• 제목/요약/키워드: $Si/Al_2$

검색결과 3,490건 처리시간 0.031초

SIMS를 이용한 SiO2/PSG/SiO2/Al-1%Si 및 SiO2/TEOS/SiO2/Al-1%Si 적층 박막내의 Na 게터링 분석 (Analysis of the Na Gettering in SiO2/PSG/SiO2/Al-1%Si and SiO2/TEOS/SiO2/Al-1%Si Multilevel Thin Films using SIMS)

  • 김진영
    • 한국표면공학회지
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    • 제51권2호
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    • pp.110-115
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    • 2018
  • The Na low temperature gettering in $SiO_2/PSG/SiO_2/Al-1%Si$ and $SiO_2/TEOS/SiO_2/Al-1%Si$ multilevel thin films was investigated using dynamic SIMS(secondary ion mass spectrometry) analysis. DC magnetron sputter, APCVD and PECVD techniques were utilized for the deposition of Al-1%Si thin films, $SiO_2/PSG/SiO_2$ and $SiO_2/TEOS/SiO_2$ passivations, respectively. Heat treatment was carried out at $300^{\circ}C$ for 5 h in air. SIMS depth profiling was used to determine the distribution of Na, Al, Si and other elements throughout the $SiO_2/PSG/SiO_2/Al-1%Si$ and $SiO_2/TEOS/SiO_2/Al-1%Si$ multilevel thin films. XPS was used to analyze chemical states of Si and O elements in $SiO_2$ passivation layers. Na peaks were observed throughout the $PSG/SiO_2$ and $TEOS/SiO_2$ passivation layers on the Al-1%Si thin films and especially at the interfaces. Na low temperature gettering in $SiO_2/PSG/SiO_2/Al-1%Si$ and $SiO_2/TEOS/SiO_2/Al-1%Si$ multilevel thin films is considered to be caused by a segregation type of gettering.

금형 예열온도에 따른 Al-Cu-Si 3원계 공정합금의 미세조직 변화 (Changes on the Microstructure of an Al-Cu-Si Ternary Eutectic Alloy with Different Mold Preheating Temperatures)

  • 오승환;이영철
    • 한국주조공학회지
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    • 제42권5호
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    • pp.273-281
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    • 2022
  • Al-Cu-Si 3원계 공정합금의 응고거동과 미세조직 변화를 이해하기 위해서, 금형 예열온도를 달리하여 Al-Cu-Si 3원계 공정합금의 미세조직 변화를 관찰하였다. 금형 예열온도가 500℃일 때, 초정 Si과 덴드라이트 형상의 Al2Cu상이 관찰되며, 이후 (α-Al+Al2Cu)의 2원계 공정상이 관찰된다. 금형 예열온도가 300℃일 때 미제조직은 금형 예열온도가 500℃일 때와 유사하나 (α-Al+Al2Cu+Si)의 3원계 공정상이 관찰되는 영역과 관찰되지 않는 영역이 나타난다. 금형 예열온도가 150℃인 경우에는 미세조직이 (α-Al+Al2Cu)의 2원계 공정상과 (α-Al+Al2Cu+Si)의 3원계 공정상이 관찰되는 Bimodal 구조를 나타낸다. 금형 예열온도를 달리 하였을 때 가장 큰 변화를 나타내는 상은 Si상이며, 임계냉각속도를 지나면 (α-Al+Al2Cu+Si)의 3원계 공정상이 형성되는 순간에 빠른 냉각에 의한 Si의 성장이 억제되면 Cooperative 성장을 하기 때문에 Al, Cu의 성장도 함께 억제된다. 서로 다른 합금설계 전산모사 프로그램을 통해 Al-27wt%Cu-5wt%Si의 3원계 공정 합금을 분석한 결과, 합금설계 전산모사 프로그램에 따라 결과의 차이가 발생하며, 전산모사의 신뢰성을 높이기 위해서는 실제 주조를 통한 미세조직 분석이 수반되어야 한다.

