Browse > Article
http://dx.doi.org/10.7735/ksmte.2017.26.4.365

Development of a Ultrasonic System for Nano-Surface Reformation Process  

Kim, Hyunse (Energy Systems Research Division, Korea Institute of Machinery and Materials)
Lim, Euisu (Energy Systems Research Division, Korea Institute of Machinery and Materials)
Park, Jong-Kweon (Energy Systems Research Division, Korea Institute of Machinery and Materials)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.26, no.4, 2017 , pp. 365-370 More about this Journal
Abstract
In this article, a 20 kHz Titanium (Ti) ultrasonic waveguide system for a nano-surface reformation process was designed and fabricated. First, finite element analysis using ANSYS software was performed to find the optimal dimensions. The obtained anti-resonance frequency for the Ti transducer with the piezoelectric device was 20.0 kHz, which value agreed well with the experiment result of 20.1 kHz (0.5% error). To test the system, chromium molybdenum steel (SCM) 435 was chosen as a test-piece. The result proved that the reformed depth was $36{\mu}m$. In addition, hardness was measured before and after the process. The value was changed from 14 HRC to 21 HRC, which is 50% increasing rate. Finally, the friction coefficient test result showed that the surface coefficient was reduced from 0.14 to 0.10 (28.6% reduction). Based on the results, the Ti ultrasonic equipment is regarded as a useful device for nano-scale surface reformation.
Keywords
Ultrasonic; Waveguide; Finite element method (FEM); Nano-surface treatment; Hardness;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Luo, Y., Zhang, Z., Wang, X., Zheng, Y., 2010, Ultrasonic Bonding for Thermoplastic Microfluidic Devices without Energy Director, Microelectronic Eng., 87 2429-2436.   DOI
2 Park, S. J., Lee, B. G., Choi, H. Z., 2004, Micro Hole Machining for Ceramics ($Al_2O_3$) using Ultrasonic Vibration, J. of the KSMTE, 13:2 104-111.
3 Amanov, A., Pyun, Y., Sasaki, S., 2014, Effects of Ultrasonic Nanocrystalline Surface Modification (UNSM) Technique on the Tribological Behavior of Sintered Cu-based Alloy, Tribology International, 72 187-197.   DOI
4 Amanov, A., Cho, I. S., Kim, D. E., Pyun, Y. S., 2012, Fretting Wear and Friction Reduction of CP Titanium and Ti-6Al-4V Alloy by Ultrasonic Nanocrystalline Surface Modification, Surface and Coatings Tech., 207 135-142.   DOI
5 Ruirun, C., Deshuang, Z., Jingjie, G., Tengfei, M., Hongsheng, D., Yanqing, S., Hengzhi, F., 2016, A Novel Method for Grain Refinement and Microstructure Modification in TiAl Alloy by Ultrasonic Vibration, Materials Science and Eng. A, 653 23-26.   DOI
6 Bozdana, A. T., Gindy, N., Li, H., 2005, Deep Cold Rolling with Ultrasonic Vibrations-A New Mechanical Surface Enhancement Technique, Int. J. of Machine Tools and Manuf., 45:6 713-718.   DOI
7 Huuki, J., Laakso, S. V., 2013, Integrity of Surfaces Finished with Ultrasonic Burnishing, J. of Eng. Manuf., 227 45-53.   DOI
8 Gras, G. G., Rodriguez, J. A. T., Mesa, R. J., Fuentes, J. L., Calle, B. G., 2016, Experimental Study of Lateral Pass Width in Conventional and Vibrations-assisted Ball Burnishing, J. of Eng. Manuf., 227 45-53.
9 Jang, H. S., Park, W. Y., Park D. S., 2011, The Establishment of Bonding Conditions of Cu using an Ultrasonic Metal Welder, J. of the KSMTE, 20:5 570-575.
10 Li, F. L., Xia, W., Zhou, Z. Y., Zhao, J., Tang, Z. Q., 2012, Analytical Prediction and Experimental Verification of Surface Roughness during the Burnishing Process, Int. J. of Machine Tools and Manuf., 62 67-75.   DOI
11 Tsai, M. Y., Yang, W. Z., 2012, Combined Ultrasonic Vibration and Chemical Mechanical Polishing of Copper Substrates, Int. J. of Machine Tools and Manuf., 53:1 69-76.   DOI
12 Zahedi, A., Tawakoli, T., Akbari, J., 2015, Energy Aspects and Workpiece Surface Characteristics in Ultrasonic-assisted Cylindrical Grinding of Alumina-zirconia Ceramics, Int. J. of Machine Tools and Manuf., 90 16-28.   DOI
13 Kim, H., Lee, Y., Lim, E., 2009, Design and Fabrication of an L-type Waveguide Megasonic System for Cleaning of Nano-scale Patterns, Current Applied Physics, 9:2 e189-e192.   DOI
14 Kim, H., Lee, Y., Lim, E., 2013, Design and Fabrication of a Horn-type Megasonic Waveguide for Nanoparticle Cleaning, IEEE Transactions on Semiconductor Manuf., 26:2 221-225.   DOI
15 Zhao, Q., Sun, Z., Guo, B., 2016, Material Removal Mechanism in Ultrasonic Vibration Assisted Polishing of Micro Cylindrical Surface on SiC, Int. J. of Machine Tools and Manuf., 103 28-39.   DOI