• Korean Journal of Materials Research
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• v.10 no.12
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• pp.812-818
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• 2000

We studied the effects of Ge preamorphization (PAM) on 0.25$\mu\textrm{m}$ Ti-salicide junctions using comparative study with As PAM. For each PAM schemes, ion implantations are performed at a dose of 2E14 ion/$\textrm{cm}^2$ and at 20keV energy using $^{75}$ /As+and GeF4 ion sources. Ge PAM showed better sheet resistance and within- wafer uniformity than those of As PAM at 0.257m line width of n +/p-well junctions. This attributes to enhanced C54-silicidation reaction and strong (040) preferred orientation of the C54-silicide due to minimized As presence at n+ junctions. At p+ junctions, comparable performance was obtained in Rs reduction at fine lines from both As and Ge PAM schemes. Junction leakage current (JLC) revels are below ~1E-14 A/$\mu\textrm{m}^{2}$ at area patterns for all process conditions, whereas no degradation in JLC is shown under Ge PAM condition even at edge- intensive patterns. Smooth $TiSi_2$ interface is observed by cross- section TEM (X- TEM), which supports minimized silicide agglomeration due to Ge PAM and low level of JLC. Both junction break- down voltage (JBV) and contact resistances are satisfactory at all process conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.433-433
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• 2012

As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

• Korean Journal of Veterinary Service
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• v.45 no.1
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• pp.31-38
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• 2022

Swine influenza (SI) is an important respiratory disease in pigs and epidemic worldwide, which is caused by influenza A virus (IAV) belonging to the family of Orthomyxoviridae. As seen again in the 2009 swine-origin influenza A H1N1 pandemic, pigs are known to be susceptible to swine, avian, and human IAVs, and can serve as a 'mixing vessel' for the generation of novel IAV variants. To this end, the emergence of swine influenza viruses must be kept under close surveillance. Herein, we report the isolation and phylogenetic study of a swine IAV, A/swine/Korea/21810/2021 (sw21810, H3N2 subtype). BLASTN sequence analysis of 8 gene segments of the isolated virus revealed a high degree of nucleotide similarity (94.76 to 100%) to porcine strains circulating in Korea and the United States. Out of 8 genome segments, the HA gene was closely related to that of isolates from cluster I. Additionally, the NA gene of the isolate belonged to a Korean Swine H1N1 origin, and the PB2, PB1, NP and NS genes of the isolate were grouped into that of the Triple reassortant swine H3N2 origin virus. The PA and M genes of the isolate belonged to 2009 Pandemic H1N1 lineage. Human infection with mutants was most common through contact with infected pigs. Our results suggest the need for periodic close monitoring of this novel swine H3N2 influenza virus from a public health perspective.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.4
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• pp.143-148
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• 2018

Sodium silicate based silica aerogels are lower in cost than silica alkoxide based silica aerogels, but the demand is decreasing as their physical properties are lowered. In this research, acetonitrile as a drying control chemical additive (DCCA) is added in the sol state to improve the pore-structural properties of sodium silicate based silica aerogel by preventing the agglomeration of particles and cross-linked bond. The sodium silicate based silica aerogel by ambient pressure drying were prepared by sol-gel process. Acetonitrile/$Na_2SiO_3$ molar ratio of 0, 0.05, 0.1, 0.15, and 0.2 was added to the sol state. The physical properties of the final product were analyzed using Fourier transform infrared, contact angle measurement, Brunauer-Emmett-Teller and Barrett-Joyner-Halenda measurements and field emission scanning electron microscopy. It was confirmed that the sample with adding 0.15 molar ratio of acetonitrile and sodium silicate showed a high specific surface area ($577m^2/g$), a high pore volume (3.29 cc/g), and a high porosity (93%) comparable to the pore-structural properties of silica alkoxide based silica aerogels.

• Economic and Environmental Geology
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• v.28 no.6
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• pp.635-646
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• 1995

