• 제목/요약/키워드: $K^+$ ion source

검색결과 633건 처리시간 0.024초

플라즈마 질소 이온주입한 오스테나이트 스테인레스 강의 표면특성 (Surface Properties of Plasma Nitrogen Ion Implanted Stainless Steel)

  • 김광훈;;이홍식;임근희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 E
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    • pp.2253-2255
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    • 1999
  • Plasma source ion implantation (PSII) is a non-line-of-sight technique for surface modification of materials which is effective for non-planar targets. Properties such as hardness, corrosion resistance, wear resistance and friction can be improved without affecting the bulk properties of the material. Type 304 austenitic stainless steel was treated by nitrogen plasma ion implantation at a target bias of -50kV. Surface properties, including microhardness and ion depth profile, were studied.

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집속이온빔을 이용한 구리 기판위에 성장한 MgO 박막의 스퍼터링 수율 (Sputtering yield of the MgO thin film grown on the Cu substrate by using the focused ion beam)

  • 현정우;오현주;추동철;최은하;김태환;조광섭;강승언
    • 한국진공학회지
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    • 제10권4호
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    • pp.396-402
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    • 2001
  • 전자빔 증착기를 이용하여 1000 $\AA$의 두께를 가진 MgO박막을 구리 기판위에 상온에서 증착하였다. 스퍼터링수율 측정시 MgO 층에 충전현상을 없애주기 위해서 1000 $\AA$ 두께의 Al을 증착하였다. 갈륨 액체금속을 집속이온빔 이온원으로 사용하였다. 두 개의 정전렌즈를 사용하여 이온빔을 집속하였고, MgO에 이온빔을 주사하기 위해 편향기를 사용하였다. 가속전압의 변화에 따라 시료대 전류와 이차입자 전류를 측정하였고, 이 전류값은 소스에 인가하는 가속전압에 따라 변화되었다 MgO 박막의 스퍼터링 수율은 분석된 시료대 전류, 이차입자 전류 및 순수빔 전류의 값을 사용하여 결정하였다. 집속이온빔 장치의 가속전압이 15 kV일 때 MgO 박막의 스퍼터링 수율은 0.30으로 나왔고 가속전압의 값이 증가할 때 스퍼터링 수율이 선형적으로 증가하였다. 이러한 결과를 볼 때 집속이온빔 장치를 이용하면 MgO 박막의 스퍼터링 수율을 측정할 패 매우 효과적임을 알 수 있다.

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Hybrid Capacitor의 전기화학적 특성 및 Hybrid Capacitor / Li-ion Battery의 펄스 방전 특성 (Electrochemical Characteristics of Hybrid Capacitor and Pulse Performance of Hybrid Capacitor / Li-ion Battery)

  • 이선영;김익준;문성인;김현수
    • 한국전기전자재료학회논문지
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    • 제18권12호
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    • pp.1133-1138
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    • 2005
  • In this study, we have prepared, as the pluse power source, a commercially supplied Li-ion battery with a capacity of 700 mAh and AC resistivity of 60 md at 1 kHz and nonaqeous asymmetric hybrid capacitor composed of an activated carbon cathode and MCMB anode, and have examined the electrochemical characteristics of hybrid capacitor and the pulse performances of parallel connected hybrid capacitor/Li-ion battery source. The nonaqueous asymmetric hybrid capacitors constituted with each stack number of pairs composed of the cathode, the porous separator and the anode electrode were housed in Al-laminated film cell. The 10 stacked hybrid capacitor, which was charged and discharged at a constant current at 0.25 $mA/cm^2$ between 3 and 4.3 V, has exhibited the capacitance of 108F and the lowest equivalent series resistance was 32 $m{\Omega}$ at 1 kHz. On the other hand, the enhanced run time of Li-ion battery assisted by the hybrid capacitor was obtained with increasing of current density and pulse width in Pulse mode. The best improvement, $84\;\%$ for hybrid capacitor/Li-ion battery was obtained in the condition of a 7C-rate pulse (100 msec)/0.5C-rate standby/$10\;\%$ duty cycle.

Xanthine oxidase 활성 및 형전환에 미치는 구리이온의 영향 (Effect of Copper ion on Xanthine Oxidase Activity and Type Conversion)

  • 허근;이상일;박진우
    • 약학회지
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    • 제38권2호
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    • pp.211-217
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    • 1994
  • Copper intoxication and disturbance of copper metabolism induced various oxygen-derived free radicals related damages. The effect of copper ion on xanthine oxidase activity and type conversion of the enzyme which is concerned to generation of reactive oxygen species, was investigated, It was observed that xanthine oxidase activity was increased by addition of copper ion in the reaction mixture in proportional to the concentration of the metal ion until $60\;{\mu}M$, while the enzyme activity was inhibited in higher concentration of copper treatment. On the other hand, xanthine dehydrogenase activity was inhibited by copper ion addition with concentration dependently. Preincubation of enzyme source with $30\;{\mu}M$ of copper ion, which concentration marked increased the xanthine oxidase activity, unchanged the enzyme activity and type conversion compare to control in vitro system. It was also observed that copper induced xanthine oxidase activity and the enzyme type conversion was protected by dithiothreitol and penicillamine. These results indicate that the increment of the type conversion of xanthine oxidase necessarilly need the presence of copper ion in enzyme assay system.

