• 제목/요약/키워드: ${\alpha}-Al_2O_3$ substrate

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저온 열처리 과정에서 일어나는 (0001) α-Al2O3 기판 표면의 형상 변화 (Surface Morphological Evolution of (0001) α-Al2O3 Substrate During Low Temperature Annealing)

  • 이근형
    • 한국전기전자재료학회논문지
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    • 제23권11호
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    • pp.859-863
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    • 2010
  • Evolution of surface morphology of ${\alpha}-Al_2O_3$ substrate was investigated as a function of annealing temperature and time. Commercial (0001) ${\alpha}-Al_2O_3$ single crystal substrates were annealed in the range of $600-1000^{\circ}C$ in air. At $600^{\circ}C$, step-terrace structure started to be formed on the substrate. However, the surface roughness on the terrace was still considerable and a number of islands were observed on the step edges as well as the terraces. As the annealing temperature increased, the islands were absorbed into the step edges. Thus the terraces were smoother and the step edges were more straightened. Well-defined surface with a step height of 0.2 nm was formed above $900^{\circ}C$. On the other hand, when the substrate was annealed at a fixed temperature of $1000^{\circ}C$, the change of surface morphology was observed for the substrate annealed for 10 min. After the annealing for 30 min, the surface on which any islands could not survive was observed.

나노 다층 TiAlSiN 박막의 고온 산화 (High-temperature Oxidation of Nano-multilayered TiAlSiN Filems)

  • 이동복;김민정
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.189-189
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    • 2016
  • In this study, the Al-rich AlTiSiN thin films that consisted of TiN/AlSiN nano-multilayers were deposited on the steel substrate by magnetron sputtering, and their high-temperature oxidation behavior was investigated, which has not yet been adequately studied to date. Since the oxidation behavior of the films depends sensitively on the deposition method and deposition parameters which affect their crystallinity, composition, stoichiometry, thickness, surface roughness, grain size and orientation, the oxidation studies under various conditions are imperative. AlTiSiN nano-multilayer thin films were deposited on a tool steel substrate, and their oxidation behavior of was investigated between 600 and $1000^{\circ}C$ in air. Since the amount of Al which had a high affinity for oxygen was the largest in the film, an ${\alpha}-Al_2O_3-rich$ scale formed, which provided good oxidation resistance. The outer surface scale consisted of ${\alpha}-Al_2O_3$ incoporated with a small amount of Ti, Si, and Fe. Below this outer surface scale, a thin ($Al_2O_3$, $TiO_2$, $SiO_2$)-intermixed scale formed by the inwardly diffusing oxygen. The film oxidized slower than the $TiO_2-forming$ kinetics and TiN films, but faster than ${\alpha}-Al_2O_3-forming$ kinetics. During oxidation, oxygen from the atmosphere diffused inwardly toward the reaction front, whereas nitrogen and the substrate element of iron diffused outwardly to a certain extent.

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Preparation and Gas Permeability of ZIF-7 Membranes Prepared via Two-step Crystallization Technique

  • Li, Fang;Li, Qiming;Bao, Xinxia;Gui, Jianzhou;Yu, Xiaofei
    • Korean Chemical Engineering Research
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    • 제52권3호
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    • pp.340-346
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    • 2014
  • Continuous and dense ZIF-7 membranes were successfully synthesized on ${\alpha}-Al_2O_3$ porous substrate via two-step crystallization technique. ZIF-7 seeding layer was first deposited on porous ${\alpha}-Al_2O_3$ substrate by in-situ low temperature crystallization, and then ZIF-7 membrane layer can be grown through the secondary high-temperature crystallization. Two synthesis solutions with different concentration were used to prepare ZIF-7 seeding layer and membrane layer on porous ${\alpha}-Al_2O_3$ substrate, respectively. As a result, a continuous and defect-free ZIF-7 membrane layer can be prepared on porous ${\alpha}-Al_2O_3$ substrate, as confirmed by scanning electron microscope. XRD characterization shows that the resulting membrane layer is composed of pure ZIF-7 phase without any impurity. A single gas permeation test of $H_2$, $O_2$, $CH_4$ or $CO_2$ was conducted based on our prepared ZIF-7 membrane. The ZIF-7 membrane exhibited excellent H2 molecular sieving properties due to its suitable pore aperture and defect-free membrane layer.

