• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.134.2-134.2
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• 2017

최근 고성능, 저 전력 반도체 소자를 위한 미세 공정 기술이 발전함에 따라, gate oxide의 두께 및 선폭이 감소하고, aspect ratio가 증가하고 있는 추세이다. 따라서 얇아진 gate oxide를 통한 채널 물질로의 boron 확산을 막기 위한 고농도 질화 막 증착의 필요성이 높아지고 있으며, high aspect ratio의 gate oxide에 적용 가능한 우수한 step coverage의 질화막 또한 요구되고 있다. 이러한 요구조건을 만족시키기 위해 일반적인 13.56MHz의 플라즈마 소스를 이용한 질화연구들이 선행되어져 왔으나, 높은 binding energy(~24 eV)를 가지고 있는 N2 molecule gas를 효과적으로 dissociation 하지 못해 충분한 질화공정이 수행되어질 수 없었을 뿐만 아니라 높은 공정온도($>200^{\circ}C$에서 진행되어 반도체소자에 손상을 줄 수 있다. 본 연구에서는 이러한 문제들을 해결하기 위해 VHF (162MHz)를 이용한 플라즈마를 통해 고밀도에서 낮은 전자온도와 높은 진동온도의 플라즈마를 구현하여 20%이상의 높은 질화율을 얻을 수 있었고, multi-tile push-pull 플라즈마 소스를 통해 VHF 사용 시 나타나는 standing wave effect를 제어하여 high aspect ratio의 gate sidewall spacer에 우수한 step coverage의 질화막을 형성시킬 수 있었다.

• Journal of the Korean Chemical Society
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• v.35 no.5
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• pp.480-486
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• 1991

The solubilities of ethyl bromide in aniline and o-chloroaniline have been measured at 5, 15$^{\circ}$ and 25$^{\circ}$C in the presence and the absence of gallium bromide. When gallium bromide does not exist in the system, the solubility of ethyl bromide in o-chloroaniline is greater than in aniline, indicating a stronger interaction of ethyl bromide with o-chloroaniline than that with aniline. It could be thought that ethyl bromide forms unstable complex with gallium bromide in the presence of gallium bromide in the system. This complex has been assumed in various ways and evaluated, that instability constant (K value) is relatively constancy under the assumption of 1 : 1 complex, $C_2H_5Br{\cdot}GaBr_3$. Therefore, the complex forms the following equilibrium in the solution: $C_2H_5Br{\cdot}GaBr_3\;{\rightleftharpoons}\;C_2H_5Br +1/2Ga_2Br_6$ The instability of the complex of ethyl bromide with gallium bromide is compared with similar complexes of gallium bromide with methyl bromide. The changes of enthalpy, free energy and entropy fcor the dissociation of the complex are also calculated.

• Journal of the Korean Chemical Society
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• v.26 no.5
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• pp.326-332
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• 1982

The structure of the complex extracted from an aqueous solution containing methylene blue and tetrafluoroborate with 1,2-dichloroethane has been investigated by comparing IR spectrum of the extract with those of pure components and appeared to be an 1 : 1 contact ion-pair between monovalent ions of opposite charge. The extraction constant obtained from the absorbance data measured at 658nm in 1,2-dichlorethane has a value of 1.1${\times}$at$10^4M{-1}$ 25$^{\circ}$C in the range from 1.43${\times}10^{-2}$ to 2.86${\times}10^{-1}$M HF. In the solvent extraction with nitrobenzene, the identical experiments show that extraction constants are increased with HF concentration possibly due to dissociation of the ion-pair in nitrobenzene.

• The Bulletin of The Korean Astronomical Society
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• v.42 no.2
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• pp.80.1-80.1
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• 2017