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FIB를 이용한 다이아몬드 기판 위의 나노급 미세 패턴의 형상 가공 (Nano-scale Patterning on Diamond substrates using an FIB)

  • 송오성;김종률
    • 한국산학기술학회논문지
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    • 제7권6호
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    • pp.1047-1055
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    • 2006
  • 필드이온빔(FIB) 가공기를 써서 초고강도의 벌크다이아몬드를 가공하기 위해 이온 소오스의 종류와 가공 조건에 따른 나노급 미세 선폭의 최적조건을 알아보고 이에 근거한 2차원적인 텍스트의 가공과 3차원적인 박막요소의 가공을 시도하였다. 다이아몬드 기판과 실리콘 기판을 Ga과 $H_2O$ 소오스를 이용하는 FIB를 써서 30 kV 빔 전류를 10 pA $\sim$ 5 nA로 변화시키면서 패터닝하고 이때 각각 20 ${\mu}m$ 길이로 생성되는 선형 패턴의 선폭, 깊이, 에치속도, 에치형상, 깊이선폭비 (aspect ratio)를 확인하였다. 다이아몬드도 실리콘 기판과 마찬가지로 나노급 패턴의 형성이 가능하였다. $H_2O$ 소오스를 채용한 경우가 에치 깊이가 2배 정도 증가하였으며 동일한 가공 조건에서는 실리콘에 비해 다이아몬드의 에치 선폭이 감소는 경향이 있었다. 특히 다이아몬드는 절연성 때문에 차지가 축적되어 가공 중 이온빔이 불안정해지는 문제가 있었으나 차지 중화 모드를 이용하여 성공적으로 sub-100 nm급 선폭의 미세 가공이 가능하였다. 확인된 선폭가공 조건에 근거하여 2차원적으로 0.3carat의 보석용 다이아몬드의 거들부에 300여개의 글자를 FIB를 활용하여 선폭 240 nm정도로 명확히 기록하는 것이 가능하였다. $Ga^+$이온과 30 eV-30 pA로 조건에서 비교적 넓은 선폭과 Z축 depth 고정범위에서 많은 개인정보의 기록이 영구적으로 가능하였으며 전자현미경으로 재생이 가능하였다. 3차원적으로 두께 $1{\mu}m$의 박막요소를 FIB가공과 백금 용접으로 떼어낸 후 FIB가공으로 두께가 100 nm가 되도록 한 후 투과전자현미경을 이용하여 성분 분석을 하는 것이 성공적으로 수행될 수 있었다.

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Roll-to-Roll Barrier Coatings on PET Film by Using a Closed Drift Magnetron Plasma Enhanced Chemical Vapor Deposition

  • Lee, Seunghun;Kim, Jong-Kuk;Kim, Do-Geun
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2012년도 춘계학술발표회 논문집
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    • pp.124-125
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    • 2012
  • Korea institute of materials science (KIMS) use a linear deposition source called as a closed drift linear plasma source (CDLPS) as well as dual magnetron sputtering (DMS) to deposit SiOxCyHz films in $HMDSO/O_2$ plasma. The CDLPS generates linear plasma using closed drifting electrons and can reduce device degradations due to energetic ion bombardments on organic devices such as organic photovoltaic and organic light emission diode by controlling an ion energy. The deposited films are investigated by Fourier transform infrared (FT-IR) spectroscopy, X-ray photoelectron spectroscopy (XPS), and atomic force microscopy (AFM). Optical emission spectroscopy (OES) is used to measure relative radical populations of dissociation and recombination products such as H, CH, and CO in plasma. And SiOx film is applied to a barrier film on organic photovoltaic devices.

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이중 주파수 전원의 용량성 결합 플라즈마 식각장비에서 전극하전에 의한 입사이온 에너지분포 변화연구 (Electrode Charging Effect on Ion Energy Distribution of Dual-Frequency Driven Capacitively Coupled Plasma Etcher)

  • 최명선;장윤창;이석환;김곤호
    • 반도체디스플레이기술학회지
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    • 제13권3호
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    • pp.39-43
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    • 2014
  • The effect of electrode charging on the ion energy distribution (IED) was investigated in the dual-frequency capacitively coupled plasma source which was powered of 100 MHz RF at the top electrode and 400 kHz bias on the bottom electrode. The charging property was analyzed with the distortion of the measured current and voltage waveforms. The capacitance and the resistance of electrode sheath can change the property of ion and electron charging on the electrode so it is sensitive to the plasma density which is controlled by the main power. The ion energy distribution was estimated by equivalent circuit model, being compared with the measured distribution obtained from the ion energy analyzer. Results show that the low frequency bias power changes effectively the low energy population of ion in the energy distribution.

Individual Charge Equalization Converter Using Selective Two Current Paths for Series Connected Li-ion Battery Strings

  • Kim, Chol-Ho;Park, Hong-Sun;Moon, Gun-Woo
    • 전력전자학회:학술대회논문집
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    • 전력전자학회 2008년도 하계학술대회 논문집
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    • pp.274-276
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    • 2008
  • This paper proposes an individual charge equalization converter using selective two current paths for series connected lithium-ion battery strings. In the proposed equalizer, a central equalization converter acting as a controllable current source is sequentially connected in parallel with individual batteries through an array of cell selection switches. A flyback converter with a modified rectifier realizes a controllable current source. A central equalization converter is shared by every battery cells through the cell selection switch, instead of a dedicated charge equalizer for each cell. With this configuration, although the proposed equalizer has one dc-dc converter, individual charge equalization can be effectively achieved for the each cell in the strings. Furthermore, since the proposed equalizer would not allocate the separated dc-dc converter to each cell, such that the implementation of great size reduction and low cost can be allowed. In this paper, an optimal power rating design guide is also employed to obtain a minimal balancing size while satisfying equalization requirements. A prototype for eight lithium-ion battery cells is optimally designed and implemented. Experimental results verify that the proposed equalization method has good cell balancing performance showing small size, and low cost.

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