• 제목/요약/키워드: $Al_2O_3/AlN$ bilayer

검색결과 5건 처리시간 0.022초

Interfacial Properties of Atomic Layer Deposited Al2O3/AlN Bilayer on GaN

  • Kim, Hogyoung;Kim, Dong Ha;Choi, Byung Joon
    • 한국재료학회지
    • /
    • 제28권5호
    • /
    • pp.268-272
    • /
    • 2018
  • An $Al_2O_3/AlN$ bilayer deposited on GaN by atomic layer deposition (ALD) is employed to prepare $Al_2O_3/AlN/GaN$ metal-insulator-semiconductor (MIS) diodes, and their interfacial properties are investigated using X-ray photoelectron spectroscopy (XPS) with sputter etch treatment and current-voltage (I-V) measurements. XPS analyses reveal that the native oxides on the GaN surface are reduced significantly during the early ALD stage, indicating that AlN deposition effectively clelans up the GaN surface. In addition, the suppression of Al-OH bonds is observed through the ALD process. This result may be related to the improved device performance because Al-OH bonds act as interface defects. Finally, temperature dependent I-V analyses show that the barrier height increases and the ideality factor decreases with an increase in temperature, which is associated with the barrier inhomogeneity. A Modified Richardson plot produces the Richardson constant of $A^{**}$ as $30.45Acm^{-2}K^{-2}$, which is similar to the theoretical value of $26.4Acm^{-2}K^{-2}$ for n-GaN. This indicates that the barrier inhomogeneity appropriately explains the forward current transport across the $Au/Al_2O_3/AlN/GaN$ interface.

Performance improvements of organic solar cell using dual cathode buffer layers

  • Sachdeva, Sheenam;Kaur, Jagdish;Sharma, Kriti;Tripathi, S.K.
    • Current Applied Physics
    • /
    • 제18권12호
    • /
    • pp.1592-1599
    • /
    • 2018
  • The present study deals with the effect of dual cathode buffer layer (CBL) on the performance of bilayer of 4,4'-cyclohexylidenebis[N,N-bis(4-methylphenyl)benzenamine] (TAPC) and fullerene (C70)-based organic solar cell (OSC) with low donor concentration. OSC devices with CBLs have been fabricated using thermal vapor deposition technique. We report the use of lithium fluoride (LiF) and molybdenum trioxide ($MoO_3$) as CBLs. The insertion of LiF between C70 and aluminium (Al) electrode enhances the power conversion efficiency (PCE) of device from 1.89% to 2.47% but quenching of photogenerated excitons is observed at interface of C70 and LiF layers. Incorporation of $MoO_3$ between LiF and Al electrode further enhances PCE of device to 3.51%. This has also improved the material quality and device properties, by preventing the formation of gap states and diminishing exciton quenching.

저온 공정 온도에서 $Al_2O_3$ 게이트 절연물질을 사용한 InGaZnO thin film transistors

  • 우창호;안철현;김영이;조형균
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
    • /
    • pp.11-11
    • /
    • 2010
  • Thin-film-transistors (TFTs) that can be deposited at low temperature have recently attracted lots of applications such as sensors, solar cell and displays, because of the great flexible electronics and transparent. Transparent and flexible transistors are being required that high mobility and large-area uniformity at low temperature [1]. But, unfortunately most of TFT structures are used to be $SiO_2$ as gate dielectric layer. The $SiO_2$ has disadvantaged that it is required to high driving voltage to achieve the same operating efficiency compared with other high-k materials and its thickness is thicker than high-k materials [2]. To solve this problem, we find lots of high-k materials as $HfO_2$, $ZrO_2$, $SiN_x$, $TiO_2$, $Al_2O_3$. Among the High-k materials, $Al_2O_3$ is one of the outstanding materials due to its properties are high dielectric constant ( ~9 ), relatively low leakage current, wide bandgap ( 8.7 eV ) and good device stability. For the realization of flexible displays, all processes should be performed at very low temperatures, but low temperature $Al_2O_3$ grown by sputtering showed deteriorated electrical performance. Further decrease in growth temperature induces a high density of charge traps in the gate oxide/channel. This study investigated the effect of growth temperatures of ALD grown $Al_2O_3$ layers on the TFT device performance. The ALD deposition showed high conformal and defect-free dielectric layers at low temperature compared with other deposition equipments [2]. After ITO was wet-chemically etched with HCl : $HNO_3$ = 3:1, $Al_2O_3$ layer was deposited by ALD at various growth temperatures or lift-off process. Amorphous InGaZnO channel layers were deposited by rf magnetron sputtering at a working pressure of 3 mTorr and $O_2$/Ar (1/29 sccm). The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. The TFT devices were heat-treated in a furnace at $300^{\circ}C$ and nitrogen atmosphere for 1 hour by rapid thermal treatment. The electrical properties of the oxide TFTs were measured using semiconductor parameter analyzer (4145B), and LCR meter.

