• Title/Summary/Keyword: $C_3F_6$ gas

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Preparation of $SrTiO_3$ Thin Film by RF Magnetron Sputtering and Its Dielectric Properties (RF 마그네트론 스퍼터링법에 의한 $SrTiO_3$박막제조와 유전특성)

  • Kim, Byeong-Gu;Son, Bong-Gyun;Choe, Seung-Cheol
    • Korean Journal of Materials Research
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    • v.5 no.6
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    • pp.754-762
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    • 1995
  • Strontium titanate(SrTiO$_3$) thin film was prepared on Si substrates by RF magnetron sputtering for a high capacitance density required for the next generation of LSTs. The optimum deposition conditions for SrTiO$_3$thin film were investigated by controlling the deposition parameters. The crystallinity of films and the interface reactions between SrTO$_3$film and Si substrate were characterized by XRD and AES respectively. High quality films were obtained by using the mixed gas of Ar and $O_2$for sputtering. The films were deposited at various bias voltages to obtain the optimum conditions for a high quality file. The best crystallinity was obtained at film thickness of 300nm with the sputtering gas of Ar+20% $O_2$and the bias voltage of 100V. The barrier layer of Pt(100nm)/Ti(50nm) was very effective in avoiding the formation of SiO$_2$layer at the interface between SrTiO$_3$film and Si substrate. The capacitor with Au/SrTiO$_3$/Pt/Ti/SiO$_2$/Si structure was prepared to measure the electric and the dielectric properties. The highest capacitance and the lowest leakage current density were obtained by annealing at $600^{\circ}C$ for 2hrs. The typical specific capacitance was 6.4fF/$\textrm{cm}^2$, the relative dielectric constant was 217, and the leakage current density was about 2.0$\times$10$^{-8}$ A/$\textrm{cm}^2$ at the SrTiO$_3$film with the thickness of 300nm.

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Operation Characteristics of the SBR Process with Electro-Flotation (EF) as Solids-liquid Separation Method (전해부상을 고액분리 방법으로 적용한 SBR 공정의 운전 특성)

  • Park, Minjeong;Choi, Younggyun
    • Journal of Korean Society on Water Environment
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    • v.24 no.3
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    • pp.340-344
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    • 2008
  • Electro-flotation (EF) was applied to a sequencing batch reactor process (SBR) in order to enhance solids-liquid separation. Solids-liquid separation was good enough in the SBR coupled with EF (EF-SBR) and it was possible to maintain the concentration of mixed liquor suspended solids (MLSS) high in the EF-SBR. Under moderate organic loading condition (COD loading rate: 6 g/day), control SBR (C-SBR) showed similar treatment efficiencies with the EF-SBR. Under high organic loading condition (COD loading rate: 9.6 g/day), the solids-liquid separation in the C-SBR was deteriorated due to proliferation of filamentous bulking organisms at high F/M ratio. However, the EF-SBR was operated stably and with the high MLSS concentration (above 4,000 mg/L) regardless of the organic loading conditions during overall operating period leading to the satisfactory effluent quality. Gas production rate of the electrodes was gradually decreased because of anodic corrosion and scale build-up at the surface of cathode. However it could be partially overcome by use of corrosion-proof electrode material (SUS-316 L) and by periodic current switching between the electrodes.

A study on the electrical properties by the effect of wafer cleaning of OXYNITRIDE films deposited by Laser CVD (레이저 CVD법에 의해 퇴적된 OXYNITRIDE막의 기판세정법에 따른 특성에 관한 연구)

  • Kim, C.D.;Lee, S.K.;Kim, T.H.;Sung, Y.K.
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1280-1282
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    • 1997
  • The oxynitride films were photo-chemically deposited by ArF(wave length: 193nm) excimer laser CVD used to excite and dissociate gas phases $Si_2H_6$, $N_2O$, and $NH_3$ molecules. We obtained various electrical properties when we varied wafer cleaning procedures consisted of a conventional RCA and a two-dip step[4]. The results show the films have low leakage currents and good TZDB properties. We also analyzed the composition of the oxynitride films which have homogeneous composition throughout the film.

