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http://dx.doi.org/10.6117/kmeps.2020.27.3.009

Nanofilm Transfer Methods and Interfacial Fracture Mechanics  

Kang, Sumin (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST))
Kim, Taek-Soo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST))
Publication Information
Journal of the Microelectronics and Packaging Society / v.27, no.3, 2020 , pp. 9-19 More about this Journal
Abstract
Transferring of functional nanofilms onto target substrates is a cornerstone to developing nanofilm-based nextgeneration applications. In this work, we provide a brief review of recent advances on nanofilm transfer methods by categorizing them into the following three methods: wet-etching transfer, electrochemical delamination, and mechanical transfer. Furthermore, the mechanical transfer method, which is regarded as a promising technology owing to its facile, substrate recyclable, and widely applicable process, is overviewed by focusing on fracture mechanics approaches. Finally, the perspectives and challenges for future development of the mechanical transfer method are discussed.
Keywords
Nanofilm; Transfer; Adhesion; Crack driving force; Crack deflection;
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1 B. Deng, P. C. Hsu, G. Chen, B. N. Chandrashekar, L. Liao, Z. Ayitimuda, J. Wu, Y. Guo, L. Lin, Y. Zhou, M. Aisijiang, Q. Xie, Y. Cui, Z. Liu, and H. Peng, "Roll-to-Roll Encapsulation of Metal Nanowires between Graphene and Plastic Substrate for High-Performance Flexible Transparent Electrodes", Nano Lett., 15(6), 4206 (2015).   DOI
2 Y. Gao, Z. Liu, D. M. Sun, L. Huang, L. P. Ma, L. C. Yin, T. Ma, Z. Zhang, X. L. Ma, L. M. Peng, H. M. Cheng, and W. Ren, "Large-Area Synthesis of High-Quaility and Uniform Monolayer $WS_2$ on Reusable Au Foils", Nat. Commun., 6, 8569 (2015).   DOI
3 M. M. Tavakoli, G. Azzellino, M. Hempel, A. Y. Lu, F. J. Martin-Martinez, J. Zhao, J. Yeo, T. Palacios, M. J. Buehler, and J. Kong, "Synergistic Roll-to-Roll Transfer and Doping of CVD-Graphene Using Parylene for Ambient-Stable and Ultra-Lightweight Photovoltaics", Adv. Funct. Mater., 31, 2001924 (2020).
4 C. T. Cherian, F. Giustiniano, I. Martin-Fernandez, H. Andersen, J. Balakrishnan, and B. Ozyilmaz, "'Bubble-Free' Electrochemical Delamination of CVD Graphene Films", Small, 11(2), 189 (2015).   DOI
5 T. Yoon, W. C. Shin, T. Y. Kim, J. H. Mun, T. S. Kim, and B. J.Cho, "Direct Measurement of Adhesion Energy of Monolayer Graphene As-Grown on Copper and Its Application to Renewable Transfer Process", Nano Lett., 12(3), 1448 (2012).   DOI
6 M. A. Meitl, Z. T. Zhu, V. Kumar, K. J. Lee, X. Feng, Y. Y. Huang, I. Adesida, R. G. Nuzzo, and J. A. Rogers, "Transfer Printing by Kinetic Control of Adhesion to an Elastometric Stamp", Nat. Mater., 5, 33 (2006).   DOI
7 H. C. Ko, M. P. Stoykovich, J. Song, V. Malyarchuk, W. M. Choi, C. J. Yu, J. B. Geddes III, J. Xiao, S. Wang, Y. Huang, and J. A. Rogers, "A Hemispherical Electronic Eye Camera Based on Compressible Silicon Optoelectronics", Nature, 454, 748 (2008).   DOI
