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디스플레이 공정용 메탈윈도우 유도결합플라즈마 식각장치에 대하여
디스플레이 공정용 메탈윈도우 유도결합플라즈마 식각장치에 대하여
Lee, Ho-Jun
(부산대학교 전기컴퓨터공학부)
Publication Information
Information Display
/
v.18, no.6
, 2017 , pp. 29-34
More about this Journal
More about this Journal
Frequency : Bimonthly
Publisher : The Korean Infomation Display Society
KISTI Subject :
SCOPUS Subject :
Energy (miscellaneous)
,
Energy Engineering and Power Technology
,
Mechanical Engineering
,
Mechanics of Materials
,
Surfaces and Interfaces
Web of Science Subject :
Thermodynamics
,
Acoustics
,
Automation &control Systems
,
Engineering, Mechanical
,
Engineering, Multidisciplinary
,
Instruments &instrumentation
,
Mechanics
,
Robotics
Keywords
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Reference
1
Tokyo Electron, US Patent 8597463 B2
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