The Designing of an Air-gap Type FBAR Filter using Leach Equivalent Model |
Choi, Hyung-Wook
(Department of Electrical and Information Engineering, Kyungwon University)
Jung, Joong-Yeon (Department of Electrical and Information Engineering, Kyungwon University) Lee, Seung-Kyu (Department of Electrical and Information Engineering, Kyungwon University) Park, Yong-Seo (Department of Electrical and Information Engineering, Kyungwon University) Kim, Kyung-Hwan (Department of Electrical and Information Engineering, Kyungwon University) Shin, Hyun-Yong (Department of Electronics and Information Communication Engineering, Namseoul University) |
1 | R. Ruby, P. Bradley, J. D. Larson, and Y. Oshmyansky, 'PCS 1900 MHz duplexer using thin film bulk acoustic resonator', Electronics letters, Vol. 35, No. 10, p. 794, 1999 DOI ScienceOn |
2 | 'IEEE STD 802.11g/D1.1', Supplement to ANSI/ IEEE Std 802.11, 1999 Edition, 2002 |
3 | R. Ruby and P. Merchant, 'Micromachined thin film bulk acoustic resonators', IEEE International Frequency Control Symposium, p. 135, 1994 |
4 | G. R. Kline, K. M. Lakin, and R. S. Ketcham, 'Thin film resonator(TFR) low insertion loss filter', IEEE Ultrasonics Symposium, p. 339, 1988 |
5 | R. S. Naik, J. J. Lutsky, and R. Rief, 'Mesurements of the bulk, c-axis electromechanical coupling constants as a function of AIN film quality', IEEE Transaction Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 47, No.1, p. 292, 2000 DOI ScienceOn |
6 | W. M. Leach Jr., 'Controlled-source analogous circuits and SPICE models for piezoelectric transducers', IEEE Trans UFFC, Vol. 41, p. 60, 1994 DOI ScienceOn |
7 | S. V. Krishnaswamy, S. S. Horwitz, and R. A. Moore, 'Microwave film bulk acoustic resonator and manifold filter bank', U.S. Patent 5 185 589, 1993 |
8 | W. P. Mason, 'Physical Acoustic Principles and Methods', Academic press, Newyork, 1964 |
9 | L. M. Lakin, G. R. Kline, and K. T. Macarron, 'High-Q microwave acoustic resonators and filter', IEEE transactions on Microwave Theory and Techniques, Vol. 41, No. 12, p. 2139, 1993 DOI ScienceOn |
10 | W. P. Mason, 'Electromechanical Transducers and Wave Filters', D. Van Nostrand, New York, 1942 |
11 | J. D. Larson, R. Ruby, P. Bradley, and Y. Oshmyansky, 'A BAW antenna duplexer for the 1900 MHz PCS Band', IEEE Ultrasonics Symposium, p. 887, 1999 |