• 제목/요약/키워드: $CH_4/N_2$

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평판 유도 결합형 $CH_4/H_2/Ar$ 플라즈마를 이용한 GaN 건식 식각에서 공정변수가 저항성 접촉 형성에 미치는 영향 (The Effects of Etch Process Parameters on the Ohmic Contact Formation in the Plasma Etching of GaN using Planar Inductively Coupled $CH_4/H_2/Ar$ Plasma)

  • 김문영;태흥식;이호준;이용현;이정희;백영식
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권8호
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    • pp.438-444
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    • 2000
  • We report the effects of etch process parameters on the ohmic contact formation in the plasma etching of GaN. Planar inductively coupled plasma system with $CH_4/H_2/Ar$gas chemistry has been used as etch reactor. The contact resistance and the specific contact resistance have been investigated using transfer length method as a function of RF bias power and %Ar gas concentration in total flow rate. AES(Auger electron spectroscopy) analysis revealed that the etched GaN has nonstoichiometric Ga rich surface and was contaminated by carbon and oxygen. Especially large amount of carbon was detected at the sample etched for high bias power (or voltage) condition, where severe degradation of contact resistance was occurred. We achieved the low ohmic contact of $2.4{\times}10^{-3} {\Omega}cm^2$ specific contact resistance at the input power 400 W, RF bias power 150 W, and working pressure 10mTorr with 10 sccm $CH_4$, 15 sccm H2, 5 sccm Ar gas composition.

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Kinetics and Mechanism of the Aminolysis of Anilino Thioethers with Benzylamines in Acetonitrile

  • Oh, Hyuck-Keun;Lee, Jae-Myun;Sung, Dae-Dong;Lee, Ik-Choon
    • Bulletin of the Korean Chemical Society
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    • 제25권4호
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    • pp.557-559
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    • 2004
  • The aminolyses of anilinothioethers $(C_6H_5N(CH_3)CH_2SC_6H_4Z)$ in acetonitrile with benzylamines $(XC_6H_4CH_2NH_2)$ have been investigated. The rates are much lower in acetonitrile than in methanol (with aniline). The Bronsted ${\beta}_X$ values are similar but ${\beta}_Z$ values are smaller compared to those for the reactions in MeOH with anilines. The large negative ${\rho}_{XZ}({\cong}-0.8$, after correction for fall-off) value is interpreted to indicate a frontside attack $S_N2$ mechanism, in which the two oppositely changed reaction centers in the TS, $-N^{{\delta}+}{\cdots}S^{{\delta}-}-$, are in close vicinity increasing the interaction between nucleophile and leaving group. The inverse secondary kinetic isotope effects ($k_H/k_D$ < 1.0) are observed with deuterated benzylamines $(XC_6H_4CH_2ND_2)$.

카르보닐탄소원자의 친핵성 치환반응 (제13보). 메탄올-아세토니트릴 혼합용매에서 Thiochloroformate의 가메탄올 분해반응 (Nucleophilic Displacement at a Carbonyl Carbon Atom (ⅩⅢ). Methanolysis of Thiochloroformate in $CH_3OH-CH_3CN$ Mixtures)

  • 나상무;이익춘
    • 대한화학회지
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    • 제24권4호
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    • pp.288-294
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    • 1980
  • $CH_3O(CO)Cl,\;CH_3S(CO)Cl\;및\;CH_3S(CS)Cl$/TEX>의 가메탄올 분해반응속도를 메탄올-아세토니트릴 혼합용매하에서 결정하였다. 반응속도는 주로 벌크한 용매성질에 의해서만 아니라 일부 친전자적 특수용매화에 의해서도 영향을 받는다는 것이 실험결과로 알려졌다. 용매의 극성은 반응속도에 영향을 미치는 중요인자는 아니지만, $S_N1$형의 천이상태 안정화에 기여함을 알았다. $CH_3S(CS)Cl$/TEX>의 가메탄올 분해반응은 메탄올에 의한 이탈기의 특수 용매효과 및 큰 유전상수를 가진 용매에 의한 천이상태 안정화가 중요한 $S_N1$형으로 진행됨을 알았다. $CH_3O(CO)Cl$의 가메탄올 분해반응은 위의 경우와는 반대로 $S_N2$형으로 진행됨을 알았다.

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Methane and Nitrous Oxide Emissions from Livestock Agriculture in 16 Local Administrative Districts of Korea