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Fabrication and Characterization of LIPON Electrolyte Thin Film for All Solid State Thin Film Battery (박막전지용 LIPON 전해질 박막의 제조 및 특성 평가)

  • 손봉희;전은정;남상철;조원일;윤영수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.228-231
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    • 1999
  • The preparation and electrical properties of LIPON electrolyte were investigated in order to fabricate all solid state thin film battery. The LIPON thin film was deposited by r.f. sputtering of Li$_3$PO$_4$ target in O$_2$-N$_2$ mixtures. The LIPON deposited at N$_2$+10% O$_2$ ratio had a conductivity at 25 $^{\circ}C$ of 1.8${\times}$10$\^$-6/S/cm. The ion conductivity of the LIPON films decreased as the O$_2$ content of the process gas increased.

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Lower the Detection Limits of Accelerator Mass Spectrometry

  • John A., Eliades;Song, Jong-Han;Kim, Jun-Gon;Kim, Jae-Yeol;O, Jong-Ju;Kim, Jong-Chan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.243-244
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    • 2013
  • Over the past 15 years, several groups have incorporated radio-frequency quadrupole (RFQ) based instruments before the accelerator in accelerator mass spectrometry (AMS) systems for ion-gas interactions at low kinetic energy (<40 eV). Most AMS systems arebased on a tandem accelerator, which requires negative ions at injection. Typically, AMS sensitivity abundance ratios for radioactive-to-stable isotope are limited to Xr/Xs >10^-15, and the range of isotopes that can be analyzed is limited because of theneed to produce rather large negative ion beams and the presence of atomic isobaric interferences after stripping. The potential of using low-kinetic energy ion-gas interactions for isobar suppression before the accelerator has been demonstrated for several negative ion isobar systems with a prototype RFQ system incorporated into the AMS system at IsoTrace Laboratory, Canada (Ontario, Toronto). Requisite for any such RFQ system applied to very rare isotope analysis is large transmission of the analyte ion. This requires proper phase-space matching between the RFQ acceptance and the ion beam phase space (e.g. 35 keV, ${\varphi}3mm$, +-35 mrad), and the ability to control the average ion energy during interactions with the gas. A segmented RFQ instrument is currently being designed at Korea Institute for Science and Technology (한국과학기술연구원, KIST). It will consist of: a) an initial static voltage electrode deceleration region, to lower the ion energy from 35 keV down to <40 eV at injection into the first RFQ segment; b) the segmented quadrupole ion-gas interaction region; c) a static voltage electrode re-acceleration region for ion injection into a tandem accelerator. Design considerations and modeling will be discussed. This system should greatly lower the detection limits of the 6 MV AMS system currently being commissioned at KIST. As an example, current detection sensitivity of 41Ca/Ca is limited to the order of 10^-15 while the 41Ca/Ca abundance in modern samples is typically 41Ca/Ca~10^-14 - 10^-15. The major atomic isobaric interference in AMS is 41K. Proof-of-principal work at IsoTrace Lab. has demonstrated that a properly designed system can achieve a relative suppression of KF3-/41CaF3- >4 orders of magnitude while maintaining very high transmission of the 41CaF3- ion. This would lower the 41Ca detection limits of the KIST AMS system to at least 41Ca/Ca~10^-19. As Ca is found in bones and shells, this would potentially allow direct dating of valuable anthropological archives and archives relevant to our understanding of the most pronounced climate change events over the past million years that cannot be directly dated with the presently accessible isotopes.

