The Fabrication of ITO Thin-film O3 Gas Sensors Using R.F. Magnetron Sputtering Method and their Characterization (R.F. Magnetron Sputtering법을 이용한 ITO 박막 오존 가스센서의 제조 및 특성)
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- Journal of the Korean Ceramic Society
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- v.39 no.9
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- pp.840-845
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- 2002