8 S. Kang, J. B. Pyo, and T. S. Kim, "Layer-by-Layer Assembly of Free-Standing Nanofilms by Controlled Rolling", Langmuir, 34(20), 5831 (2018).   DOI
9 A. L. Elias, N. Perea-Lopez, A. Castro-Beltran, A. Berkdemir, R. Lv, S. Feng, A. D. Long, T. Hayashi, Y. A. Kim, M. Endo, H. R. Gutierrez, N. R. Pradhan, L. Balicas, T. E. Mallouk, F. Lopez-Urias, H. Terrones, and M. Terrones, "Controlled Synthesis and Transfer of Large-Area WS2 Sheets: From Single Layer to Few Layers", ACS Nano, 7(6), 5235 (2013).   DOI
10 K. Kang, K. H. Lee, Y. Han, H. Gao, S. Xie, D. A. Muller, and J. Park, "Layer-by-Layer Assembly of Two-Dimensional Materials into Wafer-Scale Heterostructures", Nature, 550, 229 (2017).   DOI
11 T. H. Kim, A. Carlson, J. H. Ahn, S. M. Won, S. Wang, Y. Huang, and J. A. Rogers, "Kinetically Controlled, Adhesiveless Transfer Printing Using Microstructured Stamps", Appl. Phys. Lett., 94(11), 113502 (2009).   DOI
12 R. Saeidpourazar, R. Li, Y. Li, M. D. Sangid, C. Lu, Y. Huang, J. A. Rogers, and P. M. Ferreira, "Laser-Driven Micro Transfer Placement of Prefabricated Microstructures", J. Microelectromech. Syst., 21(5), 1049 (2012).   DOI
13 M. K. Choi, I. Park, D. C. Kim, E. Joh, O. K. Park, J. Kim, M. Kim, C. Choi, J. Yang, K. W. Cho, J. H. Hwang, J. M. Nam, T. Hyeon, J. H. Kim, and D.-H. Kim, "Thermally Controlled, Patterned Graphene Transfer Printing for Transparent and Wearable Electronic/Optoelectronic System", Adv. Funct. Mater., 25, 7109 (2015).   DOI
14 R. Li, Q. Zhang, E. Zhao, J. Li, Q. Gu, and P. Gao, "Etchingand Intermediate-Free Graphene Dry Transfer onto Polymeric Thin Films with High Piezoresistive Gauge Factors", J. Mater. Chem., 7, 13032 (2019).
15 S. Kim, J. Wu, A. Carlson, S. H. Jin, A. Kovalsky, P. Glass, Z. Liu, N. Ahmed, S. L. Elgan, W. Chen, P. M. Ferreira, M. Sitti, Y. Huang, and J. A. Rogers, "Microstructured Elastomeric Surfaces with Reversible Adhesion and Examples of Their Use in Deterministic Assembly by Transfer Printing", Proc. Natl. Acad. Sci. U.S.A., 107(40), 17095 (2010).   DOI
16 A. Carlson, S. Wang, P. Elvikis, P. M. Ferreira, Y. Huang, and J. A. Rogers, "Active, Programmable, Elastomeric Surfaces with Tunable Adhesion for Deterministic Assembly by Transfer Printing", Adv. Funct. Mater., 22, 4476 (2012).   DOI
17 B. Yoo, S. Cho, S. Seo, and J. Lee, "Elastomeric Angled Microflaps with Reversible Adhesion for Transfer-Printing Semiconductor Membranes onto Dry Surfaces", ACS Appl. Mater. Interfaces., 6(21), 19247 (2014).   DOI
18 J. S. Bunch and M. L. Dunn, "Adhesion Mechanics of Graphene Membranes", Solid State Commun", 152, 1359 (2012).   DOI
19 P. Gupta, P. D. Dongare, S. Grover, S. Dubey, H. Mamgain, A. Bhattacharya, and M. M. Deshmukh, "A Facile Process for Soak-and-Peel Delamination of CVD Graphene from Substrates Using Water", Sci. Rep., 4, 3882 (2014).