전이금속염 첨가에 의한 판상 α-Al2O3 결정체 제조 (Preparation of Flaky α-Al2O3 Crystals by Transition Metal Salts Addition)

  • 송효경;박병기;이정민
    • 한국세라믹학회지
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    • 제42권6호
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    • pp.384-390
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    • 2005
  • [ ${\alpha}-Al_2O_3$ ] precursor was synthesised by sol-gel method using aluminum sulfate, sodium sulfate and sodium carbonate as law materials. The flaky ${\alpha}-Al_2O_3$ crystals were prepared by heating using precursor about $1,050^{\circ}C$. In this study, the effect of some transition-metal sulfate ($FeSO_4,\;SnSO_4,\;ZnSO_4$) addition have been investigated. When iron sulfate was added, it could see that act on impurities in crystal growth process. In case of tin sulfate, distribution of Platelets was very broad. When flaky ${\alpha}-Al_2O_3$ crystals were prepared zinc sulfate addition, thickness, size, and distribution of platelets was suited to industrial application. The average diameter of flaky ${\alpha}-Al_2O_3$ crystals was about 20 $\mu$m, and its thickness was about 0.3 $\mu$m. Increasing addition of zinc sulfate, thickness of ${\alpha}-Al_2O_3$ platelet was decreased.

High-temperature Corrosion of CrAlSiN Films in Ar/1%SO2 Gas

  • Lee, Dong Bok;Xiao, Xiao;Hahn, Junhee;Son, Sewon;Yuke, Shi
    • 한국표면공학회지
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    • 제52권5호
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    • pp.246-250
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    • 2019
  • Nano-multilayered $Cr_{25.2}Al_{19.5}Si_{4.7}N_{50.5}$ films were deposited on the steel substrate by cathodic arc plasma deposition. They were corroded at $900^{\circ}C$ in $Ar/1%SO_2$ gas in order to study their corrosion behavior in sulfidizing/oxidizing environments. Despite the presence of sulfur in the gaseous environment, the corrosion was governed by oxidation, leading to formation of protective oxides such as $Cr_2O_3$ and ${\alpha}-Al_2O_3$, where Si was dissolved. Iron diffused outward from the substrate to the film surface, and oxidized to $Fe_2O_3$ and $Fe_3O_4$. The films were corrosion-resistant up to 150 h owing to the formation of thin ($Cr_2O_3$ and/or ${\alpha}-Al_2O_3$)-rich oxide layers. However, they failed when corroded at $900^{\circ}C$ for 300 h, resulting in the formation of layered oxide scales due to not only outward diffusion of Cr, Al, Si, Fe and N, but also inward movement of sulfur and oxygen.

황산알루미늄의 가수분해에 의해 석출된 AlO(OH) 겔의 숙성시간이 판상 α-Al2O3의 결정성장에 미치는 영향 (Effect of Aging Time of AlO(OH) Gel Precipitated by Hydrolysis of Aluminum Sulfate on Crystal Growth of the Flaky α-Al2O3)

  • 최동욱;박병기;서정권;이정민
    • 한국세라믹학회지
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    • 제43권9호
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    • pp.575-581
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    • 2006
  • To precipitate the complex gel of flux and aluminum hydroxides gel, aqueous solution of the mixture of $Na_2CO_3\;and\;Na_2PO_4{\cdot}12H_2O$ was added with stirring in aqueous solution of the mixture of $Al_2(SO_4)_3{\cdot}14{\sim}18H_2O,\;Na_2SO_4$, and then the complex gel was aged in $0{\sim}30h\;at\;90^{\circ}C$. As aging time passed, the aluminum hydroxides was grown into the acicular AlO(OH) gel. Also, aging time had an effect on physical properties of the AlO(OH) gel and on crystal growth of the flaky ${\alpha}-Al_2O_3$ prepared by molten-salt precipitation. In this study, the complex gel was crystallized in temperature range of $400{\sim}1,200^{\circ}C$ after drying at $110^{\circ}C$, and then it was investigated to effect of aging time on precipitation temperature, size, thickness, morphology and particle size distribution of the flaky ${\alpha}-Al_2O_3$ crystal. As aging time passed, the flaky a${\alpha}-Al_2O_3$ crystal showed a tendency toward an increase in size and thickness as result from an increase in BET surface area and pore volume of the acicular AlO(OH) gel.

저온소결 세라믹 기판용 Cordierite계 결정화유리의 합성 및 특성조사에 관한 연구: (I) $MgO-Al_2O_3-SiO_2$계 유리분말의 결정화 및 수축거동 (Synthesis and Characterization of Cordierite Glass-Ceramics for Low Firing Temperature Substrate: (I) Crystallization and Shrinkage Behavior of $MgO-Al_2O_3-SiO_2$ Glass Powders)

  • 이근헌;김병호;임대순
    • 한국세라믹학회지
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    • 제29권6호
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    • pp.451-458
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    • 1992
  • Dense glass-ceramics for low firing temperature substrate were prepared by addition of CeO2 flux to the glass of MgO-Al2O3-SiO2 system. Glass powders were fabricated by melting at 150$0^{\circ}C$ and ball milling. Glass powder compacts were sintered at 800~100$0^{\circ}C$ for 3h. The crystallization and the shrinkage behaviors of glass powder compacts were analyzed by XRD, DTA and TMA. The shrinkage of glass powder compact increased with increasing the amount of CeO2. Because the softening temperature decreased and the crystallization temperature increased with increasing the amount of CeO2. Apparently, addition of CeO2 prevented formation of $\mu$-cordierite phase from the glass-ceramics and improved formation of $\alpha$-cordierite phase. Therefore crystallization properties were enhanced.

