• Title/Summary/Keyword: ${\mu}CM$

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New Ruthenium Complexes for Semiconductor Device Using Atomic Layer Deposition

  • Jung, Eun Ae;Han, Jeong Hwan;Park, Bo Keun;Jeon, Dong Ju;Kim, Chang Gyoun;Chung, Taek-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.363-363
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    • 2014
  • Ruthenium (Ru) has attractive material properties due to its promising characteristics such as a low resistivity ($7.1{\mu}{\Omega}{\cdot}cm$ in the bulk), a high work function of 4.7 eV, and feasibility for the dry etch process. These properties make Ru films appropriate for various applications in the state-of-art semiconductor device technologies. Thus, it has been widely investigated as an electrode for capacitor in the dynamic random access memory (DRAM), a metal gate for metal-oxide semiconductor field effect transistor (MOSFET), and a seed layer for Cu metallization. Due to the continuous shrinkage of microelectronic devices, better deposition processes for Ru thin films are critically required with excellent step coverages in high aspect ratio (AR) structures. In these respects, atomic layer deposition (ALD) is a viable solution for preparing Ru thin films because it enables atomic-scale control of the film thickness with excellent conformality. A recent investigation reported that the nucleation of ALD-Ru film was enhanced considerably by using a zero-valent metallorganic precursor, compared to the utilization of precursors with higher metal valences. In this study, we will present our research results on the synthesis and characterization of novel ruthenium complexes. The ruthenium compounds were easy synthesized by the reaction of ruthenium halide with appropriate organic ligands in protic solvent, and characterized by NMR, elemental analysis and thermogravimetric analysis. The molecular structures of the complexes were studied by single crystal diffraction. ALD of Ru film was demonstrated using the new Ru metallorganic precursor and O2 as the Ru source and reactant, respectively, at the deposition temperatures of $300-350^{\circ}C$. Self-limited reaction behavior was observed as increasing Ru precursor and O2 pulse time, suggesting that newly developed Ru precursor is applicable for ALD process. Detailed discussions on the chemical and structural properties of Ru thin films as well as its growth behavior using new Ru precursor will be also presented.

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Interfacial Properties of Octenyl Succinyl Barley ${\beta}$-Glucan in Emulsion System (유화액 시스템에서 옥테닐 호박산 베타글루칸의 계면 특성)

  • Gil, Na-Young;Kim, San-Seong;Lee, Eui-Seok;Shin, Jung-Ah;Lee, Ki-Teak;Hong, Soon-Taek
    • Journal of the Korean Applied Science and Technology
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    • v.31 no.4
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    • pp.642-652
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    • 2014
  • The synthesis of octenyl succinyl ${\beta}$-gucan (OSA-${\beta}$-glucan) was carried out and its interfacial properties at the oil-water interface and in emulsion systems were investigated. An aqueous ethanol system as a reaction media was used to facilitate the synthesis process; 10% (w/w) ethanol found to be the best as it showed a maximum degree of substitution (DS: 0.0132). FT-IR showed a characteristic absorption spectrum at $1736cm^{-1}$, indicating the esterification of octenyl succinyl groups to ${\beta}$-glucan backbone. As for interfacial tension measurements, it was decreased with increasing concentration of OSA-${\beta}$-glucan in the aqueous phase and when NaCl was added to aqueous OSA-${\beta}$-glucan solution in the range of 0.01 M to 0.1 M and also when pH was raised (pH 3 ~ pH 9). In systems of emulsion stabilized with OSA-${\beta}$-glucan, fat globule size found to decrease with increasing concentration of OSA-${\beta}$-glucan, showing a critical value of about $0.32{\mu}m$ at 0.5 wt%. When the OSA-${\beta}$-glucan emulsions were stored, it was found that fat globule size was increased with storage time and particularly pronounced increase was observed in emulsion with 1% OSA-${\beta}$-glucan, possibly due to depletion flocculation. Results of creaming stability evaluated by light scattering technique showed that it was more stable in emulsions containing smaller fat globule size. Surface load of OSA-${\beta}$-glucan in emulsions increased with increasing concentration of OSA-${\beta}$-glucan, suggesting a multilayer adsorption.