We present preliminary results of KVN single dish telescope observations of 80 dense cores in the Orion molecular cloud complex which contains the Orion A, B, and ${\lambda}$ Orionis cloud. We investigate the behavior of the different molecular tracers and look for chemical variations of cores in the three clouds in order to systematically investigate the effects of stellar feedback. The most commonly detected molecular lines (with the detection rates higher than 50%) are N2H+, HCO+, H13CO+, C2H, HCN, and H2CO. The detection rates of dense gas tracers, N2H+, HCO+, H13CO+, and C2H show the lowest values in the ${\lambda}$ Orionis cloud. We find difference between molecular D/H ratios and N2H+/H13CO+ abundance ratios towards different clouds, and between protostellar cores and starless cores. Eight starless cores in the Orion A and B clouds exhibit high deuterium fractionations, larger than 0.10, while in the ${\lambda}$ Orionis cloud, no cores reveal the high ratio. These chemical properties could support that cores in the ${\lambda}$ Orionis cloud are affected by the photo-dissociation and external heating from the nearby H II region, which is a hint of negative stellar feedback on core formation. The striking difference between the [N2H+]/[H13CO+] ratios leads us to suggest that there are significant evolutionary differences between the Orion A/B and ${\lambda}$ Orionis clouds. In order to examine whether starless cores can be candidates of pre-stellar cores, we compared the core masses estimated from the 850 um emission to their Virial masses calculated from the N2H+ line data and find that most of them are not gravitationally bound in the three clouds.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.6
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• pp.69-74
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• 2006

The effects of mechanical grinding(MG) treatment on the hydrogen storage of $Mg_2Ni$ alloy and $Mg_2Ni$ composite alloy($Mg_2Ni+graphite$) were investigated by pressure-composition-temperature(PCT) measurement, the micro-electrode technique of electrochemistry and etc, in which PCT was measured at high temperature(around $300[^{\circ}C]$) of gas phase and a carbon-filament micro-electrode for electrochemical evaluation was manipulated to make electrical contact with the particle in 1M KOH aqueous solution. It was found that the hydrogenation properties of $Mg_2Ni$ and graphite composite particle were greatly improved by the mechanical grinding treatment by which the $Mg_2Ni$ and graphite composite alloys could be changed into microstructure and nano-level particles. namely; the hydrogen dissociation pressure of PCT measurement was decreased from 0.55[MPa] to 0.42[MPa] and hydrogenation peaks by micro-electrode were also observed more clearly on the same sample.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.2
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• pp.211-220
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• 1998

The stochiometric composition of $AgGaS_2$polycrystal source materials for the single crystal thin films were prepared from horizontal furnace. From the extrapolation method of X-ray diffraction patterns, it was found that the polycrystal $AgGaS_2$has tetragonal structure of which lattice constant $a_0\;and \;c_0$ were 5.756 $\AA$ and 10.305 $\AA$, respectively. $AgGaS_2$single crystal thin film was deposited on throughly etched GaAs(100) substrate from mixed crystal $AgGaS_2$by the Hot Wall Epitaxy (HWE) system. The source and substrate temperature were $590^{\circ}C$ and $440^{\circ}C$ respectively, and the growth rate of the single crystal thin films was about 0.5 $mu \textrm{m}$/h. The crystallinity of the grown single crystal thin films was investigated by the DCRC (double crystal X-ray diffraction rocking curve). The optical energy gaps were found to be 2.61 eV for $AgGaS_2$single crystal thin films at room temperature. The temperature dependence of the photocurrent peak energy is well explained by the Varshni equation, then the constants in the Varshni equation are given by${\Alpha};=;8.695{\times}10^{-4};eV/K,and;{\beta};=;332;K$. from the photocurrent spectra by illumination of polarized light of the $AgGaS_2$single crystal thin film, we have found that crystal field splitting $\Delta$Cr was 0.28 eV at 20 K. From the PL spectra at 20 K, the peaks corresponding to free and bound excitons and a broad emission band due to D-A pairs are identified. The binding energy of the free excitons are determined to be 0.2676 eV and 0.2430 eV and the dissociation energy of the bound excitons to be 0.4695 eV.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.210.2-210.2
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• 2016

An inductively coupled plasma source was prepared for the deposition of a-C:H thin film. Properties of the inductively coupled plasma source are investigated by fluid simulation including Navier-Stokes equations and home-made tuned single Langmuir probe. Signal attenuation ratios of the Langmuir probe harmonic frequency were 13.56Mhz and 27.12Mhz. Dependencies of plasma parameters on process parameters were accord with simulation results. Ar/CH4 plasma simulation results shown that hydrocarbon radical densities have their lowest value at the vicinity of gas feeding line due to high flow velocity. For input power density of 0.07W/cm3, CH radical density qualitatively follows electron density distribution. On the other hand, central region of the chamber become deficient in CH3 radical due to high dissociation rate accompanied with high electron density. The result suggest that optimization of discharge power is important for controlling deposition film quality in high density plasma sources.

