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Fabrication of Micro-Lens Array with Long Focal Length for Confocal Microscopy  

Kim, Gee-Hong (한국기계연구원 나노공정장비연구실)
Lim, Hyung-Jun (한국기계연구원 나노공정장비연구실)
Jeong, Mi-Ra (한국기계연구원 나노공정장비연구실)
Lee, Jae-Jong (한국기계연구원 나노공정장비연구실)
Choi, Kee-Bong (한국기계연구원 나노공정장비연구실)
Lee, Hyung-Seok ((주)나노시스템)
Do, Lee-Mi (한국전자통신 연구원 RFID/USN 소자팀)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.20, no.4, 2011 , pp. 472-477 More about this Journal
Abstract
This paper shows the method of fabrication of a micro lens array comprised of a Nipkow disk used in a large-area, high-speed confocal microscopy. A Nipkow disk has two components, a micro lens array disk and a pinhole array disk. The microlens array focuses illumination light onto the pinhole array disk and redirects reflected light from a surface to a sensor. The micro lens which are positioned in order on a disk have a hemispheric shape with a few tens of micron in diameter, and can be fabricated by a variety of methods like mechanical machining, semiconductor process, replication process like imprinting process. This paper shows how to fabricate the micro lens array which has a long focal length by reflow and imprinting process.
Keywords
Microlens Array; Nipkow Disk; Reflow Process; Imprint Process; Confocal Microscopy;
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Times Cited By KSCI : 1  (Citation Analysis)
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