Assessment of Hydrogeochemical Characteristics and Contaminant Dispersion of Aquifer around Keumsan Municipal Landfill (금산 매립장 주변 대수층의 수리지화학적 특성 및 오염 확산 평가)

  • Oh, In-Suk;Ko, Kyung-Seok;Kong, In-Chul;Ku, Min-Ho
    • Economic and Environmental Geology
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    • v.41 no.6
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    • pp.657-672
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    • 2008
  • The purposes of this study are to investigate the hydrogeochemical characteristics of groundwaters around Keumsan municipal landfill, and to evaluate the contaminant dispersion from the landfill and its environmental impact. To achieve these goals, groundwater quality logging, hydrochemical analysis, multivariate statistical analysis, and contaminant transport modeling were performed. The water quality logging indicated a leaking from the landfill at the depth of 4-12m around a leachate sump. Electrical conductivity data indicated that groundwaters within 70-100m from landfill were affected by the landfill leakage. Principal components 1 and 2 obtained from principal components analysis (PCA) reflect the influence of leachate and the characteristics of aquifer media, respectively. The results of principal component analysis also indicated the natural attenuation processes such as cation exchange, sorption, and microbial biodegradation. The modeling results showed that groundwater flow westward along a valley from the landfill and contaminants transport accordingly.

The Effects of Pulsed Electromagnetic Energy and Microcurrent on Wound Healing in Rabbits. (맥동전자장에너지의 미세전류가 가토의 상처치유에 미치는 영향)

  • Kwon Won-An;Park Rae-Joon;Park Youn-Ki;Hwang Tae-Yeun
    • The Journal of Korean Physical Therapy
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    • v.12 no.3
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    • pp.319-329
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    • 2000
  • The purpose of this study w8s to evaluate the effects of pulsed electromagnetic energy(Diapulse) and microcurrent on the wound healing in rabbits. 15 domestic rabbits were randomly assigned to the PRME(n=5). MC(n=5) and CON(n=91 group. Each rabbits were anesthetized with lidocaine HCL $2\%$. Skin wounds were created laterally on the back of IS domestic rabbits(33cm). From 24 hours after being injured, the rabbits of the PEME group were irradiated with an intensity of 3 at a 300 pulses per second, which were applied for 15 minutes every day during the 12 days. The MC group were stimulated with an intensity of $50{\mu}A$ at frequency of40 pulses per second, which were applied for 15 minutes every day during the 12 days. The CON group were not stimulated. The rabbits were sacrificed and the incised wound pans were processed appropriately for the light microscopic examination on the 3rd day, 6th day and 12th day before the beginning of wound treatment. The areas of wound were measured with metric graph paper. The results were as tallows. 1 The PRME and MC group compared with control group showed that wound closure rate increased on 6th, 12th day. 2. It was found that the CON group did not show a complete maturation and had a chronic inflammatory response. Judging from the irregularity of intercellular space and the loose alignment of connective tissue. these findings showed that wound healing was delayed. 3. It showed that inflammatory cells. fibroblasts and epithelial cells activity rapidly processed in the PEME group compared with the CON group. It was found that the PEMI; group showed a advanced remodeling of epithelial layer and a positive repair of connective tissue. 4. It showed that fibroblasts, epithelial cells and inflammatory cells activity rapidly processed in the MC group compared with the CON group. It was found that the MC group showed a improved remodeling of epithelial layer and a dense connective tissue.

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The Effect of Lipo-PGE1 According to the Routes of Administration on the Survival of Transverse Rectus Abdominis Musculocutaneous Flap in Rats (Lipo-PGE1의 투여경로가 흰쥐의 횡복직근피판의 생존률에 미치는 효과)

