Browse > Article
http://dx.doi.org/10.6117/kmeps.2016.23.2.043

Study on the Properties of TiO2 Film Deposited by ALD at Low Temperature  

Park, Won Hee (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology)
Shin, Jeong Woo (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology)
Yang, Byung Chan (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology)
Park, Man-Jin (Korea Electronics-Machinery Convergence Technology Institute(KEMCTI))
Jang, Dong Young (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology)
An, Jihwan (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology)
Publication Information
Journal of the Microelectronics and Packaging Society / v.23, no.2, 2016 , pp. 43-47 More about this Journal
Abstract
This paper covers the study on the properties of $TiO_2$ film deposited by atomic layer deposition (ALD) using TTIP and water at various temperatures including the low temperature range of <$150^{\circ}C$. At low deposition temperature, ALD $TiO_2$ films showed uniform growth rate per cycle ($0.3{\AA}/cycle$), good uniformity, smooth surface, and homogenous amorphicity. They also showed good conformality of >80% on the trench structure with the high aspect ratio of up to 75. However, relatively high concentration of impurities (C~4-7 at%) in the film was observed due to low deposition temperature.
Keywords
Atomic Layer Deposition; Low-Temperature Deposition; $TiO_2$; Thin Film;
Citations & Related Records
Times Cited By KSCI : 8  (Citation Analysis)
연도 인용수 순위
1 K. J. Yoon and O. S. Song, "Property of the Nano-Thick $TiO_2$ Films Using an ALD at Low Temperature", Korean Journal of Materials Research, 18(10), 515 (2008).   DOI
2 T. Y. Lee, K. H. Kim, M. S. Kim, E. S. Ko, J. H. Chio, K. S. Moon, M. S. Kim and S. Yoo, "Light Efficiency of LED Package with $TiO_2$ Nanoparticle Dispersed Encapsulant", J. Microelectron. Packag. Soc., 21(3), 31 (2014).
3 H. Chang, "Highly-Ordered Arrays of $TiO_2$ Thin Film for Dye-sensitized Solar Cells Fabricated by Anodic Oxidation Process", Int. J. Precis. Eng. Manuf., 16(7), 1251 (2015).   DOI
4 H. Chang, C. W. Lan, C. H. Chen, M. J. Kao and J. B. Guo, "Anti-Wear and Friction Properties of Nanoparticles as Additives in the Lithium Grease", Int. J. Precis. Eng. Manuf., 15(10), 2059 (2014).   DOI
5 B. M. Kim, S. J. Lee, I. Y. Kim and T. M. Lee, "Design and Fabrication of Printed Electrowetting-on-Dielectric Device", Int. J. Precis. Eng. Manuf., 16(5), 989 (2015).   DOI
6 G.W. Kim, J. H. Kim and J. H. Kim, "Flexible Piezoelectric Vibration Energy Harvester using a Trunk-Shaped Beam Structure Inspired by an Electric Fish Fin", Int. J. Precis. Eng. Manuf., 15(9), 1967 (2014).   DOI
7 M. C. Choi, Y. K. Kim and C. S. Ha, "Polymers for Flexible Displays: From Material Selection to Device Applications", Prog. Polym. Sci., 33(6), 581 (2008).   DOI
8 J. An, T. Usui, M. Logar, J. Park, D. Thian, S. Kim, K. Kim and F. B. Prinz, "Plasma Processing for Crystallization and Densification of ALD $BaTiO_3$ Films", ACS Appl. Mater. Interfaces, 6, 10656 (2014).   DOI
9 J. An, Y. B. Kim, H. J. Jung, J. S. Park, S. W. Cha, T. M. Gur and F. B. Prinz, "Structural and Compositional Analysis of Solid Oxide Fuel Cell Electrolytes Using Transmission Electron Microscopy", Int. J. Precis. Eng. Manuf., 13(7), 1273 (2012).   DOI
10 Y. J. Choi, K. M. Kang and H. H. Park, "Thickness-dependent Electrical, Structural, and Optical Properties of ALD-grown ZnO Films", J. Microelectron. Packag. Soc., 21(2), 31 (2014).   DOI