• Title/Summary/Keyword: $CF_4$ Plasma

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Effect of Diet Containing Whole Wheat Bread with Capsosiphon fulvescens and Lindera obtusiloba Ethanol Extracts on Plasma Glucose and Lipid Levels in Rats (매생이와 생강나무잎 에탄올 추출물이 첨가된 통밀빵을 섭취한 랫트의 혈당과 지질수준에 미치는 영향)

  • Han, Ah-Ram;Kim, Se-Wook;Chun, Su-Hyun;Nam, Mi-Hyun;Hong, Chung-Oui;Kim, Bok Hee;Kim, Tae Cheol;Lee, Kwang-Won
    • Korean Journal of Food Science and Technology
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    • v.48 no.2
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    • pp.178-186
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    • 2016
  • The present study was conducted to investigate the effect of whole wheat bread with added Lindera obtusiloba (LO) and Capsosiphon fulvescens (CF) ethanol extracts on serum glucose and lipid levels in Sprague Dawley rats. Rats were divided into five groups depending on the diet administered: normal bread (NC), whole wheat bread (W), whole wheat bread with LO leaves extract (WL), whole wheat bread with CF extract (WC), and whole wheat bread with freeze-drying CF (WDC). After 4 weeks of consuming the experimental diet, the blood glucose level and hemoglobin A1c contents were found to be significantly lower in the W, WL, WC, and WDC groups than in the NC group. The high-density lipoprotein-cholesterol levels increased in the WL group when compared to those in the NC group and triglycerides levels decreased in all wheat groups compared to those in the NC group. These results suggest that wheat breads containing LO and CF extracts are effective for preventing hypercholesterolemia and obesity.

Coffee intake can promote activity of antioxidant enzymes with increasing MDA level and decreasing HDL-cholesterol in physically trained rats

  • Choi, Eun-Young;Jang, Jin-Young;Cho, Youn-Ok
    • Nutrition Research and Practice
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    • v.4 no.4
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    • pp.283-289
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    • 2010
  • This study investigated the effect of coffee intake and exercise on the antioxidative activity and plasma cholesterol profile of physically trained rats while they were exercising. Forty eight rats were under either the control diet with water (C) or control diet with coffee (CF) and at the same time they were given physical training for 4 weeks. In terms of physical training, the rats were exercised on a treadmill for 30 minutes everyday. At the end of 4 weeks, animals in each dietary group were subdivided into 3 groups: before-exercise (BE); during-exercise (DE); after-exercise (AE). Animals in the DE group were exercised on a treadmill for one hour, immediately before being sacrificed. Animals in the AE group were allowed to take a rest for one hour after exercise. TG levels were significantly high in coffee intake group than in control group. Also TG level of AE group was significantly higher than that of BE group. Exercise and coffee-exercise interaction effects were significant in total cholesterol (P = 0.0004, 0.0170). The AE of coffee intake group showed highest total cholesterol levels. HDL-cholesterol was significantly lower in coffee intake group than in control group. Coffee, exercise, and coffee-exercise interaction effects were significant in SOD (P = 0.0001, 0.0001, and 0.0001). The AE and BE of coffee intake group showed higher SOD levels than the other four groups. Catalase activities were significantly higher in coffee intake group than control group. No significant main effect was found in GSH/GSSG. Coffee, exercise, and coffee-exercise interaction effects were significant in MDA levels (P = 0.0464, 0.0016, and 0.0353). The DE and AE of coffee intake group and the DE of control group showed higher MDA levels than the BE of control group. Therefore, coffee intake can promote activities of antioxidant enzyme but it also increases MDA and decreases HDL-cholesterol in physically trained rats.

A Study on The Improvement of Profile Tilting or Bottom Distortion in HARC (높은 A/R의 콘택 산화막 에칭에서 바닥모양 변형 개선에 관한 연구)

