• Title/Summary/Keyword: $CH_4/N_2$

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The Effects of Etch Process Parameters on the Ohmic Contact Formation in the Plasma Etching of GaN using Planar Inductively Coupled $CH_4/H_2/Ar$ Plasma (평판 유도 결합형 $CH_4/H_2/Ar$ 플라즈마를 이용한 GaN 건식 식각에서 공정변수가 저항성 접촉 형성에 미치는 영향)

  • Kim, Mun-Yeong;Tae, Heung-Sik;Lee, Ho-Jun;Lee, Yong-Hyeon;Lee, Jeong-Hui;Baek, Yeong-Sik
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.8
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    • pp.438-444
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    • 2000
  • We report the effects of etch process parameters on the ohmic contact formation in the plasma etching of GaN. Planar inductively coupled plasma system with $CH_4/H_2/Ar$gas chemistry has been used as etch reactor. The contact resistance and the specific contact resistance have been investigated using transfer length method as a function of RF bias power and %Ar gas concentration in total flow rate. AES(Auger electron spectroscopy) analysis revealed that the etched GaN has nonstoichiometric Ga rich surface and was contaminated by carbon and oxygen. Especially large amount of carbon was detected at the sample etched for high bias power (or voltage) condition, where severe degradation of contact resistance was occurred. We achieved the low ohmic contact of $2.4{\times}10^{-3} {\Omega}cm^2$ specific contact resistance at the input power 400 W, RF bias power 150 W, and working pressure 10mTorr with 10 sccm $CH_4$, 15 sccm H2, 5 sccm Ar gas composition.

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Kinetics and Mechanism of the Aminolysis of Anilino Thioethers with Benzylamines in Acetonitrile

  • Oh, Hyuck-Keun;Lee, Jae-Myun;Sung, Dae-Dong;Lee, Ik-Choon
    • Bulletin of the Korean Chemical Society
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    • v.25 no.4
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    • pp.557-559
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    • 2004
  • The aminolyses of anilinothioethers $(C_6H_5N(CH_3)CH_2SC_6H_4Z)$ in acetonitrile with benzylamines $(XC_6H_4CH_2NH_2)$ have been investigated. The rates are much lower in acetonitrile than in methanol (with aniline). The Bronsted ${\beta}_X$ values are similar but ${\beta}_Z$ values are smaller compared to those for the reactions in MeOH with anilines. The large negative ${\rho}_{XZ}({\cong}-0.8$, after correction for fall-off) value is interpreted to indicate a frontside attack $S_N2$ mechanism, in which the two oppositely changed reaction centers in the TS, $-N^{{\delta}+}{\cdots}S^{{\delta}-}-$, are in close vicinity increasing the interaction between nucleophile and leaving group. The inverse secondary kinetic isotope effects ($k_H/k_D$ < 1.0) are observed with deuterated benzylamines $(XC_6H_4CH_2ND_2)$.

Nucleophilic Displacement at a Carbonyl Carbon Atom (ⅩⅢ). Methanolysis of Thiochloroformate in $CH_3OH-CH_3CN$ Mixtures (카르보닐탄소원자의 친핵성 치환반응 (제13보). 메탄올-아세토니트릴 혼합용매에서 Thiochloroformate의 가메탄올 분해반응)

  • Sangmoo La;Ikchoon Lee
    • Journal of the Korean Chemical Society
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    • v.24 no.4
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    • pp.288-294
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    • 1980
  • Methanolysis rate constants were determined for $CH_3O(CO)Cl,\;CH_3S(CO)Cl\;and\;CH_3S(CS)Cl\;in\;CH_3OH-CH_3CN$ mixtures. Results show that the rates are not predominantly influenced by the bulk solvent properties but are partly influenced by specific electrophilic solvation.Polarity of the solvent is not a dominant factor but it nevertheless plays a role in charge stabilization of the $S_N1$ like transition state. The methanolysis proceeds through $S_N1$ mechanism for $CH_3S(CS)Cl$ for which both specific solvation of leaving group by methanol and charge stabilization by a high dielectric medium are important, while for $CH_3O(CO)Cl\;methanolysis occurs\;via\;S_N2$ mechanism in which both of the solvent effects are unimportant.

