• 제목/요약/키워드: $SiCl_4

검색결과 515건 처리시간 0.03초

화학증착(CVD)에 의한 선택적 수소 투과성 실리카막의 제조 (Synthesis of $H_2$-Permselective Silica Films by Chemical Vapor Deposition)

  • 남석우;하호용;홍성안
    • 멤브레인
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    • 제2권1호
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    • pp.21-32
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    • 1992
  • 화학증착법을 사용하여 다공성 Vycor 유리에 선택적 수소 투과성 실리카 막을 제조하였다. 화학증착에는 $SiCl_4$의 가수분해 반응이 이용되었으며, 반응물인 $SiCl_4$와 물을 서로 반대 방향으로 주입하여 막을 제조하는 opposing-reactants film deposition방법과, 반응물을 다공성 유리관의 한쪽으로만 공급하는 one-sided film deposition 방법을 모두 사용하였다. 제조된 실리카 막을 통한 수소의 투과도는 $600^{\circ}C$ 이상의 온도에서 $0.01-0.25cm^3(STP)/cm^2-min-atm$의 범위에 있었으며, 수소의 질소에 대한 투과도 비는 1000정도였고, 온도의 증가에 따라 실리카 막을 통한 수소 및 질소의 투과도는 증가하였다. Opposing reactants film deposition 방법으로 제조된 실리카 막은 비교적 안정성은 높으나 수소의 투과도가 낮은 반면, one-sided film deposition 방법을 사용하면 수소의 투과도는 높으나 안정성이 낮은 막이 얻어졌다. 이러한 실리카 막은 고온에서의 기체분리 및 분리막 반응기에 응용하기 위하여는 높은 선택적투과성 및 안정성이 요구되며 막 제조 조건 및 방법이 최적화되어야 함을 알 수 있었다.

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솔-젤법에 의한 CuCl 미세결정이 분산된 비선형 광학유리의 제조 및 광특성 (Preparation and Opticaa Properties of CuCl Nanocrystallites Dispersed Nonlinear Optical Glass by Sol-Gel Process)

  • 송석표;한원택;김병호
    • 한국세라믹학회지
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    • 제34권9호
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    • pp.941-948
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    • 1997
  • CuCl nanocrystallites dispersed nonlinear optical silica and borosilicate glasses were fabricated by sol-gel process. CuCl powder was dissolved in TEOS(Si(OC2H5)4) and TMB((CH3O)3B), precursors of silica and borosilicate glasses, with ethanol, water and HCl, and precipitated through the heat treatment in the matrix glass. The optical properties of CuCl doped glasses were measured using the spectrophotometer at room temperature and low temperature(77K); Z1, 2 and Z3 exciton peaks from the absorption spectra, were observed at about 370 nm and 380 nm, respectively. The average radius of nanocrystallites, calculated from the blue shift of Z3 excitons, was measured according to annealing temperature and time. The precipitation temperature of CuCl nanocrystallites was decreased when boron was added to silica glass. Increase of annealing temperature and time made average radius of nanocrystallites saturated about 2 nm.

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CuCl 미립자가 분산된 비선형 광학유리의 제조와 비선형 광특성: III. CuCl 반도체 미립자의 Bimodal 분포 특성과 온도에 따른 광흡수도 (Preparation and Nonlinear Optical Properties of CuCl-doped Nonlinear Optical Glasses : III. Bimodal Distribution of CuCl Nanocrystals and Temperature Dependent Optical Absorption Spectra)

  • 윤영권;한원택
    • 한국세라믹학회지
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    • 제34권4호
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    • pp.436-442
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    • 1997
  • The bimodal distribution of CuCl nano-crystals precipitated in alumino-borosilicate glass matrix (30SiO2-45B2O3-7.5Al2O3-7.5Na2O-7.5CaO-2.5GeO2(mole %)) was investigated by TEM and the temperature dependent optical spectroscopy. Two types of CuCl particles with different size were observed by TEM and it was confirmed by the splitting of Z3 absorption peak at low temperature and the occurrence of deflection point in the optical spectra with temperature.

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PECVD법에 의한 3C-SiC막 증착(I): 증착변수에 따른 SiC 증착거동 (Deposition of 3C-SiC Films by Plasma-enhanced Chemical Vapor Deposition (I): Deposition Behaviors of SiC with Deposition Parameters)

