• 마이크로전자및패키징학회지
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• 제6권2호
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• pp.45-49
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• 1999

이온빔 보조 증착법을 이용하여 제작한 $SnO_2$박막을 기저 물질로한 가연성 센서에 catalyst로 ultra-thin Pd layer를 이온빔 스퍼터링으로 흡착시켰다. 가연성 기체의 센싱 메카니즘에서 Pd 촉매의 역할을 정확하게 조사하기 위해서 진공 및 공기 상에서 annealing 함으로서 Pd 촉매의 초기 산화 상태를 조절하였다. 촉매가 순수한 금속 Pd 클러스터 상태로 존재하는 $SnO_2$센서의 경우에는 PdO 클러스터가 있는 것에 비해 높은 감응성을 보였다. 이것은 PdO 클러스터가 표면 acceptor로 작용을 하는 것으로 생각되며 $SnO_2$로 부터 Pd sub-channel을 통해 전자를 받아 센서의 감도를 낮추고 응답시간을 늦추는 것으로 생각된다.

• Bulletin of the Korean Chemical Society
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• 제31권10호
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• pp.2939-2942
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• 2010

A new high-temperature pH sensor has been successfully developed by reforming the internal reference systems of the pH sensors based on oxygen-ion conducting ceramic membrane. The conventional internal reference system, a mixture of Ni and NiO, has been replaced with partially oxidized Ni powders, where Ni and NiO coexist on the surface of particles, in order to avoid the cumbersome mixing step of Ni and NiO particles. The partially oxidized Ni particles were made by oxidizing Ni under air atmosphere at $600^{\circ}C$ and characterized by X-ray diffraction (XRD) and FTIR spectroscopy. The viability of the pH sensor developed was assessed in boric acid (1000 ppm-B)/ lithium hydroxide (1 to 3 ppm-Li) buffer solutions at $280^{\circ}C$. The pH sensor showed excellent accuracy with a small error less than ${\pm}0.2$ pH units.

• 센서학회지
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• 제16권1호
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• pp.11-16
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• 2007

CuO is an important transition metal oxide with many practical applications such as catalysts, p-type semiconductor, solar cells, magnetic storage media and cathode materials. In this contribution, nanocrystalline CuO powders were prepared by solution reduction method using copper chloride ($CuCl_{2}{\cdot}2H_{2}O$), hydrazine ($N_{2}H_{4}$) and NaOH and subsequent heat treatment. The gas sensor using nanocrystalline CuO powders showed high sensitivities to acetone and ethanol.

• 전기화학회지
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• 제17권2호
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• pp.130-137
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• 2014

본 연구에서는 스크린 프린팅 방법을 이용하여 이산화납($PbO_2$)/탄소 반죽 전극을 제작하고, 이를 전기화학 방법의 과일 천연당(포도당, 자당, 과당) 측정용 센서로 이용하였다. 이산화납/탄소 반죽전극은 탄수화물과 같은 유기화합물의 전기화학적 산화촉매 신호를 측정함으로써 효소를 사용하지 않고도 당의 측정이 가능하다. 또한 측정 시 심각한 방해작용을 하는 아스코르브산(ascorbic acid)은 Nafion 막을 전극표면에 도입함으로써 효과적으로 감소시켰다. 최적화된 Nafion/이산화납/탄소 반죽 전극은 사람이 느끼는 상대당도(과당>자당>포도당)와 유사하게 각 당에 대한 감응신호를 나타내었다.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2008년도 춘계종합학술대회 A
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• pp.495-498
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• 2008

본 논문은 유비쿼터스 헬스케어 시스템을 위한 웨어러블 센서의 한 종류로서, 손목 착용형 $SpO_2$ 모듈을 구현하였으며 사용자의 산소포화도를 모니터링 할 수 있도록 제안하였다. $SpO_2$ 계측 보드는 고성능, 저전력 특징을 가지고 있는 MCU (ATmega128L, Atmel Co., USA)를 활용하여 모든 측정된 신호의 처리 및 제어를 담당하도록 하였으며, 일차적인 신호의 증폭과 필터를 위한 아날로그 회로도 구성하였다. 또한, 특정부위에서의 측정을 위해 제작된 반사형 프로브와도 연결되어 측정된 신호의 수집 및 처리를 담당하도록 하였다. IEEE 802.15.4 표준 프로토콜과 연동이 가능한 무선 센서 노드는 $SpO_2$ 계측 보드와 함께 연결되어 수집된 데이터를 서버측 PC로 전송하는 역할을 담당한다. 제안된 시스템의 활용으로 관리자가 서버측에서 모니터링 프로그램을 통해 사용자의 건강상태에 대한 정보를 확보할 수 있도록 하였다.

