• Title/Summary/Keyword: $FeSi_x$

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유연성 소자 적용을 위한 $SiO_x$ 보호막의 특성 평가

  • Jeong, Yu-Jeong;Jeong, Jae-Hye;Yun, Jeong-Heum;Lee, Seong-Hun;Lee, Geon-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.452-452
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    • 2010
  • 차세대 디스플레이로서 주목 받고 있는 유연성 정보표시 소자 개발에 대한 요구도가 날로 증대되고 있다. 유연성 정보표시 소자로서 플라스틱 기반 유연성 소자가 특히 주목 받고 있으나, 이의 실용화를 위해서는 플라스틱 기판에 적용 가능한 보호막 형성 기술 개발이 선행되어야 한다. 플라스틱 필름의 경우 높은 산소 및 수분 투과율 때문에 유연성 디스플레이의 응용에 걸림돌이 되고 있다. 플라스틱 기반 유연성 소자의 장수명화를 위해서는 수분과 산소의 투과를 방지하는 passivation layer 형성 기술이 필수적으로 요구된다. 본 연구에서는, polyethylene terephethalate (PET) 기판상에 증착된 $SiO_x$ 보호막의 합성에 있어서 중간층 유무에 따른 투습특성의 변화를 살펴보았다. 기화된 HMDSO (Hexamethyldisiloxane)와 Ar 및 $O_2$ 혼합기체를 이용하여 PECVD 방법으로 $SiO_x$ 박막을 합성하였다. 15 nm 두께의 $Al_2O_3$를 중간층으로 사용하여 중간층 유무에 따른 초기성장 거동 변화가 $SiO_x$ 박막의 투습 특성에 미치는 영향을 조사하였다. $SiO_x$ 박막 구조와 화학적 조성은 각각 FE-SEM과 FT-IR을 이용하여 분석하였으며, AFM을 이용하여 $SiO_x$ 박막 표면 미세 형상을 관찰하였다. 투습률은 MOCON사(社)의 Permatran-W 3/33 MA을 이용하여 측정하였다. 그리고 반복 굽힘 시험기를 이용하여 $SiO_x$ 보호막의 동적 투습 특성을 조사하였다. $Al_2O_3$ 중간층 유무에 따라 $SiO_x$ 박막의 투습률 (WVTR; water vapor transmission rate)은 ${\sim}10^{-1}g/m^2/day$(300 nm-thick $SiO_x$/PET)에서 ${\sim}5{\times}10^{-3}g/m^2/day$(300 nm-thick $SiO_x$/15 nm-thick $Al_2O_3$/PET)으로 변화하였다. 300 nm-thick $SiO_x$/15 nm-thick $Al_2O_3$/PET 시편의 경우 곡지름 50 mm에서 1,000회 반복 굽힘 후에도 투습률 변화를 보이지 않았다. 이와 같은 $SiO_x$ 박막의 투습 특성 변화는 $Al_2O_3$ 중간층 유무에 따른 초기 성장 거동의 변화로 해석된다. FE-SEM 및 AFM 표면 미세 구조 관찰을 통한 초기 성장 거동 변화 조사 결과, $Al_2O_3$ 중간층 없이 PET 기판위에 $SiO_x$ 박막 증착한 경우 3 차원 성장을 하는 반면, PET기판위에 $Al_2O_3$ 중간층 형성 후 $SiO_x$ 박막 증착하는 경우 2 차원 성장을 하게 됨을 관찰하였다. 따라서 본 연구를 통하여, 플라스틱 기반 유연성 표시 소자에 적용하기 위한 $SiO_x$ 보호막 합성 에 있어서 초기 성장 거동의 변화가 투습 특성에 민감한 영향을 미침을 알 수 있었다.

