• 제목/요약/키워드: $CuInS_2$ thin film

검색결과 245건 처리시간 0.026초

RF 마그네트론 스퍼터링을 이용한 p 타입 투명전도 산화물 SrCu2O2 박막의 제조 (Fabrication of P-type Transparent Oxide Semiconductor SrCu2O2 Thin Films by RF Magnetron Sputtering)

  • 석혜원;김세기;이현석;임태영;황종희;최덕균
    • 한국재료학회지
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    • 제20권12호
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    • pp.676-680
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    • 2010
  • Most TCOs such as ITO, AZO(Al-doped ZnO), FTO(F-doped $SnO_2$) etc., which have been widely used in LCD, touch panel, solar cell, and organic LEDs etc. as transparent electrode material reveal n-type conductivity. But in order to realize transparent circuit, transparent p-n junction, and introduction of transparent p-type materials are prerequisite. Additional prerequisite condition is optical transparency in visible spectral region. Oxide based materials usually have a wide optical bandgap more than ~3.0 eV. In this study, single-phase transparent semiconductor of $SrCu_2O_2$, which shows p-type conductivity, have been synthesized by 2-step solid state reaction at $950^{\circ}C$ under $N_2$ atmosphere, and single-phase $SrCu_2O_2$ thin films of p-type TCOs have been deposited by RF magnetron sputtering on alkali-free glass substrate from single-phase target at $500^{\circ}C$, 1% $H_2$/(Ar + $H_2$) atmosphere. 3% $H_2$/(Ar + $H_2$) resulted in formation of second phases. Hall measurements confirmed the p-type nature of the fabricated $SrCu_2O_2$ thin films. The electrical conductivity, mobility of carrier and carrier density $5.27{\times}10^{-2}S/cm$, $2.2cm^2$/Vs, $1.53{\times}10^{17}/cm^3$ a room temperature, respectively. Transmittance and optical band-gap of the $SrCu_2O_2$ thin films revealed 62% at 550 nm and 3.28 eV. The electrical and optical properties of the obtained $SrCu_2O_2$ thin films deposited by RF magnetron sputtering were compared with those deposited by PLD and e-beam.

Comparative Measurements and Characteristics of Cu Diffusion into Low-Dielectric Constant para-xylene based Plasma Polymer Thin Films

  • Kim, K.J.;Kim, K.S.;Jang, Y.C.;Lee, N.-E.;Choi, J.;Jung, D.
    • 한국표면공학회지
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    • 제34권5호
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    • pp.475-480
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    • 2001
  • Diffusion of Cu into the low-k para-xylene based plasma polymer (pXPP) thin films deposited by plasma-enhanced chemical vapor deposition using the para-xylene precursor was comparatively measured using various methods. Cu layer was deposited on the surfaces of pXPPs treated by $N_2$ plasma generated in a magnetically enhanced inductively coupled plasma reactor. Diffusion characteristics of Cu into pXPPs were measured using Rutherford backscattering spectroscopy (RBS), secondary ion mass spectroscopy (SIMS), cross-sectional transmission electron microscopy (XTEM), and current-voltage (I-V) measurements for the vacuum-annealed Cu/pXPPs for 1 hour at $450^{\circ}C$ and were compared. The results showed a correlation between the I-V measurement and SIMS data are correlated and have a sensitivity enough to evaluate the dielectric properties but the RBS or XTEM measurements are not sufficient to conclude the electrical properties of low-k dielectrics with Cu in the film bulk. The additional results indicate that the pXPP layers are quite resistant to Cu diffusion at the annealing temperature of $450^{\circ}C$ compared to the other previously reported organic low-k materials.

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$In_2Se_3$$Cu_2Se$를 이용한 $CuInSe_2$박막제조 및 특성분석 (Fabrication and Characterization of $CuInSe_2$Thin Films from $In_2Se_3$ and$Cu_2Se$Precursors)

  • 허경재;권세한;송진수;안병태
    • 한국재료학회지
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    • 제5권8호
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    • pp.988-996
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    • 1995
  • CdS/CuInSe$_2$태양전지의 광흡수층인 CuInSe$_2$박막을 In$_2$Se$_3$와 Cu$_2$Se 이원화합물을 precursor로 하여 진공증발법으로 제조하였고 특성을 분석하였다. 먼저 유리기판위에 0.5$\mu\textrm{m}$ 두께의 In$_2$Se$_3$를 susceptor온도를 변화시켜가면서 증착한 결과 40$0^{\circ}C$에서 가장 평탄하고 치밀한 박막이 형성되었다. 그 위에 Cu$_2$Se$_3$를 진공증발시켜 증착함으로써 in-situ로 CuInSe$_2$박막을 형성시키고 In$_2$Se$_3$를 추가로 증발시켜 CuInSe$_2$박막내에 존재하는 제 2상인 Cu$_2$Se를 제거시켰다. 이 경우 susceptor온도가 $700^{\circ}C$ 일때 미세구조가 가장 좋은 CuInSe$_2$박막이 형성되었으며 약 1.2$\mu\textrm{m}$ 두께에서 약 2$\mu\textrm{m}$의 결정립크기와 (112) 우선배향성을 가졌다. 추가 In$_2$Se$_3$양이 증가함에 따라 CuInSe$_2$박막의 조성편차보상으로 hole 농도가 감소하고 전기 비저항이 증가하였고, optical bandgap은 거의 일정한 값인 1.04eV의 값을 가졌다. Mo/유리기판 위에 증착한 CuInSe$_2$박막도 유리기판 위에 증착한 박막과 비슷한 미세구조를 가졌으며, 이 박막을 토대로 ZnO/CdS/CuInSe$_2$/Mo 구조를 갖는 태양전지 구현이 가능할 것으로 생각된다.