Mineralized zone in the Dongyang talc deposits occurs on the lowest dolomite member of the Hyangsanri Dolomite belonging to the Ogcheon Supergroup. Ore bodies are emplaced as pipe-like body along the axis of minor folds plunging $40^{\circ}$ to the west developed in these dolomite layers. Amphibolite and chlorite schist are found along the upper or lower contact of all ore bodies (Kim et al., 1963; Park and Kim, 1966). Following the recrystallization and silicification of dolomite, tremolite and tabular and leafy talc(I) of the earlier stage formed, and microcrystalline talc(II) formed in the later stage. Talc(l) and tremolite formed by the reaction between dolomite and the fluid. Whereas talc (II) formed by the reaction between dolomite and fluid, or by the reaction between early formed tremolite and fluid. During the early stage of mineralization, the fluid was the $H_2O-CO_2$ system dominant in $CO_2$, In the later stage, the composition of the fluid changed to $H_2O-NaCl-CO_2$system, and finally to the $H_2O-NaCl$ system. The pressure and temperature conditions of the formation of tremolite associated with talc(I) were 1,640~2,530 bar, and $440{\sim}480^{\circ}C$, respectively. The pressure and temperature condition of talc(II) ore formation was 1,400~2,200 bar, and $360{\sim}390^{\circ}C$, respectively. These conditions are much lower than the metamorphic pressure and temperature of the rocks from the Munjuri Formation located about 5 km to the noJ:th of Dongyang talc deposit ${\delta}^{13}C$ and ${\delta}^{18}O$ values of dolomite which is the host rock of the talc ore deposit are 2.9~5.7‰ (PDB), and -7.4~l6.8‰ (PDB), respectively. These values are little higher than those from the Cambro-Ordovician limestones of the Taebaeksan region, but belong to the range of the unaltered sedimentary dolomite. ${\delta}^{18}O$and ${\delta}D$ values of the talc from Dongyang deposit are 8.6~15.8‰ (vs SMOW), and -65~-90‰ (vs SMOW), respectively, belonging to the range of magmatic origin. These values are quite different from those measured in the metamorphic rocks of Munjuri and Kyemyungsan Formation. ${\delta}^{34}S$ value of anhydrite is 22.4‰ (CDT), which is much lower than ${\delta}^{34}S$ (30‰ vs COT) of sulfate of early Paleozoic period, and indicates the possibility of the addition of magmatic sulfur to the system. Talc ores show the textures of weak foliation and well developed crenulation cleavages. Talc ore deposit in the area is concluded as hydrothermal replacement deposit formed before the latest phase of the deformations that Ogcheon Belt has undergone.

• Economic and Environmental Geology
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• v.28 no.3
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• pp.185-197
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• 1995

Tungsten skarns in the Chungju mine which consists mainly of strata-bound type iron ore deposits are found in the vicinity of the contact between the age-unknown Kyemeongsan Formation and granitic rock intrusions of Mesozoic age($134{\pm}2Ma$). Tungsten skarns were formed extensively from alumina and silica-rich schistose rocks by the introduction of calcium and iron from hydrothermal solution. The skarns comprise a metasomatic column and are subdivided into four facies; garnet facies, wollastonite facies, epidote facies and chlorite facies. The skarn process in time-evolutional trend can be divided broadly into the four facies in terms of the paragenetic sequence of calc-silicates and their chemical composition. Skarn and ore minerals were formed in the following sequence; (1) garnet facies, adjacent to biotite granite, containing mainly garnet(>Ad96) and magnetite, (2) wollastonite facies containing mainly wollastonite and garnet(Ad95~60), (3) epidote facies, containing mainly epidote(Ps35~31), quartz, andradite-grossular(Ad63~50), and scheelite, (4) chlorite facies, adjacent to and replacing schist, containing mainly chrolite, muscovite, quartz, calcite, epidote(Ps31~25), hematite and sulfides. The mineral assemblage and mineral compositions. suggest that the chemical potentials of Ca and Fe increased toward the granitic rock, and the component Al, Mg, K, and Si decreased from the host rock to granitic rock. The homogenization temperature and salinity of fluid inclusion in scheelite, quartz and epidote of epidote facies skarn is $300-400^{\circ}C$ and 3-8wt.% eqiv. NaCl, respectively. ${\delta}^{34}S$ values of pyrite and galena associated with chlorite facies skarn is $9.13{\sim}9.51%_{\circ}$ and $5.85{\sim}5.96%_{\circ}$, respectively. The temperature obtained from isotopic com· position of coexisting pyrite-galena is $283{\pm}20^{\circ}C$. Mineral assemblages and fluid inclusion data indicate that skarn formed at low $X_{CO_2}$, approximately 0.01. Temperature of the skarn mineralization are estimated to be in the range of $400^{\circ}C$ to $260^{\circ}C$ and pressure to be 0.5 kbar. The oxygen fugacity($fo_2$) of the skarn mineralization decreased with time. The early skarn facies would have formed at log $fo_2$ values of about -25 to -27, and late skarn facies would have formed at log $fo_2$ values of -28 to -30. The estimated physicochemical condition during skarn formation suggests that the principal causes of scheelite mineralization are reduction of the ore·forming fluid and a decrease in temperature.