$Al_2O_3$/SiC Hybrid-Composite의 제조 (Fabrication of $Al_2O_3$/SiC Hybrid-Composite)

  • 이수영;임경호;전병세
    • 연구논문집
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    • 통권26호
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    • pp.103-112
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    • 1996
  • $Al_2O_3/SiC$ Hybrid-Composite이 일반적인 분말공정에 의하여 제조되었다. 소결시 $\gamma-Al_2O_3에서 $\alpha-Al_2O_3$로의 전이에 seed역할을 하는 $\alpha-Al_2O_3의 첨가는 균일한 미세구조를 발달시켜 강도의 증진을 가져왔다. nano size의 SiC의 첨가는 $Al_2O_3$의 소결성과 입성장에 영향을 미쳐 파괴강도의 증진을 가져왔다. $Al_2O_3/SiC$ nano-Composite에 SiC plates의 첨가는 파괴강도의 감소를 가져왔지만, 상대적으로 파괴인성은 증진되었다. SiC plates에 nitride (BN, $Si_3N_4$ 코팅을 할 경우 crack deflection을 더욱 유발하여 파괴인성이 증진되었다.

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SiC의 산화에 의한 $Al_2O_3/SiC$ 복합체의 제조 (Fabrication of $Al_2O_3/SiC$ Composite Through Oxidation of SiC)

  • 김경환;이홍림;이형민;홍기곤
    • 한국세라믹학회지
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    • 제34권5호
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    • pp.535-543
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    • 1997
  • The surface of SiC particles were partially oxidized to produce SiO2 layers on the SiC particles to prepare Al2O3/SiC composite by formation of mullite bonds between the grains of Al2O3 and SiC during sintering at 1$600^{\circ}C$. This process is considered to enable the sintering of Al2O3/SiC composite at lower temperature and also to relieve the stress, produced by thermal expansion mismatch between Al2O3 and SiC. In fact, Al2O3/SiC composite prepared by oxidation of SiC was observed to be more effectively sintered and densified at lower temperature. Maximum density, flexural strength and microhardness were obtained with 5.65 vol% of mullite content in Al2O3/SiC composite.

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결정질 실리콘 태양전지의 패시베이션 적용을 위한 Al2O3/SiON 적층구조의 열적 안정성에 대한 연구 (A Study on the Thermal Stability of an Al2O3/SiON Stack Structure for c-Si Solar Cell Passivation Application)

  • 조국현;장효식
    • 한국세라믹학회지
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    • 제51권3호
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    • pp.197-200
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    • 2014
  • We investigated the influence of blistering on $Al_2O_3$/SiON stacks and $Al_2O_3$/SiNx:H stacks passivation layers. $Al_2O_3$ film provides outstanding Si surface passivation quality. $Al_2O_3$ film as the rear passivation layer of a p-type Si solar cell is usually stacked with a capping layer, such as $SiO_2$, SiNx, and SiON films. These capping layers protect the thin $Al_2O_3$ layer from an Al electrode during the annealing process. We compared $Al_2O_3$/SiON stacks and $Al_2O_3$/SiNx:H stacks through surface morphology and minority carrier lifetime after annealing processes at $450^{\circ}C$ and $850^{\circ}C$. As a result, the $Al_2O_3$/SiON stacks were observed to produce less blister phenomenon than $Al_2O_3$/SiNx:H stacks. This can be explained by the differences in the H species content. In the process of depositing SiNx film, the rich H species in $NH_3$ source are diffused to the $Al_2O_3$ film. On the other hand, less hydrogen diffusion occurs in SiON film as it contains less H species than SiNx film. This blister phenomenon leads to an increase insurface defect density. Consequently, the $Al_2O_3$/SiON stacks had a higher minority carrier lifetime than the $Al_2O_3$/SiNx:H stacks.

Si-Al-SiO2-NH4F(β-Si3N4)계에서 연소반응에 의한 β-SiAlON분말의 제조 (Preparation of β-SiAlON Powder by Combustion Reaction in the System of Si-Al-SiO2-NH4F(β-Si3N4))

  • 민현홍;신창윤;원창환
    • 한국세라믹학회지
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    • 제43권10호
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    • pp.595-600
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    • 2006
  • The preparation of $\beta$-SiAlON powder by SHS in the system of $Si-Al-SiO_2-NH_4F(\beta-Si_3N_4)$ was investigated in this study. In the preparation of SiAlON powder, the effect of gas pressure, compositions such as Si, $NH_4F$, \beta-Si_3N_4$ and additive in mixture on the reactivity were investigated. At 50 atm of the initial inert gas pressure in reactor, the optimum composition for the preparation of pure $\beta$-SiAlON was $3Si+Al+2SiO_2+NH_4F$. The $\beta$-SiAlON powder synthesized in this condition was a single phase $\beta$-SiAlON with a rod like morphology.