20 B. N. Chandrashekar, B. Deng, A. S. Smitha, Y. Chen, C. Tan, H. Zhang, H. Peng, and Z. Liu, "Roll-to-Roll Green Transfer of CVD Graphene onto Plastic for a Transparent and Flexble Triboelectric Nanogenerator", Adv. Mater., 27, 5210 (2015).   DOI
21 S. P. Koenig, N. G. Boddeti, M. L. Dunn, and S. Bunch, "Ultrastrong Adhesion of Graphene Membranes", Nat. Nanotech., 6, 543 (2011).   DOI
22 A. Castellanos-Gomez, M. Buscema, R. Molenaar, V. Singh, L. Janssen, H. S. J. van der Zant, and G. A. Steele, "Deterministic Transfer of Two-Dimensional Materials by All-Dry Viscoelastic Stamping", 2D Mater., 1, 011002 (2014).   DOI
23 S. R. Na, J. W. Suk, L. Tao, D. Akinwande, R. S. Ruoff, R. Huang, and K. M. Liechti, "Selective Mechanical Transfer of Graphene from Seed Copper Foil Using Rate Effects", ACS Nano, 9(2), 1325 (2015).   DOI
24 S. R. Na, S. Rahimi, L. Tao, H. Chou, S. K. Ameri, D. Akinwande, and K. M. Liechti, "Clean Graphene Interfaces by Selective Dry Transfer for Large Area Silicon Integration", Nanoscale, 8, 7523 (2016).   DOI
25 H. Xin, Q. Zhao, D. Chen, and W. Li, "Roll-to-Roll Mechanical Peeling for Dry Transfer of Chemical Vapor Deposition Graphene" J. Micro Nano-Manuf., 6(3), 031004 (2018).
26 J. Seo, C. Kim, B. S. Ma, T. I. Lee, J. H. Bong, J. G. Oh, B. J. Cho, and T. S. Kim, "Direct Graphene Transfer and Its Application to Transfer Printing Using Mechanically Controlled, Large-Area Graphene/Copper Freestanding Layer", Adv. Funct. Mater., 28, 1707102 (2018).   DOI
27 X. Feng, M. A. Meitl, A. M. Bowen, Y. Huang, R. G. Nuzzo, and J. A. Rogers, "Competing Fracture in Kinetically Controlled Transfer Printing", Laungmuir, 23(25), 12555 (2007).   DOI
28 M. Deruelle, L. Leger, and M. Tirrell, "Adhesion at the Solid-Elastomer Interface: Influence of the Interfacial Chains", Macromolecules, 28, 7419 (1995).   DOI
29 K. Autumm, A. Dittmore, D. Santos, M. Spenko, and M. Cutkosky, "Frictional Adhesion: a New Angle on Gecko Attachment", J. Exp. Biol., 209, 3569 (2006).   DOI
30 C. Linghu, C. Wang, N. Cen, J. Wu, Z. Lai, and J. Song, "Rapidly Tunable and Highly Reversible Bio-Inspired Dry Adhesion for Transfer Printing in Air and a Vacuum", Soft Matter, 15, 30 (2019).   DOI
31 A. D. Lees and J. Hardie, "The Organs of Adhesion in the Aphid Megoura Viciae", J. Exp. Biol., 136, 209 (1988).   DOI
32 A. G. Evans, B. J. Dalgleish, M. He, and J. W. Hutchinson, "On Crack Path Selection and the Interface Fracture Energy in Bimaterial Systems", Acta Metall., 37(12), 3249 (1989).   DOI
33 A. G. Evans, M. Ruhle, B. J. Dalgleish, and P. G. Charalambides, "The Fracture Energy of Bimaterial Interfaces", Metall. Trans. A, 21(9), 2419 (1990).   DOI
34 A. Carlson, H. J. Kim-Lee, J. Wu, P. Elvikis, H. Cheng, A. Kovalsky, S. Elgan, Q. Yu, P. M. Ferreira, Y. Huang, K. T. Turner, and J. A. Rogers, "Shear-Enhanced Adhesiveless Transfer Printing for Use in Deterministic Materials Assembly", Appl. Phys. Lett., 98(26), 264104 (2011).   DOI
