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http://dx.doi.org/10.4313/JKEM.2009.22.9.772

Characteristics of ITO Thin Films Sputtered on Polycarbonate substrates at Various Pressures by In-line Sputter  

Ahn, Min-Hyung (경원대학교 전자공학과)
Cho, Eui-Sik (경원대학교 전자공학과)
Kwon, Sang-Jik (경원대학교 전자공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.22, no.9, 2009 , pp. 772-775 More about this Journal
Abstract
Indium tin oxide(ITO) thin film was deposited at room temperature on polycarbonate(PC) substrate by in-line sputter system. ITO sputtering process was carried out at a various pressure for the reduction of ion damage on PC substrate and the electrical and the optical properties of deposited ITO films were obtained and analyzed. From the experimental results, the sheet resistances of as-deposited ITO films varied with a different pressure and the optical transmittances at visible wavelength were maintained above 85%. The results are considered to be related to the pressure of oxygen atoms as a reaction gas.
Keywords
ITO; Polycarbonate; In-line sputter; Pressure; Oxygen;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 A. Kulkarni, T. Lim, M. Khan, and K. Schilz, 'Electrical, optical, structura properties of indium-tin-oxide thin films deposited on PET substrates by rf sputtering', J. Vac. Sci. Technol., Vol. A16, p. 1636, 1998   DOI   ScienceOn
2 T. karasawa and Y. Miyata, 'Electrical and optical properties of ITO thin films deposited on unheated substrates by dc reactive sputtering', Thin Solid Films, Vol. 223, p. 135, 1997   DOI   ScienceOn
3 P. Lippens, et al, Thin Solid Films, Vol. 317, p. 405, 1998   DOI   ScienceOn
4 조범진, 김경환, 'PC 기판상에 제작된 ITO 박막의 특성', 전기전자재료학회논문지, 20권, 2호, p. 162, 2007   DOI
5 W. Wu and B. Chiou, 'Deposition of indium thi oxide films on polycarbonate substrates by radio-frequency magnetron sputtering', Thin Solid Films, Vol. 298, p. 221, 1997   DOI   ScienceOn
6 T. Minami, H Sonohahra, T. Kakumu, and S. Takata, 'Physics of very thin ITO conducting films with high transparency prepared by dc magnetron sputtering', Thin Solid Films, Vol. 270, p. 37, 1995   DOI   ScienceOn
7 N. Danson, I. Safi, G. Hall, and R. Howson, 'Techniques for the sputtering of optimum indium-tin-oxide films on to room-temperature substrates', Surf. Coatings Technol., Vol. 99, p. 214, 1998   DOI   ScienceOn