• Title/Summary/Keyword: $SiCl_4

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The Hydrochemistry of ChusanYongchulso Spring, Cheonbu-ri, Buk-myeon, Northern Ulleung Island (울릉도 북면 천부리 추산 용출소의 수질화학적 특성)

  • Lee, Byeong Dae;Cho, Byong Wook;Choo, Chang Oh
    • The Journal of Engineering Geology
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    • v.28 no.4
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    • pp.565-582
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    • 2018
  • We investigated the hydrochemical properties of ChusanYongchulso Spring located in Buk-myeon, Ulleung Island, focusing on the formation and characteristics of aquifers in and around the Nari caldera. Abundant pumice with high permeability and numerous fractures (including faults and joints) that formed as a result of caldera subsidence are widely distributed in the subsurface, favoring the formation of aquifers. Because of the presence of porous pyroclastic rocks with a high internal surface area, the water type of the springs is characterized by $NaHCO_3$, with upper stream waters and the upper spring being characterized by $NaHCO_3$ and NaCl, respectively. Components with a high coefficient of determination with EC are $HCO_3$, Na, F, Ca, Mg, Cl, $SiO_2$, and $SO_4$. The high concentrations of Na and Cl might be attributable to the main lithologies in the area, given that alkaline volcanic rocks are distributed extensively across Ulleung Island. Eh and pH, which are considered to be important indicators of water-rock interaction, are unrelated to most components. According to the results obtained from factor analysis, the variance explained by factor 1 is 54% and by factor 2 is 25.8%. Components with a high loading on factor 1 are F, Na, EC, Cl, $HCO_3$, $SO_4$, $SiO_2$, Ca, $NO_3$, and Mg, whereas components with a high loading on factor 2 are Mg and Ca, along with K, $NO_3$, and DO with negative loadings. It is suggested that the high concentrations of Na, Cl, F, and $SO_4$ are closely related to the presence of fine-grained alkaline pyroclastic rocks with high permeability and porosity, which favorintensewater-rock interaction. However, a wide-ranging investigation that encompasses methods such as geophysical prospecting and geochemical analysis (including isotope, trace-element, and tracer techniques) will be necessary to gain a better understanding of the groundwater chemistry, aquifer distribution, and water cycling of Ulleung Island.

Etching characteristics of gold thin films using inductively coupled $Cl_2/Ar$ plasma ($Cl_2/Ar$ 유도 결합 플라즈마에 의한 gold 박막의 식각특성)

  • Chang, Yun-Seong;Kim, Dong-Pyo;Kim, Chang-Il;Chang, Eui-Goo;Lee, Su-Jae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05b
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    • pp.7-11
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    • 2002
  • In this study, Au thin films were etched with a $Cl_2/Ar$ gas combination in an in an inductively coupled plasma. The etch properties were measured for different gas mixing ratios of $Cl_2/(Cl_2+Ar)$ while the other process conditions were fixed at rf power (700 W), dc bias voltage (150 V), and chamber pressure (15 mTorr). The highest etch rate of the Au thin film was 3500 $\AA/min$ and the selectivity of Au to $SiO_2$ was 4.38 at a $Cl_2/(Cl_2+Ar)$ gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. There is Au-Cl bonding by chemical reaction between Cl and Au. During the etching of Au thin films in $Cl_2/Ar$ plasma, Au-Cl bond is formed, and these products can be removed by the physical bombardment of Ar ions. In addition, Optical emission spectroscopy (OES) were investigated to analyze radical density of Cl and Ar in plasma. The profile of etched Au investigated with scanning electron microscopy (SEM).

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Effect of NaCl Treatment on Absorption of Inorganic Nutrient and Growth in Rice (NaCl 처리가 벼의 무기성분 흡수 및 생육에 미치는 영향)