  • Kim, Sung-Sik;Byeon, Jun-Hee;Yoo, Gyeol;Han, Ki-Taik
    • Archives of Plastic Surgery
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    • v.32 no.1
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    • pp.12-18
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    • 2005
  • The Transverse rectus abdominis musculocutaneous (TRAM) flap has been commonly used for autologous breast reconstruction. Despite these clinical usefulness, the TRAM flap is prone to partial flap or fat necrosis in especially pedicled flap. To improve flap survival, the surgical delay procedures and pharmacological treatments have been developed. In many studies for the pharmacological treatment, Lipo-$PGE_1$ has demonstrated a marked ability to improve flap survival and it's effect has been proved similar to surgical delay procedure. The purpose of this study is to determine the most effective route of Lipo-$PGE_1$ administration as a pharmacological treatment in TRAM flap of the rat. Fifty male Sprague-Dawley rats weighing 300-350 gm were divided into five groups, One week before flap elevation, Lipo-$PGE_1$($2{\mu}g/kg$) was injected three times in a week and than the left inferior epigastric vessel based TRAM flap ($5.0{\times}3.0cm$) elevated; group I: no procedure before flap elevation; group II: intraperitoneal injection; group III: intravenous injection; group IV: subcutaneous injection; group V: topical application. A flap was assessed at postoperative 7 days by comparison of flap survival rate, vessel counts(H-E stain), and vascular endothelial growth factor(VEGF) protein expressed by Western blot. The results demonstrated that the mean percentages of the flap survival area in group III were significantly higher than that of any other group(p<0.05). The vessel counts of all experimental groups were statistically higher than that of control group(p<0.05). Only in group III, the VEGF protein expression was increased significantly than control group and there are no difference in other experimental groups. In conclusion, the intravenous administration of the Lipo-$PGE_1$ is the most effective on flap survival, and the VEGF induced by Lipo-$PGE_1$ has some positive effects on new vessel formation and flap survival.

Sclerotinia Shoot Rot of Grapevine (Vitis spp.) Caused by Sclerotinia sclerotiorum in Korea (Sclerotinia sclerotiorum에 의한 포도나무 균핵병 발생)

  • Park, Jong-Han;Han, Kyung-Sook;Han, You-Kyoung;Lee, Jung-Sup;Kim, Dae-Hyun;Hwang, Jeong-Hwan
    • Research in Plant Disease
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    • v.15 no.3
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    • pp.259-261
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    • 2009
  • Sclerotinia shoot rot of Grapevine(Vitis labruscana) occurred at Gapyeong and Yeongwol area from 2003 to 2005. Infected plants showed shoot blight at the one-year-old fruit bearing branches. The first visible symptom noticed was wilting and blighting of the branches. The obvious and typical initial symptom is the presence of a cottony, white, dense mat of mycelial growth on the surface of the diseased lesions. The base or stem of the infected young shoots develop a pale brown rotted area, which girdled and killed shoots. In advanced stages of the disease, stems and branches became bleached and eventually died. The isolates collected from diseased grapevine stem were identified as Sclerotinia sclerotiorum based on the morphological and cultural characteristics. The pathogenicity test revealed that Vitis vinifera(cultivar: Kyoho) was stronger than V. labruscana(cultivar: Campbell early) to the pathogen. This is the first report on sclerotinia shoot rot of grapevine in Korea.

Purification and N-Terminal Study of Bence Jones Proteins (Bence Jones 단백질(蛋白質)의 정제(精製) 및 N-말단검출(末端檢出))

  • Kim, Jun-Pyong
    • Applied Biological Chemistry
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    • v.13 no.1
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    • pp.59-64
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    • 1970
  • Human Bence Jones Protein could be purified by DEAF-Sephadex A-50 column $(2{\times}37cm)$ with 0.02M phosphate Buffer (pH 8.0) and gradient increasing with NaCl concentration as in Fig. 2-4. Sample As (K-type Bence Jones Protein) had two component, F-I was major component and its dried weight was 350mg. of starting material of 500mg. Other Sample Im and Ik (${\lambda}$-type Bence Jones Protein) was purified by DEAE-Sephadex A-50 with 0.02M phosphate Buffer(pH 8.0)too. F-I (major component) of Im and F-I of Ik were 242mg and 146mg. its dried weight respectively. K-type of Bence Jones Protein's(As, Ko, Ta.) N-terminal amino acid residue was determined by method of DNP,. K-type of Bence Jones Protein's amino acid residue were either glutamic acid or aspartic acid. Sample Ta was confirmed as glutamic acid its N-Terminal. As and Ko were aspartic acid. Each yellowish spot (DNP-amino acids) were extracted with 4ml. of pH 8.05% $NaHCO_3$ solution and calculated its recovery by O.D. $(360m{\mu}$ using the ${\varepsilon}=18.1{\times}10^3DNP$ $Asp\;{\varepsilon}=17.41{\times}10^(3)\;DNP\;Glu$ considering 50% lose during; the acid (6N-HCI) hydrolysis. Recovery of ko and As were 54.3% and 65% of its starting materials (DNP-Protein). Sample Ta's recovery was 85% of its DNP-protein. ${\lambda}$-type of Bence Jones Protein was rot investigated its N-terminal amino acid residue by DNP-method, probably it was blocked its N-terminal residue with glutamic acid.

