• Journal of the Korean Ceramic Society
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• v.37 no.10
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• pp.975-980
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• 2000

스테인레스 스틸 기판 위에 Pb($Zr_{0.45}$ $Ti_{0.55}$) $O_3$후막을 졸-겔 스핀 코팅법으로 제조하였다. 스테인레스 스틸은 그 자체로 좋은 도체이지만 PZT 후막의 강유전 특성을 개선하고자 Ru $O_2$박막을 중간층 겸 하부전극으로 사용하였다. PZT 전구체 용액을 코팅하고 급속 열처리하였을 때 5$50^{\circ}C$ 이하에서 pyrochlore 상이 먼저 나타났고 이 transient 상은 61$0^{\circ}C$에서 모두 perovskite 상으로 변화하였다. $600^{\circ}C$에서 열처리된 PZT 후막은 잔존하는 pyrochlore로 인해 걸어준 전기장에 무관하게 5-7$\mu$C/$ extrm{cm}^2$의 낮은 $P_{r}$값을 나타내었으나 61$0^{\circ}C$ 이상에서 열처리된 시편들은 모두 25$\mu$C/$\textrm{cm}^2$ 이상의 잔류분극을 가지고 있었다. 또한 Ru $O_2$중간층이 PZT의 강유전성에 미치는 영향을 조사하였을 때 잔류분극 값은 거의 영향을 받지 않았으나 항전계 값은 상당한 영향을 받았다. 즉 100nm 두께의 Ru $O_2$박막을 중간층으로 사용할 경우 중간층 없이 직접 스테인레스 스틸 위에 코팅할 때에 비해 항전계 값을 45% 가량 줄일 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.152-152
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• 1999

1Gb급 이상 기억소자의 캐패시터 재료로 주목받고 있는 (Ba,Sr)TiO3 [BST] 박막의 전극재료로는 Pt, Ru, Ir과 같은 금속전극과 RuO2, IrO2와 산화물 전도체가 유망한 것으로 알려져 있다. 그런데, DRAM의 집적도가 증가하게 되면, BST같은 고유전율 박막을 유전재료로 사용한다 하더라도, 3차원적인 구조가 불가피하게 때문에 기존의 sputtering 방법으로는 우수한 단차피복성을 얻기 힘들므로, MOCVD법이 필수적이다. 본 연구에서는 기존에 연구되었던 Pt에 비해 식각특성이 우수하고, 비교적 낮은 비저항을 갖는 Ru 박막증착에 대한 연구를 행하였다. 본 연구에서는 수직형의 반응기와 저항 가열 방식의 susceptor로 구성된 저압 유기금속 화학증착기를 사용하여 최대 6inch 직경을 갖는 기판 위에 Ru박막을 증착하였다. Precursor로는 기존에 연구된 적이 없는 bis-(ethyo-$\pi$-cyclopentadienyl)Ru (Ru(C5H4C2H5)2, [Ru(EtCp)2])를 사용하였으며, bubbler의 온도는 85$^{\circ}C$로 하였다. Si, SiO2/Si를 사용하였으며, 증착온도 25$0^{\circ}C$~40$0^{\circ}C$, 증착압력 3Torr의 조건에서 Ru 박막을 증착하였다. Presursor를 운반하는 수송기체로는 Ar을 사용하였으며, carbon과 같은 불순물의 제거를 위해 O2를 첨가하였다. 증착된 박막은 XRD, SEM, 4-point probe등을 통해 구조적, 전기적 특성을 평가하였으며, 열역학 계산을 위해서는 SOLGASMIX-PV프로그램을 사용하였다. Ru 박막의 증착에 있어서 산소의 첨가는 필수적이었으며, Ru 박막의 증착속도는 30$0^{\circ}C$~40$0^{\circ}C$의 온도 영역에서 200$\AA$/min으로 일정하였으며, 첨가된 산소의 양이 적을수록 더 치밀하고 평탄한 표면형상을 보였으며, 또한 더 낮은 전기 전도도를 보였다. 그리고 증착된 박막은 12~15$\mu$$\Omega$cm 정도의 낮은 비저항 값을 나타냈으며 이것은 기존의 sputtering 법에 의해 증착된 Ru 박막의 비저항 값들과 비교될만하다. 한편, 높은 온도, 높은 산소분압 조건에서 RuO2의 형성을 관찰하였으며, 이것은 열역학적인 계산을 통해서 잘 설명할 수 있었다.