  • 정진일;고종철;이승엽;권태오;이동진
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.48 no.6
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    • pp.465-468
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    • 2003
  • In order to find out the basic information for salt tolerance in vice (Oryza sativa L.), effects of NaCl treatment on absorption of inorganic components and growth were investigated in 6 japonica and 5 tongil varieties and compared to the salt tolerance variety, Annapurna. The absorption of N and $\textrm{P}_2\textrm{O}_5$ was less repressed than that of $\textrm{K}_2\textrm{O}$, MgO, CaO, and $\textrm{Si}\textrm{O}_2$ which were a little affected by NaCl treatment. $\textrm{K}_2\textrm{O}$ was the most highly repressed component in the absorption of inorganic components, followed by MgO, CaO, total-N, $\textrm{P}_2\textrm{O}_5$ and $\textrm{Si}\textrm{O}_2$. $\textrm{Na}_2\textrm{O}$ content was increased about twenty times to the control at 30days after NaCl treatment, and tonsil varieties more than absorbed japonica ones. Dry weight of japonica varieties by NaCl treatment was less reduced than that of tonsil varieties, followed by Seomjinbyeo, Sinseonchalbyeo, Nakdongbyeo, Daechoungbyeo, Dongjinbyeo and Chuchoungbyeo in japonica group, and Milyang30, Gayeabyeo, Jangseongbyeo, Chilseongbyeo and Taebackbyeo in tonsil group. The relationship between dry weight reduction and Na/K ratio showed positively significant correlation in rice.

유도결합 $Cl_2/CHF_3, Cl_2/CH_4, Cl_2/Ar $플라즈마를 이용한 InGaN 건식 식각 반응 기구 연구

  • 이도행;김현수;염근영;이재원;김태일
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.249-249
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    • 1999
  • GaN과 같은 III-nitride 반도체 관한 식각 기술의 연구는 blue-emitting laser diode(LD)를 위한 경면(mirror facet)의 형성뿐만아니라 새로운 display 용도의 light emitting diodes (LED), 고온에서 작동되는 광전소자 제조 등에도 그 중요성이 증대되고 있다. 최근에는 III-nitride 물질의 높은 식각속도와 미려하고 수직한 식각형상을 이루기 위하여 ECR(Electron Cyclotron Resonance)이나 ICP(Inductively Coupled Plasma)와 같은 고밀도 플라즈마 식각과 CAIBE(Chemically assisted ion beam etching)를 이용한 연구가 진행되고 있다. 현재 제조되어 지고 있는 LED 및 LD와 같은 광소자의 구조의 대부분은 p-GaN/AlGaN/InGaN(Q.W)/AlGaN/n-GaN 와 같은 여러 층의 형태로 이루어져 있다. 이중 InGaN는 광소자나 전자소자의 특성에 영향을 주는 가장 중요한 부분으로써 현재까지 보고된 식각연구는 undoped GaN에 대부분 집중되고 있고 이에 비해 소자 특성에 핵심을 이루는 InGaN의 식각특성에 관한 연구는 미흡한 상황이다. 본 연구에서는 고밀도 플라즈마원인 ICP 장비를 이용하여 InGaN를 식각하였고, 식각에는 Cl2/CH4, Cl2/Ar 플라즈마를 사용하였다. InGaN의 식각특성에 영향을 미치는 플라즈마의 특성을 관찰하기 위하여 quadrupole mass spectrometry(QMS)와 optical emission spectroscopy(PES)를 사용하였다. 기판 온도는 5$0^{\circ}C$, 공정 압력은 5,Torr에서 30mTorr로 변화시켰고 inductive power는 200~800watt, bias voltage는 0~-200voltage로 변화시켰으며 식각마스크로는 SiO2를 patterning 하여 사용하였다. n-GaN, p-GaN 층 이외에 광소자 제조시 필수적인 InGaN 층을 100% Cl2로 식각한 경우에 InGaN의 식각속도가 GaN에 비해 매우 낮은 식각속도를 보였다. Cl2 gas에 소량의 CH4나 Ar gas를 첨가하는 경우와 공정압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%Ar 플라즈마에서 공정 압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%CHF3 와 Cl2/10%Ar 플라즈마에서 공정압력을 15mTorr로 감소시키는 경우 InGaN과 GaNrks의 선택적인 식각이 가능하였다. InGaN의 식각속도는 Cl2/Ar 플라즈마의 이온에 의한 Cl2/CHF3(CH4) 플라즈마에서의 CHx radical 형성에 의하여 증가하는 것으로 사료되어 진다.