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The Relation between Bone Mineral Density and Lifestyle in College Students (일부 대학생의 골밀도와 생활습관간의 관련성)

  • Kang, Tae-Hun;Lee, Mu-Sik;Bae, Suk-Hwan;Kim, Yong-Kwon
    • Journal of radiological science and technology
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    • v.39 no.3
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    • pp.429-434
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    • 2016
  • This study was performed in order to identify the relation between bone nineral density and life styles of some of Korean colleage students. A total of 121 college students were assessed through bone mineral density test on femoral neck and lumbar spine using dual energy X-ray absorptiometry(DEXA). The survey about their lifestyles with a self-rating questionnaire, was conducted from September 2014 to November 2014. SPSS 18.0 Program was used for those research data analyses such as the frequency analysis, the cross analysis. The percentage of the osteoporisis, osteopenia and normal groups were 0.0%, 24.8% and 75.2%. BMI, Regular menstrual cycle, Walking and Regular exercise in adolescence were positively related with T-score. But Using time of electronic devices was negative related with T-score. It can be concluded that desirable life style in time of college students and adolescence is important for their bone health. The necessity of preparing guideline for preventing bone disease in old age connected with the school curriculum should be recognized to the public and educational authorities.

남해 동부 연안 지역 지하수의 수리지구화학적 연구: 해수침투에 대한 고찰

  • 신광섭;윤성택;허철호;이상규
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2003.04a
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    • pp.438-441
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    • 2003
  • 남해 동부 연안 지역 지하수의 해수 침투 영향을 광역적으로 파악하기 위하여, 202개소의 지하수 시료를 채취하고 수리지구화학적 연구를 수행하였다. 전체 시료 중 14.4%가 500 $\mu\textrm{m}$/cm을 초과하는 높은 EC값을 나타내어 해수 영향을 시사해 주었다. 해수 영향 판단의 또 다른 파라메터로 사용되는 CI/HCO$_3$ 몰비는 전체 시료의 23.3%가 1.3 이상의 값을 나타내었다. 한편, 대표적으로 해수침투 영향 및 인위적 오염의 영향을 각각 반영하는 것으로 알려진 Cl과 NO$_3$의 농도에 관한 누적도수분포도를 작성하여 배경수질군과 오염영향군을 구분짓는 배경치(background concentration)를 구한 결과, 각각 Cl = 22.3 mg/1 및 NO$_3$= 23.1 mg/l로 나타났다. 이 두 파라메터의 농도 분포를 기준으로 하여 채취된 지하수 시료를 크게 4개의 그룹으로 나눌 수 있었다. 그 결과, 자연적 또는 인위적 기원의 오염이 배제된 그룹 1은 전체 시료의 31%, 자연적 오염(해수 영향)을 반영하는 그룹 2는 전체의 24%, 인위적 오염의 영향을 반영하는 그룹 3은 전체의 9%, 해수 영향 및 인위적 오염을 동시에 반영하는 그룹4는 전체의 36%로 나타났다. 또한 그룹2와 그룹4는 대부분 Na-Cl유형으로 진화하는 Ca-Cl유형을 나타내었다. 따라서, 여러 지구화학 방법에 의한 해수 영향 판단 결과는 서로 잘 일치하고 있음을 알 수 있다. 결국, 지구화학적 파라메터를 종합적으로 활용함으로써, 연안 지역 해수침투의 효과적인 파악은 물론 예측 및 방지, 복구에 효과적으로 사용될 수 있을 것으로 판단된다.으로 토양에서 유동 가능성이 있는 중금속만을 추출하였다. 분석실험은 토양의 Cd2+ 와 Pb2+를 대상으로 행하여졌으며, 여러 토양에서 추출 분석한 결과를 EDTA분석결과와 비교하였다. 실험결과, 중금속은 매우 신속하게 고분자 자성체와 결합하였고, 그 후 자성체를 외부 자장으로 모은 후 산으로 용해시키고, 결합된 중금속은 Graphite furnace AAS로 분석함으로써 빠르고 효율적으로 분석실험을 수행할 수 있음을 알 수 있었다. 