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Al$_2$O$_3$-TiO$_2$세라믹의 플라즈마 용사과정에서 미세구조의 변화와 용사코팅층의 탄성에 대한 연구 (A Study on the elastic properties of coated layers and the changes of microstructure in plasma spray coating of $Al_2$O$_3$-TiO$_2$ ceramics)

  • 이형근;김대훈;황선효;안병국;김병희;서동수;안명구
    • Journal of Welding and Joining
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    • 제14권6호
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    • pp.109-118
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    • 1996
  • Al$_2$O$_3$-TiO$_2$powders of six different compositions were plasma-sprayed on Ti substrate. The spray powders and the spray coated layers were analysed and compared using SEM and X-RD. The elastic properties (specific elastic constant and damping coefficient) of the coated specimens were measured in order to select the optimum composition range of ceramics for use in a speaker diaphragm. A correlation between the microstructure and elastic properties was also investigated. When $Al_2$O$_3$powders with 0- 13% TiO$_2$were plasma sprayed, the coated layers were composed of metastable y-Al$_2$O$_3$with small amount of $\alpha$-Al$_2$O$_3$and the content of $\alpha$-Al$_2$O$_3$was increased with TiO$_2$content. Specific elastic constant was rapidly increased with 2 and 13% TiO$_2$addition to $Al_2$O$_3$. The internal damping was nearly unchanged with TiO$_2$content The specific elastic constant seemed to be dependent on the content of $\alpha$-Al$_2$O$_3$in the coated layer.

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${Fe_3}Al-4Cr$ 합금의 고온산화 (High Temperature Oxidation of ${Fe_3}Al-4Cr$ Alloys)

  • 김기영;이동복
    • 한국재료학회지
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    • 제11권1호
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    • pp.34-38
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    • 2001
  • Fe-28%Al($Fe_3Al$)과 Fe-28%Al-4%Cr($Fe_3Al-4Cr$) 금속간화합물을 대기중 1073, 1273, 1473k의 온도에서 최고 17일까지 장시간 산화시켰다. $Fe_3Al-4Cr$의 산화저항은 근본적으로 $Fe_3Al$과 거의 비슷하거나, 약간 우수하였다. $Fe_3Al$ 위에 형성된 산화물은 거의 순수한 ${\alpha}-AL_2O_3$로만 구성되어 있었으며, $Fe_3Al-4Cr$ 위에 형성된 산화물은 약간의 Fe와 Cr 이온이 고용된 ${\alpha}-AL_2O_3$로 구성되어 있었다. 외부산화막을 형성하기 위해 모재원소의 외부확산에 의해 산화물-모재 계면에는 Kirkendall 기공이 존재하였다. $Fe_3Al(-4Cr)$ 표면에 형성된 산화막은 1273k가지는 비교적 얇고 치밀하였으나, 1473k에서 산화막의 박리와 함께 상대적으로 큰 무게증가가 발생하였다.

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Characterization of Multiphase in $Fe_2O_3$ Thin Film by PECVD

  • Kim, Bum-Jin;Lee, Eun-Tae;Jang, Gun-Eik;Chung, Yong-Sun
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1997년도 Proceedings of the 12th KACG Technical Meeting and the 4th Korea-Japan EMGS (Electronic Materials Growth Symposium)
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    • pp.79-85
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    • 1997
  • Fe$_2$O$_3$ thin films were prepared on $Al_2$O$_3$ substrate by PECVD(Plasma-Enhanced Chemical Vapor Deposition) process. The phase transformation of iron oxide film was determined as the substrate temperature and reduction-oxidation process. $\alpha$-Fe$_2$O$_3$ was stable in deposition temperature ranges of 80~15$0^{\circ}C$. Fe$_3$O$_4$ phase was obtained by the reduction process of $\alpha$-Fe$_2$O$_3$ phase in H$_2$ ambient. Fe$_3$O$_4$ phase was transformed into a ${\gamma}$-Fe$_2$O$_3$ thin film under controlled oxidation conditions at 280~30$0^{\circ}C$.

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