  • 김광호;서지윤;윤석영
    • 한국세라믹학회지
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    • 제38권6호
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    • pp.531-536
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    • 2001
  • SiCl$_4$/CH$_4$/H$_2$계를 사용한 플라즈마 화학증착법(PECVD)으로 실리콘(100) 기판 위에 3C-SiC막을 117$0^{\circ}C$~1335$^{\circ}C$의 온도범위에서 증착하였다. 증착온도, 유입가스비, R$_{x}$ [=CH$_4$/(CH$_4$+H$_2$)], 그리고 r.f. power를 변화시켜 증착막의 결정성에 대해 검토하였다. Thermal CVD에 비해 PECVD법은 박막의 증착속도를 향상시켰다. 증착된 3C-SiC은 (111) 면으로 최대의 우선배향성을 지님을 알 수 있었다. 실리콘 기판 위의 3C-SiC막의 결정성은 R$_{x}$값에 의존하였으며, R$_{x}$가 감소할수록 결정성이 더욱 향상되었다. Free Si가 3C-SiC막과 함께 증착되었으나, 증착온도와 r.f power가 증가함에 따라 free Si의 함량은 감소하였다. 증착온도 127$0^{\circ}C$, 유입가스비 R$_{x}$=0.04, r.f. power가 60W에서 비교적 결정성을 가진 3C-SiC막을 얻을 수 있었다.

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$Sr_2SiO_4:Eu^{2+}$ 형광체의 합성 및 발광특성 (Synthesis and luminescent properties of $Sr_2SiO_4:Eu^{2+}$ phosphors)

  • 김종민;박용서;최형욱
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.430-431
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    • 2009
  • In this study, europium doped strontium silicate ($Sr_2SiO_4:Eu^{2+}$) phosphor has been synthesized by conventional solid-state method and investigated luminescent characteristic. $SrCO_3$ and $SiO_2$ were mixed together by 2:1 mole ratio. Also $NH_4Cl$ was added as a flux. The mixture were sintered at $800^{\circ}C$, $1000^{\circ}C$ for 3h under the atmosphere (5% $H_2$/95% $N_2$). This phosphor can be applicated to the yellow phosphor for white LED because it has yellow emission band (540nm), which emits efficiently under the 370nm excitaion energy.

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용융염계에서 자전연소합성법에 의한 α-Si3N4분말의 제조 - 2. 반응물의 증가 (Preparation of α-Si3N4 Powder in Reaction System Containing Molten Salt by SHS - Part 2. Scale-Up)

  • 윤기석;양범석;박영철;원창환
    • 한국세라믹학회지
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    • 제41권9호
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    • pp.703-708
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    • 2004
  • 앞선 논문 분말의 제조에서 정립한 $\alpha$-Si$_3$N$_4$ 분말의 제조를 위한 최적의 조성에서 반응 혼합물의 양에 따른 압력 및 생성물의 변화를 관찰하였다. 5L 반응기 내에서 반응 혼합물의 양이 100g일 때 필요한 최저 $N_2$ 압력은 60atm이었다. 그러나 반응 혼합물의 양이 200g 이상일 때부터 반응기 내부의 압력 증가로 인해 반응은 완료될 수 없었으며, 혼합물이 증가할수록 반응율은 직선적으로 감소하였다. 반응물의 양이 증가할수록 최초 반응기 내부의 $N_2$압력을 감소시킴으로써 반응을 완료시킬 수 있었으며, 500g일 때 초기 $N_2$ 압력을 약 20atm까지 감소시킴으로써 반응은 완료될 수 있었다. 반응이 중간에 멈추는 원인은 반응기 내부의 압력 증가로 인해 기화되지 못한 채 혼합물 안에 존재한 NH$_4$Cl때문인 것으로 밝혀졌다.

Physicochemical and Electrochemical Characteristics of Carbon Nanomaterials and Carbon Nanomaterial-Silicon Composites

  • Kim, Soo-Jin;Hyun, Yura;Lee, Chang-Seop
    • 대한화학회지
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    • 제60권5호
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    • pp.299-309
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    • 2016
  • In this study, the physicochemical and electrochemical properties of carbon nanomaterials and synthesized nano-carbon/Si composites were studied. The nano-carbon/Si composites were ball-milled to a nano size and coated with pyrolytic carbon using Chemical Vapor Deposition (CVD). They were then finely mixed with respective nano-carbon materials. The physicochemical properties of samples were analyzed using Scanning Electron Microscopy (SEM), Energy Dispersive X-ray Spectroscopy (EDS), Raman spectroscopy, X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), and surface area analyzer. The electrochemical characteristics were investigated using the galvanostatic charge-discharge and cyclic voltammetry (CV) measurements. Three-electrode cells were fabricated using the carbon nanomaterials and nano-carbon/Si composites as anode materials and LiPF6 and LiClO4 as electrolytes of Li secondary batteries. Reversibility using LiClO4 as an electrolyte was superior to that of LiPF6 as the electrolyte. The initial discharge capacities of nano-carbon/Si composites were increased compared to the initial discharge capacities of nano-carbon materials.