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Magnetic Properties of Sn1-xFexO2 Thin Films and Powders Grown by Chemical Solution Method

  • Li, Yong-Hui;Shim, In-Bo;Kim, Chul-Sung
    • Journal of Magnetics
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    • v.14 no.4
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    • pp.161-164
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    • 2009
  • Iron-doped $Sn_{1-x}Fe_xO_2$ (x = 0.0, 0.05, 0.1, 0.2, 0.33) thin films on Si(100) substrates and powders were prepared by a chemical solution process. The x-ray diffraction (XRD) patterns of the $Sn_{1-x}Fe_xO_2$ thin films and powders showed a polycrystalline rutile tetragonal structure. Thermo gravimetric (TG) - differential thermal analysis (DTA) showed the final weight loss above $430{^{\circ}C}$ for all powder samples. According to XRD Rietveld refinement of the powders, the lattice parameters and unit cell volume decreased with increasing Fe content. The magnetic properties were characterized using a vibrating sample magnetometer (VSM) and M$\ddot{o}$ssbauer spectroscopy. The thin film samples with x = 0.1 and 0.2 showed paramagnetic properties but thin films with x = 0.33 exhibited ferromagnetic properties at room temperature. Mossbauer studies revealed the $Fe^{3+}$ valence state in the samples. The ferromagnetism in the samples can be interpreted in terms of the direct ferromagnetic coupling of ferric ions via an electron trapped in a bridging oxygen deficiency, which can be explained using the F-center exchange model.

Growth and Structural Properties of Fe Thin Films Electrodeposited on n-Si(111) (n-Si(111) 기판 위에 전기증착에 의한 Fe 박막의 성장과 구조적 특성)

  • Kim Hyun-Deok;Park Kyeong-Won;Lee Jong-Duk
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.10 no.9
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    • pp.1663-1670
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    • 2006
  • Single crystal Fe thin films were grown directly onto n-Si(111) substrates by pulsed electrodeposition. Cyclic Voltammogram(CV) indicated that the $Fe^{2+}/n-Si(111)$ interface shows a good diode behavior by forming a Schottky barrier. From Mott-Schottky (MS) relation, it is found that the flat-band potential of n-Si(111) substrate and equilibrium redox potential of $Fet^{2+}$ ions are -0.526V and -0.316V, respectively. The nucleation and growth kinetics at the initial reaction stages of Fe/n-Si(111) substraste was studied by current transients. Current transients measurements have indicated that the deposition process starts via instantaneous nucleation and 3D diffusion limited growth. After the more deposition, the deposition flux of Fe ions was saturated with increase of deposition time. from the as-deposited sample obtained using the potential pulse of 1.4V and 300Hz, it is found that Fe nuclei grows to three dimensional(3D) islands with the average size of about 100nm in early deposition stages. As the deposition time increases, the sizes of Fe nuclei increases progressively and by a coalescence of the nuclei, a continuous Fe films grow on the Si surface. In this case, the Fe films show a highly oriented columnar structure and x-ray diffraction patterns reveal that the phase ${\alpha}-Fe$ grows on the n-Si(111) substrates.

Fe-based Amorphous Alloy with High Strength and Toughness Synthesized based on nm-scale Phase Separation (nm-수준의 상분리를 이용하여 제조한 고강도 고인성 철계 비정질 합금)

  • Lee, Kwang-Bok;Park, Kyoung-Won;Yi, Sang-Ho;Lee, Jae-Chul
    • Korean Journal of Metals and Materials
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    • v.48 no.1
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    • pp.1-7
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    • 2010
  • Experiments have demonstrated that the addition of a moderate amount of V to $Fe_{52}Co_{(20-x)}B_{20}Si_4Nb_4V_x$ amorphous alloy enhances the plasticity of the alloy. In particular, $Fe_{52}Co_{17.5}B_{20}Si_4Nb_4V_{2.5}$ alloy withstood a maximum of 8.3% strain prior to fracture along with a strength exceeding 4.7 GPa. Energy dispersive x-ray spectroscopy conducted on the $Fe_{52}Co_{17.5}B_{20}Si_4Nb_4V_{2.5}$ alloy exhibited evidence of compositional modulation, indicating that nm-scale phase separation had occurred at local regions. In this study, the role played by nm-scale phase separation on the plasticity was investigated in terms of structural disordering and shear localization in order to better understand the structural origin of the enhanced plasticity shown by the developed alloy.