  • Ji, Eun-Sook;Park, Kyu-Hyun
    • Asian-Australasian Journal of Animal Sciences
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    • 제25권12호
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    • pp.1768-1774
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    • 2012
  • This study was conducted to evaluate methane ($CH_4$) and nitrous oxide ($N_2O$) emissions from livestock agriculture in 16 local administrative districts of Korea from 1990 to 2030. National Inventory Report used 3 yr averaged livestock population but this study used 1 yr livestock population to find yearly emission fluctuations. Extrapolation of the livestock population from 1990 to 2009 was used to forecast future livestock population from 2010 to 2030. Past (yr 1990 to 2009) and forecasted (yr 2010 to 2030) averaged enteric $CH_4$ emissions and $CH_4$ and $N_2O$ emissions from manure treatment were estimated. In the section of enteric fermentation, forecasted average $CH_4$ emissions from 16 local administrative districts were estimated to increase by 4%-114% compared to that of the past except for Daejeon (-63%), Seoul (-36%) and Gyeonggi (-7%). As for manure treatment, forecasted average $CH_4$ emissions from the 16 local administrative districts were estimated to increase by 3%-124% compared to past average except for Daejeon (-77%), Busan (-60%), Gwangju (-48%) and Seoul (-8%). For manure treatment, forecasted average $N_2O$ emissions from the 16 local administrative districts were estimated to increase by 10%-153% compared to past average $CH_4$ emissions except for Daejeon (-60%), Seoul (-4.0%), and Gwangju (-0.2%). With the carbon dioxide equivalent emissions ($CO_2$-Eq), forecasted average $CO_2$-Eq from the 16 local administrative districts were estimated to increase by 31%-120% compared to past average $CH_4$ emissions except Daejeon (-65%), Seoul (-24%), Busan (-18%), Gwangju (-8%) and Gyeonggi (-1%). The decreased $CO_2$-Eq from 5 local administrative districts was only 34 kt, which was insignificantly small compared to increase of 2,809 kt from other 11 local administrative districts. Annual growth rates of enteric $CH_4$ emissions, $CH_4$ and $N_2O$ emissions from manure management in Korea from 1990 to 2009 were 1.7%, 2.6%, and 3.2%, respectively. The annual growth rate of total $CO_2$-Eq was 2.2%. Efforts by the local administrative offices to improve the accuracy of activity data are essential to improve GHG inventories. Direct measurements of GHG emissions from enteric fermentation and manure treatment systems will further enhance the accuracy of the GHG data.

Molecular Cloning of Chitinase Genes Family from Serratia marcescens

  • Song, Young-Hwan;Kweon, Oh-Gun
    • 한국어병학회지
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    • 제6권2호
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    • pp.103-110
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    • 1993
  • Sau3AI으로 부분절단한 Serratia marcescens genomic DNA(5Kb 이상)을 pUC19의 BamHI site에 삽입하여 total genomic library를 준비하였다. Swollen colloidal chitin media에서 halo를 형성하는 2개의 E.coli 형질전환주를 선별하였다. 이들 colony가 chitinase 유전자를 갖음을 재확인하기 위하여 4-methylumbelliferyl N-acetyl-$\beta$-D-glucosaminide(4-MuFGlcNAc)를 이용하였다. 4-MuFGlcNAc는 chitinase에 대한 기질특이성을 나타내며 형광을 나타내는 기질로서 positive clone들은 360nm의 자외선을 조사하였을 경우 밝은 형광을 나타낸다. pUC19으로 부터 유래된 2 종류의 다른 chitinase clone, pCH1(11.0Kb) 및 pCH2(7.5Kb)를 genomic DNA library로 부터 분리하였으며, 이들의 제한효소지도를 작성한 결과 서로 다른 제한효소지도를 나타내었다. pCH1EA 및 pCH2로 부터 각각의 EcoRI-Xbal fragment를 subcloning함으로써 두개의 다른 chitinase 유전자의 위치를 결정하였다. pCH1EA 및 pCH2를 cross hybridization 한 결과 hybridization signal을 나타내지 않아 서로 유사성이 없는 것으로 사료된다.

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Fabrication and characterization of silicon-based microsensors for detecting offensive $CH_3SH\;and\; (CH_3)_3N$ gases

  • Lee, Kyu-Chung;Hur, Chang-Wu
    • Journal of information and communication convergence engineering
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    • 제6권1호
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    • pp.38-42
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    • 2008
  • Highly sensitive and mechanically stable gas sensors have been fabricated using the microfabrication and micromachining techniques. The sensing materials used to detect the offensive $CH_3SH$ and $(CH_3)_3N$ gases are 1 wt% Pd-doped $SnO_2$ and 6 wt% $Al_2O_3$-doped ZnO, respectively. The optimum operating temperatures of the devices are $250^{\circ}C$ and $350^{\circ}C$ for $CH_3SH$ and $(CH_3)_3N$, respectively and the corresponding heater power is, respectively, about 55mW and 85mW. Excellent thermal insulation is achieved by the use of a double-layer membrane: i.e. $0.2{\mu}m$-thick silicon nitride and $1.4{\mu}m$-thick phosphosilicate glass. The sensors are mechanically stable enough to endure the heat cycles between room temperature and $350^{\circ}C$, at least for 30 days.