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Methane and Nitrous Oxide Emissions from Livestock Agriculture in 16 Local Administrative Districts of Korea

  • Ji, Eun-Sook;Park, Kyu-Hyun
    • Asian-Australasian Journal of Animal Sciences
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    • v.25 no.12
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    • pp.1768-1774
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    • 2012
  • This study was conducted to evaluate methane ($CH_4$) and nitrous oxide ($N_2O$) emissions from livestock agriculture in 16 local administrative districts of Korea from 1990 to 2030. National Inventory Report used 3 yr averaged livestock population but this study used 1 yr livestock population to find yearly emission fluctuations. Extrapolation of the livestock population from 1990 to 2009 was used to forecast future livestock population from 2010 to 2030. Past (yr 1990 to 2009) and forecasted (yr 2010 to 2030) averaged enteric $CH_4$ emissions and $CH_4$ and $N_2O$ emissions from manure treatment were estimated. In the section of enteric fermentation, forecasted average $CH_4$ emissions from 16 local administrative districts were estimated to increase by 4%-114% compared to that of the past except for Daejeon (-63%), Seoul (-36%) and Gyeonggi (-7%). As for manure treatment, forecasted average $CH_4$ emissions from the 16 local administrative districts were estimated to increase by 3%-124% compared to past average except for Daejeon (-77%), Busan (-60%), Gwangju (-48%) and Seoul (-8%). For manure treatment, forecasted average $N_2O$ emissions from the 16 local administrative districts were estimated to increase by 10%-153% compared to past average $CH_4$ emissions except for Daejeon (-60%), Seoul (-4.0%), and Gwangju (-0.2%). With the carbon dioxide equivalent emissions ($CO_2$-Eq), forecasted average $CO_2$-Eq from the 16 local administrative districts were estimated to increase by 31%-120% compared to past average $CH_4$ emissions except Daejeon (-65%), Seoul (-24%), Busan (-18%), Gwangju (-8%) and Gyeonggi (-1%). The decreased $CO_2$-Eq from 5 local administrative districts was only 34 kt, which was insignificantly small compared to increase of 2,809 kt from other 11 local administrative districts. Annual growth rates of enteric $CH_4$ emissions, $CH_4$ and $N_2O$ emissions from manure management in Korea from 1990 to 2009 were 1.7%, 2.6%, and 3.2%, respectively. The annual growth rate of total $CO_2$-Eq was 2.2%. Efforts by the local administrative offices to improve the accuracy of activity data are essential to improve GHG inventories. Direct measurements of GHG emissions from enteric fermentation and manure treatment systems will further enhance the accuracy of the GHG data.

Molecular Cloning of Chitinase Genes Family from Serratia marcescens

  • Song, Young-Hwan;Kweon, Oh-Gun
    • Journal of fish pathology
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    • v.6 no.2
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    • pp.103-110
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    • 1993
  • Total genomic DNA library of Serratia marcescens was prepared by inserting Sau3AI partial digesting fragments(above 5 kb) into the dephosphorylated BamHl site of pUC19. In primary screening, two colonies were selected by observing the halo around E. coli transformants grown on the swollen colloidal chitin media. Secondary screening was performed by soaking two colonies with a few drops of 4-methylumbelleliferryl N-acetyl-$\beta$-D-glucocosaminide(4-MuNGlcNAc). As 4-MuNGlcNAc is a specific, fluorogenic substrate for chitinase, the positive clones produce light fluorescence by the exposure under the long wave U.V. light(360 nm). From genomic DNA library derived from pUC19, we have isolated two different chitinase clones, pCH1(11.0Kb) and pCH2(7.5Kb), which show completely different restriction map to each other. The cross-hybridization of pCH1EA and pCH2 have not revealed any hybridization signals to each other.

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Fabrication and characterization of silicon-based microsensors for detecting offensive $CH_3SH\;and\; (CH_3)_3N$ gases

  • Lee, Kyu-Chung;Hur, Chang-Wu
    • Journal of information and communication convergence engineering
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    • v.6 no.1
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    • pp.38-42
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    • 2008
  • Highly sensitive and mechanically stable gas sensors have been fabricated using the microfabrication and micromachining techniques. The sensing materials used to detect the offensive $CH_3SH$ and $(CH_3)_3N$ gases are 1 wt% Pd-doped $SnO_2$ and 6 wt% $Al_2O_3$-doped ZnO, respectively. The optimum operating temperatures of the devices are $250^{\circ}C$ and $350^{\circ}C$ for $CH_3SH$ and $(CH_3)_3N$, respectively and the corresponding heater power is, respectively, about 55mW and 85mW. Excellent thermal insulation is achieved by the use of a double-layer membrane: i.e. $0.2{\mu}m$-thick silicon nitride and $1.4{\mu}m$-thick phosphosilicate glass. The sensors are mechanically stable enough to endure the heat cycles between room temperature and $350^{\circ}C$, at least for 30 days.

