• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.287-287
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• 2011

ITRS(international technology roadmap for semiconductors)에 따르면 MOS (metal-oxide-semiconductor)의 CD(critical dimension)가 45 nm node이하로 줄어들면서 poly-Si/SiO2를 대체할 수 있는 poly-Si/metal gate/high-k dielectric이 대두되고 있다. 일반적으로 metal gate를 식각시 정확한 CD를 형성시키기 위해서 plasma를 이용한 RIE(reactive ion etching)를 사용하고 있지만 PIDs(plasma induced damages)의 하나인 PICD(plasma induced charging damage)의 발생이 문제가 되고 있다. PICD의 원인으로 plasma의 non-uniform으로 locally imbalanced한 ion과 electron이 PICC(plasma induced charging current)를 gate oxide에 발생시켜 gate oxide의 interface에 trap을 형성시키므로 그 결과 소자 특성 저하가 보고되고 있다. 그러므로 본 연구에서는 이에 차세대 MOS의 metal gate의 식각공정에 HDP(high density plasma)의 ICP(inductively coupled plasma) source를 이용한 중성빔 시스템을 사용하여 PICD를 줄일 수 있는 새로운 식각 공정에 대한 연구를 하였다. 식각공정조건으로 gas는 HBr 12 sccm (80%)와 Cl2 3 sccm (20%)와 power는 300 w를 사용하였고 200 eV의 에너지로 식각공정시 TEM(transmission electron microscopy)으로 TiN의 anisotropic한 형상을 볼 수 있었고 100 eV 이하의 에너지로 식각공정시 하부층인 HfO2와 높은 etch selectivity로 etch stop을 시킬 수 있었다. 실제 공정을 MOS의 metal gate에 적용시켜 metal gate/high-k dielectric CMOSFETs의 NCSU(North Carolina State University) CVC model로 effective electric field electron mobility를 구한 결과 electorn mobility의 증가를 볼 수 있었고 또한 mos parameter인 transconductance (Gm)의 증가를 볼 수 있었다. 그 원인으로 CP(Charge pumping) 1MHz로 gate oxide의 inteface의 분석 결과 이러한 결과가 gate oxide의 interface trap양의 감소로 개선으로 기인함을 확인할 수 있었다.

• Clean Technology
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• v.9 no.2
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• pp.57-61
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• 2003

A novel nitric acid-free desmut solution has been developed to remove smut, which is produced from a NaOH etching, on the surface of aluminum alloy metal in metal surface treatment processes. Comparing with the performance of 5% $HNO_3$ desmut solution, the mixed acid solution containing 2% $H_2O_2$, 0.5% HF, and 10% $H_2SO_4$ shows the same effect of smut removal for aluminum alloy samples of A16061 and A15052. To examine the surface alterations of the aluminum samples, in addition, the surface analysis is carried out with scanning electron microscopy (SEM) and electron probe microanalysis (EPMA).

• Journal of Environmental Impact Assessment
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• v.9 no.4
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• pp.301-314
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• 2000

Marine surface sediments in the vicinity of Samcheonpo coal-fired power plant were analyzed by a total analysis($HF+HNO_3+HClO_4$) and sequential extraction procedure for heavy metals in order to investigate the total concentrations and geochemical phases of heavy metals. The result showed that the concentrations of Cr, Cu, Fe and Zn were within ranges typical for coastal areas, which reflected the mineralogical composition of the sediments in the studied area. However, the distributions of Cd, Co, Mn, Ni and Pb were rather different from the former, indicating that these heavy metals had a different origin, or that they were affected by a different geochemical mechanism. Chemical partitioning of heavy metals using sequential extraction procedure revealed that Cu, Fe, Pb, Zn were significantly bound to the residual phases of the sediments, whereas carbonate phases contained considerable amounts of Mn. The significant association of Pb with the exchangeable fraction also indicated that Pb was more mobile and bioavailable than Cu, Fe, Mn, Zn.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.480-480
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• 2013