Improvement of Fe, Mn or Si Substitution on Hydrogen Storage Properties of Ti-Cr-V Alloys (Fe, Mn, Si 치환에 의한 Ti-Cr-V 합금의 수소저장 특성 향상)

  • Yoo, Jeong-Hyun;Cho, Sung-Wook;Park, Choong-Nyeon
    • Transactions of the Korean hydrogen and new energy society
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    • v.18 no.3
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    • pp.250-255
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    • 2007
  • Hydrogen storage properties of $Ti_{0.32}Cr_{0.43-X}V_{0.25}M_X$($0{\leq}X{\leq}0.1$, M=Fe, Mn, Si) have been investigated. With varing of Mn content, the lattice parameter of the alloy was unchanged and similar to that of $Ti_{0.32}Cr_{0.43}V_{0.25}$ alloy. With increase of Fe, Si content, the lattice parameters of the BCC phases decreased. When the Fe content was 8 at%, the desorption plateau pressure increased to several atmospheres without decrease of the effective hydrogen storage capacity of the alloy. When the Mn content was 8 at%, the effective hydrogen storage capacity showed approximately 2.5 wt% without change in the desorption plateau pressure. With increase of Si content, hysteresis increased and hydrogen storage capacity decreased rapidly. A study was also made on how desorption temperature affected the usable hydrogen of the $Ti_{0.32}Cr_{0.35}V_{0.25}Mn_{0.08}$ alloy. The temperature was varied from 293 to 413 K, and the pressure from 5 to 0.002 MPa. The usable hydrogen of the alloy was 2.7 wt% when absorbed and desorbed at 293 K and 373 K., respectively. The heat of hydride formation of the alloy was approximately -35.5 kJ/mol $H_2$.

Magnetic Properties of FeZrN/$SiO_2$ Soft Magnetic Multilayer Thin Films (FeZrN/$SiO_2$ 연자성 다층 박막의 자기적 성질)

  • Kim, Taek-Su;Kim, Jong-O
    • Korean Journal of Materials Research
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    • v.6 no.11
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    • pp.1061-1066
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    • 1996
  • RF magnetron reactive sputtering법으로 Fe75.5Zr8.3N16.2/SiO2(250$\AA$) 다층 박막을 FeZrN의 두께를 변화시키면서 제조하고, 제조된 박막을 진공 열처리하여 열처리 온도에 따른 포화자화, 보자력, 고주파에서의 투자율 그리고 열적 안정성을 조사하였다. Fe75.5Zr8.3N16.2/SiO2(250$\AA$) 다층박막은 FeZrN의 두께가 800$\AA$이상일 때 좋은 연자성을 나타내었다. Fe75.5Zr8.3N16.2/SiO2(250$\AA$)다층 박막을 45$0^{\circ}C$로 열처리 했을 때 포화자속밀도(1.08 T), 보자력 0.41 Oe, 1 MHz에서의 실효 투자율은 3000이상의 연자성을 나타내었다. 그 이유는 X-선 회절 분석 결과 열처리에 의해서 ZrN 미결정이 석출하여 $\alpha$-Fe 결정 성장이 억제되어 우수한 연자기적 성질이 나타난다고 판단된다. 이때 $\alpha$-Fe 입자 크기는 40-50$\AA$, ZrN의 입자 크기는 10-15$\AA$이다. 그리고 실효 투자율의 주파수 의존성에서 단층막에서는 5 MHz 이상에서 실효 투자율이 급격히 감소하는 경향을 보였으나, 다층막에서는 40MHz까지 실효 투자율이 1600이 되어 고주파에서의 연자성이 개선되었다.

