• JSTS:Journal of Semiconductor Technology and Science
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• 제17권2호
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• pp.245-251
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• 2017

Niobium doped zirconium oxide (Nb-Zr-O:NZO) thin films were fabricated on Si substrates by a sol-gel technique with an annealing temperatures of $500{\sim}1000^{\circ}C$ in air ($N_2:O_2=3:1$) for 20 minutes. It was found that the NZO film is based on tetragonal $ZrO_2$ polycrystalline structure with the Nb 5+ ion state and there is almost no diffusion of Nb or Zr to Si substrate. The relative dielectric constant for the NZO film with the Nb composition of 30 mol% and annealed at $800^{\circ}C$ was around 40. The root mean roughness was 1.02 nm. In addition, the leakage current of NZO films was as low as $10^{-6}A/cm^2$ at 4.4 V.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 춘계총회 및 연구발표회 초록집
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• pp.176.2-176
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• 2003

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.188-189
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• 2009

In this study, in order to develop excellent lead-free composition ceramics for piezoelectric transformer, $(K_4CuNb_8O_{23})$ added $(K_{0.5}Na_{0.5})(Nb_{0.96}Sb_{0.04})O_3$ ceramics were fabricated using conventional mixed oxide method and their piezoelectric and dielectric properties were investigated as a function of the amount of KCN addition. With increasing the amount of KCN addition, density and mechanical quality factor(Qm), electromechanical coupling factor (Kp) were increased up to 1.2mol% and then decreased. At the 1.2mol% KCN added specimen, mechanical quality factor (Qm), electromechanical coupling factor (Kp), density and dielectric constant (${\varepsilon}r$) showed the optimal values of 781, 0.445, $4.42g/cm^3$ and 443, respectively, for piezoelectric transformer application.

• 한국전기전자재료학회논문지
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• 제16권1호
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• pp.33-38
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• 2003

Highly homogeneous PZT powder was prepared by a partial oxalate method using chemicals of (Z $r_{0.53}$ $Ti_{0.47}$) $O_2$, Pb(N $o_3$)$_2$and (COOH)$_2$ㆍ2$H_2O$. N $b_2$ $O_{5}$ addition effect on microstructure and electrical properties of PZT ceramics was investigated. When the precursors were calcined at 71$0^{\circ}C$, a single perovskite phase was obtained. After sintering at 110$0^{\circ}C$, X-ray diffraction Patterns showed coexistence of rhombohedral and tetragonal phases regardless of the N $b_2$ $O_{5}$ content. As the content of N $b_2$ $O_{5}$ increased, grain size decreased but sintered density increased. The electromechanical coupling factor of kp and the piezoelectric constant of $d_{31}$ increased linearly with the content of N $b_2$ $O_{5}$, and those values reached 0.7 and -200, respectively, when 1.2 mol% of N $b_2$ $O_{5}$ is added. is added.ded.

• 한국세라믹학회지
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• 제41권7호
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• pp.508-512
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• 2004

치과 임프란트의 상부구조물로 응용하기 위해 Zr $O_2$, $Y_2$ $O_3$, Nb$_2$ $O_{5}$를 각각 90.24, 5.31, 4.45mo1%씩 혼합한 정방정 지르코니아 고용체에 알루미나를 부피비로 10-90%를 10vo1%간격으로 첨가하여 (Y, Nb)-TZP/알루미나 복합체를 제조하였다. 최적의 기계적 물성은 알루미나를 10vo1% 첨가했을 때 이축 곡강도는 900MPa이었으며 파괴인성은 8.9MPam$^{1}$2/이었고 20$0^{\circ}C$ 오토크레이브하에서 10시간 열처리했을 때 저온열화가 관찰되지 않았다. 복합체를 임프란트 상부구조물로 제작하여 40명의 환자에게 총 65개를 시술한 후 2년 동안 관찰한 결과 부작용이나 나사의 풀림 또는 파절이 전혀 일어나지 않아 우수한 임상결과를 보였다.

• 한국세라믹학회지
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• 제37권4호
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• pp.354-358
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• 2000

Tetragonal (t)-ZrO2/Al2O3 composites doped with Y2O3, Nb2O5, and Fe2O3 ((Y, Nb, Fe)-TZP/Al2O3) were prepared over the range containing Fe2O3 from 0.1 to 0.5 mol% with 0.1 mol% intervals to evaluate the effect of Fe2O3 addition on chromaticity, hydrothermal stability, and mechanical property of the composites. After autoclaving for 20 h at 18$0^{\circ}C$ under 3.5 MPa water vapor pressure, no tlongrightarrowm phase transformation was observed probably due to the preferential solid solubility of Fe2O3 in Al2O3, the presence of the rigid Al2O3 particles, and the inherent phase stability of (Y, Nb)-TZP. The optimized strength and the fracture toughness of the composite were 700 MPa and 8.5 MPa.m1/2, respectively, when 0.1 mol% Fe2O3 was added. The composites have shown a gradual color change from a slightly white ivory to a pale yellowish brown with increasing the Fe2O3 concentration.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2002년도 추계총회 및 연구발표회 초록집
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• pp.159.2-159
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• 2002