  • PDF

590 MPa TRIP강의 선택적 표면산화 거동과 표면 산화막이 도금특성에 미치는 영향 (Selective Surface Oxidation of 590MPa TRIP Steel and Its Effect on Hot-Dip Galvanizability)

  • 김성환;임준모;허주열;이석규;박노범;김종상
    • 대한금속재료학회지
    • /
    • 제49권4호
    • /
    • pp.281-290
    • /
    • 2011
  • In order to gain better understanding of the selective surface oxidation and its influence on the galvanizability of a transformation-induced plasticity (TRIP) assisted steel containing 1.5 wt.% Si and 1.6 wt.% Mn, a model experiment has been carried out by depositing Si and Mn (each with a nominal thickness of 10 nm) in either monolayers or bilayers on a low-alloy interstitial-free (IF) steel sheet. After intercritical annealing at $800^{\circ}C$ in a $N_2$ ambient with a dew point of $-40^{\circ}C$, the surface scale formed on 590 MPa TRIP steel exhibited a microstructure similar to that of the scale formed on the Mn/Si bilayer-coated IF steel, consisting of $Mn_{2}SiO_{4}$ particles embedded in an amorphous $SiO_{2}$ film. The present study results indicated that, during the intercritical annealing process of 590 MPa TRIP steel, surface segregation of Si occurs first to form an amorphous $SiO_{2}$ film, which in turn accelerates the out-diffusion of Mn to form more stable Mn-Si oxide particles on the steel surface. During hot-dip galvanizing, particulate $Fe_{3}O_{4}$, MnO, and Si-Mn oxides were reduced more readily by Al in a Zn bath than the amorphous $SiO_{2}$ film. Therefore, in order to improve the galvanizability of 590 TRIP steel, it is most desirable to minimize the surface segregation of Si during the intercritical annealing process.

지르코니아 프라이머 종류에 따른 복합레진-지르코니아의 전단결합강도 (Effec of different zirconia primers on shear bond strengths of composite resin to bonded zirconia)

  • 석홍병;김태석;안재석;이정환
    • 대한치과기공학회지
    • /
    • 제38권3호
    • /
    • pp.135-142
    • /
    • 2016
  • Purpose: The aim of this research was to evaluate the influence of different surface treatments on the shear bond strength of zirconia ceramic to composite resin. Methods: Seventy two cylinder-shape (diameter: 5 mm; height: 12 mm) blocks of experimental industrially manufactured Y-TZP ceramic were abraded with $125{\mu}m\;Al_2O_3$ particles and randomly divided into 4 groups. All the materials were categorized as group Gc(control group - composite resin veneering on zirconia surface), Gr - composite resin veneering after surface treatment of Rocatec system (3M ESPE, Seefeld, Germany) group; Gz - composite resin veneering after surface treatment of Zirconia primer (Z-primer, Bisco, U.S.A) group; Gm - composite resin veneering after surface treatment of zirconia primer (Monobond plus, ivoclar vivadent AG, Liechtenstein) group. Two different zirconia primers and Rocatec system were used to zirconia cylinders (n=16) onto the zirconia surface. Zirconia specimens, polished and roughened, were pretreated and composite bilayer cylinders bonded using conventional adhesive techniques. Results: Shear bond strengths were analyzed using single-factor ANOVA(p<0.05). Bond strength values achieved after airbone particle abrasion and zirconia surface pre-treatments(p<0.05). Conclusion: Shear bond strength tests denmonstrated that zirconia primer is a viable method to improved bond strength between zirconia ceramic core and veneering composites.