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1 |
Study on electrical properties of BST thin film with substrates
이태일;최명률;박인철;김홍배;
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The Korean Vacuum Society
, v.11, no.3, pp.135-140,
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2 |
Properties of thin films deposited by ion-beam assisted reactive magnetron sputtering
김성화;이재홍;황보창권;
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The Korean Vacuum Society
, v.11, no.3, pp.141-150,
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3 |
Electrical Properties of Ultra-shallow Junctions using ion Implantation
송재훈;김지수;임성일;전기영;최덕균;최원국;
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The Korean Vacuum Society
, v.11, no.3, pp.151-158,
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4 |
Physical Properties of TiN films grown by ALD
김재범;홍현석;오기영;이종무;
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The Korean Vacuum Society
, v.11, no.3, pp.159-165,
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5 |
Growth and dielectric Properties or oxide artificial superlattice deposited by pulsed laser deposition (PLD)
김주호;김이준;정동근;김용성;이재찬;
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The Korean Vacuum Society
, v.11, no.3, pp.166-170,
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6 |
Changes in Work Function after O-Plasma Treatment on Indium-Tin-Oxide
김근영;오준석;최은하;조광섭;강승언;조재원;
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The Korean Vacuum Society
, v.11, no.3, pp.171-175,
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7 |
Optical properties and applications of films prepared by ion beam sputtering
이정환;조준식;김동환;고석근;
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The Korean Vacuum Society
, v.11, no.3, pp.176-182,
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8 |
Improvement in dielectric behavior by using ozone as an oxidant for the atomic layer deposition technique
김재범;권덕렬;오기영;이종무;
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The Korean Vacuum Society
, v.11, no.3, pp.183-188,
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