Metal Complexes of Ambidentate Ligand (VIII). Ni (II) and Pd (II) Complexes of Isonitrosomethylacetoacetate Imines (Ambidentate 리간드의 금속착물 (제 8 보). Isonitrosomethylacetoacetate Imine 리간드의 니켈(II) 및 팔라듐(II) 착물)

  • Bon-Chang Goo;Gang-Yeol Choi;Man-Ho Lee;In-Whan Kim
    • Journal of the Korean Chemical Society
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    • v.37 no.7
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    • pp.662-671
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    • 1993
  • New Ni(II) and Pd(II) complexes of isonitrosomethylacetoacetate imine derivatives, Ni(IMAA-NH)(IMAA-NH'), Ni(IMAA-NH)(IMAA-NR), $Pd(IMAA-NH)_2\;and Pd(IMAA-NR)_2(R=CH_3,\;C_2H_5,\;n-C_3H_7,\;n-C_4H_9,\;or\;CH_2C_6H_5)$, where H-IMAA-NH and H-IMAA-NR represent isonitrosomethylacetoacetate imine and N-alkylisonitrosomethylacetoacetate imine derivative, respectively, have been prepared and the structures of the complexes have been studied by elemental analyses, electronic, infrared, and $^1H-\;and\;^{13}C-NMR$ spectroscopies.

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Spectrophotometric Quantitatification of Fe(II) and Fe(III) Ions Using N,N'-bis(4-methoxysalicylidene) phenylendiamine (N,N'-bis(4-methoxysalicylidene) phenylendiamine를 이용한 Fe(II) 및 Fe(III) 이온의 분광학적 분석)

  • Kim, Sun-Deuk;Seol, Jong-Min
    • Journal of the Korean Chemical Society
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    • v.55 no.3
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    • pp.463-471
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    • 2011
  • A novel $N_2O_2$ Schiff base ligand, N,N'-bis(4-methoxysalicylidene)phenylendiamine(4-$CH_3O$-Salphen), has been synthesized. It has been revealed that the compound is very useful for the spectrophotometric quantification of Fe(II) and Fe(III) ions in aqueous solutions, such as mineral water, hot spring water, sea water, and waste water. The optimum conditions for the quantitative analysis are the followings; [4-$CH_3O$-Salphen]=$4.0{\times}10^{-4}\;M$, DMF/$H_2O$=70/30(v/v), pH=3.4~3.8, T= at $55^{\circ}C$, and prereaction time=1.0 hr. The sample of single valence state was prepared by the preliminary oxidation or reduction using $H_2O_2$ ($5.0{\times}10^{-4}\;M$) and $NH_2OH{\cdot}HCl$ ($5.0{\times}10^{-4}\;M$). The quantitative analyses of Fe(II) and Fe(III) ion were performed by measuring the absorbance at 434 nm and 456 nm, respectively. The estimated mean values agreed well with the standard values within the range of 2.00~6.90%. The limit of detection was 27.9 ng/mL for Fe(II) and 55.8 ng/mL for Fe(III).

Synthesis and Dissociation Constants of Cationic Rhodium (I)-Triphenylarsine Complexes of Unsaturated Nitriles and Aldehyde

  • Chin, Chong-Shik;Park, Jeong-Han;Shin, Sang-Young;Kim, Choong-Il
    • Bulletin of the Korean Chemical Society
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    • v.8 no.3
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    • pp.179-183
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    • 1987
  • Reactions of $Rh(ClO_4)(CO)(AsPh_3)_2$ with unsaturated nitriles and aldehyde, L, produce a series of new cationic rhodium (I) complexes, $[RhL(CO)(AsPh_3)_2]ClO_4$ (L = $CH_2$ = CHCN, $CH_2$ = C($CH_3$)CN, trans-$CH_3CH$ = CHCN, $CH_2$ = CH$CH_2$CN, trans-$C_6H_5CH$ = CHCN, and trans-$C_6H_5CH$ = CHCHD) where L are coordinated through the nitrogen and oxygen, respectively but not through the ${\pi}$-system of the olefinic group. Dissociation constants for the reaction, $[RhL(CO)(AsPh_3)_2]ClO_4$ $\rightleftharpoons$ $Rh(ClO_4)(CO)(AsPh_3)_2$ + L, have been measured to be $1.20{\times}10^{-4}$ M (L = $CH_2$ = CHCN), $1.05{\times}10^{-4}$ M (L = $CH_2$ = C($CH_3$)CN, $3.26{\times}10^{-5}$ M (L = trans-$CH_3$CH = CHCN) and $6.45{\times}10^{-5}$ M (L = $CH_2$ = CH$CH_2$CN) in chlorobenzene at $25^{\circ}C, and higher than those of triphenylphosphine complexes, $[RhL(CO)(AsPh_3)_2]ClO_4$ where L are the corresponding nitriles that are coordinated through the nitrogen atom. The differences in dissociation constants seem to be predominantly due to the differences in ${\Delta}H$ (not due to the differences in ${\Delta}S$). The weaker Rh-N (unsaturated nitriles) bonding in $AsPh_3$ complexes than in $PPh_3$ complexes (based on ${\Delta}H$ values) suggests that the unsaturated nitriles in 2∼5 are good ${\sigma}$-donor and poor ${\pi}$-acceptor.