35 P. Sen, Y. Xiong, Q. Zhang, S. Park, W. You, H. Ade, M. W. Kudenov, and B. T. O'Connor, "Shear Enhanced Transfer Printing of Conducting Polymer Thin Films", ACS Appl. Mater. Interfaces., 10(37), 31560 (2018).   DOI
36 H. Cheng, J. Wu, Q. Yu, H. J. Kim-Lee, A. Carlson, K. T. Turner, K. C. Hwang, Y. Huang, and J. A. Rogers, "An Analytical Model for Shear-Enhanced Adhesiveless Transfer Printing", Mech. Res. Commun., 43, 46 (2012).   DOI
37 H. W. Jang and W. S. Kim, "Shear-Induced Dry Transfer of Reduced Graphene Oxide Thin Film via Roll-to-Roll Printing", Appl. Phys. Lett., 108(9), 091601 (2016).   DOI
38 W. Jung, D. Kim, M. Lee, S. Kim, J. H. Kim, and C. S. Han, "Ultraconformal Contact Transfer of Monolayer Graphene on Metal to Various Substrates", Adv. Mater., 26, 6394 (2014).   DOI
39 X. Ma, Q. Liu, D. Xu, Y. Zhu, S. Kim, Y. Cui, L. Zhong, and M. Liu, "Capillary-Force-Assisted Clean-Stamp Transfer of Two-Dimensional Materials", Nano Lett., 17(11), 6961 (2017).   DOI
40 G. J. M. Fechine, I. Martin-Frenandez, G. Yiapanis, R. Bentini, E. S. Kulkarni, R. V. Bof de Oliveria, X. Hu, I. Yarovsky, A. H. Castro Neto, and B. Ozyilmaz, "Direct Dry Transfer of Chemical Vapor Deposition Graphene to Polymeric Substrates", Carbon, 83, 224 (2015).   DOI
41 J. Kim, H. Park, J. B. Hannon, S. W. Bedell, K. Fogel, D. K. Sadana, and C. Dimitrakopoulos, "Layer-Resolved Graphene Transfer via Engineered Strain Layers", Science, 342, 833 (2013).   DOI
42 C. H. Lee, D. R. Kim, and X. Zheng, "Fabrication of Nanowire Electronics on Nonconventional Substrates by Water- Assisted Transfer Printing", Nano Lett., 11(8), 3435 (2011).   DOI
43 C. H. Lee, D. R. Kim, I. S. Cho, N. William, Q. Wang, and X. Zheng, "Peel-and-Stick: Fabricating Thin Film Solar Cell on Universal Substrates", Sci. Rep., 2, 1000 (2012).   DOI
44 D. S. Wie, Y. Zhnag, M. K. Kim, B. Kim, S. Park, Y. J. Kim, P. P. Irazoqui, X. Zheng, B. Xu, and C. H. Lee, "Wafer-Recyclable, Environment-Friendly Transfer Printing for Large- Scale Thin-Film Nanoelectronics", Proc. Natl. Acad. Sci. U.S.A., 115(31), E9236 (2018).
45 C. H. Lee, J. H. Kim, C. Zou, I. S. Cho, J. M. Weisse, W. Nemeth, Q. Wang, A. C. T. van Duin, T. S. Kim, and X. Zheng, "Peel-and-Stick: Mechanism Study for Efficient Fabrication of Flexible/Transparent Thin Film Electronics", Sci. Rep., 3, 2917 (2013).   DOI
46 A. Gurarslan, Y. Yu, L. Su, Y. Yu, F. Suarez, S. Yao, Y. Zhu, M. Ozturk, Y. Zhang, and L. Cao, "Surface-Energy-Assisted Perfect Transfer of Centimeter-Scale Monolayer and Few- Layer MoS$_2$ Films onto Arbitrary Substrates", ACS Nano, 8(11), 11522 (2014).   DOI
47 S. M. Shinde, T. Das, A. T. Hoang, B. K. Sharma, X. Chen, and J. H. Ahn, "Surface-Functionalization-Mediated Direct Transfer of Molybdenum Disulfide for Large-Area Flexible Devices", Adv. Funct. Mater., 28, 1706231 (2018).   DOI
48 X. Yang, X. Li, Y. Deng, Y. Wang, G. Liu, C. Wei, H. Li, Z. Wu, Q. Zheng, Z. Chen, Q. Jiang, H. Lu, and J. Zhu, "Ethanol Assisted Transfer of Clean Assembly of 2D Building Blocks and Suspended Structures", Adv. Funct. Mater., 29, 1902427 (2019).   DOI