• Transactions on Electrical and Electronic Materials
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• 제5권3호
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• pp.109-112
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• 2004

In this study, in order to develop the low temperature sintering ceramics for ultrasonic vibrator, Pb(Sb$\_$$\frac{1}{2}$/Nb$\_$$\frac{1}{2}$/) O$_3$-Pb(Ni$\_$1/3/Nb$\_$2/3/)O$_3$-Pb(Zr$\_$0.48/Ti$\_$0.52/)O$_3$ ceramics were manufactured as a function of the amount of CuO addition, and their dielectric and piezoelectric characteristics were investigated. With increasing CuO addition, the grain size and density increased up to 0.3 wt% CuO addition. Taking into consideration electromechanical coupling factor(k$\_$p/) of 0.53, mechanical quality factor(Q$\_$m/) of 423, dielectric constant($\varepsilon$$\_$r/) of 1,759 and piezoelectric constant(d$\_$33/) of 362pC/N, it could be concluded that 0.5 wt% CuO added composition ceramic sintered at 920$^{\circ}C$ was suitable for ultrasonic vibrator application.

• 한국전기전자재료학회논문지
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• 제27권9호
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• pp.555-560
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• 2014

In this paper, in order to develop outstanding Pb-free composition ceramics, the $Fe_2O_3$-doped ($Na_{0.525}K_{0.443}Li_{0.037}$)($Nb_{0.883}Sb_{0.08}Ta_{0.037}$)$O_3$ + 0.3 wt% $Bi_2O_3$ + x wt% $Fe_2O_3$ (x= 0~1.0 wt%)(abbreviated as NKL-NST) lead-free piezoelectric ceramics have been synthesized using the ordinary solid state reaction method. The effect of $Fe_2O_3$-doping on their microstructure and electrical properties were investigated. XRD diffraction pattern studies confirm that $Fe_2O_3$ completely diffused into the NKL-NST lattice to form a new stable soild solution with $Fe^{3+}$ entering the $Nb^{5+}$, $Sb^{5+}$ and $Ta^{5+}$ of B-site. And, phase structure of all the ceramics exhibited pure perovskite phase and no secondary phase was found in the ceramics. The ceramics doped with 0.6 wt% $Fe_2O_3$ have the optimum values of piezoelectric constant($d_{33}$), planar piezoelectric coupling coefficient($k_p$) and mechanical quality factor($Q_m$) : $d_{33}$ = 233 [pC/N], $k_p$= 0.44, $Q_m$= 95. These results indicate that the ($Na_{0.525}K_{0.443}Li_{0.037}$)($Nb_{0.883}Sb_{0.08}Ta_{0.037}$)$O_3$ +0.3 wt% $Bi_2O_3$ + 0.6 wt% $Fe_2O_3$ ceramic is a promising candidate for lead-free piezoelectric ceramics.

• 한국해양공학회지
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• 제24권6호
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• pp.81-85
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• 2010

The effects of co-doping with complex dopants of softeners, $La^{+3}$ and/or $Nb^{+5}$, and a hardener, $Fe^{+3}$, on the microstructural and piezoelectric properties of PZT ceramics with a composition of a rhombohedral-tetragonal morphotropic phase boundary, $PbZr_{0.53}Ti_{0.47}O_3$, were investigated. Unlike single-element doping, the complex doping of both the softener and hardener ions led to various compensation effects for the piezoelectric properties of the PZT ceramics. For 0.5 wt.% $La_2O_3$ softener and/or 0.5 wt.% $Nb_2O_5$ doped compositions, there were apparent hardener doping (compensation) effects for an addition of over 1.0 wt.% $Fe_2O_3$. For the $La_2O_3$ and/or $Nb_2O_5$ doped composition, the co-dopant $Fe_2O_3$ addition led to lower kp and $\varepsilon$r, and increased $Q_m$ values. The prepared PZT ceramics modified with complex soft dopants, $La^{+3}$ and $Nb^+$, as well as a hard dopant, $Fe^{+3}$, showed that the piezoelectric properties were stable with the compositional variations, which made it possible to establish piezoelectric performances with higher reliability and reproducibility. The most improved piezoelectric properties of enhanced $Q_m$ with $\varepsilon_r$ remaining higher $k_p$, were obtained in the PZT composition complexly doped with $La^{+3}$ and $Fe^{+3}$. From the results obtained in this study, the properties of compositionally modified PZT ceramics can also be tailored over a wider range by changing the dopant compositions to meet the specific requirements for underwater or other applications.