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Bandgap Engineering in CZTSSe Thin Films via Controlling S/(S+Se) Ratio

  • Vijay C. Karade;Jun Sung Jang;Kuldeep Singh, Gour;Yeonwoo Park;Hyeonwook, Park;Jin Hyeok Kim;Jae Ho Yun
    • Current Photovoltaic Research
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    • 제11권3호
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    • pp.67-74
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    • 2023
  • The earth-abundant element-based Cu2ZnSn(S,Se)4 (CZTSSe) thin film solar cells (TFSCs) have attracted greater attention in the photovoltaic (PV) community due to their rapid development in device power conversion efficiency (PCE) >13%. In the present work, we demonstrated the fine-tuning of the bandgap in the CZTSSe TFSCs by altering the sulfur (S) to the selenium (Se) chalcogenide ratio. To achieve this, the CZTSSe absorber layers are fabricated with different S/(S+Se) ratios from 0.02 to 0.08 of their weight percentage. Further compositional, morphological, and optoelectronic properties are studied using various characterization techniques. It is observed that the change in the S/(S+Se) ratios has minimal impact on the overall Cu/(Zn+Sn) composition ratio. In contrast, the S and Se content within the CZTSSe absorber layer gets altered with a change in the S/(S+Se) ratio. It also influences the overall absorber quality and gets worse at higher S/(S+Se). Furthermore, the device performance evaluated for similar CZTSSe TFSCs showed a linear increase and decrease in the open circuit voltage (Voc) and short circuit current density (Jsc) of the device with an increasing S/(S+Se) ratio. The external quantum efficiency (EQE) measured also exhibited a linear blue shift in absorption edge, increasing the bandgap from 1.056 eV to 1.228 eV, respectively.

박막 스트레인 게이지를 이용한 압력 센서 (Thin-Film Strain-Gage Pressure Sensors)

  • 민남기;진민석;전재형;서세열
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 하계학술대회 논문집 C
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    • pp.1476-1478
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    • 1996
  • This paper describes the recent development of a thin-film pressure transducer with Cu-Ni films as strain gages. The construction details and the output characteristics are presented. In order to improve the sensitivity and the temperature compensation, two circumferential gages are placed in the central region of the diaphragm, and two radial gages are placed near the edge. The output sensitivity obtained is 2.1mV/V and the maximum non-linearity and hysteresis is less than 2%FS.

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DIC 법을 이용한 구리박막의 인장시험 (Tensile Tests for Copper Thin Foils by Using DIC Method)

  • 김정엽;송지호;박경조
    • 대한기계학회논문집A
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    • 제36권12호
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    • pp.1529-1534
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    • 2012
  • 본 연구에서는 DIC 법을 이용하여 두께 $12{\mu}m$ 의 구리박막에 대한 인장시험을 수행하였다. 시험결과 정밀한 응력-변형률 곡선의 시험결과를 얻을 수 있었으며, 특히 잉크젯프린터를 이용한 시험편 표면 스펙클패턴의 작성은 DIC 법을 적용하기가 어려운 시험편 표면의 콘트라스트가 낮은 경우에 유용하게 사용할 수 있을 것이다. 측정된 구리박막의 기계적 물성은 탄성계수 E = 89.2 GPa, 0.2% 오프셋 항복응력 $S_{0.2%}$= 232.8 MPa, 인장강도 $S_u$= 319.2 MPa, 파단연신률 ${\varepsilon}_f$= 16.8 %, Poisson 비 ${\nu}$= 0.34 의 결과를 얻었으며, 탄성계수는 알려진 벌크소재에 대한 결과보다는 작다.