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Determination of Positional Fatty Acid and Triacylglycerol Compositions of Selected Infant Formulas (영유아용 조제분유의 위치별 지방산 및 Triacylglycerols의 정성 분석)

  • Son, Jeoung-Mae;Lee, Jeung-Hee;Hong, Soon-Taek;Lee, Kyung-Su;Park, Hye-Kyung;Kwon, Kwang-Il;Lee, Ki-Teak
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.40 no.9
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    • pp.1256-1264
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    • 2011
  • Infant formula is one of the main nutritional sources for infants. In this study, the fatty acid compositions of Korean (domestic, n=8) and foreign infant formulas (n=3) were analyzed. Crude fats were extracted using the Folch method, and fatty acid compositions (total and positional) were analyzed by gas chromatography. In the fatty acid compositions of infant formulas, oleic (19.88~44.64%), palmitic (7.59~21.65%) and linoleic acids (16.72~25.87%) were the major fatty acids. Domestic infant formula products contained 35.94~56.55% total saturated fatty acid content, whereas that of foreign infant formula ranged from 34.40~42.88%. The content of monounsaturated fatty acids ranged from 20.23~44.99% in domestic products and 34.11~45.07% in foreign products. In addition, 0.17~2.57% arachidonic acid/docosahexaenoic acid and 10~13% linoleic acid/linolenic acid were detected in the analyzed products (domestic and foreign products). A small amount of trans fatty acids (0.25~1.69%) were found. In sn-2 position analysis, palmitic acids (1.84~38.74%) were detected in the analyzed formulas. Further, typical triacylglycerols in human milk, including 1,3-di-monounsaturated-2-saturated triacylglycerol, were not detected in the analyzed formulas.

Effects of Composition on Soft Magnetic Properties and Microstructures of Fe-Hf-O Thin Films (Fe - Hf - O계 박막에서 조성이 미세구조 및 연자기 특성에 미치는 효과)

  • 박진영;김종열;김광윤;한석희;김희중
    • Journal of the Korean Magnetics Society
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    • v.7 no.5
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    • pp.237-242
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    • 1997
  • The microstructure and soft magnetic properties of as-deposited Fe-Hf-O thin film alloys, which are produced at $P_{O2}=10%$ by rf magnetron sputtering method in $Ar+O_2$ mixed gas atmosphere, is investigated. Newly developed $Fe_{82}Hf_{3.4}O_{14.6}$ film exhibits good soft magnetic properties with $4{\pi}M_s=17.7$ kG, $H_c=0.7$ Oe and ${\mu}_{eff}$(0.5~100MHz)=2,500, respectively. The Fe-Hf-O films are composed of $\alpha$-Fe nanograins and amorphous phase with larger amounts of Hf and O elements which chemically combine each other. With increasing Hf area fraction, Hf and O contents increased proportionally. It was considered that O content in films was determined by Hf contents, because O was chemically combined with Hf. It results from decreasing the $\alpha$-Fe grain size by precipitates (Hf and O), high electrical resistivity. The $Fe_{82}Hf_{3.4}O_{14.6}$ film exhibits the quality factor (Q=$\mu$'/$\mu$") of 25 at 20 MHz. These good frequency characteristics are considered to be superior to other films already reported.o other films already reported.

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Effects of Plant Extracts on Microbial Population, Methane Emission and Ruminal Fermentation Characteristics in In vitro