  • Hwang, Won-Tae;Kim, Gli-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.5
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    • pp.389-395
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    • 2005
  • The etching technology of the high aspect ratio contact(HARC) is necessary at the critical contact processes of semiconductor devices. Etching the $SiO_{2}$ contact hole with the sub-micron design rule in manufacturing VLSI devices, the unexpected phenomenon of 'profile tilting' or 'bottom distortion' is often observed. This makes a short circuit between neighboring contact holes, which causes to drop seriously the device yield. As the aspect ratio of contact holes increases, the high C/F ratio gases, $C_{4}F_{6}$, $C_{4}F_{8}$ and $C_{5}F_{8}$, become widely used in order to minimize the mask layer loss during the etching process. These gases provide abundant fluorocarbon polymer as well as high selectivity to the mask layer, and the polymer with high sticking yield accumulates at the top-wall of the contact hole. During the etch process, many electrons are accumulated around the asymmetric hole mouth to distort the electric field, and this distorts the ion trajectory arriving at the hole bottom. These ions with the distorted trajectory induce the deformation of the hole bottom, which is called 'profile tilting' or 'bottom distortion'. To prevent this phenomenon, three methods are suggested here. 1) Using lower C/F ratio gases, $CF_{4}$ or $C_{3}F_{8}$, the amount of the Polymer at the hole mouth is reduced to minimize the asymmetry of the hole top. 2) The number of the neighboring holes with equal distance is maximized to get the more symmetry of the oxygen distribution around the hole. 3) The dual frequency plasma source is used to release the excessive charge build-up at the hole mouth. From the suggested methods, we have obtained the nearly circular hole bottom, which Implies that the ion trajectory Incident on the hole bottom is symmetry.

Improving CO2 Adsorption Performance of Activated Carbons Treated by Plasma Reaction with Tetrafluoromethane (사불화탄소 플라즈마 반응에 의해 처리된 활성탄소의 CO2 흡착 성능 향상)

  • Chung Gi Min;Chaehun Lim;Seo Gyeong Jeong;Seongjae Myeong;Young-Seak Lee
    • Applied Chemistry for Engineering
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    • v.34 no.2
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    • pp.170-174
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    • 2023
  • CO2 is known as one of the causes of global warming, and various studies are being conducted to capture it. In this study, a tetrafluoromethane (CF4) plasma reaction was performed to improve the CO2 adsorption of activated carbons (ACs) through changes in surface characteristics, and the adsorption characteristics according to the reaction time were considered. After the reaction, the micropore volume increased up to 1.03 cm3/g. In addition, as the reaction time increased, the fluorine content on the surface increased to 0.88%. It was possible to simultaneously control the pore properties and surface functional groups of the ACs through this experiment. Also, the CO2 uptake of surface-treated ACs improved up to 7.44% compared to untreated ACs, showing the best performance at 3.90 mmol/g when the reaction time was 60 s. This is due to the synergy effect of the fluorine functional groups introduced on the surface of the ACs and the increased micropore volume caused by the etching effect. It was found that the micropore volume had a greater effect on CO2 adsorption in the region where the CO2 uptake was less than 3.67 mmol/g, while the added fluorine content had a greater effect in the region above that.

Changes in the Myocardial Antioxidant Enzyme System by Post-Ischemic Reperfusion During Corontory Artery Bypass Operations (관상동맥우회술시 심근허혈후 재관류에 의한 활성산소 방어효소계의 변화)

  • 김응중;김기봉
    • Journal of Chest Surgery
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    • v.29 no.8
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    • pp.850-860
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    • 1996
  • Oxygen free radicals and their metabolites have been implicated as possible causes of reperrusion injury In animal models. Their role in the clinical setting is still controversial. The aim of this study was to evaluate the degree of tissue damage, oxidative stress. and changes in the antioxidant enzyme system in patients undergoing cor nary artery bypass graft operations(CABG) with myocardial protection by cold blood cardioplegia. In patients undergoing CABG(n:10). the levels of lactate dehydrogenate(LDH), creatine phosphokinase MB fraction(CK-MB), and malondialdehyde(M DA) were measured In the coronary sinus effluent before aortic cross clamping and 20 minutes after reperfusion. At the same time, the myocardial tissue activities of superoxide dismutase(SOD). catalase(CAT), glutathione peroxiddse(GSHPX), glutathione reductase (GSSGRd), and glucose 6-phosphate dehydrogenate(GfPDH ) were determined in the right atrial auricle excised before aortic cross clamping and in the left atrial auricle excised 20 minutes after reperfuslon. The levels of increased significantly after reperrusion(p< U.05). There were no significant changes in CAT and CfPDH levels. Western blot analysis was performed to study the induction of antioxidant enzyme and demonstrated increased amount of Cu,Zn-SOD.

