1 |
W.Y. Chung, C.H. Shim, S.D. Choi and D.D. Lee, Tin oxide microsensor for LPG monitoring, The 7th Int'nal Conf. on Solid-state Sensors and Actuators, Yokohama, 1993, pp. 428-431
|
2 |
V.A. Zubstovsky, Y.M. Perov and Y.E. Sedakov, Design and manufacturing of gas sensors based on thin film semiconductors for oil and gas industries, The 4th Int'nal Meeting on Chemical Sensors, Tokyo, 1992, pp. 320-321
|
3 |
X. Wang, S. Yee and P. Carey, An integrated array of multiple thin-film metal oxide sensors for quantification of individual components in organic vapor mixtures, Sensors and Actuators B, Vol. 13-14, pp. 458-461, 1993
|
4 |
H. Nanto, H. Sokooshi and T. Usuda, Smell sensor using aluminium-doped zinc oxide thin film prepared by sputtering technique, Sensors and Actuators B, Vol. 10, pp. 79-83, 1993
DOI
ScienceOn
|
5 |
Q. Wu, K.M. Lee and C.C. Liu, Development of chemical sensors using microfabrication and micromachining techniques, Sensors and Actuators B, Vol. 13-14, pp. 1-6, 1993
|
6 |
U. Dibbern, A Substrate for Thin-film Gas Sensors in Microelectronic Technology, Sensors and Actuators B, Vol. 2, pp. 63-70, 1990
DOI
ScienceOn
|
7 |
D. M. Byrne and S. Taguchi, The Taguchi approach to parameter design, Quality Progress, December, 1987, pp. 19-26
|
8 |
Y. Takao, Y. Iwanaga, Y. Shimizu and M. Egashira, Trimethylamine-sensing mechanism of TiO2-based sensors 1. Effect of metal additives on trimethylamine-sensing properties of TiO2 sensors, Sensors and Actuators B, Vol. 10, pp. 229-234, 1993
DOI
ScienceOn
|
9 |
D. J. Smith, J. F. Vetelino and R. S. Falconer, Stability, sensitivity and selectivity of tungsten trioxide films for sensing applications, Technical Digest of the 4th International Meeting on Chemical Sensors, 1992, pp. 312-315
|
10 |
V. Demarne and A. Grisel, A new SnO2 low temperature deposition technique for integrated gas sensors, Sensors and Actuators B, Vol. 15-16, pp. 63-67, 1993
|
11 |
V. Demarne and A. Grisel, An integrated low-power thin-film CO gas sensor on silicon, Sensors and Actuators 13, pp.301-313, 1988
DOI
ScienceOn
|
12 |
P. Krebs and A. Grisel, A low power integrated catalytic gas sensor, Sensors and Actuators B, Vol. 13-14, pp. 155-158, 1993
|
13 |
I.-L. Kim, W.-B. Lee, J.-H. Cha and H.-D. Lee, Development of catalytic type gas sensor substrate by MEMS manufacturing process, Proceedings of Korean Hydrogen and New Energy Society, 2004, pp. 661-665
|