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| 1 |
Consumable Approaches of Polysilicon MEMS CMP
Park, Sung-Min;Jeong, Suk-Hoon;Jeong, Moon-Ki;Park, Boum-Young;Jeong, Hae-Do;Kim, Hyoung-Jae;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.157-162,
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| 2 |
Dishing and Erosion Evaluations of Tungsten CMP Slurry in the Orbital Polishing System
Lee, Sang-Ho;Kang, Young-Jae;Park, Jin-Goo;Kwon, Pan-Ki;Kim, Chang-Il;Oh, Chan-Kwon;Kim, Soo-Myoung;Jhon, Myung-S.;Hur, Se-An;Kim, Young-Jung;Kim, Bong-Ho;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.163-166,
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| 3 |
Effect of Particle Size of Ceria Coated Silica and Polishing Pressure on Chemical Mechanical Polishing of Oxide Film
Kim, Hwan-Chul;Lim, Hyung-Mi;Kim, Dae-Sung;Lee, Seung-Ho;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.167-172,
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| 4 |
A Study on Lateral Distribution of Implanted Ions in Silicon
Jung, Won-Chae;Kim, Hyung-Min;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.173-179,
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| 5 |
Realization of Two-bit Operation by Bulk-biased Programming Technique in SONOS NOR Array with Common Source Lines
An, Ho-Myoung;Seo, Kwang-Yell;Kim, Joo-Yeon;Kim, Byung-Cheul;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.180-183,
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| 6 |
Demonstration of Alternative Fabrication Techniques for Robust MEMS Device
Chang, Sung-Pil;Park, Je-Young;Cha, Doo-Yeol;Lee, Heung-Shik;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.184-188,
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| 7 |
Electrical and Dielectric Properties, and Accelerated Aging Characteristics of Lanthania Doped Zinc Oxide Varistors
Nahm, Choon-Woo;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.189-195,
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| 8 |
The Designing of an Air-gap Type FBAR Filter using Leach Equivalent Model
Choi, Hyung-Wook;Jung, Joong-Yeon;Lee, Seung-Kyu;Park, Yong-Seo;Kim, Kyung-Hwan;Shin, Hyun-Yong;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.196-203,
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| 9 |
SF6 and O2 Effects on PR Ashing in N2 Atmospheric Dielectric Barrier Discharge
Jeong, Soo-Yeon;Kim, Ji-Hun;Hwang, Yong-Seuk;Kim, Gon-Ho;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.204-209,
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| 10 |
Comparison of Latin Hypercube Sampling and Simple Random Sampling Applied to Neural Network Modeling of HfO2 Thin Film Fabrication
Lee, Jung-Hwan;Ko, Young-Don;Yun, Il-Gu;Han, Kyong-Hee;
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The Korean Institute of Electrical and Electronic Material Engineers
, v.7, no.4, pp.210-214,
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