$Al/SiC/Al_{2}O_{3}$복합재료의 기계적 성질 및 마멸특성 (Mechanical Properties and Wear Behaviour of $Al/SiC/Al_{2}O_{3}$ Composite Materials)

  • 임흥준;김영한;한경섭
    • 대한기계학회논문집
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    • 제17권10호
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    • pp.2498-2508
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    • 1993
  • $Al/SiC/Al_{2}O_{3}$ hybrid composites are fabricated by squeeze infiltration method. From the misconstructive of $Al/SiC/Al_{2}O_{3}$ hybrid composites fabricated by squeeze infiltration method, uniform distribution of reinforcements and good bondings are found. Hardness value of $Al/SiC/Al_{2}O_{3}$ hybrid composites increases linearly with the volume fraction of reinforcement because SiC whisker and $Al_{2}$O$_{3}$ fiber have an outstanding hardness. Optimal aging conditions are obtained by examining the hardness of $Al/SiC/Al_{2}O_{3}$ hybrid composites with different aging time. Tensile properties such as Young's modulus and ultimate tensile strength are improved up to 30% and 40% by the addition of reinforcements, respectively. Failure mode of $Al/SiC/Al_{2}O_{3}$ hybrid composites is ductile on microstructural level. Through the abrasive wear test and wear surface analysis, wear behaviour and mechanism of 6061 aluminum and $Al/SiC/Al_{2}O_{3}$ hybrid composites are characterized under various testing conditions. The addition of SiC whisker to $Al/SiC/Al_{2}O_{3}$ composites gives rise to improvement of the wear resistance. The wear resistance of $Al/SiC/Al_{2}O_{3}$ hybrid composites is superior to that of Al/SiC composites. The wear mechanism of aluminum alloy is mainly abrasive wear at low speed range and adhesive and melt wear at high speed range. In contrast, that of $Al/SiC/Al_{2}O_{3}$ hybrid composites is abrasive wear at all speed range, but severe wear when counter material is stainless steel. As the testing temperature increases, wear loss of aluminum alloy decreases because the matrix is getting more ductile, but that of $Al/SiC/Al_{2}O_{3}$ hybrid composites is hardly varied. Oil lubricant is more effective to reduce the wear loss of aluminum alloy and $Al/SiC/Al_{2}O_{3}$ hybrid composites at high speed range.

제조방법에 따른 Al2O3-SiCw 복합체의 특성 (Properties of Al2O3-SiCw Composites Fabricated by Three Preparation Methods)

  • 이대엽;윤당혁
    • 한국세라믹학회지
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    • 제51권5호
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    • pp.392-398
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    • 2014
  • $Al_2O_3$-SiC composites reinforced with SiC whisker ($SiC_w$) were fabricated using three different methods. In the first, $Al_2O_3-SiC_w$ starting materials were used. In the second, $Al_2O_3-SiC_w$-SiC particles ($SiC_p$) were used, which was intended to enhance the mechanical properties by $SiC_p$ reinforcement. In the third method, reaction-sintering was used with mullite-Al-C-$SiC_w$ starting materials. After hot-pressing at $1750^{\circ}C$ and 30 MPa for 1 h, the composites fabricated using $Al_2O_3-SiC_w$ and $Al_2O_3-SiC_w-SiC_p$ showed strong mechanical properties, by which the effects of reinforcement by $SiC_w$ and $SiC_p$ were confirmed. On the other hand, the mechanical properties of the composite fabricated by reaction-sintering were found to be inferior to those of the other $Al_2O_3$-SiC composites owing to its relatively lower density and the presence of ${\gamma}-Al_2O_3$ and ${\gamma}-Al_{2.67}O_4$. The greatest hardness and $K_{1C}$ were 20.37 GPa for the composite fabricated using $Al_2O_3-SiC_w$, and $4.9MPa{\cdot}m^{1/2}$ using $Al_2O_3-SiC_w-SiC_p$, respectively, which were much improved over those from the monolithic $Al_2O_3$.