• 센서학회지
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• 제15권3호
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• pp.192-198
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• 2006

In this study, the light addressable potentiometric sensors (LAPS) with $Si_{3}N_{4}/SiO_{2}/Si$, and $Ta_{2}O_{5}/SiO_{2}/Si$ structures were fabricated. The penicillinsae was immobilized on the devices to hydrolyze the penicillin using self-assembled monolayer (SAM) method. Then response characteristics according to the penicillin concentrations were measured and compared. The measuring system was simplified by using LabVIEW. The pH response characteristics of fabricated devices are 56 mV/pH ($Si_{3}N_{4}$ sensing membrane) and 61 mV/pH ($Ta_{2}O_{5}$ sensing membrane). The sensitivity of sensor by enzyme reaction result of the enzyme reaction were 60 mV/decade and 74 mV/decade for $Si_{3}N_{4}/SiO_{2}/Si$ and $Ta_{2}O_{5}/SiO_{2}/Si$ structure, respectively, in the range of $0.1\;mM{\sim}10\;mM $of the penicillin concentration.

• Transactions on Electrical and Electronic Materials
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• 제13권2호
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• pp.106-109
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• 2012

A low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology. In order to heat up the sensing layer to operating temperature, a platinum (Pt) micro heater was embedded in the gas sensor. The line width and gap of the microheater was 20 ${\mu}m$ and 4.5 ${\mu}m$, respectively. Zinc oxide (ZnO) nanowhisker arrays were grown on a sensor from a ZnO seed layer using a hydrothermal method. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growing ZnO nanowhiskers. Temperature distribution of the sensor was analyzed by infrared thermal camera. The optimum temperature for highest sensitivity was found to be $250^{\circ}C$ although relatively high (64%) sensitivity was obtained even at as low a temperature as $150^{\circ}C$. The power consumption was 72 mW at $250^{\circ}C$, and only 25 mW at $150^{\circ}C$.

• 센서학회지
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• 제13권5호
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• pp.323-328
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• 2004

N-type semi-conducting oxides such as $SnO_{2}$, ZnO, and $ZrO_{2}$ have been known for the detecting materials of inflammable or toxic gases. Of those materials, $SnO_{2}$-based sensors are well known as high sensitive materials to detect toxic gases. And the sensitivity is improved if catalysts are added. Detecting toxic gases, especially DMMP (di-methyl-methyl-phosphonate) and DPGME (Dipropylene glycol methyl ether), was performed by a mixture of Tin oxide ($SnO_{2}$) and Zirconia ($ZrO_{2}$). The films consist of each three different mass% of Zr (from 1 mass% to 5 mass%), and they were tested by XRD, SEM, TEM, BET. Nano-structure, pore and particle size was controlled to verify the sensor's sensing mechanism. The sensors was evaluated at five different degrees (from $200^{\circ}C$ to $400^{\circ}C$) and three different concentrations (from 500 ppb to 1500 ppb). The sensors had good sensitivity of both simulants, and high selectivity of DMMP.

• Transactions on Electrical and Electronic Materials
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• 제6권4호
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• pp.173-176
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• 2005

A new $MoO_3$ based microsensor with low power consumption was presented. Typical size of sensor was 5mm in width and 8mm in length. As a sensitive electrode, $MoO_3$ was successfully fabricated by IC technology on pyrex glass of $250{\mu}m$ in thickness. After annealing at $550^{\circ}C$ for 3hrs, the film was fully crystallized and demonstrated as pure $MoO_3$ structure. The grain size of $MoO_3$ was plat like and typical size was about $1{\mu}m$. Based on the results of sensitivity measurement, $MoO_3$ microsensor shows especially high selectivity to $H_2$ reducing gas atmosphere. The applied heater power was lower than 0.5 Watt.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.450-450
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• 2011

This study reports the hydrogen sulfide gas sensing properties of ZnO nanorods bundle and the investigation of gas sensing mechanism. Also the improvement of sensing properties was also studied through the application of ZnO heterstructured nanorods. The 1-Dimensional ZnO nano-structure was synthesized by hydrothermal method and ZnO nano-heterostructures were prepared by sonochemical reaction. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) spectra confirmed a well-crystalline ZnO of hexagonal structure. The gas response of ZnO nanorods bundle sensor increased with increasing temperature, which is thought to be due to chemical reaction of nanorods with gas molecules. Through analysis of X-ray photoelectron spectroscopy (XPS), the sensing mechanism of ZnO nanorods bundle sensor was explained by well-known surface reaction between ZnO surface atoms and hydrogen sulfide. However at high sensing temperature, chemical conversion of ZnO nanorods becomes a dominant sensing mechanism in current system. In order to improve the gas sensing properties, simple type of gas sensor was fabricated with ZnO nano-heterostructures, which were prepared by deposition of CuO, Au on the ZnO nanorods bundle. These heteronanostructures show higher gas response and higher current level than ZnO nanorods bundle. The gas sensing mechanism of the heteronanostructure can be explained by the chemical conversion of sensing material through the reaction with target gas.