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Interaction of physical trainings and coffee intakes in fuel utilization during exercise in rats

  • Choi, Eun-Young;Cho, Yun-Ok
    • Nutrition Research and Practice
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    • v.7 no.3
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    • pp.178-184
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    • 2013
  • This study investigates the impact of exercises, coffee intakes, and physical trainings on fuel utilization in rats. Ninety-six rats were fed a control diet with either water (C) or coffee (CF; 0.12 g freeze-dried instant coffee/100 g body weight/d). Additionally, the animals go through physical training (TC and TCF) or no training (NTC and NTCF) for 4 weeks. For physical training, animals have to exercise on treadmills for 30 minutes (5 d per week, $15^{\circ}$ incline, 0.5-0.8 km/h). At the end of week 4, the animals in each group were subdivided into three exercise groups: before exercise (BE), during exercise (DE), and after exercise (AE). The DE rats exercised on treadmills for 1 hour immediately before being sacrificed. Hemoglobin, hematocrit, glucose, glycogen, protein, triglyceride (TG), and free fatty acid (FFA) levels in the plasma, liver, and skeletal muscle of the rats were compared accordingly. Organ weights were also measured. Coffee-training interaction had a significant impact on heart weight, visceral fat, hemoglobin, hematocrit, liver glycogen in DE and AE, and liver triglyceride in DE and AE. Exercise (meaning exercised on a treadmill for 1 hour immediately before being sacrificed) training interaction was significant in liver glycogen, muscle glycogen in control diet and control diet with coffee, FFA and muscle TG levels at control diet with coffee group. Exercise-coffee interactions significantly influenced the FFA with no training groups. Exercise-coffee-training interaction significantly effects on FFA, Liver TG and Muscle TG. Coffee intakes can increase lipolysis during exercising but coffee consumptions delay the recovery of liver glycogen levels in trained rats after exercising. Coffee intakes can increase lipolysis during exercising but coffee consumptions delay the recovery of liver glycogen levels in trained rats after exercising. Coffee can be an effective ergogenic aid during exercise for physically trained rats.

유리기판의 광추출 효율 향상을 위한 마스크 제작 공정 없는 플라즈마 식각 연구

  • Seo, Dong-Wan;Gwon, O-Hyeong;Lee, U-Hyeon;Kim, Ji-Won;Hwang, Gi-Ung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.507-507
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    • 2013
  • 유리기판으로 투과되는 빛들 중에는 내부 전반사나 wave-guided mode로 인하여 손실이 일어나 일반적으로 20%의 광추출 효율을 가진다. 이러한 문제점을 해결하기 위한 연구에는 Photonic Crystal과 같은 주기적인 나노 구조물이 있는데 이러한 구조물을 제작하기 위한 마스크 공정 과정은 대부분 복잡하거나 비싼 단점이 있다. 이에 본 발표에서는 마스크 없이 비정질소다라임 유리의 구조물 생성으로 광 추출 효율이 상승하는지 보고자 하였다. M-ICP (Magnetized-Induced Coupled Plasma)란 용량 결합형 플라즈마와 유도 결합형 플라즈마 두 가지 방식의 플라즈마를 이용한 것인데 용량 결합형 플라즈마를 이용해 이온이 sheath에 의해 가속되어 유리표면에 부딪히고 그에 따라 유리가 식각되는 물리적 식각을 이용하였다. 또한 이온의 밀도를 조절하기 위해 유도결합형 플라즈마 방식을 이용하여 식각률을 높였다. 화학적 식각을 위해서는 CF4와 O2혼합 가스를 이용해 F가 Si와 결합하여 SiF4가 되어 사라지고 탄소잔여물인 C는 O2와 반응하여 제거하였다. 그 결과, 랜덤한 분포를 가지는 미세한 구조물(stochastic sub-wavelength structure)을 유리 표면에 형성할 수 있었고, 또한 다양한 가스 종류와 압력, source power와 bias power, 그리고 시간을 바꿔가며 미세 구조물들을 관찰하였다. 실험 결과, 가시광선 파장 이하의 높이를 갖고 수 마이크로미터의 너비를 갖는 구조물이 전반사되는 빛을 효율적으로 추출하는 것을 산란되는 빛의 정도인 diffusive transmittance 가 기존 0%에서 15% 정도로 증가하는 것으로 스펙트로포토미터 측정을 통해 확인하였다. 이러한 유리 기판 위 구조물 생성방법을 OLED에 적용한다면 적은 비용으로 소자의 효율을 크게 향상 시킬 수 있을 것이다. 또한 본 처리 과정의 장점은 기존의 방법에 필요한 스퍼터링이나 RTA 처리 과정이 필요 없어 공정 단가 절감과 제조 공정의 단순화로 높은 생산성을 얻을 수 있으며 대면적화에도 유리하다.