SiC와 TiC 입자를 함유하는 Al2O3 입자복합체의 균열저항거동과 기계적 성질 (R-Curve Behavior and Mechanical Properties of Al2O3 Composites Containing SiC and TiC Particles)

  • 나상웅;이재형
    • 한국세라믹학회지
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    • 제39권4호
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    • pp.413-419
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    • 2002
  • $Al_2O_3$/TiC/SiC, $Al_2O_3$/SiC 및 $Al_2O_3$/TiC 복합체들을 고온가압소결로 제조하여 이들의 균열저항거동과 기계적 성질을 비교해 보았다. $Al_2O_3$$0.8{\mu}m$의 TiC가 30vol% 첨가된 $Al_2O_3$/TiC는 단일체 $Al_2O_3$와 비슷한 균열저항거동을 보이며 파괴인성은 전반적으로 10% 이내의 증가를 보이는데 그쳤지만 강도는 약 30% 증가하였다. $Al_2O_3$$3{\mu}m$ SiC가 30vol% 첨가된 $Al_2O_3$/SiC는 SiC 입자의 균열 접속으로 인해 증가하는 균열저항거동을 뚜렷이 보이면서 파괴인성이 긴 균열에서 약 75% 증가하였으나 강도는 다소 감소했다. $Al_2O_3$/TiC에 SiC 입자가 30 vol% 첨가된 $Al_2O_3$/TiC/SiC 복합체의 경우 단일체 $Al_2O_3$에 비해 긴 균열 거리에서 파괴인성이 50% 이상 증가된 6.6 MP${\cdot}\sqrt{m}$에 이르렀으며 강도 값도 약 20% 상승하였다. 그러나 큰 SiC 입자의 첨가로 인해 TiC 입자만 첨가된 $Al_2O_3$/TiC 복합체보다는 강도가 다소 낮았다. 또한 SiC 입자만 첨가된 $Al_2O_3$/SiC 복합체보다는 파괴인성이 다소 낮았는데, 이는 작은 TiC 입자들이 SiC 입계를 거칠게 만들어 균열접속을 일으키는 SiC 입자의 뽑힘 현상을 방해하였기 때문이다.

연소합성법에 의한 $MoSi_2-Al_2O_3$ 복합재료의 특성에 미치는 $Mo/MoO_3$ 몰비의 영향 (Influences of the Molar Ratio of $Mo/MoO_3$ on Characteristics of $MoSi_2-Al_2O_3$ composites by SHS Methods)

  • 장윤식;이윤복;김용백;김인술;박흥채;오기동
    • 한국세라믹학회지
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    • 제33권11호
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    • pp.1209-1216
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    • 1996
  • MoSi2-Al2O3 composites were prepared by thermal explosion mode of self-propagating high temperature syn-thesis (SHS) using element powders of MoO3 Mo Si and Al. The combustion products of MoSi2 which have 10, 20, 30 and 40 wt% Al2O3 showed the molten state in the range of Mo to MoO3 6:1-9.5:1, 2:1-8:1, 1:1-5:1, and 1:1-3:1 (molar ratio) respectively. The combustion products which made least seperation the molten phase from the slag phase were in Mo/MoO3=9, 5:1, 8:1, 5:1 and 3:1 (molar ratio) respectively. Particles size of MoSi2 and Al2O3 in the combustion product were decreased as the molar ratio of Mo to MoO3 increase. By XRD analysis only MoSi2 and $\alpha$-Al2O3 peaks were identified in the combusion products, In case of MoSi2 containing 20wt% Al2O3 5.1wt% Al existed into MoSi2 grains and 30.7wt% Si and 7.7wt% Mo existed into Al2O3 grains. The relative density of MoSi2 containing 10, 20, 30 and 40 wt% Al2O3 were 82.7, 85.2, and 81.9% respectively. The fracture strength of MoSi2-Al2O3 composites increased with increasing Al2O3 and that of MoSi2-20wt% Al2O3 composite was 195 MPa.

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