• Journal of the Korean Vacuum Society
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• v.20 no.6
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• pp.436-441
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• 2011

Metal coating with several nanometer thickness was applied on the carbon nanotubes (CNTs) in order to improve electron emission characteristics and emission reliability for the potential applications in the area of various electron sources and displays. CNTs were grown on the 2-nm thick Invar (52% Fe, 42% Ni, 6% Co alloy)-catalized Si substrate by using plasma-enhanced chemical vapor deposition at $450^{\circ}C$. In order to reduce the spatial density of densely packed CNTs, as-grown CNTs were partly etched back by $N_2$ plasma and subsequently coated with 5~150 nm thick Ti by a sputtering method. 5 nm thick Ti-coated CNTs produced four times higher emission current density at the electric field of 6 V/${\mu}m$ and much lower emission current fluctuation, compared with the as-grown CNTs. These improved emission properties are mainly due to not only the work function of Ti (4.3 eV) lower than that of pristine CNTs (5 eV), but also lower contact resistance and better adhesion between CNT emitters and substrate accomplished by Ti coating.

• The Korean Journal of Quaternary Research
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• v.18 no.1 s.22
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• pp.21-30
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• 2004

The Ilgwang Fault is NNE-striking, elongated 40 Km between Ulsan and Haeundae-ku, Busan in southeastern part of the Korean Peninsula. This paper si mainly concerned about the ages of the fault activities especially in the Quaternary, inferred from classification of geomorphic surfaces and trench excavation for the construction of Singori nuclear power plant. The geomorphic surfaces are classified into Beach and the Alluvial plain, the 10 m a.s.l. Marine terrace(MIS 5a), the 20 m a.s.l. Marine terrace(MIS 5e), the Reworked surface of 45 m a.s.l. Marine terrace(MIS 7 or 9) and the Low relief erosional surface. The Low relief erosional surface is distributed coastal side, the Reworked surface of 45m a.s.l. Marine terrace inland side by the Ilgwang Fault Line as the boundary line. But the former is above 10 m higher in relative height than the latter. The 20 m a.s.l. Marine terrace on the elongation line of the Ilgwang Fault reveals no dislocation. A site was trenched on the straight contact line with $N30^{\circ}E$-striking between the 10 m a.s.l. Marine terrace and the 20 m a.s.l. Marine terrace. Fault line or dislocation was not observable in the trench excavation. Accordingly, the straight contact line is inferred as the ancient shore line of the 10 m a.s.l. Marine terrace. The Ages of the Fault activities are inferred after the formation of the Ichonri formation - before the formation of the 45 m a.s.l. Marine terrace(220 Ka. y. B.P. or 320. Ka. y. B.P.). The Low relief erosional surface was an island above the sea-level during the formation of the 45 m a.s.l. marine terrace in the paleogeography.

• Tuberculosis and Respiratory Diseases
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• v.53 no.4
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• pp.389-400
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• 2002

Background : The rapid diagnostic tests for tuberculosis are needed to facilitate early treatment of tuberculosis and prevention of Mycobacterium tuberculosis transmission. The Xeniss Rapid TB kit is a rapid, card-based immunochromatographic test for the detection of antibodies directed against M. tuberculosis antigens including antigen 5(38-kDa antigen). The objective of this study was to evaluate the performance of the Xeniss Rapid TB kit for the diagnosis of active tuberculosis with serums from patients, asymptomatic healthy and close contact controls. Methods : 188 patients with active tuberculosis were tested; 177 with pulmonary tuberculosis(18 with combined pleurisy), and 11 with extrapulmonary tuberculosis. The control groups were composed of 82 close contacts and 57 healthy adults. Study subject were drawn from one national tuberculosis hospital for patients and close contacts, and another private hospital for healthy adults in Masan city, Korea. The Xeniss Rapid TB kit(Xeniss Life Science Co., Ltd., Seoul, Korea) was evaluated by using serum samples according to the instructions of the manufacturer by an investigator masked to the clinical and microbiological status of the study subjects. Results : The diagnostic sensitivity of the Xeniss Rapid TB kit was 73.9% in patients and specificities were 73.2% and 93.0% in close contact and healthy adults respectively. The positive predictive value in patients was 84.2% and the negative predictive value in controls was 85.8%. Conclusion : This study shows that the Xeniss Rapid TB test is a simple and fast method to diagnose active TB. The results of the sensitivity and specificites suggest that serodiagnosis using this point of care testing(POCT) device would be valuable and advantageous for screening tuberculosis in the clinical field.