Soft Magnetic Properties of Fe-B-Si-N thin films Sputtered in ($Ar+N_2$ ) Plasma
(($Ar+N_2$ )분위기 중에 제작된 Fe-B-Si-N 합금 박막의 연자기적 성질)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1996.11a
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- pp.17-17
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- 1996