Ambidentate 리간드의 금속착물 (제 8 보). Isonitrosomethylacetoacetate Imine 리간드의 니켈(II) 및 팔라듐(II) 착물 (Metal Complexes of Ambidentate Ligand (VIII). Ni (II) and Pd (II) Complexes of Isonitrosomethylacetoacetate Imines)

  • 구본창;최강열;이만호;김인환
    • 대한화학회지
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    • 제37권7호
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    • pp.662-671
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    • 1993
  • isonitrosomethylacetoacetate(H-IMAA)의 이민유도체를 리간드로하는 새로운 Ni(II) 및 Pd(II)착물, Ni(IMAA-NH)(IMAA-NH'), Ni(IMAA-NH)(IMAA-NR),$ Pd(IMAA-NH)_2$, 및 $Pd(IMAA-NR)_2(R=CH_3,\;n-C_3H_7,\;n-C_4H_9$, 또는 $CH_2C_6H_5)$을 합성하고, 이들 착물의 구조를 원소분석, 전자흡수분광법, 적외선흡수분광법, $^1H$$^{13}C$ 핵자기공명분광법으로 조사하였다. 여기서 H-IMAA-MH 및 H-IMAA-NR은 각각 isonitrosomethylacetoacetate imine 및 N-alkylisonitrosomethylacetoacetate imine 유도체를 나타낸다.

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N,N'-bis(4-methoxysalicylidene) phenylendiamine를 이용한 Fe(II) 및 Fe(III) 이온의 분광학적 분석 (Spectrophotometric Quantitatification of Fe(II) and Fe(III) Ions Using N,N'-bis(4-methoxysalicylidene) phenylendiamine)

  • 김선덕;설종민
    • 대한화학회지
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    • 제55권3호
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    • pp.463-471
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    • 2011
  • [ $N_2O_2$ ] 시프염기 리간드인 N,N'-bis(4-methoxysalicylidene) phenylendiamine(4-$CH_3O$-salphen)을 합성하였다. 분광광도법으로 4-$CH_3O$-salphen을 이용하여 수용액 중의 Fe(II)와 Fe(III)이온의 분리 정량실험을 위하여, 리간드 농도는 $4.0{\times}10^{-4}\;M$, DMF 용매와 물의 비율은 70/30(v/v), pH는 3.4~3.8 범위, 온도는 $55^{\circ}C$에서 1 시간 정도를 물 중탕하여 결과를 얻었다. 시료의 예비 산화 및 환원 전처리는 $5.0{\times}10^{-4}\;M$ 농도의 $H_2O_2$$NH_2OH{\cdot}HCl$을 사용하여 단일 원자가 상태의 시료를 만들어 사용하였다. 이때 Fe(II)와 Fe(III) 이온의 정량은 434 nm와 456 nm에서 흡광도를 측정하였다. 이상의 최적화된 실험조건을 이용하여 약수, 온천수, 바닷물 및 하수 처리장의 처리수를 채취하여 Fe(II)와 Fe(III) 이온을 각각 정량 분석한 결과는 측정 평균값이 표준 값에 대하여 2.00~6.90% 범위에서 잘 일치 하였고, 정량검출한계는 Fe(II)의 경우 27.9 ng/mL이었고, Fe(III)은 55.8 ng/mL이었다.

Synthesis and Dissociation Constants of Cationic Rhodium (I)-Triphenylarsine Complexes of Unsaturated Nitriles and Aldehyde

  • Chin, Chong-Shik;Park, Jeong-Han;Shin, Sang-Young;Kim, Choong-Il
    • Bulletin of the Korean Chemical Society
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    • 제8권3호
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    • pp.179-183
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    • 1987
  • Reactions of $Rh(ClO_4)(CO)(AsPh_3)_2$ with unsaturated nitriles and aldehyde, L, produce a series of new cationic rhodium (I) complexes, $[RhL(CO)(AsPh_3)_2]ClO_4$ (L = $CH_2$ = CHCN, $CH_2$ = C($CH_3$)CN, trans-$CH_3CH$ = CHCN, $CH_2$ = CH$CH_2$CN, trans-$C_6H_5CH$ = CHCN, and trans-$C_6H_5CH$ = CHCHD) where L are coordinated through the nitrogen and oxygen, respectively but not through the ${\pi}$-system of the olefinic group. Dissociation constants for the reaction, $[RhL(CO)(AsPh_3)_2]ClO_4$ $\rightleftharpoons$ $Rh(ClO_4)(CO)(AsPh_3)_2$ + L, have been measured to be $1.20{\times}10^{-4}$ M (L = $CH_2$ = CHCN), $1.05{\times}10^{-4}$ M (L = $CH_2$ = C($CH_3$)CN, $3.26{\times}10^{-5}$ M (L = trans-$CH_3$CH = CHCN) and $6.45{\times}10^{-5}$ M (L = $CH_2$ = CH$CH_2$CN) in chlorobenzene at $25^{\circ}C, and higher than those of triphenylphosphine complexes, $[RhL(CO)(AsPh_3)_2]ClO_4$ where L are the corresponding nitriles that are coordinated through the nitrogen atom. The differences in dissociation constants seem to be predominantly due to the differences in ${\Delta}H$ (not due to the differences in ${\Delta}S$). The weaker Rh-N (unsaturated nitriles) bonding in $AsPh_3$ complexes than in $PPh_3$ complexes (based on ${\Delta}H$ values) suggests that the unsaturated nitriles in 2∼5 are good ${\sigma}$-donor and poor ${\pi}$-acceptor.