49 E. P. Guyer and R. H. Dauskardt, "Fracture of Nanoporous Thin-Film Glasses", Nat. Mater., 3, 53 (2004).   DOI
50 Y. Zhang, Q. Liu, and B. Xu, "Liquid-Assisted, Etching-Free, Mechanical Peeling of 2D Materials", Extreme Mech. Lett., 16, 33 (2017).   DOI
51 J. Shim, S. H. Bae, W. Kong, D. Lee, K. Qiao, D. Nezich, Y. J. Park, R. Zhao, S. Sundaram, X. Li, H. Yeon, C. Choi, H. Kum, R. Yue, G. Zhou, Y. Ou, K. Lee, J. Moodera, X. Zhao, J. H. Ahn, C. Hinkle, A. Ougazzaden, and J. Kim, "Controlled Crack Propagation for Atomic Precision Handling of Wafer-Scale Two-Dimensional Materials", Science, 362, 665 (2018).   DOI
52 T. Yoon, J. H. Kim, J. H. Choi, D. Y. Jung, I. J. Park, S. Y. Choi, N. S. Cho, J. I. Lee, Y. D. Kwon, S. Cho, and T. S. Kim, "Healing Graphene Defects Using Selective Electrochemical Deposition: Toward Flexible and Stretchable Devices", ACS Nano, 10(1), 1539 (2016).   DOI
53 J. D. Buron, D. H. Petersen, P. Boggild, D. G. Cooke, M. Hilke, J. Sun, E. Whiteway, P. F. Nielsen, O. Hansen, A. Yurgens, and P. U. Jepsen, "Graphene Conductance Uniformity Mapping", Nano Lett., 12(10), 5074 (2012).   DOI
54 T. Yoon, S. Kang, T. Y. Kang, and T. S. Kim, "Detection of Graphene Cracks by Electromagnetic Induction, Insensitive to Doping Level", Comput. Model. Eng. Sci., 120(2), 351 (2019).
55 A. Kamer, K. Larson-Smith, L. S. C. Pingree, and R. H. Dauskardt, "Adhesion and Degradation of Hard Coatings on Poly (Methyl Methacrylate) Substrates", Thin Solid Films, 519(6), 1907 (2011).   DOI
56 T. Yoon, W. S. Jo, and T. S. Kim, "High-Yield Etching-Free Transfer of Graphene: a Fracture Mechanics Approach", J. Microelectron. Packag. Soc., 21(2), 59 (2014).   DOI
57 S. Kang, T. Yoon, S. Kim, and T. S. Kim, "Role of Crack Deflection on Rate Dependent Mechanical Transfer of Multilayer Graphene and Its Application to Transparent Electrodes", ACS Appl. Nano Mater., 2(4), 1980 (2019).   DOI
58 C. Lee, X. Wei, J. W. Kysar, and J. Hone, "Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene", Science, 321, 385 (2008).   DOI
59 B. D. Gates, Q. Xu, M. Stewart, D. Ryan, C. G. Willson, and G. M. Whitesides, "New Approaches to Nanofabrication: Molding, Printing, and Other Techniques", Chem. Rev., 105, 1171 (2005).   DOI
60 M. Konagai, M. Sugimoto, and K. Takahashi, "High Efficiency GaAs Thin Film Solar Cells by Peeled Film Technology", J. Cryst. Growth, 45, 277 (1978).   DOI
61 K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, M. I. Katsnelson, I. V. Grigorieva, S. V. Dubonos, and A. A. Firsov, "Two-Dimensional Gas of Massless Dirac Fermions in Graphene", Nature, 438, 197 (2005).   DOI
62 A. A. Balandin, S. Ghosh, W. Bao, I. Calizo, D. Teweldebrhan, F. Miao, and C. N. Lau, "Superior Thermal Conductivity of Single-Layer Graphene", Nano Lett., 8(3), 902 (2008).   DOI
63 R. R. Nair, P. Blake, A. N. Grigorenko, K. S. Novoselov, T. J. Booth, T. Stauber, N. M. R. Peres, and A. K. Geim, "Fine Structure Constant Defines Visual Transparency of Graphene", Science, 320, 1308 (2008).   DOI