• Journal of Korean Society of Water and Wastewater
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• v.31 no.5
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• pp.373-381
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• 2017

$RuO_2$ is a common active component of Dimensionally Stable Anodes (DSAs) for chlorine evolution that can be used in wastewater treatment systems. The recent improvement of chlorine evolution using nanostructures of $RuO_2$ electrodes to increase the treatment efficiency and reduce the energy consumption of this process has received much attention. In this study, $RuO_2$ nanorod and nanosheet electrodes were simply fabricated using the sol-gel method with organic surfactants as the templates. The obtained $RuO_2$ nanorod and nanosheet electrodes exhibit enhanced electrocatalytic activities for chlorine evolution possibly due to the active surface areas, especially the outer active surface areas, which are attributed to the increase in mass transfers compared with a conventional nanograin electrode. The electrocatalytic activities for chlorine evolution were increased up to 20 % in the case of the nanorod electrode and 35% in the case of the nanosheet electrode compared with the nanograin electrode. The $RuO_2$ nanorod 80 nm in length and 20-30 nm in width and the $RuO_2$ nanosheet 40-60 nm in length and 40 nm in width are formed on the surface of Ti substrates. These results support that the templated $RuO_2$ nanorod and nanosheet electrodes are promising anode materials for chlorine evolution in future applications.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2022-2024
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• 2005

Electrical double-layer capacitor (EDLC) is an electrochemical energy storage device in which electric charges only accumulated by a pure electrostatic attraction force are stored on the electrolyte-electrode interface in a form of double layer and separated by the electrolyte. The composite was prepared by mixing nanosize $TiO_2$ and activated carbon through a means of ultrasonic vibration in ethanol solution for 30 min in various mass ratios of $AC:TiO_2$ to form activated carbone-semiconducting oxide composites. Either 1.0 M $LiClO_4/EC-DEC$ or $Et_4NBF_4$/EC-DEC was used as the electrolyte. It was found that with modification of $TiO_2$, the specific capacitance of activated carbon measured at $1mA/cm^2$ was increased from 40 to 50 F/g. This method is unique in comparison the conventional method because it uses semiconducting TiO2 other than electrochemically active materials such as $RuO_2$. The increase in specific capacitance could be attributed to the decrease in electric polarization, caused by the introduction of $RuO_2$.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.52-52
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• 2003

Gbit급 DRAM 커패시터의 고유전물질로 각광받고 있는 (Ba,Sr)TiO$_3$〔BST〕의 하부전극 물질로서 (Ba,Sr)RuO$_3$〔BSR〕의 적용 가능성을 연구하였다. BSR은 BST와의 구조적, 화학적 유사성으로 인하여, BST와 하부전극사이의 저유전 계면반응 충의 생성을 최소화함으로서 향상된 전기적 특성을 구현 할 수 있다. 본 연구에서는 methoxyethoxytetramethylheptanedionate(METHD) 소스를 적용한 유기 화학 기상 증착법(MOCVD)법을 이용하여 BSR을 증착하였으며, 증착된 BSR의 특성을 x-ray photoelectron spectroscopy(XPS) 분석법으로 기화기 온도 변화에 따른 BSR박막의 특성을 분석하였다. 증착온도 55$0^{\circ}C$에서 소스의 기화효율에 영향을 미치는 기화기온도를 변화시켜가며 BSR박막의 증착실험을 진행하였으며 소스 유입 속도 0.075sccm, 증착 온도 55$0^{\circ}C$, Ar/O2 = 200/350 sccm일 때 기화기 온도를 260~28$0^{\circ}C$까지 1$0^{\circ}C$간격의 변화로 증착실험을 수행하였다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.2
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• pp.221-226
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• 1998

Amorphous (Ba, Sr)$TiO_3$[BST] layer(30, 70 nm) was introduced between crystalline BST and $RuO_2$electrode to realize double-layered BST structure in order to improve the properties of BST film. The structure and surface morphology of double-layered BST film were modified by the application of amorphous BST layer; that is, surface became smoother and grain size increased abruptly. Amorphous layer thicker than 30 nm was effective to hinder the influence of $RuO_2$surface on the structure of as-grown BST films by in-situ process. Dielectric constant of double-layered BST film was improved dramatically from 152 to 340 and leakage current was lowered from $1.25{\times}10^{-5}A/{\textrm}{cm}^2);to;6.85{\times}10^{-7}A/{\textrm}{cm}^2$, respectively.

