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http://dx.doi.org/10.7735/ksmte.2012.21.6.855

Fabrication and Optical Characterization of Porous Silicon Nanowires  

Kim, Jungkil (경희대학교 대학원 물리학과)
Choi, Suk-Ho (경희대학교 응용과학대학 응용물리학과)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.21, no.6, 2012 , pp. 855-859 More about this Journal
Abstract
Silicon nanowires (SiNWs) were fabricated by a metal-assisted chemical etching of Si and the porous structure on their surfaces was controlled by changing the volume ratio of the etching solution composed of hydrofluoric acid, hydrogen peroxide, and deionized water. The concentration of hydrogen peroxide as the oxidant was varied for controlling the porosity of SiNWs. The optical properties of porous SiNWs were unique and very different from those of single-crystalline Si, as characterized by measuring their photoluminescence and Raman spectra for different porosities.
Keywords
Porous silicon nanowires; Porosity; Metal-assisted chemical etching Raman; Photoluminescence;
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