64 K. S. Kim, Y. Zhao, H. Jang, S. Y. Lee, M. J. Kim, K. S. Kim, J. H. Ahn, P. Kim, J. Y. Choi, and B. H. Hong, "Large-Scale Pattern Growth of Graphene Films for Stretchable Transparent Electrodes", Nature, 457, 706 (2009).   DOI
65 F. Bonaccorso, Z. Sun, T. Hasan, and A. C. Ferrari, "Graphene Photonics and Optoelectronics", Nat. Photonics., 4, 611 (2010).   DOI
66 J. H. Ahn, H. Lee, and S. H. Choa, "Technology of Flexible Semiconductor/Memory Device", J. Microelectron. Packag. Soc., 20(2), 1 (2013).   DOI
67 S. K. Lee, K. Rana, and J. H. Ahn, "Graphene Films for Flexible Organic and Energy Storage Devices", J. Phys. Chem. Lett., 4, 831 (2013).   DOI
68 N. K. Mahenderkar, Q. Chen, Y. C. Liu, A. R. Duchild, S. Hofheins, E. Chason, and J. A. Switzer, "Epitaxial Liff-Off of Electrodeposited Single-Crystal Gold Foils for Flexible Electronics", Science, 355, 1203 (2017).   DOI
69 J. Yoon, S. Jo, I. S. Chun, I. Jung, H. S. Kim, M. Meitl, E. Menard, X. Li, J. J. Coleman, U. Paik, and J. A. Rogers, "GaAs Photovoltaics and Optoelectronics Using Releasable Multilayer Epitaxial Assemblies", Nature, 465, 329 (2010).   DOI
70 C. W. Cheng, K. T. Shiu, N. Li, S. J. Han, L. Shi, and D. K. Sadana, "Epitaxial Lift-Off Process for Gallium Arsenide Substrate Reuse and Flexible Electronics", Nat. Commun., 4, 1577 (2013).   DOI
71 X. Li, Y. Zhu, W. Cai, M. Borysiak, B. Han, D. Chen, R. D. Piner, L. Colombo and R. S. Ruoff, "Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes", Nano Lett., 9(12), 4359 (2009).   DOI
72 K. K. Liu, W. Zhang, Y. H. Lee, Y. C. Lin, M. T. Chang, C. Y. Su, C. S. Chang, H. Li, Y. Shi, H. Zhang, C. S. Lai, and L. J. Li, "Growth of Large-Area and Highly Crystalline MoS2 Thin Layers on Insulating Substrates", Nano Lett., 12(3), 1538 (2012).   DOI
73 S. Fan, Q. A. Vu, M. D. Tran, S. Adhikari, and Y. H. Lee, "Transfer Assembly for Two-Dimensional van der Waals Heterostructures", 2D Mater., 7, 022005 (2020).   DOI
74 S. Bae, H. Kim, Y. Lee, X. Xu, J. S. Park, Y. Zheng, J. Balakrishnan, T. Lei, H. R. Kim, Y. I. Song, Y. J. Kim, K. S. Kim, B. Ozyilmaz, J. H. Ahn, B. H. Hong, and S. Iijima, "Rollto-Roll Production of 30-Inch Graphene Films for Transparent Electrodes", Nat. Nanotech., 5, 574 (2010).   DOI
75 D. Son, J. Lee, S. Qiao, R. Ghaffari, J. Kim, J. E. Lee, C. Song, S. J. Kim, D. J. Lee, S. W. Jun, S. Yang, M. Park, J. Shin, K. Do, M. Lee, K. Kang, C. S. Hwang, N. Lu, T. Hyeon, and D.-H. Kim, "Multifuntional Wearable Devices for Diagonosis and Therapy of Movement Disorders", Nat. Nanotech., 9, 397 (2014).   DOI
76 A. Pirkle, J. Chan, A. Venugopal, D. Hinojos, C. W. Magnuson, S. McDonnell, L. Colombo, E. M. Vogel, R. S. Ruoff, and R. M. Wallace, "The Effect of Chemical Residues on the Physical and Electrical Properties of Chemical Vapor Deposited Graphene Transferred to $SiO_2$", Appl. Phys. Lett., 99, 122108 (2011).   DOI
77 H. H. Kim, B. Kang, J. W. Suk, N. Li, K. S. Kim, R. S. Ruoff, W. H. Lee, and K. Cho, "Clean Transfer of Wafer-Scale Graphene via Liquid Phase Removal of Polycyclic Aromatic Hydrocarbons", ACS Nano, 9(5), 4726 (2015).   DOI