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Seasonal Variation and Statistical Analysis of Particulate Pollutants in Urban Air (도시대기립자상물질중 오염성분의 계절적 변동 및 통계적 해석)

  • 이승일
    • Journal of environmental and Sanitary engineering
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    • v.9 no.2
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    • pp.8-23
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    • 1994
  • During the period from Mar., 1991 to Feb., 1992 66 tSP samples were collected by Hi volume air sampler at 1 sampling site in Seoul and the amount of concentration of 21 components(SO$_{4}$$^{2-}$, NO$_{3}$$^{-}$, NH$_{4}$$^{+}$, Cl$^{-}$, Al, Ba, Ca, Cd, Cr, Cu, Fe, It Mg, Mn, Na, Ni, Pt Si, Ti, Zn, Zr ) were measured. And monthly and seasonal variation were surveyed and the principal component analysis( PCA ) were carried out with respect to these amount of pollutants, minimum of visibility and radiation on a horizontal surface. The total amount of soluble ion in water was high in order o(SO$_{4}$$^{2-}$> NO$_{3}$$^{-}$> N%'>Cl$^{-}$ and metal ion was high in order of Na> Ca>Si> Fe> Al> K> Mg> Zn> Pb> Cu>Ti> Mn > Ba> Cr> Zr> Ni> Cd. There was Seasonal variation in concentration for SO$_{4}$$^{2-}$, NH$_{4}$$^{+}$, Cl$^{-}$, Na, Al, Ca, Bt Mg, Fe and Si. It was assumed that the components of the highest concentration on April were depend on yellow sand and the frequency of wind velocity and direction. As the results of PCA, the amount of pollution components was able to characterized with two principal components(Z$_{1}$, Z$_{2}$ ). The first principal components Z$_{1}$ was considered to be a factor indicating the pollutants originated from natural generation and The second principal components Z$_{2}$ was considered to be a factor indicating the pollutants originated from human work. The monthly concentration of pollutants in ISP, minimum of visibility and radiation on a horizontal surface was possible to evaluate by the use of these two principal components Z$_{1}$ and Z$_{2}$ .

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바이오 센서 응용을 위한 Tree-like 실리콘 나노와이어의 표면성장 및 특성파악

  • An, Chi-Seong;Kulkarni, Atul;Kim, Ho-Jung;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.346-346
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    • 2011
  • 실리콘 나노와이어는 높은 표면적으로 인해 뛰어난 감지 능력을 가지는 재료 중 하나로 다양한 센서 응용 분야에 사용되고 있다. 이를 제작하는 방법에는 Micro Electro Mechanical Systems (MEMS) 공정을 이용한 Top-down 방식과 Vapor-Liquid-Solid (VLS) 공정을 이용한 Bottom-up 방식이 널리 사용되고 있다. 특히 Plasma-Enhanced Chemical Vapor Deposition(PECVD)와 Au 촉매를 이용한 Bottom-up 방식은 수십 나노미터 이하의 실리콘 나노와이어를 간단한 변수 조절을 통해 성장시킬 수 있다. 또한 Au/Si의 공융점인 363$^{\circ}C$보다 낮은 온도에서 $SiH_4$를 분해시킬 수 있어 열적 효과로 인한 손실을 줄일 수 있는 장점을 지니고 있다. 하지만 PECVD를 이용한 실리콘 나노와이어 성장은 VLS 공정을 통해 표면으로부터 수직으로 성장하게 되는데 이는 센서 응용을 위한 전극 사이의 수평 연결 어려움을 지니고 있다. 따라서 이를 피하기 위한 표면 성장된 실리콘 나노와이어가 요구된다. 본 연구에서는 PECVD VLS 공정을 이용하여 $HAuCl_4$를 촉매로 이용한 표면 성장된 Tree-like 실리콘 나노와이어를 성장시켰다. 공정가스로는 $SiH_4$와 이를 분해시키기 위해 Ar 플라즈마를 사용 하였고 웨이퍼 표면에 HAuCl4를 분사하고 고진공 상태에서 챔버 기판을 370$^{\circ}C$까지 가열한 후 플라즈마 파워(W) 및 공정 압력(mTorr)을 변수로 두어 실험을 진행하였다. 기존의 보고된 연구와 달리 환원된 금 입자 대신 $HAuCl_4$용액을 그대로 사용하였는데 이는 표면 조도(Surface roughness)를 가지는 Au 박막 상태로 존재하게 된다. 이 중 마루(Asperite) 부분에 PECVD로부터 발생된 실리콘 나노 입자가 상대적으로 높은 확률로 흡착하게 되어 실리콘 나노와이어의 표면성장을 유도하게 된다. 성장된 실리콘 나노와이어는 SEM과 EDS를 이용하여 직경, 길이 및 화학적 성분을 측정하였다. 직경은 약 100 nm, 길이는 약 10 ${\mu}m$ 정도로 나타났으며 Tree-like 실리콘 나노와이어가 성장되었다. 향후 전극이 형성된 기판위에 이를 직접 성장시킴으로써 이 물질의 I-V 특성을 파악 할 것이며 이는 센서 응용 분야에 도움이 될 것으로 기대된다.

