Study of the effect of vacuum annealing on sputtered SnxOy thin films by SnO/Sn composite target |
Kim, Cheol
(Graduate School of Nano-IT Design Convergence, Seoul National University of Science and Technology)
Cho, Seungbum (Graduate School of Nano-IT Design Convergence, Seoul National University of Science and Technology) Kim, Sungdong (Department of Mechanical System Design Engineering, Seoul National University of Science and Technology) Kim, Sarah Eunkyung (Graduate School of Nano-IT Design Convergence, Seoul National University of Science and Technology) |
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