78 H. V. Ngoc, Y. Qian, S. K. Han, and D. J. Kang, "PMMAEtching-Free Transfer of Wafer-Scale Chemical Vapor Deposition Two-Dimensional Atomic Crystal by a Water Soluble Polyvinyl Alcohol Polymer Method", Sci. Rep., 6, 33096 (2016).   DOI
79 Z. Zhang, J. Du, D. Zhang, H. Sun, L. Yin, L. Ma, J. Chen, D. Ma, H. M. Cheng, and W. Ren, "Rosin-Enabled Ultraclean and Damage-Free Transfer of Graphene for Large-Area Flexible Organic Light-Emitting Diodes", Nat. Commun., 8, 14560 (2017).   DOI
80 W. S. Leong, H. Wang, J. Yeo, F. J. Martin-Martinez, A. Zubair, P. C. Shen, Y. Mao, T. Palacio, M. J. Buehler, J. Y. Hong, and J. Kong, "Paraffin-Enabled Graphene Transefer", Nat. Commun., 10, 867 (2019).   DOI
81 B. Jang, C. H. Kim, S. T. Choi, K. S. Kim, K. S. Kim, H. J. Lee, S. Cho, J. H. Ahn, and J. H. Kim, "Damage Mitigation in Roll-to-Roll Transfer of CVD-Graphene to Flexible Substrates", 2D Mater., 4, 024002 (2017).   DOI
82 H. E. Lee, J. H. Shin, J. H. Park, S. K. Hong, S. H. Park, S. H. Lee, J. H. Lee, I. S. Kang, and K. J. Lee, "Micro Light Emitting Diodes for Display and Flexible Biomedical Applications", Adv. Funct. Mater., 29, 1808075 (2019).   DOI
83 J. Kim, M. Lee, H. J. Shim, R. Ghaffari, H. R. Cho, D. Son, Y. H. Jung, M. Soh, C. Choi, S. Jung, K. Chu, D. Jeon, S. T. Lee, J. H. Kim, S. H. Choi, T. Hyeon, and D.-H. Kim, "Stretchable Silicon Nanoribbon Electronics for Skin Prosthesis", Nat. Commun., 5, 5747 (2014).   DOI
84 Y. H. Ko, K. Choi, S. W. Kim, D. Y. Yu, J. Bang, and T. S. Kim, "Trends of Researches and Technologies of Electronic Packaging Using Graphene", J. Microelectron. Packag. Soc., 23(2), 1 (2016).   DOI
85 H. Jang, Y. J. Park, X. Chen, T. Das, M. S. Kim, and J. H. Ahn, "Graphene-Based Flexible and Stretchable Electronics", Adv. Mater., 28, 4184 (2016).   DOI
86 Y. Zhan, Z. Liu, S. Najmaei, P. M. Ajayan, and J. Lou, "Large-Area Vapor-Phase Growth and Characterization of $MoS_2$ Atomic Layers on a $SiO_2$ Substrate", Small, 8(7), 966 (2012).   DOI
87 Y. Nam, H. O. Kim, S. H. Cho, and S. H. K. Park, "Effect of Hydrogen Diffusion in an In-Ga-Zn-O Thin Film Transistor with an Aluminum Oxide Gate Insulator on Its Electrical Properties", RCS Adv., 8, 5622 (2018).
88 B. Deng, Z. Liu, and H. Peng, "Toward Mass Production of CVD Graphene Films", Adv. Mater., 31, 1800996 (2019).   DOI
89 L. Gao, W. Ren, H. Xu, L. Jin, Z. Wang, T. Ma, L. P. Ma, Z. Zhang, Q. Fu, L. M. Peng, X. Bao, and H. M. Cheng, "Repeated Growth and Bubbling Transfer of Graphene with Millimetre-Size Single-Crystal Grains Using Platinum", Nat. Commun., 3, 699 (2012).   DOI
90 Y. Wang, Y. Zheng, X. Xu, E. Dubuisson, Q. Bao, J. Lu, and K. P. Loh, "Electrochemical Delamination of CVD-Grown Graphene Film: Toward the Recyclable Use of Copper Catalyst", ACS Nano, 5(12), 9927 (2011).   DOI
91 Z. Tang, C. Neumann, A. Winter, and A. Turchanin, "Electrochemical Delamination Assisted Transfer of Molecular Nanosheets", Nanoscale, 12, 8656, (2020).   DOI