한편, 실험에서 나타난 수치들을 비교 검토한 결과 토양 분석시 sandy soil에서는 자성체를 이용한 분석이 EDTA에 의한 방법보다 더 높은 추출도를 보인 반면, silt 함량이 많은 토양의 경우에서 EDTA분석에서 더 높은 중금속 추출도를 보였다.s 중에서 490nm와 555nm의 복합밴드를 포함하는 OC2 알고리즘(ocean color chlorophyll 2 algorithm)을 사용하는 것이 OC2 series 및 OC4 알고리즘보다 좋은 추정 값을 도출할 수 있을 것으로 기대된다.환경에서는 5일에서 7월에 주로 이 충체의 유충이 발육되고 전파되는 것으로 추측되었다.러 가지 방법들을 적극 적용하여 금후 검토해볼 필요가 있을 것이다.잡은 전혀 삭과가 형성되지 않았다. 이 결과는 종간 교잡종을 자방친으로 하고 그 자방친의 화분친을 사용할 때만 교잡이 이루어지고 있음을 나타내고 있다. 따라서 여교잡을 통한 종간잡종 품종육성 활용방안을 금후 적극 확대 검토해야 할 것이다하였다.함을 보이고 있다.X> , ZnCl$_{3}$$^{-}$같은 이온과 MgCl$^{+}$, MgCl$_{2}$같은 이온종을 형성하기 때문인것 같다. 한편 어

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Prevention of P-i Interface Contamination Using In-situ Plasma Process in Single-chamber VHF-PECVD Process for a-Si:H Solar Cells

  • Han, Seung-Hee;Jeon, Jun-Hong;Choi, Jin-Young;Park, Won-Woong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.204-205
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    • 2011
  • In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is a most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. For best performance of thin film silicon solar cell, the dopant profiles at p/i and i/n interfaces need to be as sharp as possible. The sharpness of dopant profiles can easily achieved when using multi-chamber PECVD equipment, in which each layer is deposited in separate chamber. However, in a single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of a single-chamber PECVD system in spite of the advantage of lower initial investment cost for the equipment. In order to resolve the cross-contamination problem in single-chamber PECVD systems, flushing method of the chamber with NH3 gas or water vapor after doped layer deposition process has been used. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. A single-chamber VHF-PECVD system was used for superstrate type p-i-n a-Si:H solar cell manufacturing on Asahi-type U FTO glass. A 80 MHz and 20 watts of pulsed RF power was applied to the parallel plate RF cathode at the frequency of 10 kHz and 80% duty ratio. A mixture gas of Ar, H2 and SiH4 was used for i-layer deposition and the deposition pressure was 0.4 Torr. For p and n layer deposition, B2H6 and PH3 was used as doping gas, respectively. The deposition temperature was $250^{\circ}C$ and the total p-i-n layer thickness was about $3500{\AA}$. In order to remove the deposited B inside of the vacuum chamber during p-layer deposition, a high pulsed RF power of about 80 W was applied right after p-layer deposition without SiH4 gas, which is followed by i-layer and n-layer deposition. Finally, Ag was deposited as top electrode. The best initial solar cell efficiency of 9.5 % for test cell area of 0.2 $cm^2$ could be achieved by applying the in-situ plasma cleaning method. The dependence on RF power and treatment time was investigated along with the SIMS analysis of the p-i interface for boron profiles.

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