태양에너지는 신재생 에너지 중에서 무한한 에너지원으로서 태양에너지에 대한 활발한 연구가 이루어지고 있다. 그 중에서도 결정형 실리콘 태양전지에 대해 다양한 연구가 진행 중이다. 이러한 실리콘 태양전의 제작은 실리콘 식각 용액을 이용하여 기판의 절삭 손상된 부분을 식각한 후 텍스쳐링(texturing) 공정을 통해 표면의 흡수율을 높이고, 반면에 반사율을 감소시킨다. 텍스쳐링 공정이 끝난 후 도핑 공정을 통해 에미터(emitter)를 형성, 반사방지막을 증착, 기판의 전면과 후면에 페이스트를 바르고 스크린인쇄법으로 전극을 형성한 후 마지막으로 형성된 전극을 소성 공정을 통해 전극이 에미터와 접촉하면 태양전지가 완성된다. 하지만 텍스쳐링 공정을 통해 만들어진 피라미드 구조는 도핑공정을 하게 되면, 꼭짓점 부분의 균일한 도핑이 이루어지지 않는다. 이러한 균일하지 않은 공정으로 인해 전극 소성 공정에서 일부의 에미터층을 뚫어버리게 되므로 누설전류가 증가하게 된다. 그래서 본 논문에서는, 변환 효율을 개선시키기 위해 표면 구조와 반사방지막의 열처리 공정에 대한 연구를 하였다. 우선 피라미드 구조를 균일하게 만들었으며, 반사방지막 형성 후 열처리를 하여 소수 캐리어 수명을 증가시켰으며, 누설전류를 감소하였다. 균일한 도핑 및 전극 형성을 용이하게 하는 부드러운 피라미드 구조를 형성하기 위해 HND (HF：HNO3 : D.I wafer=5 : 100 : 100) 용액을 사용하여 식각하였다. 그 결과 직렬저항은 NHD용액을 사용하여 300초 동안 식각하였을 때 $1.284{\Omega}$ 낮아지는 결과를 얻을 수 있었으며, 도핑을 균일화하여 누설전류를 감소시킬 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.19-20
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• 2006

Two methods that can reduce reflectance in solar cells are surface texturing and anti-reflection coating. Wet chemical etching is a typical method that surface texturing of multi-crystalline silicon. Wet chemical etching methods are the acid texturization of saw damage on the surface of multi-crystalline silicon or double-step chemical etching after KOH saw damage removal too. These methods of surface texturing are realized by chemical etching in acid solutions HF-$HNO_3$-$H_2O$. In this solutions we can reduce reflectance spectra by simple process etching of multi-crystalline silicon surface. We have obtained reflectance of 27.19% m 400~1100nm from acidic chemical etching after KOH saw damage removal. This result is about 7% less than just saw damage removal substrate. The surface morphology observed by microscope and scanning electron microscopy (SEM).

• Bulletin of the Korean Chemical Society
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• v.29 no.1
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• pp.94-98
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• 2008

A fundamental study was developed concerning the novel solvent extraction of the tetravalent metal ions; zirconium(IV), hafnium(IV) and thorium(IV). Their extraction behavior in toluene was investigated with a recently synthesized naphthol-derivative Schiff base, 1-({[4-(4-{[(E)-1-(2-hydroxy-1-naphthyl)methyliden]amino}phenoxy) phenyl]imino}methyl)-2-naphthol (HAPMN). The spectrophotometrical examination of the complex formation between HAPMN and the Zr(IV), Hf(IV) and Th(IV) ions in acetonitrile revealed the formation of stable 1:1 complexes in the solution. After the thorium extraction in toluene, it was found that [Th(OH)3HA] was the respective deriving substance. While, in the case of zirconium and hafnium extraction, the extracted adduct was found to be [M4(OH)8(H2O)16Cl62HA]. The stoichiometric coefficients of these extracted species were determined by the slope analysis method. The extraction reaction followed a cation exchange mechanism.

• Corrosion Science and Technology
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• v.2 no.1
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• pp.53-57
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• 2003

The MarM247 based superalloy (8wt.%Cr- 9wt.%Co- 3wt.%Ta- 1.5wt.%Hf- 5.6%wt.Al- 9.5wt.%W- Bal. Ni) specimens were diffusion aluminized by for types of pack cementation methods, and their coating structure and their high temperature oxidation resistance were investigated. The coated specimens treated at 973K in high aluminum concentration pack had a coating layer containing large hafunium rich precipitates, which were originally included in substrate alloy. After the high temperature oxidation test in air containing 30 vol.% $H_2O$ at 1273K ~ 323K, the deep localized corrosion which reached to the substrate were observed along with these hafnium rich precipitates. On the other hand, the coated specimens treated at 1323K using low aluminum concentration pack showed the coating layer without the large hafunium rich precipitates, and after the high temperature oxidation test at 1273K for 1800 ksec, it did not show the deep localized corrosion. The nickel electroplating before the aluminizing forms thick hafnium free area, and its high temperature oxidation resistance were comparable to platinum modified aluminizing coatings at 1273K.

• Journal of the Korean institute of surface engineering
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• v.50 no.5
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• pp.315-321
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• 2017

Antireflective pyramid arrays can be readily obtained via anisotropic etching in alkaline solution (KOH, NaOH), which is widely used in crystalline-Si (c-Si) solar cells. The periodic inverted pyramid arrays show even lower light reflectivity because of their superior light-trapping characteristics. Since this inverted pyramidal structures are mostly achieved using very complex techniques such as photolithograpy and laser processes requiring extra costs, here, we demonstrate the Cu-nanoparticle assisted chemical etching processes to make the inverted pyramidal arrays without the need of photolithography. We have mainly controlled the concentration of $Cu(NO_3)_2$, HF, $H_2O_2$ and temperature as well as time factors that affecting the reaction. Optimal inverted pyramid structure was obtained through reaction parameters control. The reflectance of inverted pyramid arrays showed < 10% over 400 to 1100 nm wavelength range while showing 15~20% in random pyramid arrays.