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Optimum Process Condition by Experimental Design Method for the Synthesis of Methylchlorosilanes(MCS) (실험계획법에 의한 메틸염화실란 합성의 최적공정조건)

  • Cho, Chul Kun;Han, Kee Do
    • Applied Chemistry for Engineering
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    • v.9 no.3
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    • pp.394-398
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    • 1998
  • An optimum synthetic condition was studied for the MCS used as a silicone monomer. The contact mixture was made from the four component catalyst system($CuCl/ZnCl_2/Sn/Cd$) and silicon particles. The contact mass was used for a series of experiments with methyl chloride, which were designed and done to explore the optimum condition for MCS synthesis by an experimental design method. The optimum temperature and MeCl flow rate, which were obtained using 50g contact mass at 60rpm and 1 atm, were in the range of $300-305^{\circ}C$ and of 70-80ccm. Also a continuous run was performed to confirm the conditions. The results showed that the average reaction rate and selectivity were 170(g-MCS/hr.kg-Si) and 0.05 respectively at 67% conversion of MeCl and 92% silicon utilization rate. Also the parameters of overall reaction rate equation and a total pressure were estimated on the basis of the results of the continuous run.

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HYDROLYTIC DEGRADATION OF DENIAL COMPOSITE RESINS (수종 치과용 복합레진의 가수분해)

  • Yang, Kyu-Ho;Kim, Jung-Ran
    • Journal of the korean academy of Pediatric Dentistry
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    • v.27 no.2
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    • pp.370-378
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    • 2000
  • The composite restorative resins have their insufficient resistance to wear. The subsurface degradation within the restoration is considered to be associated with wear. The aim of this study was to evaluate the resistance to degradation of six commercial composite resins in an alkaline solution. The brands studied were Clearfil APX(Kuraray), Heliomolar(Vivadent), Surefil(Dentsply), TPH(Dentsply), Tetric Ceram(Vivadent), and Z100(3M). Preweighed discs of each brand were exposed 0.1N NaOH solution at $60^{\circ}C$. After 14 days they were removed, neutralized with HCL, washed with water and dried to constant mass at $60^{\circ}C$. Resistance to degradation was evaluated on the basis of the following parameters: (a) mass loss(%) - determined from pre-and post-exposure specimen weights; (b) Si loss (ppm)-obtained from ICP-AE analysis of solution exposed to specimens; and (c) degradation depth$({\mu}m)$ - measured microscopically (SEM) from polished circular sections of exposed specimens. The results were as follows: 1. The mass loss was in descending order by Z100, TC H, S, CL, TPH and in the range of $0.45\sim3.64%$ 2. The degradation layer depth was in descending order by H, Z100, S, TC, TPH, CL and in the range of $10.85\sim73.38{\mu}m$ 3. For the Si concentration, Z100 was the highest of all 4. The highly significant correlation(r=0.81, p<0.05) was observed between mass loss and degradation depth. 5. Under scanning electronmicroscopy, the degradation of connection between resin matrix and fillers was observed 2 weeks after soaking in NaOH solution.

