• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.434-437
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• 1997

In this paper, we present an $H^{\infty}$ controller design of RTP system satisfying robust stability and performance using weighted mixed sensitivity minimization. In industrial fields, RTP system is widely used for improving the oxidation and the annealing in semiconductor manufacturing process. The main control factors are temperature control of wafer and uniformity in the wafer. The control of temperature and uniformity has been solved by PI control method. We improve robust stability and performance of RTP system by the design of $H^{\infty}$ controller using the weighted mixed sensivity function. An example is proposed to show the validity of proposed method.d.

• Nuclear Engineering and Technology
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• v.29 no.4
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• pp.280-290
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• 1997

The robust controller for the nuclear reactor power control system is designed. The nuclear reactor is modeled by use of the point kinetics equations and the singly lumped energy balance equations, Since the model is not exact, the controller which can make the actual system robust is necessary. The perturbed plant is investigated by employing the uncertainties of the initial power level and the physical properties, and by introducing the delay into the modeled plant The overall system is configured into the two port model and the H$\infty$ controller is designed. In designing the H$\infty$ controller, two factors of the loop shaping and the permissible magnitude of control input are taken into account The designed controller provides the sufficient margins for the robustness, and the transients of the system output power and the control input satisfy their associated requirement.

• Journal of the Korean Institute of Telematics and Electronics S
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• v.35S no.6
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• pp.55-65
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• 1998

In industrial fields, RTP(rapid thermal processing) system is widely used for improving the oxidation and the annealing in semiconductor manufacturing process. The main control factors are temperature control of wafer and uniformity in the wafer. In this paper, we propose an $H^{\infty}$ controller design of RTP system satisfying robust stability and performance using weighted mixed sensitivity miniimization and loop shaping technique. And we need reduction technique because of the difficulty of implementation with the obtained high order controller for original model and reduced models, namely, Hankel, square-root balanced, and Schur balanced methods. An example is proposed to show the validity of the proposed method.

• Journal of Institute of Control, Robotics and Systems
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• v.4 no.1
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• pp.134-140
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• 1998

포항제철 2열연공장의 사상압연에 사용되고 있는 DC 모터를 가지는 열간압연 구동기에 대한 견실 H/sup .inf./ 속도제어기 설계방법을 제안한다. 기존에는 PI 재어기법을 이용하여 속도를 제어하고 있으므로 불확실성과 외란등이 존재할 경우 양호한 제어 성능을 얻기 힘들다. 이를 해결하기 위해 주파수 하중 함수를 가지는 혼합감도최소화 문제를 설정하여 견실성을 보장하는 H/sup .inf./ 속도제어기를 설계한다. 이때 주파수 하중함수는 루프쉐이핑기법을 이용하여 주어진 구동기 플랜트에 적합하도록 선택한다. H/sup .inf./ 속도제어기 설계는 Pasek이 제시한 DC 모터의 모델링 방법에 의해 얻어진 모델을 포함하는 구동기 모델에서 속도제어기 부분을 제외한 모델을 대상으로 한다. 제안한 견실 속도제어기 설계방법은 파라미터 변화나 부하토크 변동 등의 외란에 대하여 폐루프 시스템의 견실안정성과 원하는 속도에 좋은 추적 성능을 보인다. 제어 대상인 포항제철 2열연공장의 열간압연 구동기에 대한 시뮬레이션을 통해 기준속도 추적성, 응답속도, 불확실성과 외란에 대한 견실성 등의 성능에 기존의 PI 속도제어기보다 양호함을 확인함으로써 제안한 견실 H/sup .inf./ 속도제어기 설계 방법의 타당성을 보인다.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1800-1803
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• 1997

This paper presents new feedback actuators to achieve an accurate position control of a flexible gnatry robot arm. the translational motion in the plane is generated by two d.c.motors and controlled by emplying elecor-rheological(ER) clutch acutators. The generated motion can be continuously controlled by controlling the intensity of lectric field imposed to the ER fluid domain which tunes the transmitted torque of the ER clutch. n the other hand, during control action of the translational motion a flexible arm attached to the moving mass produces undesirable oscillatins due to its inherent flexibility. The oscillations are actively suppressed by applying feedback voltages to piezoceramic acutators bonded on the surface of the flexible arm. The control electric fields to be applied to the ER clutch and the control voltage for the piezoceramic actuator are determined via the loop shaping esign procedures(LSDP) in the H.inf. control technique. Comsequently, an accuate positiion control at the end-point of the flexible am is achieved during planar motion.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.456-460
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• 1996

A nonlinear control scheme for preventing limit cycle due to the nonlinearity of themulti-step bang-bang actuator in mechanical position control systems is proposed. A linearized model, SIDF, fora multi-step bang-bang actuator is introduced to compensate the nonlinearity of the multi-step bang-bang actuator. Using that model, a $H_{\infty}$robust controller for position control systms with a bang-bang actuator is proposed by loop shaping tecniques with normalized coprime factorization stabilization to address the robustness. The proposed scheme needs a smaller deadband as a result of compensating the nonlinearity of the bang-bang actuator. A single-axis servo system is served in order to verify the proposed control scheme experimentally. Experimental results show that the controller can satisfy the special intersts, silent contact switching of the actuator.r.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.9 s.252
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• pp.1094-1101
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• 2006

Recently, a ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator and ultra-precision linear encoder, is designed and developed. The system transfer function of the ultra-precision stage system was derived from the step responses of the system using system identification tool. A $H_{\infty}$ controller was designed using loop shaping method to have robustness for the system uncertainty and external disturbances. For the designed controller, simulations were performed and it was applied to the ultra-precision stage system. From the experimental results it was found that this stage could be controlled with less than 5nm resolution irrespective of hysteresis and creep.