• Bulletin of the Korean Chemical Society
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• 제23권6호
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• pp.921-923
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• 2002

• Bulletin of the Korean Chemical Society
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• 제19권4호
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• pp.484-486
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• 1998

• Bulletin of the Korean Chemical Society
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• 제19권2호
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• pp.231-235
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• 1998

Two holmium β-diketonate complexes, Ho(hfa)3(H2O)2 (1) and [Ho(hfa)3(H2O)2](triglyme) (2), have been prepared and characterized by IR, TGA, and single-crystal X-ray analyses. These complexes show polymeric chains by the intermolecular hydrogen bondings. The donor atoms of the intermolecular hydrogen bonding in both complexes are hydrogen atoms of the coordinated water molecules. The acceptor atoms in 1 are the carbonyl oxygen atoms of β-diketonate ligands whereas those in 2 are oxygen atoms of the triglyme ligand. While compound 1 decomposes cleanly to Ho2O3, compound 2 sublimes intact. Crystal data for 1 and 2 are as follows: Ho(hfa)3(H2O)2 triclinic P1, a=10.158(4), b=11.628(2), c=12.579(6) Å, α=67.02(3)°, β=73.95(4)°, γ=76.12(2)°, V=1299.8(8) Å3. [Ho(hfa)3(H2O)2](triglyme), monoclinic P21/c, a=12.559(3), b=19.111(2), c=16.789(6) Å, β=110.59(4)°, V=3772(2) Å3.

• 대한화학회지
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• 제37권9호
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• pp.806-812
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• 1993

Cu(I)(${\beta}$-diketonate) 착화합물로서 $Cu(I)(hfac)PR_3$(P는 phosphine, R은 Me, Et, Bu를 나타낸다) 착물들을 비수용매에서 유리질 탄소전극과 탄소 microelectrode를 사용하여 이들 착물들의 전기화학적 성질을 조사하였다. 아세토니트릴 용액에서 순환 전압-전류법에 의한 $Cu(I)(hfac)PR_3$ 착물들의 환원과정은 최종생성물이 Cu(0)로 가는 1전자 반응으로 진행되었다. 탄소 microelectrode를 이용한 대시간-전류법에 의해서 이들 착물들이 1전자 반응으로 진행됨을 확인하였으며, 확산계수는 $4.5{\sim}6.7{\times} 10^{-6}cm^2$/sec값으로 나타났다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.364.2-364.2
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• 2014

Magnesium oxide (MgO) thin films have attracted great scientific and technological interest in recent decades. Because of its distinguished properties such as a wide band gap (7.2 eV), a low dielectric constant (9.8), a low refractive index, an excellent chemical, and thermal stability (melting point=$2900^{\circ}C$), it is widely used as inorganic material in diverse areas such as fire resistant construction materials, optical materials, protective layers in plasma display panels, buffer layers of multilayer electronic/photonic devices, and perovskite ferroelectric thin films. Precursor used in the ALD requires volatility, stability, and low deposition temperature. Precursors using a heteroleptic ligands with different reactivity have advantage of selective reaction of the heteroleptic ligands on substrate during ALD process. In this study, we have synethesized new heteroleptic magnesium precursors ${\beta}$-diketonate and aminoalkoxide which have been widely used for the development of precursor because of the excellent volatility, chelating effects by increasing the coordination number of the metal, and advantages to synthesize a single precursor. A newly-synthesized Mg(II) precursor was adopted for growing MgO thin films using ALD.

• 대한화학회지
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• 제46권4호
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• pp.389-393
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• 2002

• Bulletin of the Korean Chemical Society
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• 제26권10호
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• pp.1620-1622
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• 2005

• Bulletin of the Korean Chemical Society
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• 제20권3호
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• pp.355-361
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• 1999

To improve the volatility and stability of lead complexes, the principle of stabilization by saturating the metal coordination sphere by intramolecular coordination through a β-diketonates with an ethereal group has was tested. Several new lead complexes with alkoxyalkyl-substituted β-diketonates, Pb(R1C(O)CHC(O)(CH2)3OR2)2(Rl=t-Bu, Me, OMe, i-Pr, R2=Me, Et), or carboxylate, Pb(OC(O)(CH2)3OEt)2, were prepared by the reaction between Pb(OAc)2 and corresponding alkoxyalkyl-substituted β-diketonates, and they were found to have a viscous liquid phase. The nature of the head (β-diketonate or carboxylate) or tails and substituents of β-diketonates appeared not to be important for the formation of the liquid phase. It is worth mentioning that Pb(OAc)2, which has limited use due to its low solubility, was successfully adopted as a starting material for the preparation of new lead complexes. Easy hydrolysis, reaction with HCl, and 13C NMR spectra indicated that tail portions were not coordinated to the metal as a copper derivative, Cu(t-BuC(O)CHC(O)(CH2)3OMe)2. All these complexes were not volatile enough for the MOCVD experiments, but a methyl derivative, Pb(MeC(O)CHC(O)(CH2)3OEt)2, showed some sublimation. The methoxy derivative, Pb(MeOC(O)CHC(O)(CH2)3OEt)2, was thermally unstable due to possible equilibrium between species coordinating with a keto oxygen atom and an ethereal atom of a methoxy group, which was confirmed by IR and 13C NMR spectra.

• 한국세라믹학회지
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• 제40권2호
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• pp.153-158
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• 2003

Photosensitive sol solution을 이용한 self pattern된 박막은 photoresist/dry etching process에 비해 박막의 제조과정이 간단하다는 장점을 가지고 있다. 이 연구에서는 강유전성 메모리소자의 산화물 전극재료로 사용되고 있는 La$_{0.5}$Sr$_{0.5}$CoO$_3$(LSCO)극 photosensitive sol solution을 이용하여 spin coating법으로 제조하였으며 출발원료는 La-2methoxyethoxide, Sr-ethoxide, Co-2methoxyethoxide를 사용하였다. LSCO gel 박막에 UV 노광시간을 증가시킴에 따라 M(metal)-O-M 결합이 생성되면서 metal $\beta$-diketonate의 UV 흡수 피크 강도는 감소되었고 LSCO gel 박막에 UV조사에 따른 용해도 차이가 생기면서 fine patterning 을 얻을 수 있었다. 68$0^{\circ}C$ 이상의 온도로 대기 중에서 열처리된 LSCO 박막은 perovskite 상을 나타내었고 74$0^{\circ}C$에서 가장 낮은 비저항값(4$\times$10￣$^3$Ωcm)을 얻을 수 있었다.

• 한국세라믹학회지
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• 제39권8호
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• pp.750-757
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• 2002

Photosensitive sol solution을 이용한 self pattern된 박막은 photoresist/dry etching process에 비해 박막의 제조과정이 간단하다는 장점을 가지고 있다. 이 연구에서는 photosensitive sol solution을 이용하여 spin coating법에 의해 $Sr_{0.9}Bi_{2.1}Ta_2O_9$의 조성을 갖는 강유전체 박막을 제조하였으며 출발원료는 $Sr(OC_2H_5)_2,\;Bi(TMHD)_3$와 $Ta(OC_2H_5)_5$를 사용하였다. SBT 박막에 UV 노광시간을 증가시킴에 따라 M-O-M 결합이 생성되면서 metal ${\beta}$-diketonate의 UV 흡수 피크 강도는 감소되었고 SBT 박막에 UV 조사에 따른 용해도 차이가 생기면서 fine patterning을 얻을 수 있었다. 또한 UV가 조사된 SBT 박막의 강유전 특성이 UV가 조사되지 않은 것보다 우수하였다.