• The Korean Journal of Pharmacology
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• v.30 no.2
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• pp.255-260
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• 1994

There are some reports about the influences of free fatty acids on the albumin binding of drugs. But they were concerned to the limited free fatty acids, mostly of azapropazone-warfarin bidning site bound drugs and determination of dissociation and association constants by stopped flow technique. These data were not enough to make conculsions for the general tendency of free fatty acid to albumin binding. Therefore the influence of various saturated fatty acids of $C_{10{\sim}20}$, oleic acid and linoleic acid as unsaturated fatty acids to albumin binding of warfarin and dansylsarcosine were studied by equilibrium dialysis. The concentration of free drug was determined by spectrophotometer according to the molar ratios of 0, 0.5, 1, 2 and 4 between free fatty acid and albumin. There were significant increasing in the free durg concentration of warfarin and dansylsarcosine when the molar ratio for capric acid, lauric acid and palmitic acid was 4. The free warfarin concentration was increased significantly at a molar ratio of 4 between oleic acid and albumin. Therefore the albumin binding of durgs can be variated significantly by increased free fatty acid of diabetics and cause to the pharmacokinetic variation between healthy and diabetics.

• Journal of Hydrogen and New Energy
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• v.13 no.1
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• pp.74-82
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• 2002

Ni nanoparticles이 표면에 분산된 mutiwall carbon nanotubes (MWNTs)의 수소저장 특성을 분석하였다. Metal nanoparticles의 분산 방법은 incipient wetness impregnation procedure을 사용하였는데, 이러한 Ni catalysts의 역할은 기존에 알려진 Li, K doping과 같은 개념으로 기상의 수소를 분해하여 carbon 표면에 chemical adsorption 시키는 역할을 하게 된다. 실제로 Ni nanoparticles이 6wt% loading된 경우에는 thermal desorption spectra를 분석한 결과 ~2.8wt% hydrogen이 ~340-520K의 온도범위에서 방출되는 것을 관찰할 수 있었다. Kissingers plot을 통해서 MWNTs와 hydrogen과 interaction energy를 구한 결과 ${\sim}31kJ/molH_2$를 얻을 수 있었으며 이 값은 기존의 SWNTs에 hydrogen이 physi-sorption에서 실험적으로 얻을 수 있었던 값보다 1.5배 큰 값이라고 할 수 있다. 자세한 수소저장 기구를 분석하기 위해서 FT-IR분석을 한 결과 C-Hn stretching vibrations이 관찰되었으며 mono-hydride와 weak di-hydride $sp^3$가 형성된 것으로 해석 될 수 있었다. 이와 같은 결과는 Ni nanoparticle들이 예상과 같이 hydrogen molecules을 dissociation하는 역할을 하는 것을 의미한다. 연속적인 thermal desorption 실험을 통해 가역성도 평가하였다.

• Transactions on Electrical and Electronic Materials
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• v.14 no.6
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• pp.329-333
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• 2013

SiOC films were prepared by capacitively coupled plasma chemical vapor deposition, and the correlation between the binding energy by X-ray photoelectron spectroscopy and Arrhenius equation for ionization energy was studied. The ionization energy decreased with increase of the potential barrier, and then the dielectric constant also decreased. The binding energy decreased with increase of the potential barrier. The dielectric constant and electrical characteristic of SiOC film was obtained by Arrhenius equation. The dielectric constant of SiOC film was decreased by lowering the polarization, which was made from the recombination between opposite polar sites, and the dissociation energy during the deposition. The SiOC film with the lowest dielectric constant had a flat surface, which depended on how carbocations recombined with other broken bonds of precursor molecules, and it became a fine cross-linked structure with low ionization energy, which contributed to decreasing the binding energy by Si 2p, C 1s electron orbital spectra and O 1s electron orbital spectra. The dielectric constant after annealing decreased, owing to the extraction of the $H_2O$ group, and lowering of the polarity.