• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.118-119
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• 2007

TWO-CHANNEL방식의 디지털 광센서는 I2C의 출력을 가지고 있다. 하나의 CMOS집적회로에 포토다이오드와 기존의 아날로그-디지털 변환기(ADC)로 구성되어 있었던 방식과는 달리 2개의 비교기(Comparotor)로 2개의 채널을 형성하게 된다. 인간의 눈과 비슷한 반응을 얻기 위해 16-bit의 유효 범위를 갖는다. 이 광센서는 광원의 넓은 파장에 적합하게 설계 되었다.

• Journal of Sensor Science and Technology
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• v.28 no.6
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• pp.395-401
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• 2019

This paper proposes a method for estimating the location of a magnetized tip that is inside a non-transparent space or body by using arrayed giant magnetoresistance (GMR) sensors. In general, an object located in such an opaque space can be detected using X-rays, magnetic fields, ultra-sonic sensors, etc., depending on its characteristics. X-ray is mostly used for medical purposes but frequent exposure to it could cause harm to patients as well as doctors. In this study, how well a GMR sensor is applicable instead of an X-ray is investigated. The sensor's voltage output is experimentally fitted to distance with a relationship of 3rd degree polynomial. To detect a small magnetized tip with 900 Oe inside a human body, a 2×2 arrayed GMR sensor and a location estimation algorithm based on information acquired from four sensors is developed. Evaluation tests show that the suggested method is applicable to limited cases with a distance less than 33-55 mm, and the location of a magnet tip is estimated relatively well with an error less than 1.5 mm.

• Journal of Sensor Science and Technology
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• v.17 no.1
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• pp.9-14
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• 2008

In this paper, the gas responses of tungsten oxide films prepared by anodic reaction was discussed. Sensing electrodes and heating electrodes were patterned by photolithography method on quartz substrate. Porous tungsten oxide was fabricated in electrolyte solutions of 5 % HF (HF :$C_2H_6OH:H_2O$=3 : 2 : 20) by anodic reaction. The anodic reaction with metal (platinum wire) as a cathode and the sensing device as an anode was conducted under the various reaction times (1-10 min) at 10 mA/$cm^2$ The surface structure and morphology of the fabricated sensor have been analysed by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM). All the peaks of XRD results were well indexed to the pure phase pattern. The average diameter of the porous tungsten oxide surface were ranged about 100 nm. The fabricaed sensor showed good sensitivity to 200 ppm toluene at operating temperature of $250^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.78-79
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• 2008

In this paper, poly 3C-SiC thin films were grown on $SiO_2$/Si by atmospheric pressure chemical vapor deposition (APCVD) using HMDS, $H_2$, and Ar gas at $1100^{\circ}C$ for 30 min, respectively. And then, palladium films were deposited on poly 3C-SiC by RF magnetron sputter. Thickness, uniformity, and quality of these samples were performed by SEM. Crystallinity and preferred orientationsof palladium were analyzed by XRD. And Pd/poly 3C-SiC schottky diodes were fabricated and characterized by current-voltage measurements. Its electric current density Js and barrier height voltage were measured as $2\times10^{-3}$ A/$cm^2$, 0.58 eV, respectively. And these devices operated about $350^{\circ}C$. From results, Pd/poly 3C-SiC devices are promising for high temperature hydrogen sensor and applications.

• Journal of Sensor Science and Technology
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• v.22 no.3
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• pp.175-180
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• 2013

This paper describes the characteristics of cubic silicon carbide (3C-SiC) films grown on a carbonized Si(100) substrate, using hexamethyldisilane (HMDS, $Si_2(CH_3)_6$) as a safe organosilane single precursor in a nonflammable $H_2$/Ar ($H_2$ in Ar) mixture carrier gas by atmospheric pressure chemical vapor deposition (APCVD) at $1280^{\circ}C$. The growth process was performed under various conditions to determine the optimized growth and carbonization condition. Under the optimized condition, grown film has a single crystalline 3C-SiC with well crystallinity, small voids, low residual stress, low carrier concentration, and low RMS. Therefore, the 3C-SiC film on the carbonized Si (100) substrate is suitable to power device and MEMS fields.

• Progress in Superconductivity and Cryogenics
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• v.12 no.3
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• pp.44-48
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• 2010

Acoustic emission (AE) signal from an HTS tape has a low signal to noise ratio, due to the large amount of noise caused by the boiling of the liquid cryogen or mechanical vibration from the cryo-cooler. In an attempt to improve the sensitivity of the AE sensor, $Pb(Zr_{0.54}Ti_{0.46})O_3$ + 0.2 wt% $Cr_2O_3$ + 1.0 wt.% $Nb_2O_5$ ceramics sintered at $1200^{\circ}C$ was synthesized. In addition, the resonance ($f_r$) and anti-resonance frequencies ($f_a$) were measured using the specimens with various thicknesses (1.0, 1.5, 2.0, 2.5 and 3.0 mm). According to the test results, large AE signals with high frequencies were obtained from the AE sensor fabricated using a piezoelectric disc with a thinner thickness.

• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.394-399
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• 1999

An automobile hot-film air flow sensor is deposited with platinum by sputtering method, patterned by photoresisted lift-off method, annealed in $1,000^{\circ}C$ and passivated with PI-2723. The TCR of the fabricated hot-film is about $3500\;ppm/^{\circ}C$. In the experiment, the output voltage of the sensor is in proportional to the fourth power root in the air mass flow range of 300 kg/h. The error in the full flow range is about ${\pm}0.7%$. In the range of air temperature of $-20^{\circ}C{\sim}120^{\circ}C$, the error is about ${\pm}1%$ that is ${\pm}2%$ lower than that of the reference sensor. Therefore, the fabricated hot-film air flow sensor satisfies the specification for automobile. Lower temperature error of the sensor provides to control the precise air/fuel ratio of automobile engine and results in improvement of a fuel mileage and the less amount of toxic gases emitted by automobile.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.359-359
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• 2011

This study reports the H2S gas sensing properties of CuO / ZnO nano-hetero structure bundle and the investigation of gas sensing mechanism. The 1-Dimensional ZnO nano-structure was synthesized by hydrothermal method and CuO / ZnO nano-heterostructures were prepared by photo chemical reaction. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) spectra confirmed a well-crystalline ZnO of hexagonal structure. In order to improve the H2S gas sensing properties, simple type of gas sensor was fabricated with ZnO nano-heterostructures, which were prepared by photo-chemical deposition of CuO on the ZnO nanorods bundle. The furnace type gas sensing system was used to characterize sensing properties with diluted H2S gas (50 ppm) balanced air at various operating temperature up to 500$^{\circ}C$. The H2S gas response of ZnO nanorods bundle sensor increased with increasing temperature, which is thought to be due to chemical reaction of nanorods with gas molecules. Through analysis of X-ray photoelectron spectroscopy (XPS), the sensing mechanism of ZnO nanorods bundle sensor was explained by well-known surface reaction between ZnO surface atoms and hydrogen sulfide. However at high sensing temperature, chemical conversion of ZnO nanorods becomes a dominant sensing mechanism in current system. Photo-chemically fabricated CuO/ZnO heteronanostructures show higher gas response and higher current level than ZnO nanorods bundle. The gas sensing mechanism of the heteronanostructure can be explained by the chemical conversion of sensing material through the reaction with H2S gas.

• Proceedings of the KIEE Conference
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• 1999.07e
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• pp.2450-2452
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• 1999

Presently, it is now developing the optical remote gas sensor system which can measure combustible gases such as $CH_4$ and $C_2H_2$ generating by partial discharges inside the cable and connection parts to detect thermal deterioration of Oil-Filled (OF) power cable at the appropriate time. It is the most important parameter to select central wavelength of laser diode (LD) by analyzing the absorption bend of measuring gases in the infrared region. In this research, we proposed the optical spectrum analyzer to absorption band of $CH_4$ and $C_2H_2$ for the preliminary research of optical fiber gas detecting system.

• Journal of Sensor Science and Technology
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• v.22 no.2
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• pp.124-129
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• 2013

In this paper, we manufactured the regenerated FBG by the thermal annealing of seed FBG based on UV irradiation. The writing conditions of regenerated FBGs were investigated in four types of optical fiber. FBGs written in $H_2$-free fiber were erased and not regenerated during the thermal annealing. FBG written in $H_2$ loaded Boron co-doped fiber was erased at the temperature of about $580^{\circ}C$ and regenerated about $590^{\circ}C$. However, the extinction of regenerated FBG started at the temperature over $900^{\circ}C$ and then FBG disappeared out. FBG written in $H_2$ loaded Ge high doped fiber was erased and regenerated around the temperature of $800^{\circ}C$ and maintained until the end of the thermal annealing. The reflection of the regenerated FBG was decreased about 12 dB and the center wavelength of the regenerated FBG was shifted about 0.7 nm compared with that of the seed FBG. The thermal characteristics of the regenerated FBG were analyzed by reheating from room temperature to $980^{\circ}C$. As results, the regenerated FBG had survived without a decrease of reflection and the thermal sensitivity was $15pm^{\circ}C$.