4}{\cdot}2H_{2}O)$, quartz$(SiO_{2})$, white lead$(PbCO_{3})$ and calcite$(CaCO_{3})$ which have been used for white pigments since ancient times and $TiO_{2}$ which is common used in modern times. In red pigments of Dancheong fragments, it is confirmed that hematite$(Fe_{2}O_{3})$ and red lead$(Pb_{3}O_{4})$, which have been used for red pigments since ancient times and C.I. pigment orange $13(C_{32}H_{24}C_{12}N_{8}O_{2})$ but there is no cinnabar(HgS) which has been used since B.C. 3000 in China. In yellow pigments of Dancheong fragments, it is confirmed that crocoite$(PbCrO_{4})$ and massicot(PbO). In blue pigments of Dancheong fragments, it is confirmed that sodalite$(Na_{4}BeAlSi_{4}O_{12}Cl)$ and nosean $(Na_{8}Al_{6}Si_{6}O_{24}SO_{4})$ as coloring material of blue pigment and C.I. pigments blue $29(Na_{7}Al_{6}Si_{6}O_{24}S_{3})$ which is used in modern times. In green pigments of Dancheong fragments, it is confirmed that calumetite$(Cu(OHCI)_{2}{\cdot}2H_{2}O)$, escolaite(Cr2O3), dichromium trioxide$(Cr_{2}O_{3})$, emerald green$(C_{2}H_{3}As_{3}Cu_{2}O_{8})$, and C.I. pigments green$(C_{32}H_{16}-XCl_{x}Cu_{8})$ which is used in modern time. In black pigments of Dancheong fragments, Chiness ink(carbon black) is confirmed.

KOH 이방성 식각을 이용한 Ti-실리사이드 전계방출 소자 연구

  • 김성배;전형탁;최성수
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.61-61
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    • 1999
  • 저항이 5$\Omega$-cm인 n-type Si(100) 웨이퍼를 실리콘 식각시 마스크로 사용하기 위하여 습식 열산화법을 이용하여 100$0^{\circ}C$에서 SiO2을 2400$\AA$ 성장시킨 후, OPCVD 공정을 통해 785$^{\circ}C$서 SiH2Cl2 가스 30sccm과 NH3가스 100sccm을 이용하여 Si3N4를 3000$\AA$ 증착시켰다. 이 웨이퍼를 포토-리쏘그라피 공정을 거쳐 지름 2$\mu\textrm{m}$의 포토레지스트 패턴을 제작한 후 600W의 RF power하에서 CF4 가스 10sccm, CHF3 가스 15sccm, O2가스 8sccm 및 Ar가스 10sccm을 이용하여 MERIE 방법으로 Si3N4를 식각한 다음, 7:1 BHF 용액내에서 30초간의 습식식각을 통해 40wt.%의 KOH 용액내에 8$0^{\circ}C$에서 30초간의 이방성 식각을 통해 피라미드 모양의 Si FEA(field emitter array)를 제작하였다. 본 실험은 다음과 같이 완성된 Si FEA를 샤프닝 산화 후 산화막 식각을 통해 마스크를 제거한 다음, tip의 열화학적 내구성을 증가시키고 장시간 구동시 안정성과 전계방출 전류밀도를 높이기 위해 tip의 표면에 Ti를 sputter 방법으로 약 300$\AA$ 증착시킨 후, RTA 장비를 이용하여 2단계 열처리 (first annealing:$600^{\circ}C$/30sec, second annealing : 85$0^{\circ}C$/15sec)를 통해 Si FEA의 경우보다 낮은 turn-on 전압과 높은 전계방출 특성을 나타낼 것으로 기대된다.

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A Study on the Sinterability of MgO-Al2O3-SiO2 System Ceramic Powders Prepared by Spray Pyrolysis Method (분무열분해법으로 제조한 MgO-Al2O3-SiO2계 화합물분체의 소결성)

  • 박정현;박찬욱;조경식
    • Journal of the Korean Ceramic Society
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    • v.26 no.3
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    • pp.347-360
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    • 1989
  • Spinel, mullite, forsterite and cordierite composition powders were synthesized from Mg(NO3)2.6H2O, Al(NO3)3.9H2O and SiCl4-ethanol solution by spray pyrolysis method and the sinterability of these powders were investigated. The bulk density of spinel and mullite specimens sintered at 1,$700^{\circ}C$ for 1hr was 3.56g/㎤(99.5% relative density) and 3.16g/㎤(99.7% relative density), respectively. (Green compacts were made from powders prepared at 1,00$0^{\circ}C$). The bulk density of forsterite and cordierite specimens sintered at 1,480 and 1,40$0^{\circ}C$ for 2hrs were 3.217 and 2.155g/㎤, respectively. (Green compacts were made from powders prepared at 1,00$0^{\circ}C$). The constituent compositions of spinel and mullite specimens sintered at 1,$700^{\circ}C$ for 1hr were 27.5wt% MgO and 70.5wt% Al2O3, respectively. Vickers microhardness and fracture toughness of spinel sintered at the above condition were 13.7GPa and 2.6MN.m3/2, respectively, and room temperature bending strength, 425MPa, was nearly maintained even at the elevated temperature. In the case ofmullite specimens, those values were 13.5GPa, 2.2MN/m3/2 and 430MPa, respectively.

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Characterization of SiC/C Functionally Gradient Materials Growth Process by CVD Technique

  • Park, Chinho;Lee, Jinwook;Jung, Soon-Deuk;Yi, Sung-Chul;Kim, Yootaek
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.06a
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    • pp.7-11
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    • 1997
  • SiC/C functionally gradient material (FGMs) were formed on graphite substrates by hot-wall chemical vapor deposition (CVD) technique using the SiCl$_4$-C$_3$H8-H$_2$ chemistry. Thermochemical equilibrium calculations were carried out to investigate the deposition process. The effect of process variables on the deposition yield and the SiC/C ratio in deposited layers was studied in detail. Calculated results showed a reasonable agreement with the experiment in a qualitative sense. SiC/C FGMs with excellent mechanical and thermal properties could be successfully formed on graphite substrates by carefully controlling the compositions in the deposited layers.

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An Analysis of Characteristics of PECVD and LPCVD a-Si Films Crystallized by Excimer Laser (엑시머 레이저를 이용하여 결정화한 PECVD 및 LPCVD 비정질 실리콘 박막의 특성 분석)

  • Jang, K.H.;Lee, S.K.;Jun, M.C.;Han, M.K.
    • Proceedings of the KIEE Conference
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    • 1994.07b
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    • pp.1239-1242
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    • 1994
  • We have characterized XeCl excimer-laser-induced crystallization of thin amorphous silicon films deposited by PECVD (${\alpha}-Si:H$) and LPCVD(${\alpha}-Si$). The electrical and optical properties and surface roughness of crystallized thin films have been measured. The dc conductivities, crystallinity and surface roughness of the films increased as the laser energy density and shot density were increased. Also, we have investigated the effects of 2-step annealing employing SPC and ELA. The properties of 2-step annealed films were better than those of films annealed by ELA only.

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