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| 1 |
The Present Status of Development of Inductively Coupled Plasma Simulator based on Fluid Model
Kwon, D.C.;Yoon, N.S.;
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The Korean Vacuum Society
, v.18, no.3, pp.151-163,
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| 2 |
Computational Fluid Dynamic Modeling for Internal Antenna Type Inductively Coupled Plasma Systems
Joo, Jung-Hoon;
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The Korean Vacuum Society
, v.18, no.3, pp.164-175,
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| 3 |
Design of an Inductively Coupled Plasma Source with Consideration of Electrical Properties and its Practical Issues
Lee, S.W.;
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The Korean Vacuum Society
, v.18, no.3, pp.176-185,
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| 4 |
Plasma Sources for Production of High Flux Particle Beams in Hyperthermal Energy Range
Yoo, S.J.;Kim, S.B.;
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The Korean Vacuum Society
, v.18, no.3, pp.186-196,
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| 5 |
The Effect of Contamination of Ion Source on Ionic Current of Quadrupole Mass Spectrometer
Lee, K.C.;Park, C.J.;Kim, J.T.;Oh, E.S.;Hong, K.S.;Hong, S.S.;Lim, I.T.;Yun, J.Y.;Kang, S.W.;Shin, Y.H.;
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The Korean Vacuum Society
, v.18, no.3, pp.197-202,
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| 6 |
Characteristics of Electomigration & Surface Hardness about Tungsten-Carbon-Nitrogen(W-C-N) Related Diffusion Barrier
Kim, Soo-In;Hwang, Young-Joo;Ham, Dong-Shik;Nho, Jae-Kue;Lee, Jae-Yun;Park, Jun;Ahn, Chan-Goen;Kim, Chang-Seong;Oh, Chan-Woo;Yoo, Kyeng-Hwan;Lee, Chang-Woo;
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The Korean Vacuum Society
, v.18, no.3, pp.203-207,
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| 7 |
Self-Assembled InAs/AlAs Quantum Dots Characterization Using Photoreflectance Spectroscopy
Kim, Ki-Hong;Sim, Jun-Hyoung;Bae, In-Ho;
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The Korean Vacuum Society
, v.18, no.3, pp.208-212,
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| 8 |
Characterization of Al-Doped ZnO Thin Film Grown on Buffer Layer with RF Magnetron Sputtering Method
No, Young-Soo;Park, Dong-Hee;Kim, Tae-Whan;Choi, Ji-Won;Choi, Won-Kook;
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The Korean Vacuum Society
, v.18, no.3, pp.213-220,
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| 9 |
A Study on the Ultrasonic Response Characteristic of PVDF Organic Thin Film by Physical Vapor Deposition Method
Park, Soo-Hong;
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The Korean Vacuum Society
, v.18, no.3, pp.221-228,
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| 10 |
Millimeter-Scale Aligned Carbon Nanotubes Synthesized by Oxygen-Assisted Microwave Plasma CVD
Kim, Y.S.;Song, W.S.;Lee, S.Y.;Choi, W.C.;Park, C.Y.;
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The Korean Vacuum Society
, v.18, no.3, pp.229-235,
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| 11 |
The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter
Lee, Hwa-Ryun;Hong, In-Seok;Trinh, Tu Anh;Cho, Yong-Sub;
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The Korean Vacuum Society
, v.18, no.3, pp.236-243,
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