Browse > Article

Modification of the Supporting Structure of a Wafer Polishing Machine for the Improved Stability  

Ro, Seung-Hoon (금오공과대학교 지능기계공학과)
Kim, Young-Jo (금오공과대학교 대학원)
Kim, Dong-Wook (금오공과대학교 대학원)
Yi, Il-Hwan (금오공과대학교 대학원)
Park, Keun-Woo (금오공과대학교 대학원)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.11, no.2, 2012 , pp. 144-151 More about this Journal
Abstract
Polishing is not only one of the most frequently adopted processes in modern industries, but also the most critical one to the surface quality of the products such as semi conductor wafers and LED sapphire wafers. With the required specifications for the wafer surface quality getting more and more strengthened, the manufacturers are spending huge amount of cost to renew the machine to meet the enhanced surface specifications. Surface qualities of the wafers are mostly damaged by the structural vibrations of the polishing machines. In this paper, the dynamic characteristics of a wafer polishing machine have been analyzed through the frequency response test and the computer simulation. And the supporting structure of a polishing machine has been investigated to minimize the vibration transmissions, to improve the stability of the machine and further to reduce the defects of the polished products. The result of the study shows that simple design modifications of the supporting structure without altering the main structure of the machine can substantially suppress the vibrations of the machine with negligible expenses.
Keywords
Wafer Polishing; Surface Quality; Structural Vibrations; Supporting Structure; Vibration Suppression;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Ro S. H., "Mechanical Vibrations with Applications", Han Tee Media, 2011.
2 Ro S. H. and Lee J. H., "Design Alteration of A Lathe Structure for the Improved Dynamic Stability", Journal of the Korean Society of Industrial Application, Vol. 12, pp. 91-99, 2009.
3 Fertis D. G., "Mechanical and Structural Vibrations", John Wiley & Sons, Inc., New York, pp. 197-241, 1995.
4 Ewins D. J., "Modal Testing", Brel & Kjaer, 1986.
5 Randall R. B., "Frequency Analysis", Brel & Kjaer, 1977.
6 McConnell K. G., "Vibration Testing", John Wiley & Sons, Inc., New York, 1995.
7 Havosen W. G. and Brown D. L., "Journal of Sound and Vibration", 1977.
8 Ro S. H. and Cho H. J. and Choi E. H., "Analysis of the Free Vibrations of Rectangular Plates Using Database", Trans. of the KSME (A), Vol 24, No. 8, pp. 1978-1990, 2000.
9 Cho H. J. and Ro S. H., "Effect of Design Parameters on the Uniform and the Nonuniform Cantilever Beams", Trans. of the KSME (A), Vol 23, No. 4, pp. 697-708, 1999.
10 Ro S. H., "Design Alteration of a Milling Machine Structure for the Improved Stability", Journal of the Korean Society of Manufacturing Process Engineers, Vol. 5, No. 4, pp. 72-78, 2006.