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Levels of Plasma Glucose and Lipid in Rats Fed Bread Supplemented with Natural Extracts (천연추출물이 첨가된 식빵을 섭취한 흰쥐의 혈당 및 지질수준에 미치는 영향)

  • Kim, Se-Wook;Han, Ah-Ram;Chun, Su-Hyun;Nam, Mi-Hyun;Hong, Chung-Oui;Kim, Bok Hee;Kim, Tae Cheol;Lee, Kwang-Won
    • Korean Journal of Food Science and Technology
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    • v.48 no.1
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    • pp.77-85
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    • 2016
  • In this study, 4-week-old rats were fed bread supplemented with Terminalia chebula (TC), Plantago asiatica (PA), Linder obtusiloba (LO), and Capsosiphon fulvescens (CF) ethanol extracts, to determine the decrease in blood glucose levels, as well as the anti-inflammatory and lipid-enhancing effects. Previous studies have demonstrated the antioxidative effects of these ethanol extracts. After sacrifice, the liver tissue, whole blood, and serum samples were collected for biochemical analysis. The results showed a significant decrease in blood glucose level, lipid peroxidation, malondialdehyde (MDA) level, HbA1c level, total cholesterol, and low-density lipoprotein (LDL)-cholesterol (p<0.05) and an increase in high-density lipoprotein (HDL)-cholesterol level in rats fed bread supplemented with LO and CF ethanol extracts (p<0.05). Therefore, the results of this study demonstrate that bread supplemented with LO and CF ethanol extracts can potentially affect the blood glucose level and lead to lipid enhancement.

Decrease of Global Warming Effect During Dry Etching of Silicon Nitride Layer Using C3F6O/O2 Chemistries

  • Kim, Il-Jin;Moon, Hock-Key;Lee, Jung-Hun;Jung, Jae-Wook;Cho, Sang-Hyun;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.459-459
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    • 2012
  • Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

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이중 주파수를 이용한 유도 결합형 플라즈마의 특성 분석

  • Seo, Jin-Seok;Kim, Tae-Hyeong;Mishra, Anurag;Kim, Gyeong-Nam;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.577-577
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    • 2013
  • 플라즈마를 이용하는 공정은 반도체 산업에서 박막트랜지스터, 평면 모니터와 LCD 등 다양한 반도체 및 디스플레이 소자를 제작하는데 중요한 기술 중 하나로 발전되어 왔다. 현재 플라즈마 공정 기술을 이용하여 소자의 크기를 수십 나노 이하로 공정함으로써 수율을 향상시킬 수 있었지만, 소자의 미세화는 그 한계점에 봉착하였다. 그러한 이유로 웨이퍼 사이즈의 크기를 대구경화 시킴으로써 이런 문제점을 극복하고자 하였지만, 대구경 웨이퍼 사이즈에 맞는 차세대 대면적 공정 장비와 그에 따른 플라즈마 소스의 개발과 이를 컨트롤 할 수 있는 능력이 매우 절실하게 되었다. 본 연구에서는 대구경 웨이퍼용 플라즈마 소스를 위해 상대적으로 낮은 압력과 고밀도 플라즈마를 발생시킬 수 있는 유도 결합형 플라즈마원을 사용하였다. 하지만 유도 결합형 플라즈마 소스의 경우 대구경화에 따른 안테나의 길이가 길어짐으로써 생기는 정상파 효과를 피할 수가 없게 되었다. 그러한 이유로, 본 연구에서는 정상파 효과를 줄일 수 있는 상대적으로 낮은 주파수를 사용하는 안테나의 형태를 이용하여 실질적인 공정 영역에 있어서의 균일도 문제를 해결하였다. 또한, 플라즈마의 특성조절을 위해 이중주파수를 사용함 으로써 플라즈마 특성 조절을 하였다. 이러한 형태의 이중주파수를 사용하는 플라즈마 소스를 이용하여 10 mTorr의 Ar/CF4 조건에서 양이온 종들을 PSM (Plasma Sampling Mass spectroscopy, HIDEN Inc.)을 통해 에너지를 분석하였다. 이중 주파수에 있어 전력비율에 따라 IEDs (Ion Energy Distributions)는 많은 변화가 관찰되었으며, 인가하는 입력전력에 따라 E-H mode 전이가 일어남을 관찰할 수 있었다.

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