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Compazrison of Water Qualities and Biotic Effects of Three River Waters in Taegu Area (대구지방 하천의 수질특성과 수생물에 미치는 영향 비교)

  • Lyu, Seung-Won;Seung-Dal Song
    • Journal of environmental and Sanitary engineering
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    • v.5 no.1
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    • pp.7-13
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    • 1990
  • The water environmental characters of the Nakdong River, Geumho River and Sin Stream, both before-flood (Aug. 24) and after-flood (Sept. 8), have been compared, and their effects on the growth of Spirodela polyrhiza Shleiden have been examined. Before the flood, the concentrations of most of the chemical components of the Geumho River were similar to those of the Sin Stream; (COD, 19.6~21.4; alkalinity, 177~183; $NH_4\;^+$, 20.7~24.4; $NO_3\;^-$, 3.9~4.3; $PO_\;4^{3-}$, 3.4~3.7; $Mg^{2+}$, 42; $Ca^{2+}$, 68.5~69.7; $Cl^-$, 90~92; $SiO_2$, 10.4~11.2; , 11~32; LAS, 3.0~3.8; , 0.007~0.010ppm) but much higher than those of the Nakdong River (30~40 fold for $NH_4\;^+$, , $PO_\;4^{3-}$ and LAS, and 2~5 fold for COD, alkalinity, $NO_3\;^-$, $Mg^{2+}$, Cl- and ). Especially in the Geumho River, Secchi disk transparency was very low (17cm) and DO was not detected. The flood caused significant increases in some chemical components: $NH_4\;^+$, 1.0;$NO_3\;^-$, 9.6; , 12.8 and , 5.4 ppm in the Nakdong River; DO, 1.0; $NO_2\;^-$, 0.92; $NO_3\;^-$, 22.2 and $SiO_2$, 17.6ppm in the Geumho River; DO, 3.0; $NO_2\;^-$, 1.4; $NO_3\;^-$, 22.2; SiO2$SiO_2$, 19.2 and , 25.0ppm in the Sin Stream. General species diversity index (H) of phytoplankton community in the Nakdong River, Geumho River and Sin Stream before flood was 3.1, 2.7 and 1.6, respectively. After the flood, the phytoplankton growth was highly sparse in each river water, hence indices have no significance. The growth of S. polyrhiza was enhanced in Geumho River water (max. RGR=26%/day), while it ceased within 7days in Nakdong River water.

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Comparison of Hydrochemical Characteristics of Groundwater in the Southern Area and the Northwestern Area, Pusan (부산 남부지역 지하수와 서북부지역 지하수의 수리화학적 특성 비교)

  • 함세영;조명희;성익환;이병대;조병욱;심형수
    • Journal of the Korean Society of Groundwater Environment
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    • v.6 no.3
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    • pp.140-151
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    • 1999
  • Groundwater samples from the southern area composed of andesitic rocks and the northwestern area composed of granite in Pusan city, have been collected and analyzed. According to the Piper diagram. groundwater in the southern area belongs to Ca$\^$2+/-HCO$_3$$\^$-/ and Ca$\^$2+/-(Cl$\^$-/+SO$_4$$\^$2-/) types, and that in the northwestern area mostly belongs to Ca$\^$2+/-HCO$_3$$\^$-/ type and partly Na$\^$+/-HCO$_3$$\^$-/ type. Two factors (factor 1 and factor 2) were obtained from the result of the factor analysis in the southern area. Factor 1, consisting of Mg$\^$2+/, Ca$\^$2+/, Cl$\^$-/, SO$_4$$\^$2-/, NH$_4$$\^$+/, EC and NO$_3$$\^$-/ is represented by the dissolution of Ca-plagioclase and calcite, and the influence of anthropogenic sources. Factor 2, consisting of K$\^$+/, Na$\^$+/. SiO$_2$, SO$_4$$\^$2-/, and HCO$_3$$\^$-/ is mainly represented by the dissolution of feldspar. Three factors were obtained from the result of the factor analysis in the northwestern area Factor 1, consisting of Na$\^$+/, K$\^$+/, NH$_4$$\^$+/, Cl$\^$-/, SO$_4$$\^$2-/ and NO$_3$$\^$-/ explains dissolution of plagioclase and mica, the influence of anthropogenic sources and salt water. Factor 2, consisting of Ca$\^$2+/ and HCO$_3$$\^$-/ explains the dissolution of Ca-plagioclase. Factor 3, consisting of Mg$\^$2+/ and SiO$_2$, explains the dissolution of silicate minces. and contaminants. Based on the phase stability diagrams, groundwater both in the southern and in the northwestern area is mostly in equilibrium with kaolinite. Cl$\^$-/ with respect to Na$\^$+/, Ca$\^$2+/, Mg$\^$2+/, K$\^$+/, SO$_4$$\^$2-/ and HCO$_3$$\^$-/ indicates that both the northwestern area and the southern area are influenced by the salt water.

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