• Journal of Environmental Science International
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• v.18 no.1
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• pp.49-60
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• 2009

Fabrication and oxidants formation of 1 and 2 component metal oxide electrode, which is known to be so effective to destruct non-biodegradable organics in wastewater, were studied. Five electrode materials (Ru, Pt, Sn, Sb and Gd) were used for the 1 and 2 component electrode. The metal oxide electrode was prepared by coating the electrode material on the surface of the titanium mesh and then thermal oxidation at $500^{\circ}C$ for 1 h. The removed RhB per 2 min and unit W for one component electrode decreased in the following sequences: Ru/Ti>Sb/Ti>Pt/Ti>Gd/Ti>Sn/Ti. The concentration of oxidants generated in 1 and 2 component electrodes was in the order of: $ClO_2$> free Cl>$H_2O_2>O_3$. OH radical was not generated from in entire one and two component electrodes. RhB degradation rate and generated oxidants of the Ru-Sn=9:1 electrode was higher than that of the two component electrode. The exact relationship between the removal of RhB and the generated oxidants concentration was not obvious. However, it was assumed that electrode with high RhB decolorization had high oxidant concentration.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.10
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• pp.620-624
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• 2016

Ferroelectric $Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT) films were deposited on SrTiO3(100) substrate by using conductive $SrRuO_3$ films as underlayer and their structural and ferroelectric properties were investigated. PZT films were grown in (00l) orientation on well lattice-matched pseudo-cubic $SrRuO_3$ films. Thickness dependence of ferroelectric and electrical properties of PZT films was investigated. PZT film with 400 nm thickness showed a remanent polarization ($P_r$) of $29.0{\mu}C/cm^2$ and coercive field ($E_c$) of 83 kV/cm, and $P_r$ decreased and $E_c$ increased with thickness reduction. The dielectric constant for PZT films showed gradual decrease with thickness reduction. Breakdown field of PZT films did not show the thickness dependence and displayed as high value as 1 MV/cm.

• Applied Chemistry for Engineering
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• v.18 no.4
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• pp.356-360
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• 2007

Recently, dye sensitized solar cells (DSSCs) composed of nanoporous $TiO_2$, light-sensitive dyes, electrolytes, and counter electrode have been received much attention. Nanostructured particles with higher surface area for the higher adsorption of Ru (II) dye are required to increase the quantity of light absorption. Also, it has been reported that the key factor to achieve high energy conversion efficiency in the photoelectrode of DSSC is the heat treatment of $TiO_2$ paste with acid addition. In this work, we investigated the influence of acid treatment of $TiO_2$ solar cell on the photovoltaic performance of DSSC. The working electrodes fabricated in this work were characterized by X-ray photoelectron spectroscopy (XPS), extended X-ray absorption fine structure (EXAFS), field emission scanning electron microscope (FE-SEM), and atomic force microscope (AFM). In addition, the influence of nanostructured photoelectrode fabricated with the acid-treated paste on the energy conversion efficiency was investigated on the basis of photocurrent-potential curves. It was found that the influence of acid-treated paste on the photovoltaic efficiency was significant.

• Journal of Environmental Science International
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• v.17 no.6
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• pp.581-589
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• 2008

This study was carried out to evaluate the effect of water quality of cooling tower on Legionella pneumophila disinfection using Ru/Ti electrode. The influences of parameters such as pH, turbidity, $CaCO_3$ and TOC were investigated using laboratory scale batch reactor. Oxidants such as free Cl, $ClO_2,\;H_2O_2\;and\;O_3$ were measured. The results showed that all of the water quality parameters of cooling tower had deteriorated disinfection of Legionella pneumophila. When the turbidity, $CaCO_3$ and TOC was increased, oxidants which was generated during electrolysis was decreased. pH, free Cl, $ClO_2\;and\;H_2O_2$ concentration were decreased with the increase of pH, whereas $O_3$ concentration was increased with the increase of pH. The order of effect of water quality on the disinfection performance for Legionella pneumophila was turbidity > $CaCO_3$ > TOC > pH. To obtain the safety standard (1000 CFU/L), the simultaneous increase current and NaCl dosage was needed.