Study on the Properties of TiO2 Film Deposited by ALD at Low Temperature |
Park, Won Hee
(Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology)
Shin, Jeong Woo (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology) Yang, Byung Chan (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology) Park, Man-Jin (Korea Electronics-Machinery Convergence Technology Institute(KEMCTI)) Jang, Dong Young (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology) An, Jihwan (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology) |
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