  • Kim, E.T.;Kim, C.H.;Min, K.S.;Lee, S.S.
    • Asian-Australasian Journal of Animal Sciences
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    • v.25 no.6
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    • pp.806-811
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    • 2012
  • This study was conducted to evaluate effects of plant extracts on methanogenesis and rumen microbial diversity in in vitro. Plant extracts (Artemisia princeps var. Orientalis; Wormwood, Allium sativum for. Pekinense; Garlic, Allium cepa; Onion, Zingiber officinale; Ginger, Citrus unshiu; Mandarin orange, Lonicera japonica; Honeysuckle) were obtained from the Plant Extract Bank at Korea Research Institute of Bioscience and Biotechnology. The rumen fluid was collected before morning feeding from a fistulated Holstein cow fed timothy and commercial concentrate (TDN; 73.5%, crude protein; 19%, crude fat; 3%, crude fiber; 12%, crude ash; 10%, Ca; 0.8%, P; 1.2%) in the ratio of 3 to 2. The 30 ml of mixture, comprising McDougall buffer and rumen liquor in the ratio of 4 to 1, was dispensed anaerobically into serum bottles containing 0.3 g of timothy substrate and plant extracts (1% of total volume, respectively) filled with $O_2$-free $N_2$ gas and capped with a rubber stopper. The serum bottles were held in a shaking incubator at $39^{\circ}C$ for 24 h. Total gas production in all plant extracts was higher (p<0.05) than that of the control, and total gas production of ginger extract was highest (p<0.05). The methane emission was highest (p<0.05) at control, but lowest (p<0.05) at garlic extract which was reduced to about 20% of methane emission (40.2 vs 32.5 ml/g DM). Other plant extracts also resulted in a decrease in methane emissions (wormwood; 8%, onion; 16%, ginger; 16.7%, mandarin orange; 12%, honeysuckle; 12.2%). Total VFAs concentration and pH were not influenced by the addition of plant extracts. Acetate to propionate ratios from garlic and ginger extracts addition samples were lower (p<0.05, 3.36 and 3.38 vs 3.53) than that of the control. Real-time PCR indicted that the ciliate-associated methanogen population in all added plant extracts decreased more than that of the control, while the fibrolytic bacteria population increased. In particular, the F. succinogens community in added wormwood, garlic, mandarin orange and honeysuckle extracts increased more than that of the others. The addition of onion extract increased R. albus diversity, while other extracts did not influence the R. albus community. The R. flavefaciens population in added wormwood and garlic extracts decreased, while other extracts increased its abundance compared to the control. In conclusion, the results indicated that the plant extracts used in the experiment could be promising feed additives to decrease methane gas emission from ruminant animals while improving ruminal fermentation.

Production of Acetate from Waste Gas using Peptostreptococcus productus (Peptostreptococcus productus를 이용한 산업체 부생가스로부터 아세테이트 생산)

  • 강환구;전희진
    • KSBB Journal
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    • v.15 no.2
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    • pp.188-194
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    • 2000
  • The anaerobic bacterium P. productus was known to produce acetate from CO, C02 and H2. In this research the acetate f formation from waste gas was studied. For this research, kinetic parameter study on CO conversion were carried out. From t this study maximum CO conversion rate of 39.3 mmol/L . hr . 0.0 and Km of 0.578 atm were obtained. Also the effect of c CO refreshment, N source, initial pH and c비ture temperature on acetate formation were studied. Acetate formation in 5L lab s scale fermenter was tested and specific acetate production rate of 0.48 g/L-hr-O.O. was obtained and the acetate c concentration was 21 g/L.

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Hydrogenation Characteristics of Aromatics in Residue Oil of Naphtha Cracking on Pt/Pd Impregnated Mesoporous Molecular Sieve (메조포러스 분자체에 담지된 Pt/Pd 촉매상에서 납사분해 잔사유의 방향족 화합물 수소화 특성)

  • Choi, Jong Hwa;Jeong, Soon Yong;Oh, Sung-Geun
    • Korean Chemical Engineering Research
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    • v.43 no.6
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    • pp.675-682
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    • 2005
  • Al containing mesoporous molecular sieve (Al-MMS) was synthesized by hydrolysis of $H_2SiF_6$ and $Al(NO_3)_3{\cdot}9H_2O$. The material obtained was characterized by XRD, $N_2$-physisorption. The specific surface area was $981m^2/g$, and the average pore size was uniformity $39{\AA}$. It was confirmed that the acidity of Al-MMS was milder than that of zeolite Y based on the results of $NH_3$-TPD. Active materials, Pt and Pd, were loaded on Al-MMS in order to examine the feasibility of using Al-MMS as a catalyst support in the hydrogenation of aromatic compounds included in the residue oil of a naphtha cracker. The hydrogenation activity of PtPd/Al-MMS has been studied by following the kinetics of the hydrogenation of naphthalene, and by comparing the kinetic parameters obtained with Pt and Pd catalysts supported on the other mesoporous material support and commercial conventional support materials. PtPd/Al-MMS catalyst shows the highest activity of hydrogenation and sulfur resistance. The high activity of PtPd/Al-MMS was confirmed again in the hydrogenation of PGO (pyrolized gas oil), which is residue oil obtained from a naphtha cracker. Therefore, PtPd/Al-MMS can be applied to the hydrogenation of aromatic compounds included in the residue oil of a commercial naphtha cracker commericially.