• Korean Journal of Materials Research
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• v.34 no.5
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• pp.247-253
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• 2024

The separation of zirconium and hafnium using tributyl phosphate (TBP)-Dodecane extractants in nitric acid medium was performed. Zirconium oxychloride, used as extraction feed, was obtained from the synthesis of Kalimantan zircon sand concentrate smelted using NaOH. The extraction process was carried out by dissolving chloride-based metals in nitric acid media in the presence of sodium nitrate using TBP-Dodecane as an extractant. Some of the extraction parameters carried out in this study include variations in organic phase and aqueous phase (O/A), variations in contact time, and variations in nitric acid concentration. Extraction was carried out using a mechanical shaker according to the parameter conditions. X-ray fluorescence (XRF) was used for elemental (Zr and Hf) composition analysis of the aqueous solution. The results showed that zirconium was separated from hafnium at optimum conditions with an organic/aqueous ratio of 1:5, contact time of 75 min, and an HNO₃ concentration of 7 M. The resulting separation factor of zirconium and hafnium using TBP-Dodecane was 14.4887.

• Economic and Environmental Geology
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• v.30 no.5
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• pp.417-431
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• 1997

Characteristics of sedimentary rocks and enrichment of toxic elements in shale and coal from the Chungnam coal field were investigated based upon geochemistry of major, trace and rare earth elements. Shale and coal of the area are interbedded along the Traissic to the Jurassic Daedong Supergroup, which can be subdivided into grey shale, black shale and coal. The coal had been mined, however all the mines are abandonded due to the economic problems. The shale and coal are characterized by relatively low contents of $SiO_2$, and $Al_2O_3$ and high levels of loss-on-ignition (LOI), CaO and $Na_2O$ in comparison with the North American Shale Composite (NASC). Light rare earth elements (La, Ce, Yb and Lu) are highly enriched with the coal. Ratios of $Al_2O_3/Na_2O$ and $K_2O/Na_2O$ in shale and coal range from 30.0 to 351.8 and from 4.2 to 106.8, which have partly negative correlations against $SiO_2/Al_2O_3$ (1.24 to 6.06), respectively. Those are suggested that controls of mineral compositions in shale and coal can be due to substitution and migration of those elements by diagenesis and metamorphism. Shale and coal of the area may be deposited in terrestrial basin deduced from high C/S (39 to 895) and variable composition of organic carbon (0.39 to 18.40 wt.%) and low contents of reduced sulfur (0.01 to 0.05 wt.%). These shale and coal were originated from the high grade metamorphic and/or igneous rocks, and the rare earth elements of those rocks are slightly influenced with diagenesis and metamorphism on the basis of $Al_2O_3$ versus La, La against Ce, Zr versus Yb, the ratios of La/Ce (0.38 to 0.85) and Th/U (3.6 to 14.6). Characteristics of trace and rare earth elements as Co/Th (0.07 to 0.86), La/Sc (0.31 to 11.05), Se/Th (0.28 to 1.06), V/Ni (1.14 to 3.97), Cr/V (1.4 to 28.3), Ni/Co (2.12 to 8.00) and Zr/Hf (22.6~45.1) in the shale and coal argue for inefficient mixing of the simple source lithologies during sedimentation. These rocks also show much variation in $La_N/Yb_N$ (1.36 to 21.68), Th/Yb (3.5 to 20.0) and La/Th (0.31 to 7.89), and their origin is explained by derivation from a mixture of mainly acidic igneous and metamorphic rocks. Average concentrations in the shale and coal are As=7.2 and 7.5, Ba=913 and 974, Cr=500 and 145, Cu=20 and 26, Ni=38 and 35, Pb=30 and 36, and Zn=77 and 92 ppm, respectively, which are similar to those in the NASC. Average enrichment indices for major elements in the shale (0.79) and coal (0.77) are lower than those in the NASC. In addition, average enrichment index for rare earth elements in coal (2.39) is enriched rather than the shale (1.55). On the basis of the NASC, concentrations of minor and/or environmental toxic elements in the shale and coal were depleted of all the elements examined, excepting Cr, Pb, Rb and Th. Average enrichment indices of trace and/or potentially toxic elements (As, Cr, Cu, Ni, Pb, U and Zn) are 1.23 to 1.24 for shale and 1.06 to 1.22 for coal, respectively.