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| 1 |
Low vacuum characteristics of the capacitance diaphragm gauges and the resonance silicon gauges
;;;I. Arakawa;
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The Korean Vacuum Society
, v.12, no.3, pp.151-156,
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| 2 |
New calibration apparatus for a precise barometer
우삼용;이용재;최인묵;김부식;최종운;
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The Korean Vacuum Society
, v.12, no.3, pp.157-161,
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| 3 |
The influence of sputtering rate during depth profiling
김주광;성인복;김태준;오상훈;강석태;
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The Korean Vacuum Society
, v.12, no.3, pp.162-167,
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| 4 |
A New process for the Solid phase Crystallization of a-Si by the thin film heaters
김병동;정인영;송남규;주승기;
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The Korean Vacuum Society
, v.12, no.3, pp.168-173,
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| 5 |
Study on diffusion barrier properties of Tantalum films deposited by substrate bias voltage
;;Minoru Isshiki;
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The Korean Vacuum Society
, v.12, no.3, pp.174-181,
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| 6 |
A Monte Carlo Simulation Model Development for Electron Beam Lithography Process in the Multi-Layer Resists and Compound Semiconductor Substrates
손명식;
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The Korean Vacuum Society
, v.12, no.3, pp.182-192,
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| 7 |
A study on the synthesis and formation behavior of nanostructrued TiN films by metal doping
명현식;한전건;
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The Korean Vacuum Society
, v.12, no.3, pp.193-199,
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