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A Study on Iron Compounds of Scoria in The Northern Area of Jeju (제주 북부지역 스코리아의 철 화합물에 관한 연구)

  • Choi, Won-Jun;Ko, Jeong-Dae
    • Journal of the Korean Magnetics Society
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    • v.18 no.5
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    • pp.168-173
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    • 2008
  • Fe compounds of scoria distributed in northern area of Jeju island are investigated using X-ray fluorescence spectroscopy, X-ray diffractometry, and $^{57}Fe$ Mossbauer spectroscopy. The samples were prepared from four parasite volcanos. These samples consist of the typical basalt comprised of $SiO_2,\;Al_2O_3$, Fe compounds, and silicate minerals. The $M{\ddot{o}}ssbauer$ spectra showed doublets for olivine, pyroxene, and ilmenite as well as sextets for hematite and magnetite. The valence state of Fe is chiefly a 3+ charge state with a little 2+ charge state. It is expected that this results will add to the body of information related to the information mechanism of Jeju island. The geochemistry for these samples is the same results to mid-mountain's samples in Jeju Island.

Development of Continuous Galvanization-compatible Martensitic Steel

  • Gong, Y.F.;Song, T.J.;Kim, Han S.;Kwak, J.H.;De Cooman, B.C.
    • Corrosion Science and Technology
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    • v.11 no.1
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    • pp.1-8
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    • 2012
  • The development of martensitic grades which can be processed in continuous galvanizing lines requires the reduction of the oxides formed on the steel during the hot dip process. This reduction mechanism was investigated in detail by means of High Resolution Transmission Electron Microscopy (HR-TEM) of cross-sectional samples. Annealing of a martensitic steel in a 10% $H_2+N_2$ atmosphere with the dew point of $-35^{\circ}C$ resulted in the formation of a thin $_{C-X}MnO.SiO_{2}$ (x>1) oxide film and amorphous $_{a-X}MnO.SiO_{2}$ oxide particles on the surface. During the hot dip galvanizing in Zn-0.13%Al, the thin $_{C-X}MnO.SiO_{2}$ (x>1) oxide film was reduced by the Al. The $_{a-X}MnO.SiO_{2}$ (x<0.9) and $a-SiO_{2}$ oxides however remained embedded in the Zn coating close to the steel/coating interface. No $Fe_{2}Al_{5-X}Zn_{X}$ inhibition layer formation was observed. During hot dip galvanizing in Zn-0.20%Al, the $_{C-X}MnO.SiO_{2}$ (x>1) oxide film was also reduced and the amorphous $_{a-X}MnO.SiO_{2}$ and $a-SiO_{2}$ particles were embedded in the $Fe_{2}Al_{5-X}Zn_{X}$ inhibition layer formed at the steel/coating interface during hot dipping. The results clearly show that Al in the liquid Zn bath can reduce the crystalline $_{C-X}MnO.SiO_{2}$ (x>1) oxides but not the amorphous $_{a-X}MnO.SiO_{2}$ (x<0.9) and $a-SiO_{2}$ oxides. These oxides remain embedded in the Zn layer or in the inhibition layer, making it possible to apply a Zn or Zn-alloy coating on martensitic steel by hot dipping. The hot dipping process was also found to deteriorate the mechanical properties, independently of the Zn bath composition.

Microstuctures and Themal Stability of Rapidly Solidified Al-Fe-V-Si-(Mn) Alloys (급랭응고한 Al-Fe-V-Si계 합금의 미세조직과 열안정성에 관한 연구)

  • Kim, Seon-Hwa;Park, Won-Wook
    • Applied Microscopy
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    • v.21 no.2
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    • pp.57-66
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    • 1991
  • The main purpose of this paper was to investigate the change of rapidly solidified microstructures and dispersoid behavior according to heat-treatment in the Al-Fe-V-Si-(Mn) alloys. It was found that (111) preferred orientation identified by X-ray diffraction and fine subgrain/large grain were observed in the rapidly solidified Al-Fe-V-Si-(Mn) alloys. Cell boundary of the zone A was composed of the microcrystalline, whereas that of the zone B was amorphous. Decomposition of the Al-Fe-V-Si-(Mn) alloys occurred at about $300^{\circ}C$. These alloys exhibited excellent thermal stability at the elevated temperature. Microstructure of the zone B was more stable than that of the zone A. The spherical dispersoid and 5-fold symmetry phase was also more thermally stable than the amorphous structure of cell boundary.

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