Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.11a
- /
- Pages.228-231
- /
- 1999
Fabrication and Characterization of LIPON Electrolyte Thin Film for All Solid State Thin Film Battery
박막전지용 LIPON 전해질 박막의 제조 및 특성 평가
Abstract
The preparation and electrical properties of LIPON electrolyte were investigated in order to fabricate all solid state thin film battery. The LIPON thin film was deposited by r.f. sputtering of Li