The Fabrication of ITO Thin-film O3 Gas Sensors Using R.F. Magnetron Sputtering Method and their Characterization
![]() |
Kwon, Jung-Bum
(Department of Materials Science and Engineering, The University of Seoul)
Jung, Kyoung-Keun (Department of Materials Science and Engineering, The University of Seoul) Lee, Dong-Su (Inostek Inc.) Ha, Jo-Woong (Inostek Inc.) Yoo, Kwang-Soo (Department of Materials Science and Engineering, The University of Seoul) |
1 | K. S. Yoo, 'Fabrication and Characteristics of Thin Films for Ceramic Sensors,' Sci. and Tech. of Ceram. Mater., 1 [3] 293-301 (1992) |
2 | A. Hattori, H. Tachibana, N. Yoshiike and A. Yoshida, 'Ozone Sensor Made by Dip Coating Method,' Sensors and Actuators A, 77 120-25 (1999) DOI ScienceOn |
3 |
K. Lee, 'Fabrication of |
4 |
J. W. Park, ' |
5 |
J. I. Lee and S. K. Choi, 'Relationship between Film Density and Electrical Properties on D.C. Magnetron Reactive Sputtered Sn-doped |
6 |
S. K. Jung, B. C. Kim, S. H. Chang and J. J. Kim, 'Sintering Behaviors of ITO Ceramics with Additions of |
7 | T. Seiyama, 'Gas Detection by Activated Semiconductor Sensor,' Denki kagaku, 40 [3] 244-49 (1972) |
8 |
K. S. Yoo and T. S. Kim, 'Gas-sensing Characteristics of |
9 | W. J. Jeong, G. C. Park and Y. T. Yoo, 'Properties of ITO Thin Films Fabricated by R.F. Magnetron Sputtering,' J. Kor. Sensor Soc., 4 [22] 51-7 (1995) |
10 |
K. S. Yoo and H. J. Jung, 'Gas-sensing Characteristics of Semiconducting Materials Based on |
![]() |