전이금속이온과 1,15-Diaza-3,4:12,13-dibenzo-5,8,11-trioxacycloheptadecane과의 착물형성 (Complex Formation of 1,15-Diaza-3,4:12,13-dibenzo-5,8,11-trioxacycloheptadecane with Some Transition Metal Ions)

  • 장철규;신영국;김시중
    • 대한화학회지
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    • 제30권6호
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    • pp.526-531
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    • 1986
  • 95% 메탄올 용액에서 코발트(II), 니켈(II), 구리(II)와 아연(II)이온들과 1,15-diaza-3,4:12,13-dibenzo-5,8,11-trioxacycloheptadecane (NenOdien H$_4$, L)리간드와의 안정도 상수를 전위차 적정법으로 25$^{\circ}$C 에서 결정하였다. 그 결과 착물의 형성은 리간드내의 주게원자의 영향을 받으며 안정도 상수의 크기는 Co(II) < Ni(II) < Cu(II) > Zn(II)의 순위이였다. 한편 고체착물의 구조를 분광광도법, 원소분석 및 전기전도도법의 결과로부터 논의하였다. 그 결과 고체상태의 화학조성과 기하구조는 팔면체의 $[CoL_2(OH_2)Cl]Cl{\cdot}2H_2O$, 팔면체의 $[NiL_2(OH_2)Cl]Cl{\cdot}2H_2O$, 사각피라밋형의 [CuLCl]Cl, 그리고 팔면체의 $[ZnLCl_2]{\cdot}\frac{1}{2}H_2O$임을 알 수 있었다.

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SiH2Cl2 와 O3을 이용한 원자층 증착법에 의해 제조된 실리콘 산화막의 특성 (Characteristics of Silicon Oxide Thin Films Prepared by Atomic Layer Deposition Using Alternating Exposures of SiH2Cl2 and O3)

  • 이원준;이주현;한창희;김운중;이연승;나사균
    • 한국재료학회지
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    • 제14권2호
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    • pp.90-93
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    • 2004
  • Silicon dioxide thin films were deposited on p-type Si (100) substrates by atomic layer deposition (ALD) method using alternating exposures of $SiH_2$$Cl_2$ and $O_3$ at $300^{\circ}C$. $O_3$ was generated by corona discharge inside the delivery line of $O_2$. The oxide film was deposited mainly from $O_3$ not from $O_2$, because the deposited film was not observed without corona discharge under the same process conditions. The growth rate of the deposited films increased linearly with increasing the exposures of $SiH_2$$Cl_2$ and $O_3$ simultaneously, and was saturated at approximately 0.35 nm/cycle with the reactant exposures over $3.6 ${\times}$ 10^{9}$ /L. At a fixed $SiH_2$$Cl_2$ exposure of $1.2 ${\times}$ 10^{9}$L, growth rate increased with $O_3$ exposure and was saturated at approximately 0.28 nm/cycle with $O_3$ exposures over$ 2.4 ${\times}$ 10^{9}$ L. The composition of the deposited film also varied with the exposure of $O_3$. The [O]/[Si] ratio gradually increased up to 2 with increasing the exposure of $O_3$. Finally, the characteristics of ALD films were compared with those of the silicon oxide films deposited by conventional chemical vapor deposition (CVD) methods. The silicon oxide film prepared by ALD at $300^{\circ}C$ showed better stoichiometry and wet etch rate than those of the silicon oxide films deposited by low-pressure CVD (LPCVD) and atmospheric-pressure CVD (APCVD) at the deposition temperatures ranging from 400 to $800^{\circ}C$.

Biodiversity of Microalgae and Their Elemental Components from Veeranam Lake, Tamilnadu, India

  • Sivakumar, K.;Senthilkumar, R.
    • 생태와환경
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    • 제41권2호
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    • pp.128-136
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    • 2008
  • An attempt was made in the Veeranam freshwater lake with the objectives to collect, identify, describe and document the algae occurring from March 2007 to August 2007. Qualitative and quantitative characterization of phytoplankton and analysis of physico-chemical parameters of water samples were carried out at monthly intervals during the study period in the western and eastern sides of the lake. It was found that the phytoplankton community embraced 68 genera belonging to four classes viz., Bacillariophyceae (40), Chlorophyceae (22), Cynophyceae (4) and Euglenophyceae (2). There were significant influences of various physico-chemical parameters on the phytoplankton population density. Commonly occurred genera, Oscillatoria (Cyanophyceae), Navicula (Bacillariophyceae) and Scenedesmus (Chlorophyceae), were subjected to energy dispersive spectroscopic analysis (EDS). They were found to accumulate different elements such as Zn, P, S, Ca, Mg, Fe, N, Si, Cl and Mn. Among these the member Cyanophyceae contained Zn, P, Mg, Ca, Mn, S and N. Bacillariophyceae Si, Zn, Mg, Cl, N, Fe, and Ca. Chlorophyceae Ca, Mg, N, Fe, Cl, Zn, Si and Mn. Thus these observations would determine the chemical dialogue between the cell structures and role of the elements. Further, it gives the clue about the phytoplankton growth requirements.