산화물 전구체를 이용한 YBCO 박막제조에서 열처리조건의 최적화 (Optimization of annealing conditions in oxide-precursor-based MOD process for YBCO thin films)

  • 허순영;김영국;유재무;고재웅;홍계원;이희균;유상임
    • Progress in Superconductivity
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    • 제6권2호
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    • pp.118-123
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    • 2005
  • A low cost YBCO oxide powder was employed as a starting precursor for MOD process. YBCO oxide is advantageous over metal acetates or TFA salts which are popular starting precursors for conventional MOD-TFA process because that YBCO oxide precursor is cheap and easy to control molar ratio. YBCO thin films were prepared by this oxide-precursor-based MOD process and annealing condition was optimized. The YBCO thin film annealed at below $780^{\circ}C$ shows no transport $I_c$ and poor microstructure. Raman spectroscopic study of YBCO thin film indicates that YBCO thin film prepared at below $780^{\circ}C$ contains a number of imperfections such as non-superconducting $BaCuO_2$ phase, cation disorder, etc. However, the YBCO thin film treated at above $800^{\circ}C$ shows improvement in microstructure and current transport properties. This research was supported by a grant from Center for Applied Superconductivity Technology of the 21st Century Frontier R&D Program funded by the Ministry of Science and Technology, Republic of Korea.

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전자가 도핑된 $Sr_{0.9}$$La_{0.1}$Cu$O_2$초전도체의 홀 효과

  • Kim, Hyun-Jung;W. N. Kang;Kim, Kijoon H. P.;Lee, Sung-Ik;S. Karimoto
    • Progress in Superconductivity
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    • 제4권1호
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    • pp.32-36
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    • 2002
  • We have measured the Hall effect in infinite-layer Sr/sub 0.9/La/sub 0.1/$CuO_2$ thin films grown by molecular beam epitaxy. We do not observe $T^{2}$ dependence of the cotangent of Hall angle, which is commonly observed in other cuprate High-Tc superconductors. Therefore, this result cannot be interpreted within two different scattering mechanism based on charge-spin separation theory. The mixed-state Hall effect shows no sign anomaly, implying that tile hydrodynamic contribution of vortex core is negligibly small.

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고압 스터터링 방법으로 $YBa_2Cu_3O_{7-y}$박막을 제조할 때 기판의 접지 여부와 인가전류의 양이 박막 성장에 미치는 영향 (Effects of Substrate-Grounding and the Sputtering Current on $YBa_2Cu_3O_{7-y}$ Thin-Film Growth by Sputtering in High Gas Pressures)

  • 한재원;조광행;최무용
    • 한국진공학회지
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    • 제4권1호
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    • pp.40-45
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    • 1995
  • 직경 2인치의 YBa2Cu3O7-y 타겟을 사용하여 높은 스퍼터링 기체 압력 하에서 off-axis DC-마그네트론 스퍼터링 방법으로 MgO(100) 단결정 기판 위에 YBa2Cu3O7-y 박막을 c축 방향으로 in-냐셔 성장시킬 때 기판의 접지 여부와 인가전류의 양이 박막 성장에 미치는 여향을 연구하였다. 그 결과 접지 여부는 박막의 초전도 변환온도, 전기수송 특성, 결정 구조적 특성에는 영향을 거의 주지 않는 반면 표면상태에는 상당한 영향을 미치며, 인가전류의 양은 초전도 특성에 많은 영향을 미침을 발견하였다. 기판온도 $670^{\circ}C$, 스퍼터링 기체압력 300mTorr, 아르곤 대 산소 분압비 5:1의 조건에서 인가전류의 최적량은 300-500 mA이었으며 평균 박막 성장속도는 $0.11-0.14AA$/s로 매우 낮았다. 기판의 접지 효과와 낮은 성장속도의 원인에 대해 고찰해 본다.

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Ga/(In+Ga) 함량비에 따른 $Cu(In,Ga)Se_2$ 박막의 국소적 영역에서의 표면 퍼텐셜과 전류-전압 특성 연구 (Local surface potential and current-voltage behaviors of $Cu(In,Ga)Se_2$ thin-films with different Ga/(In+Ga) content)

  • 김지영;정아름;조윌렴;조현준;김대환;성시준;황대규;강진규;이동하
    • 한국태양에너지학회:학술대회논문집
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    • 한국태양에너지학회 2012년도 춘계학술발표대회 논문집
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    • pp.149-152
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    • 2012
  • $Cu(In,Ga)Se_2$ (CIGS) is one of the most promising photovoltaic materials because of large conversion efficiency which has been achieved with an optimum Ga/(In+Ga) composition in $CuIn_{1-x}Ga_xSe_2$ (X~0.3). The Ga/(In+Ga) content is important to determine band gap, solar cell performances and carrier behaviors at grain boundary (GB). Effects of Ga/(In+Ga) content on physical properties of the CIGS layers have been extensively studied. In previous research, it is reported that GB is not recombination center of CIGS thin-film solar cells. However, GB recombination and electron-hole pair behavior studies are still lacking, especially influence of with different X on CIGS thin-films. We obtained the GB surface potential, local current and I-V characteristic of different X (00.7 while X~0.3 showed higher potential than 100 mV on GBs. Higher potential on GBs appears positive band bending. It can decrease recombination loss because of carrier separation. Therefore, we suggest recombination and electron-hole behaviors at GBs depending on composition of X.

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